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Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible\u2010to\u2010mid\u2010infrared band, larger peak emission cross\u2010section, higher doping concentration. However, the writing of Type\u2010I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, this work introduces a novel femtosecond laser direct writing technique that combines slit\u2010shaping with an immersion oil objective to fabricate low\u2010loss Type\u2010I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode\u2010field, and refractive index distribution, with a spatial resolution as high as 700\u00a0nm and a high positive refractive index variation on the order of 10<jats:sup>\u22122<\/jats:sup>, introducing new degrees of freedom to design and fabricate passive\/active optical waveguide devices. As a proof\u2010of\u2010concept, this work successfully produces a 7\u00a0mm\u2010long circular\u2010shaped gain waveguide (\u224810\u00a0\u00b5m in diameter) in an Er<jats:sup>3+<\/jats:sup>\u2010doped YAG single crystal, exhibiting a propagation loss as low as 0.23\u00a0dB\u00a0cm<jats:sup>\u22121<\/jats:sup>, a net gain of \u22483\u00a0dB and a polarization\u2010insensitive character. The newly\u2010developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits.<\/jats:p>","DOI":"10.1002\/adma.202404493","type":"journal-article","created":{"date-parts":[[2024,5,8]],"date-time":"2024-05-08T16:13:40Z","timestamp":1715184820000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":28,"title":["3D Laser Writing of Low\u2010Loss Cross\u2010Section\u2010Variable Type\u2010I Optical Waveguide Passive\/Active Integrated Devices in Single Crystals"],"prefix":"10.1002","volume":"36","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-1073-6324","authenticated-orcid":false,"given":"Daoyuan","family":"Chen","sequence":"first","affiliation":[{"name":"State Key Laboratory of Extreme Photonics and Instrumentation College of Optical Science and Engineering Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhi","family":"Chen","sequence":"additional","affiliation":[{"name":"Zhejiang Lab  Hangzhou 311100 China"},{"name":"College of Materials Science and Engineering Key Laboratory of Advanced Materials of Yunnan Province Kunming University of Science and Technology  Kunming Yunnan 650093 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yi","family":"Yang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Extreme Photonics and Instrumentation College of Optical Science and Engineering Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yuying","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Extreme Photonics and Instrumentation College of Optical Science and Engineering Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xuhu","family":"Han","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Extreme Photonics and Instrumentation College of Optical Science and Engineering Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kuen Yao","family":"Lau","sequence":"additional","affiliation":[{"name":"Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province &amp; Key Lab of Modern Optical Technologies of Education Ministry of China School of Optoelectronic Science and Engineering &amp; Collaborative Innovation Center of Suzhou Nano Science and Technology Soochow University  Suzhou 215006 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhemin","family":"Wu","sequence":"additional","affiliation":[{"name":"School of Material Science and Engineering Centre of Electron Microscopy and State Key Laboratory of Silicon Materials Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chen","family":"Zou","sequence":"additional","affiliation":[{"name":"School of Material Science and Engineering Centre of Electron Microscopy and State Key Laboratory of Silicon Materials Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yu","family":"Zhang","sequence":"additional","affiliation":[{"name":"Zhejiang Lab  Hangzhou 311100 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Beibei","family":"Xu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Extreme Photonics and Instrumentation College of Optical Science and Engineering Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaofeng","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Materials Science and Engineering Zhejiang University  Hangzhou 310027 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhijun","family":"Ma","sequence":"additional","affiliation":[{"name":"Zhejiang Lab  Hangzhou 311100 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Guoping","family":"Dong","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Luminescent Materials and Devices and Guangdong Provincial Key Laboratory of Fiber Laser Materials and Applied Techniques Guangdong Engineering Technology Research and Development Center of Special Optical Fiber Materials and Devices School of Materials Science and Engineering South China University of Technology  Guangzhou 510641 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Giuseppe","family":"Barillaro","sequence":"additional","affiliation":[{"name":"Dipartimento di Ingegneria dell'Informazione Universit\u00e0 di Pisa  via G. 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