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With increasingly stringent performance demands, reliability has become a critical bottleneck limiting further development of MEMS devices. This study specifically examines comb\u2010drive capacitive MEMS accelerometers, investigating their performance degradation mechanisms and developing corresponding reliability assessment methodologies. Through systematic analysis of crack propagation mechanisms in silicon thin\u2010film microstructures under both static and dynamic loading conditions, we demonstrate that fatigue crack growth can initiate structural fractures in sensitive components, ultimately leading to device failure and compromised reliability. To overcome current limitations in fatigue\u2010induced reliability evaluation, we establish a comprehensive crack propagation model using COMSOL simulations. By synergistically combining silicon microstructure fracture mechanics with Gamma process degradation modeling, this research achieves accurate reliability assessment and precise quantification of performance degradation in MEMS accelerometers.<\/jats:p>","DOI":"10.1002\/qre.3794","type":"journal-article","created":{"date-parts":[[2025,4,23]],"date-time":"2025-04-23T10:55:11Z","timestamp":1745405711000},"page":"2547-2556","update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Failure Mechanism Analysis and Reliability Assessment of MEMS Accelerometers"],"prefix":"10.1002","volume":"41","author":[{"given":"Jing","family":"Li","sequence":"first","affiliation":[{"name":"School of Mechanical and Electrical Engineering University of Electronic Science and Technology of China  Chengdu Sichuan China"},{"name":"Center for System Reliability and Safety University of Electronic Science and Technology of China  Chengdu Sichuan China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Guoguang","family":"Lu","sequence":"additional","affiliation":[{"name":"Science and Technology on Reliability Physics and Application of Electronic Component Laboratory The Fifth Electronics Research Institute of Ministry of Industry and Information Technology  Guangzhou Guangdong China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Junzuo","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Mechanical Engineering Southwest Jiaotong University  Chengdu Sichuan China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sajawal Gul","family":"Niazi","sequence":"additional","affiliation":[{"name":"School of Mechanical and Electrical Engineering University of Electronic Science and Technology of China  Chengdu Sichuan China"},{"name":"Center for System Reliability and Safety University of Electronic Science and Technology of China  Chengdu Sichuan China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ying","family":"Zeng","sequence":"additional","affiliation":[{"name":"School of Mechanical and Electrical Engineering University of Electronic Science and Technology of China  Chengdu Sichuan China"},{"name":"Center for System Reliability and Safety University of Electronic Science and Technology of China  Chengdu Sichuan China"},{"name":"China University of Petroleum at Karamay  Karamay Xinjiang China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2025,4,23]]},"reference":[{"issue":"08","key":"e_1_2_8_2_1","first-page":"1","article-title":"MEMS Technology Status and Development Prospects","volume":"42","author":"Gu Y.","year":"2013","journal-title":"Equipment for Electronic Products Manufacturing"},{"key":"e_1_2_8_3_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ress.2024.110664"},{"key":"e_1_2_8_4_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.eswa.2025.126580"},{"key":"e_1_2_8_5_1","article-title":"An Intelligent Failure Feature Learning Method for Failure and Maintenance Data Management of Wind Turbines","volume":"244","author":"Li H.","year":"2024","journal-title":"Reliability Engineering & System Safety"},{"key":"e_1_2_8_6_1","doi-asserted-by":"crossref","unstructured":"D. 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