{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,9]],"date-time":"2026-04-09T17:10:17Z","timestamp":1775754617551,"version":"3.50.1"},"reference-count":268,"publisher":"Wiley","issue":"6","license":[{"start":{"date-parts":[[2024,1,29]],"date-time":"2024-01-29T00:00:00Z","timestamp":1706486400000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52225501"],"award-info":[{"award-number":["52225501"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62227812"],"award-info":[{"award-number":["62227812"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["U23A20617"],"award-info":[{"award-number":["U23A20617"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["advanced.onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Advanced Intelligent Systems"],"published-print":{"date-parts":[[2024,6]]},"abstract":"<jats:p>Piezoelectric actuation technology has been widely used in various precise\u2010oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross\u2010scale and multiple\u2010degree\u2010of\u2010freedom (multi\u2010DOF) output motions are of utmost importance in the context of micro\u2010\/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross\u2010scale multi\u2010DOF piezoelectric drive technology is provided. To commence, it provides an in\u2010depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross\u2010scale motion is introduced, and the multi\u2010DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi\u2010DOF cross\u2010scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real\u2010world environments. Finally, an in\u2010depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.<\/jats:p>","DOI":"10.1002\/aisy.202300780","type":"journal-article","created":{"date-parts":[[2024,1,29]],"date-time":"2024-01-29T21:18:25Z","timestamp":1706563105000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":37,"title":["Review on Multiple\u2010Degree\u2010of\u2010Freedom Cross\u2010Scale Piezoelectric Actuation Technology"],"prefix":"10.1002","volume":"6","author":[{"given":"Qingbing","family":"Chang","sequence":"first","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 Heilongjiang Province China"}]},{"given":"Weishan","family":"Chen","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 Heilongjiang Province China"}]},{"given":"Shijing","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 Heilongjiang Province China"}]},{"given":"Jie","family":"Deng","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 Heilongjiang Province China"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5684-9159","authenticated-orcid":false,"given":"Yingxiang","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Robotics and System Harbin Institute of Technology  Harbin 150001 Heilongjiang Province China"}]}],"member":"311","published-online":{"date-parts":[[2024,1,29]]},"reference":[{"key":"e_1_2_9_2_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2021.3094477"},{"key":"e_1_2_9_3_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/abc6b9"},{"key":"e_1_2_9_4_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2020.106634"},{"key":"e_1_2_9_5_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2018.2866272"},{"key":"e_1_2_9_6_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2020.2972301"},{"key":"e_1_2_9_7_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4932580"},{"key":"e_1_2_9_8_1","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202203054"},{"key":"e_1_2_9_9_1","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms10078"},{"key":"e_1_2_9_10_1","doi-asserted-by":"publisher","DOI":"10.3390\/act12040163"},{"key":"e_1_2_9_11_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi13081256"},{"key":"e_1_2_9_12_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-010-1017-9"},{"key":"e_1_2_9_13_1","doi-asserted-by":"publisher","DOI":"10.3390\/act8040069"},{"key":"e_1_2_9_14_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi12121512"},{"key":"e_1_2_9_15_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi13030429"},{"key":"e_1_2_9_16_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.carbon.2014.12.012"},{"key":"e_1_2_9_17_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201704407"},{"key":"e_1_2_9_18_1","doi-asserted-by":"publisher","DOI":"10.3390\/act8020045"},{"key":"e_1_2_9_19_1","first-page":"8203607","volume":"51","author":"Zhang L.","year":"2015","journal-title":"IEEE Trans. Magn."