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However, conventional negative pressure sources (e.g., diaphragm vacuum pumps) suffer from poor scalability from meso\u2010 to microscale, unavoidable vibration and noise, while the performances of existing smart material\u2010driven suction cups are often restricted by their bulky structures, poor active adhesive stresses, or high power consumptions. To address these limitations, a monolithic suction pad is proposed where its active adhesion is realized by the electrostatic\u2013hydraulic coupling generated negative pressure cavity and the sealing is achieved by the elastomeric\u2013hydraulic coupled outer rim. This suction pad features a peak pull\u2010off stress of 7.4\u2009kPa and good switch ability in its adhesive stress of over 12 times. Compared with the existing smart material\u2010driven suction cups, the proposed suction pad demonstrates clear advantages in its significantly lower profile structure, lower preload stress requirement, and a higher adhesive force to power consumption ratio. This suction pad is envisioned to have promises in broad applications such as digital manufacturing, transfer printing, medical robotics, and robotic locomotion.<\/jats:p><\/jats:sec>","DOI":"10.1002\/aisy.202200425","type":"journal-article","created":{"date-parts":[[2023,2,22]],"date-time":"2023-02-22T09:06:26Z","timestamp":1677056786000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":11,"title":["A Monolithic Electrostatic\u2013Hydraulic Coupled Suction Pad"],"prefix":"10.1002","volume":"5","author":[{"given":"Chongjing","family":"Cao","sequence":"first","affiliation":[{"name":"Research Centre for Medical Robotics and Minimally Invasive Surgical Devices Shenzhen Institute of Advanced Technology (SIAT) Chinese Academy of Sciences  Shenzhen 518055 China"}]},{"given":"Lei","family":"Wang","sequence":"additional","affiliation":[{"name":"Research Centre for Medical Robotics and Minimally Invasive Surgical Devices Shenzhen Institute of Advanced Technology (SIAT) Chinese Academy of Sciences  Shenzhen 518055 China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4714-6595","authenticated-orcid":false,"given":"Xing","family":"Gao","sequence":"additional","affiliation":[{"name":"Research Centre for Medical Robotics and Minimally Invasive Surgical Devices Shenzhen Institute of Advanced Technology (SIAT) Chinese Academy of Sciences  Shenzhen 518055 China"}]}],"member":"311","published-online":{"date-parts":[[2023,2,22]]},"reference":[{"key":"e_1_2_8_2_1","doi-asserted-by":"publisher","DOI":"10.1002\/admt.201900193"},{"key":"e_1_2_8_3_1","doi-asserted-by":"publisher","DOI":"10.1088\/1748-3190\/10\/3\/035004"},{"key":"e_1_2_8_4_1","doi-asserted-by":"publisher","DOI":"10.1098\/rsbl.2013.0234"},{"key":"e_1_2_8_5_1","doi-asserted-by":"publisher","DOI":"10.1088\/1748-3190\/11\/5\/051001"},{"key":"e_1_2_8_6_1","doi-asserted-by":"publisher","DOI":"10.1021\/am8002439"},{"key":"e_1_2_8_7_1","doi-asserted-by":"publisher","DOI":"10.1126\/scirobotics.aan4545"},{"key":"e_1_2_8_8_1","doi-asserted-by":"publisher","DOI":"10.1109\/LRA.2020.3003773"},{"key":"e_1_2_8_9_1","doi-asserted-by":"publisher","DOI":"10.1098\/rsif.2017.0714"},{"key":"e_1_2_8_10_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/aab579"},{"key":"e_1_2_8_11_1","doi-asserted-by":"publisher","DOI":"10.1126\/scirobotics.aat2874"},{"key":"e_1_2_8_12_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.aaf1092"},{"key":"e_1_2_8_13_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.matt.2022.01.013"},{"key":"e_1_2_8_14_1","doi-asserted-by":"publisher","DOI":"10.1002\/admt.201800378"},{"key":"e_1_2_8_15_1","doi-asserted-by":"publisher","DOI":"10.1098\/rsif.2017.0395"},{"key":"e_1_2_8_16_1","doi-asserted-by":"publisher","DOI":"10.1089\/soro.2017.0133"},{"key":"e_1_2_8_17_1","doi-asserted-by":"publisher","DOI":"10.1038\/nature22382"},{"key":"e_1_2_8_18_1","doi-asserted-by":"publisher","DOI":"10.1073\/pnas.1620344114"},{"key":"e_1_2_8_19_1","doi-asserted-by":"publisher","DOI":"10.1002\/aisy.201900041"},{"key":"e_1_2_8_20_1","first-page":"151","volume":"6","author":"Bing-Shan H.","year":"2009","journal-title":"Int. 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