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A Fowler\u2013Nordheim tunneling current of low energetic electrons (<jats:italic>E<\/jats:italic> = 30\u201360\u00a0eV) emitted from the tip of an atomic force microscopy (AFM) cantilever is utilized to induce a nanoscale oxidation on a MoTe<jats:sub>2<\/jats:sub> nanosheet surface under ambient conditions. Due to the water solubility of the generated oxide, a direct pattern transfer into the MoTe<jats:sub>2<\/jats:sub> surface can be achieved by a simple immersion of the sample in deionized water. The tip\u2010grown oxide is characterized using Auger electron and Raman spectroscopy, revealing it consists of amorphous MoO<jats:sub>3<\/jats:sub>\/MoO<jats:italic><jats:sub>x<\/jats:sub><\/jats:italic> as well as TeO<jats:sub>2<\/jats:sub>\/TeO<jats:italic><jats:sub>x<\/jats:sub><\/jats:italic>. With the presented technology in combination with subsequent AFM imaging it is possible to demonstrate a strong anisotropic sensitivity of 1T\u2019\u2010\/(T<jats:sub>d<\/jats:sub>)\u2010MoTe<jats:sub>2<\/jats:sub> to aqueous environments. Finally the discussed approach is used to structure a nanoribbon field effect transistor out of a few\u2010layer 2H\u2010MoTe<jats:sub>2<\/jats:sub> nanosheet.<\/jats:p>","DOI":"10.1002\/adma.202310887","type":"journal-article","created":{"date-parts":[[2023,11,6]],"date-time":"2023-11-06T18:20:15Z","timestamp":1699294815000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":22,"title":["Exploring the Surface Oxidation and Environmental Instability of 2H\u2010\/1T\u2019\u2010MoTe<sub>2<\/sub> Using Field Emission\u2010Based Scanning Probe Lithography"],"prefix":"10.1002","volume":"36","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5186-4306","authenticated-orcid":false,"given":"Christoph","family":"Reuter","sequence":"first","affiliation":[{"name":"Institute of Micro\u2010 and Nanotechnologies Microsystems Technology Group Technische Universit\u00e4t Ilmenau  Max\u2010Planck\u2010Ring 12 98693 Ilmenau Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Gernot","family":"Ecke","sequence":"additional","affiliation":[{"name":"Institute of Micro\u2010 and Nanotechnologies Nanotechnology Group Technische Universit\u00e4t Ilmenau  Gustav\u2010Kirchhoff\u2010Stra\u00dfe 1 98693 Ilmenau Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Steffen","family":"Strehle","sequence":"additional","affiliation":[{"name":"Institute of Micro\u2010 and Nanotechnologies Microsystems Technology Group Technische Universit\u00e4t Ilmenau  Max\u2010Planck\u2010Ring 12 98693 Ilmenau Germany"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2023,12]]},"reference":[{"key":"e_1_2_8_1_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.1c01816"},{"key":"e_1_2_8_2_1","doi-asserted-by":"publisher","DOI":"10.1021\/nl502557g"},{"key":"e_1_2_8_3_1","doi-asserted-by":"publisher","DOI":"10.1021\/nl5045007"},{"key":"e_1_2_8_4_1","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2017.209"},{"key":"e_1_2_8_5_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41566-020-0647-4"},{"key":"e_1_2_8_6_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41377-022-01047-5"},{"key":"e_1_2_8_7_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201305845"},{"key":"e_1_2_8_8_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.5b00736"},{"key":"e_1_2_8_9_1","volume":"10725","author":"Rami A.","year":"2018","journal-title":"Proc. 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