},{"key":"e_1_2_9_20_1","doi-asserted-by":"publisher","DOI":"10.3390\/act11110310"},{"key":"e_1_2_9_21_1","doi-asserted-by":"publisher","DOI":"10.1002\/admt.201900716"},{"key":"e_1_2_9_22_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201802084"},{"key":"e_1_2_9_23_1","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2018.2875940"},{"key":"e_1_2_9_24_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202008452"},{"key":"e_1_2_9_25_1","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202001368"},{"key":"e_1_2_9_26_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2019.106254"},{"key":"e_1_2_9_27_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-023-36243-3"},{"key":"e_1_2_9_28_1","volume":"10","author":"Chen E.","year":"2023","journal-title":"Adv. Sci."},{"key":"e_1_2_9_29_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmecsci.2022.107943"},{"key":"e_1_2_9_30_1","unstructured":"S.Yabui T.Atsumi T.Inoue presented at8th IFAC Symp. on Mechatronic Systems Tech Univ Wien Vienna AustriaSeptember2019."},{"key":"e_1_2_9_31_1","unstructured":"S.Kwon W. K.Chung Y.Youm inIEEE Int. Conf. on Robotics and Automation IEEE Piscataway NJ2001."},{"key":"e_1_2_9_32_1","doi-asserted-by":"publisher","DOI":"10.1016\/S0890-6955(00)00061-4"},{"key":"e_1_2_9_33_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-009-2327-x"},{"key":"e_1_2_9_34_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2010.02.005"},{"key":"e_1_2_9_35_1","first-page":"329","volume":"21","author":"Zhu H.","year":"2016","journal-title":"IEEE\u2010ASME Trans. Mechatron."},{"key":"e_1_2_9_36_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2019.2928978"},{"key":"e_1_2_9_37_1","doi-asserted-by":"publisher","DOI":"10.1063\/5.0056955"},{"key":"e_1_2_9_38_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2021.106471"},{"key":"e_1_2_9_39_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2009.04.001"},{"key":"e_1_2_9_40_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2020.111971"},{"key":"e_1_2_9_41_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2023.106957"},{"key":"e_1_2_9_42_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmecsci.2023.108276"},{"key":"e_1_2_9_43_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2021.113029"},{"key":"e_1_2_9_44_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2023.3262862"},{"key":"e_1_2_9_45_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2022.3150399"},{"key":"e_1_2_9_46_1","doi-asserted-by":"publisher","DOI":"10.1007\/s12541-016-0126-5"},{"key":"e_1_2_9_47_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2017.07.010"},{"key":"e_1_2_9_48_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2019.01.033"},{"key":"e_1_2_9_49_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2023.3237900"},{"key":"e_1_2_9_50_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2021.108636"},{"key":"e_1_2_9_51_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2014.2360644"},{"key":"e_1_2_9_52_1","doi-asserted-by":"publisher","DOI":"10.1109\/TRO.2021.3102418"},{"key":"e_1_2_9_53_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2019.02.019"},{"key":"e_1_2_9_54_1","doi-asserted-by":"publisher","DOI":"10.3390\/act6010007"},{"key":"e_1_2_9_55_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2022.3213906"},{"key":"e_1_2_9_56_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2023.3270511"},{"key":"e_1_2_9_57_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ab8315"},{"key":"e_1_2_9_58_1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2014.6689788"},{"key":"e_1_2_9_59_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2015.2511782"},{"key":"e_1_2_9_60_1","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2014.2317778"},{"key":"e_1_2_9_61_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2016.06.004"},{"key":"e_1_2_9_62_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2012.04.024"},{"key":"e_1_2_9_63_1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2020.2972307"},{"key":"e_1_2_9_64_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5037407"},{"key":"e_1_2_9_65_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4967857"},{"key":"e_1_2_9_66_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4914843"},{"key":"e_1_2_9_67_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2012.02.010"},{"key":"e_1_2_9_68_1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2011.1905"},{"key":"e_1_2_9_69_1","first-page":"172","volume":"48","author":"Dabbagh V.","year":"2017","journal-title":"Precis. Eng.