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Here, a generic approach of making scalable ultrathin transition metal\u2010carbide\/boride\/nitride using immiscibility of two metals is demonstrated. Ultrathin tantalum carbide, nitride, and boride are grown using chemical vapor deposition by heating a tantalum\u2010copper bilayer with corresponding precursor (C<jats:sub>2<\/jats:sub>H<jats:sub>2<\/jats:sub>, B powder, and NH<jats:sub>3<\/jats:sub>). The ultrathin crystals are found on the copper surface (opposite of the metal\u2013metal junction). A detailed microscopy analysis followed by density functional theory based calculation demonstrates the migration mechanism, where Ta atoms prefer to stay in clusters in the Cu matrix. These ultrathin materials have good interface attachment with Cu, improving the scratch resistance and oxidation resistance of Cu. This metal\u2013metal immiscibility system can be extended to other metals to synthesize metal carbide, boride, and nitride coatings.<\/jats:p>","DOI":"10.1002\/adma.201700364","type":"journal-article","created":{"date-parts":[[2017,6,8]],"date-time":"2017-06-08T02:13:16Z","timestamp":1496887996000},"source":"Crossref","is-referenced-by-count":99,"title":["Metal Immiscibility Route to Synthesis of Ultrathin Carbides, Borides, and Nitrides"],"prefix":"10.1002","volume":"29","author":[{"given":"Zixing","family":"Wang","sequence":"first","affiliation":[{"name":"Materials Science and Nanoengineering Rice University  6100 Main St Houston TX 77005 USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Vidya","family":"Kochat","sequence":"additional","affiliation":[{"name":"Materials Science and Nanoengineering Rice University  6100 Main St Houston TX 77005 USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Prafull","family":"Pandey","sequence":"additional","affiliation":[{"name":"Materials Engineering Indian Institute of Science  Bangalore 560012 India"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sanjay","family":"Kashyap","sequence":"additional","affiliation":[{"name":"Materials Engineering Indian Institute of Science  Bangalore 560012 India"},{"name":"School of Engineering and Technology BML Munjal University  67th KM Stone NH\u20108 Gurgaon 122413 India"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Soham","family":"Chattopadhyay","sequence":"additional","affiliation":[{"name":"Materials Research Centre Indian Institute of Science  Bangalore 560012 India"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Atanu","family":"Samanta","sequence":"additional","affiliation":[{"name":"Materials Research Centre Indian Institute of Science  Bangalore 560012 India"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Suman","family":"Sarkar","sequence":"additional","affiliation":[{"name":"Materials Engineering Indian Institute of Science  Bangalore 560012 India"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Praveena","family":"Manimunda","sequence":"additional","affiliation":[{"name":"Hysitron Inc.  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