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To address this challenge, herein a bioinspired hexapod piezoelectric robot (PER\u2010hexapod) aiming at high\u2010performance micromanipulation is presented. Specifically, two piezoelectric elements are integrated in a functional module to provide 3\u2010DOF precise motions, the collaboration of six functional modules generates the multi\u2010DOF motions, and the multimode fusion of three gaits facilitates the cross\u2010scale motion. The robot outputs 6\u2010DOF motions with resolutions higher than 4\u2009nm or 0.2 \u03bcrad, and unlimited traveling ranges of in\u2010plane motions are accomplished. PER\u2010hexapod, whose weight is 0.45\u2009kg, can stably drive a carrying load of 10\u2009kg. In addition, PER\u2010hexapod realizes the accurate positioning with the root\u2010mean\u2010square error less than 5\u2009nm. Thus, it has potential applications in the precise positioning in a large range, such as the batch injection of multiple cells and micromachining on large surfaces. Not only PER\u2010hexapod, but many other robots can be also designed with the same philosophy to construct micromanipulation systems for various requirements.<\/jats:p><\/jats:sec>","DOI":"10.1002\/aisy.202100142","type":"journal-article","created":{"date-parts":[[2021,10,20]],"date-time":"2021-10-20T17:38:54Z","timestamp":1634751534000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":34,"title":["Bioinspired Multilegged Piezoelectric Robot: The Design Philosophy Aiming at High\u2010Performance Micromanipulation"],"prefix":"10.1002","volume":"4","author":[{"given":"Hongpeng","family":"Yu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5684-9159","authenticated-orcid":false,"given":"Yingxiang","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jie","family":"Deng","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jing","family":"Li","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shijing","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Weishan","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jie","family":"Zhao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2021,10,18]]},"reference":[{"key":"e_1_2_8_2_1","doi-asserted-by":"publisher","DOI":"10.1038\/442151a"},{"key":"e_1_2_8_3_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.aav1937"},{"key":"e_1_2_8_4_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201903770"},{"key":"e_1_2_8_5_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201808135"},{"key":"e_1_2_8_6_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-020-16501-4"},{"key":"e_1_2_8_7_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.aan6558"},{"key":"e_1_2_8_8_1","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms10974"},{"key":"e_1_2_8_9_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2020.2973882"},{"key":"e_1_2_8_10_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586-020-2626-9"},{"key":"e_1_2_8_11_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.8b05203"},{"key":"e_1_2_8_12_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201302544"},{"key":"e_1_2_8_13_1","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202002203"},{"key":"e_1_2_8_14_1","doi-asserted-by":"publisher","DOI":"10.1038\/micronano.2016.24"},{"key":"e_1_2_8_15_1","doi-asserted-by":"publisher","DOI":"10.1504\/IJNM.2006.011382"},{"key":"e_1_2_8_16_1","doi-asserted-by":"publisher","DOI":"10.1108\/AA-02-2017-017"},{"key":"e_1_2_8_17_1","doi-asserted-by":"publisher","DOI":"10.1115\/1.4036352"},{"key":"e_1_2_8_18_1","doi-asserted-by":"publisher","DOI":"10.1115\/1.2345371"},{"key":"e_1_2_8_19_1","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202001155"},{"key":"e_1_2_8_20_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202005141"},{"key":"e_1_2_8_21_1","doi-asserted-by":"publisher","DOI":"10.1002\/admt.201900716"},{"key":"e_1_2_8_22_1","doi-asserted-by":"publisher","DOI":"10.1126\/scirobotics.aar3018"},{"key":"e_1_2_8_23_1","doi-asserted-by":"publisher","DOI":"10.1038\/s42256-020-0203-4"},{"key":"e_1_2_8_24_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2011.2118764"},{"key":"e_1_2_8_25_1","unstructured":"Z. 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