\u2010J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"e_1_2_9_70_1","doi-asserted-by":"publisher","DOI":"10.1080\/00150193.2013.838089"},{"key":"e_1_2_9_71_1","doi-asserted-by":"publisher","DOI":"10.1007\/s10832-014-9922-4"},{"key":"e_1_2_9_72_1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2013.2626"},{"key":"e_1_2_9_73_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ceramint.2015.03.247"},{"key":"e_1_2_9_74_1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2012.2283"},{"key":"e_1_2_9_75_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2023.3237874"},{"key":"e_1_2_9_76_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2017.01.023"},{"key":"e_1_2_9_77_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4985703"},{"key":"e_1_2_9_78_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2014.10.010"},{"key":"e_1_2_9_79_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2016.07.002"},{"key":"e_1_2_9_80_1","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2016.2542861"},{"key":"e_1_2_9_81_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2847655"},{"key":"e_1_2_9_82_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2842730"},{"key":"e_1_2_9_83_1","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2018.2875711"},{"key":"e_1_2_9_84_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2020.2972273"},{"key":"e_1_2_9_85_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-016-2854-y"},{"key":"e_1_2_9_86_1","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2006.875533"},{"key":"e_1_2_9_87_1","unstructured":"Y.Li Q.Xu inIEEE Int. Conf. on Robotics and Automation IEEE Piscataway NJ2008."},{"key":"e_1_2_9_88_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4965880"},{"key":"e_1_2_9_89_1","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/25\/11\/115033"},{"key":"e_1_2_9_90_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2885716"},{"key":"e_1_2_9_91_1","author":"Deng J.","year":"2023","journal-title":"Sci. China\u2010Technol. Sci."},{"key":"e_1_2_9_92_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ac93d2"},{"key":"e_1_2_9_93_1","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202001155"},{"key":"e_1_2_9_94_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2022.109704"},{"key":"e_1_2_9_95_1","first-page":"167","volume":"75","author":"Shao S.","year":"2022","journal-title":"Precis. Eng. J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"e_1_2_9_96_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2020.2975493"},{"key":"e_1_2_9_97_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ac59da"},{"key":"e_1_2_9_98_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ac7dce"},{"key":"e_1_2_9_99_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2022.3176293"},{"key":"e_1_2_9_100_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2022.102928"},{"key":"e_1_2_9_101_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2022.104997"},{"key":"e_1_2_9_102_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2020.106881"},{"key":"e_1_2_9_103_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2016.2517102"},{"key":"e_1_2_9_104_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2020.106855"},{"key":"e_1_2_9_105_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ac736e"},{"key":"e_1_2_9_106_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2019.03.025"},{"key":"e_1_2_9_107_1","doi-asserted-by":"publisher","DOI":"10.1177\/1045389X19862376"},{"key":"e_1_2_9_108_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-020-04909-3"},{"key":"e_1_2_9_109_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2019.111606"},{"key":"e_1_2_9_110_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2868274"},{"key":"e_1_2_9_111_1","doi-asserted-by":"publisher","DOI":"10.1063\/5.0004553"},{"key":"e_1_2_9_112_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2018.03.039"},{"key":"e_1_2_9_113_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5082856"},{"key":"e_1_2_9_114_1","first-page":"581342","author":"Hua S.","year":"2014","journal-title":"Adv. Mech. Eng."