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Recent advancements, including silicon\u2010based homogeneous CFETs and van der Waals\u2010based heterogeneous CFETs, have demonstrated significant progress, yet a comprehensive and up\u2010to\u2010date review is absent to further advance the field. This work explores CFET fabrication methodologies, comparing the advantages and challenges of Monolithic and Sequential integration approaches, with a focus on thermal management, process complexity, and material compatibility. We highlight the critical role of layered van der Waals materials in addressing thermal constraints and enhancing gate control, leveraging their atomic\u2010scale thickness and unique electronic properties. Furthermore, we discuss strategies to overcome key challenges such as achieving balanced electrical characteristics, optimizing thermal management, and minimizing parasitic capacitance through innovative channel engineering, gate\u2010dielectric design, and structural optimization. The co\u2010design principles of CFET architectures are also examined, showcasing their potential in logic circuits, memory units, and computing\u2010in\u2010memory systems. This review provides a forward\u2010looking perspective on CFET technology, emphasizing the need for continued innovation in material\u2010processing\u2010structure co\u2010design and co\u2010optimization to unlock new frontiers in semiconductor technology.<\/jats:p>","DOI":"10.1002\/adma.73226","type":"journal-article","created":{"date-parts":[[2026,4,30]],"date-time":"2026-04-30T12:43:51Z","timestamp":1777553031000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["From Planar to 3D: The Evolution of Complementary Field\u2010Effect Transistor for Next\u2010Generation Semiconductor Nodes"],"prefix":"10.1002","volume":"38","author":[{"given":"Yafang","family":"Li","sequence":"first","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"},{"name":"School of Physics Key Laboratory of Material Physics Ministry of Education Zhengzhou University  Zhengzhou Henan China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Siqi","family":"Liu","sequence":"additional","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hao","family":"Zheng","sequence":"additional","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Liwen","family":"Cao","sequence":"additional","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Fei","family":"Wang","sequence":"additional","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2742-4711","authenticated-orcid":false,"given":"Longhui","family":"Zeng","sequence":"additional","affiliation":[{"name":"School of Physics Key Laboratory of Material Physics Ministry of Education Zhengzhou University  Zhengzhou Henan China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0124-1757","authenticated-orcid":false,"given":"Jun","family":"Li","sequence":"additional","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yen\u2010Fu","family":"Lin","sequence":"additional","affiliation":[{"name":"Department of Physics National Chung Hsing University  Taichung Taiwan"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-5632-5224","authenticated-orcid":false,"given":"Yuen Hong","family":"Tsang","sequence":"additional","affiliation":[{"name":"Department of Applied Physics The Hong Kong Polytechnic University  Kowloon Hong Kong China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4801-560X","authenticated-orcid":false,"given":"Mengjiao","family":"Li","sequence":"additional","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8061-1861","authenticated-orcid":false,"given":"Jianhua","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Microelectronics Shanghai University  Jiading Shanghai China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2026,4,30]]},"reference":[{"key":"e_1_2_10_2_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586\u2010023\u201006145\u2010x"},{"key":"e_1_2_10_3_1","unstructured":"J. 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