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Although there are remarkable strides in achieving low\u2010dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the resonator materials. In this study, a wafer\u2010scale amorphous thin film is uncovered, which has the highest ultimate tensile strength ever measured for a nanostructured amorphous material. This silicon carbide (SiC) material exhibits an ultimate tensile strength of over 10 GPa, reaching the regime reserved for strong crystalline materials and approaching levels experimentally shown in graphene nanoribbons. Amorphous SiC strings with high aspect ratios are fabricated, with mechanical modes exceeding quality factors 10<jats:sup>8<\/jats:sup> at room temperature, the highest value achieves among SiC resonators. These performances are demonstrated faithfully after characterizing the mechanical properties of the thin film using the resonance behaviors of free\u2010standing resonators. This robust thin\u2010film material has significant potential for applications in nanomechanical sensors, solar cells, biological applications, space exploration, and other areas requiring strength and stability in dynamic environments. The findings of this study open up new possibilities for the use of amorphous thin\u2010film materials in high\u2010performance\u00a0applications.<\/jats:p>","DOI":"10.1002\/adma.202306513","type":"journal-article","created":{"date-parts":[[2023,10,12]],"date-time":"2023-10-12T06:10:52Z","timestamp":1697091052000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":32,"title":["High\u2010Strength Amorphous Silicon Carbide for Nanomechanics"],"prefix":"10.1002","volume":"36","author":[{"given":"Minxing","family":"Xu","sequence":"first","affiliation":[{"name":"Department of Precision and Microsystems Engineering Delft University of Technology Delft CD 2628 The Netherlands"},{"name":"Department of Quantum Nanoscience Delft University of Technology, Kavli Institute of Nanoscience Delft CD 2628 The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dongil","family":"Shin","sequence":"additional","affiliation":[{"name":"Department of Precision and Microsystems Engineering Delft University of Technology Delft CD 2628 The Netherlands"},{"name":"Department of Materials Science and Engineering Delft University of Technology Delft CD 2628 The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Paolo M.","family":"Sberna","sequence":"additional","affiliation":[{"name":"Faculty of Electrical Engineering Mathematics and Computer Science Delft University of Technology, Else Kooi Laboratory Delft CD 2628 The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Roald","family":"van der Kolk","sequence":"additional","affiliation":[{"name":"Department of Quantum Nanoscience Delft University of Technology, Kavli Nanolab Delft CD 2628 The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Andrea","family":"Cupertino","sequence":"additional","affiliation":[{"name":"Department of Precision and Microsystems Engineering Delft University of Technology Delft CD 2628 The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Miguel A.","family":"Bessa","sequence":"additional","affiliation":[{"name":"Brown University School of Engineering Providence RI 02912 USA"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1458-5735","authenticated-orcid":false,"given":"Richard A.","family":"Norte","sequence":"additional","affiliation":[{"name":"Department of Precision and Microsystems Engineering Delft University of Technology Delft CD 2628 The Netherlands"},{"name":"Department of Quantum Nanoscience Delft University of Technology, Kavli Institute of Nanoscience Delft CD 2628 The Netherlands"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2023,12,3]]},"reference":[{"key":"e_1_2_11_1_1","doi-asserted-by":"publisher","DOI":"10.1038\/nphoton.2012.245"},{"key":"e_1_2_11_2_1","volume":"13","author":"Pratt J. 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