},{"key":"e_1_2_9_115_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2014.12.001"},{"key":"e_1_2_9_116_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi8080245"},{"key":"e_1_2_9_117_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2016.03.015"},{"key":"e_1_2_9_118_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2016.10.004"},{"key":"e_1_2_9_119_1","unstructured":"X.Liu W.Huang Y.Wang presented atSPAWDA Xian ChinaOctober2016."},{"key":"e_1_2_9_120_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ab547f"},{"key":"e_1_2_9_121_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2018.08.042"},{"key":"e_1_2_9_122_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.2185500"},{"key":"e_1_2_9_123_1","doi-asserted-by":"crossref","unstructured":"W.Rong S.Zhang M.Yu L.Sun presented atICMA 2011 Beijing ChinaAugust2011 https:\/\/doi.org\/10.1109\/icma.2011.5985655.","DOI":"10.1109\/ICMA.2011.5985655"},{"key":"e_1_2_9_124_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.1143290"},{"key":"e_1_2_9_125_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2014.04.009"},{"key":"e_1_2_9_126_1","unstructured":"F.Wang Z.Huo Y.Tian D.Zhang presented at8th IEEE\u2010CYBER Tianjin ChinaJuly2018."},{"key":"e_1_2_9_127_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2020.104066"},{"key":"e_1_2_9_128_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2013.2262801"},{"key":"e_1_2_9_129_1","unstructured":"Y.Tian K.Lu F.Wang C.Zhou Y.Ma W.Wang D.Zhang J.Zhang inIEEE 3M\u2010NANO IEEE Piscataway NJ2019."},{"key":"e_1_2_9_130_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2018.04.008"},{"key":"e_1_2_9_131_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2017.2758749"},{"key":"e_1_2_9_132_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5141138"},{"key":"e_1_2_9_133_1","doi-asserted-by":"publisher","DOI":"10.1007\/s12541-020-00393-x"},{"key":"e_1_2_9_134_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2010.2052107"},{"key":"e_1_2_9_135_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2019.2941137"},{"key":"e_1_2_9_136_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-017-3626-z"},{"key":"e_1_2_9_137_1","doi-asserted-by":"publisher","DOI":"10.1109\/TNANO.2008.2005829"},{"key":"e_1_2_9_138_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2019.2935933"},{"key":"e_1_2_9_139_1","doi-asserted-by":"crossref","unstructured":"C.Liang F.Wang Y.Tian D.Zhang presented at7th 3M\u2010NANO Shanghai ChinaAugust2017.","DOI":"10.1109\/3M-NANO.2017.8286283"},{"key":"e_1_2_9_140_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4904974"},{"key":"e_1_2_9_141_1","unstructured":"W.Chen S.Chen X.Wu D.Luo presented at4th ICIST Shenzhen ChinaApril2014."},{"key":"e_1_2_9_142_1","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/24\/2\/025002"},{"key":"e_1_2_9_143_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5001966"},{"key":"e_1_2_9_144_1","doi-asserted-by":"publisher","DOI":"10.1364\/AO.57.009307"},{"key":"e_1_2_9_145_1","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/24\/7\/075014"},{"key":"e_1_2_9_146_1","unstructured":"B.Zhang L.Zhang G.Huang R.Shu presented at4th ISPDI\u2010 Sensor and Micromachined Optical Device Technologies Beijing ChinaMay2011."},{"key":"e_1_2_9_147_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2019.11.003"},{"key":"e_1_2_9_148_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5091023"},{"key":"e_1_2_9_149_1","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.51.09MF14"},{"key":"e_1_2_9_150_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2021.107851"},{"key":"e_1_2_9_151_1","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/18\/3\/035009"},{"key":"e_1_2_9_152_1","doi-asserted-by":"publisher","DOI":"10.1007\/s11801-016-6147-6"},{"key":"e_1_2_9_153_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2015.10.001"},{"key":"e_1_2_9_154_1","doi-asserted-by":"publisher","DOI":"10.1007\/s12541-020-00459-w"},{"key":"e_1_2_9_155_1","first-page":"301","volume":"34","author":"Gao W.","year":"2010","journal-title":"Precis. Eng. J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"e_1_2_9_156_1","doi-asserted-by":"publisher","DOI":"10.4028\/www.scientific.net\/KEM.523-524.650"},{"key":"e_1_2_9_157_1","doi-asserted-by":"publisher","DOI":"10.1007\/s12541-013-0219-3"},{"key":"e_1_2_9_158_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2021.108398"},{"key":"e_1_2_9_159_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2023.102983"},{"key":"e_1_2_9_160_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2015.01.024"},{"key":"e_1_2_9_161_1","doi-asserted-by":"publisher","DOI":"10.1063\/5.0008905"},{"key":"e_1_2_9_162_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2017.2682983"},{"key":"e_1_2_9_163_1","unstructured":"Y.Tian M.Yang F.Wang C.Zhou X.Zhao D.Zhang inIEEE 3M\u2010NANO IEEE Piscataway NJ2019."},{"key":"e_1_2_9_164_1","doi-asserted-by":"publisher","DOI":"10.1109\/TASE.2010.2077675"},{"key":"e_1_2_9_165_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2022.104854"},{"key":"e_1_2_9_166_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2017.02.005"},{"key":"e_1_2_9_167_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2019.111777"},{"key":"e_1_2_9_168_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-016-3258-8"},{"key":"e_1_2_9_169_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.rcim.2015.07.004"},{"key":"e_1_2_9_170_1","unstructured":"X.Tang I.Chen inIEEE\/RSJ Int. Conf. on Intelligent Robots andSystems IEEE Piscataway NJ2006."},{"key":"e_1_2_9_171_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ab8a6e"},{"key":"e_1_2_9_172_1","doi-asserted-by":"publisher","DOI":"10.1007\/s12213-020-00124-5"},{"key":"e_1_2_9_173_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2020.2973175"},{"key":"e_1_2_9_174_1","unstructured":"W.Zesch R.Buechi A.Codourey R. Y.Siegwart presented atConf. on Microrobotics and Micromechanical Systems Philadelphia PAOctober1995."},{"key":"e_1_2_9_175_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi11020216"},{"key":"e_1_2_9_176_1","first-page":"289","volume":"26","author":"Morita T.","year":"2002","journal-title":"Precis. Eng. J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"e_1_2_9_177_1","doi-asserted-by":"publisher","DOI":"10.1007\/s41315-018-0071-9"},{"key":"e_1_2_9_178_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2011.2118764"},{"key":"e_1_2_9_179_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechmachtheory.2003.09.001"},{"key":"e_1_2_9_180_1","doi-asserted-by":"publisher","DOI":"10.1088\/0964-1726\/15\/1\/N02"},{"key":"e_1_2_9_181_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ultras.2017.01.005"},{"key":"e_1_2_9_182_1","doi-asserted-by":"publisher","DOI":"10.3390\/act7010008"},{"key":"e_1_2_9_183_1","doi-asserted-by":"publisher","DOI":"10.1143\/JJAP.43.2884"},{"key":"e_1_2_9_184_1","doi-asserted-by":"publisher","DOI":"10.1080\/01691864.2012.754077"},{"key":"e_1_2_9_185_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2013.01.012"},{"key":"e_1_2_9_186_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jsv.2016.07.021"},{"key":"e_1_2_9_187_1","doi-asserted-by":"publisher","DOI":"10.3390\/s19040828"},{"key":"e_1_2_9_188_1","doi-asserted-by":"publisher","DOI":"10.1002\/eej.21261"},{"key":"e_1_2_9_189_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2014.2320858"},{"key":"e_1_2_9_190_1","unstructured":"M.Ghafarian B.Shirinzadeh T. K.Das A.Al\u2010Jodah W.Wei inIEEE\/ASME Int. Conf. on AIM IEEE Piscataway NJ2018."},{"key":"e_1_2_9_191_1","doi-asserted-by":"publisher","DOI":"10.1109\/TRO.2013.2288800"},{"key":"e_1_2_9_192_1","unstructured":"Z.Wang L.Chen L.Sun inIEEE Int. Conf. on Mechatronics and Automation IEEE Piscataway NJ2007."},{"key":"e_1_2_9_193_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.3693345"},{"key":"e_1_2_9_194_1","doi-asserted-by":"crossref","unstructured":"D.Zhang X.Li M.Ni P.Li L.Dong D.Rui J.Zhang presented atICEMI 2017 Yangzhou ChinaOctober2017 https:\/\/doi.org\/10.1109\/icemi.2017.8265851.","DOI":"10.1109\/ICEMI.2017.8265851"},{"key":"e_1_2_9_195_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2019.2931619"},{"key":"e_1_2_9_196_1","doi-asserted-by":"publisher","DOI":"10.1002\/aisy.202100142"},{"key":"e_1_2_9_197_1","doi-asserted-by":"crossref","unstructured":"E. E.Aktakka R. L.Peterson K.Najafi presented at2013 Transducers and Eurosensors XXVII Barcelona SpainJune2013 https:\/\/doi.org\/10.1109\/transducers.2013.6627085.","DOI":"10.1109\/Transducers.2013.6627085"},{"key":"e_1_2_9_198_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6439\/ab3b17"},{"key":"e_1_2_9_199_1","doi-asserted-by":"publisher","DOI":"10.1155\/2014\/523786"},{"key":"e_1_2_9_200_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4813739"},{"key":"e_1_2_9_201_1","first-page":"276","volume":"31","author":"Varadarajan K. M.","year":"2007","journal-title":"Precis. Eng. J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"e_1_2_9_202_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2022.109072"},{"key":"e_1_2_9_203_1","unstructured":"R.Gaunt S.Roberts A.Anthony presented atConf. on Instrument Design and Performance for Optical\/Infrared Ground\u2010based Telescopes WaikoloaFebruary2002."},{"key":"e_1_2_9_204_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.rcim.2016.08.005"},{"key":"e_1_2_9_205_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2017.11.002"},{"key":"e_1_2_9_206_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2019.2942645"},{"key":"e_1_2_9_207_1","unstructured":"D. H.Chao G. H.Zong R.Liu inIEEE\/ASME Int. Conf. on Advanced IntelligentMechatronics IEEE Piscataway NJ2005."},{"key":"e_1_2_9_208_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2017.12.030"},{"key":"e_1_2_9_209_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi11111024"},{"key":"e_1_2_9_210_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi10080542"},{"key":"e_1_2_9_211_1","doi-asserted-by":"publisher","DOI":"10.1243\/09544054JEM369"},{"key":"e_1_2_9_212_1","doi-asserted-by":"publisher","DOI":"10.1155\/2019\/4919505"},{"key":"e_1_2_9_213_1","unstructured":"W.Dong Z.Du L.Sun B.Zhang inIEEE Int. Conf. onNano\/Micro Engineered and Molecular Systems IEEE Piscataway NJ2006."},{"key":"e_1_2_9_214_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mechatronics.2006.03.006"},{"key":"e_1_2_9_215_1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2019.2951158"},{"key":"e_1_2_9_216_1","unstructured":"Y.Tian Z.Huo F.Wang B.Shi D.Zhang inIEEE 3M\u2010NANO IEEE Piscataway NJ2019."},{"key":"e_1_2_9_217_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2013.08.012"},{"key":"e_1_2_9_218_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2018.2883255"},{"key":"e_1_2_9_219_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2019.2959475"},{"key":"e_1_2_9_220_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2021.3071698"},{"key":"e_1_2_9_221_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ac112a"},{"key":"e_1_2_9_222_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2021.3073313"},{"key":"e_1_2_9_223_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.precisioneng.2018.10.005"},{"key":"e_1_2_9_224_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5109835"},{"key":"e_1_2_9_225_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.1143140"},{"key":"e_1_2_9_226_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5008471"},{"key":"e_1_2_9_227_1","doi-asserted-by":"publisher","DOI":"10.1109\/ACCESS.2018.2877761"},{"key":"e_1_2_9_228_1","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2009.1010"},{"key":"e_1_2_9_229_1","doi-asserted-by":"publisher","DOI":"10.1080\/19475411.2022.2084173"},{"key":"e_1_2_9_230_1","doi-asserted-by":"publisher","DOI":"10.1007\/s11465-017-0422-5"},{"key":"e_1_2_9_231_1","doi-asserted-by":"publisher","DOI":"10.1080\/10408436.2014.992585"},{"key":"e_1_2_9_232_1","doi-asserted-by":"publisher","DOI":"10.1116\/1.585130"},{"key":"e_1_2_9_233_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijmecsci.2022.107239"},{"key":"e_1_2_9_234_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2021.3108723"},{"key":"e_1_2_9_235_1","unstructured":"A.Jacob P.Parihar presented atICOP Kolkata India 2015."},{"key":"e_1_2_9_236_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2020.107602"},{"key":"e_1_2_9_237_1","first-page":"024102","volume":"61","author":"Wan Y.","year":"2022","journal-title":"Opt. Eng."},{"key":"e_1_2_9_238_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2019.2959087"},{"key":"e_1_2_9_239_1","doi-asserted-by":"publisher","DOI":"10.1177\/09544054221138149"},{"key":"e_1_2_9_240_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.3c05328"},{"key":"e_1_2_9_241_1","volume":"29","author":"Tu Y.","year":"2017","journal-title":"Adv. Mater."},{"key":"e_1_2_9_242_1","doi-asserted-by":"publisher","DOI":"10.1002\/aisy.202200096"},{"key":"e_1_2_9_243_1","doi-asserted-by":"publisher","DOI":"10.1109\/TBME.2017.2713302"},{"key":"e_1_2_9_244_1","doi-asserted-by":"publisher","DOI":"10.1111\/j.1442-9071.1998.tb01375.x"},{"key":"e_1_2_9_245_1","doi-asserted-by":"publisher","DOI":"10.1007\/s10544-011-9544-4"},{"key":"e_1_2_9_246_1","author":"Dai C.","year":"2023","journal-title":"IEEE Trans. Autom. Sci. Eng."},{"key":"e_1_2_9_247_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2017.2698139"},{"key":"e_1_2_9_248_1","doi-asserted-by":"publisher","DOI":"10.1109\/TMECH.2020.3003992"},{"key":"e_1_2_9_249_1","volume":"8","author":"Yang T.","year":"2021","journal-title":"Appl. Phys. Rev."},{"key":"e_1_2_9_250_1","unstructured":"Z.Yu W.Zhao X.Shi Y.Li T.Wang presented atConf. on AOPC \u2013 Advanced Laser Technology and Applications Beijing ChinaJune2021."},{"key":"e_1_2_9_251_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.commatsci.2010.05.007"},{"key":"e_1_2_9_252_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2022.109009"},{"key":"e_1_2_9_253_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jsv.2021.116243"},{"key":"e_1_2_9_254_1","doi-asserted-by":"publisher","DOI":"10.1177\/14613484231176127"},{"key":"e_1_2_9_255_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4984030"},{"key":"e_1_2_9_256_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.energy.2023.127870"},{"key":"e_1_2_9_257_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ymssp.2020.106696"},{"key":"e_1_2_9_258_1","doi-asserted-by":"publisher","DOI":"10.21595\/jve.2017.19014"},{"key":"e_1_2_9_259_1","doi-asserted-by":"publisher","DOI":"10.1007\/s10846-022-01649-6"},{"key":"e_1_2_9_260_1","doi-asserted-by":"publisher","DOI":"10.1002\/aisy.202300168"},{"key":"e_1_2_9_261_1","doi-asserted-by":"publisher","DOI":"10.1002\/advs.202305128"},{"key":"e_1_2_9_262_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-665X\/ac6f9f"},{"key":"e_1_2_9_263_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2023.3266571"},{"key":"e_1_2_9_264_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2023.114898"},{"key":"e_1_2_9_265_1","author":"Deng J.","year":"2023","journal-title":"IEEE\u2010ASME Trans. Mechatron."},{"key":"e_1_2_9_266_1","doi-asserted-by":"publisher","DOI":"10.21595\/jve.2017.19197"},{"key":"e_1_2_9_267_1","first-page":"035023","volume":"30","author":"Fan P.","year":"2021","journal-title":"Smart Mater. Struct."},{"key":"e_1_2_9_268_1","doi-asserted-by":"publisher","DOI":"10.1109\/TRO.2017.2656902"},{"key":"e_1_2_9_269_1","doi-asserted-by":"publisher","DOI":"10.1109\/TIE.2022.3213887"}],"container-title":["Advanced Intelligent Systems"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/aisy.202300780","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,7]],"date-time":"2025-10-07T23:03:58Z","timestamp":1759878238000},"score":1,"resource":{"primary":{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/10.1002\/aisy.202300780"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,1,29]]},"references-count":268,"journal-issue":{"issue":"6","published-print":{"date-parts":[[2024,6]]}},"alternative-id":["10.1002\/aisy.202300780"],"URL":"https:\/\/doi.org\/10.1002\/aisy.202300780","archive":["Portico"],"relation":{},"ISSN":["2640-4567","2640-4567"],"issn-type":[{"value":"2640-4567","type":"print"},{"value":"2640-4567","type":"electronic"}],"subject":[],"published":{"date-parts":[[2024,1,29]]},"assertion":[{"value":"2023-11-16","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2024-01-29","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}],"article-number":"2300780"}}