{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,5]],"date-time":"2026-10-05T07:56:11Z","timestamp":1791186971732,"version":"4.1.0"},"reference-count":60,"publisher":"Wiley","license":[{"start":{"date-parts":[[2026,10,5]],"date-time":"2026-10-05T00:00:00Z","timestamp":1791158400000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/onlinelibrary.wiley.com\/termsAndConditions#vor"},{"start":{"date-parts":[[2026,10,5]],"date-time":"2026-10-05T00:00:00Z","timestamp":1791158400000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/doi.wiley.com\/10.1002\/tdm_license_1.1"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["22475079"],"award-info":[{"award-number":["22475079"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100012226","name":"Fundamental Research Funds for the Central Universities","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100012226","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["advanced.onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Advanced Materials"],"abstract":"<jats:title>ABSTRACT<\/jats:title>\n                  <jats:p>The miniaturization of patterns to sub\u201020\u00a0nm dimensions remains challenging, owing to the fundamental constraints of optical patterning and the increasing complexity and cost of advanced lithographic technologies such as extreme\u2010ultraviolet lithography. Here, we introduce an electrochemical etching strategy that effectively decouples the final feature size from the optical diffraction limit by leveraging voltage\u2010gated solubility switching in electro\u2010responsive polymers. We discover that the redox\u2010state\u2010dependent solubility of rhodamine\u2010based polymers (Poly\u2010RhNNE\u2010B) can be precisely modulated by applied potentials, enabling programmable electrochemical dissolution. Notably, redox\u2010mediator\u2010facilitated intermolecular charge transfer extends this solubility switching laterally beyond the electrode\u2010contact regions. This electrochemical lateral etching enables electrically controlled post\u2010patterning dimensional refinement, allowing the remaining feature width to be progressively reduced after the initial pattern has been defined and yielding a minimum remaining linewidth of \u223c17\u00a0nm without requiring the final nanoscale dimension to be directly defined by high\u2010resolution optical exposure. This approach introduces an electrochemical nanofabrication strategy that complements conventional lithographic techniques, potentially reducing process complexity in selected nanoscale pattern\u2010refinement scenarios while enabling high\u2010resolution micro\/nano\u2010structuring, thereby expanding the toolbox for next\u2010generation precision nanomanufacturing.<\/jats:p>","DOI":"10.1002\/adma.75271","type":"journal-article","created":{"date-parts":[[2026,10,5]],"date-time":"2026-10-05T07:39:02Z","timestamp":1791185942000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Electrochemical Solubility Switching Enables Lateral Etching Toward Sub\u201020\u00a0nm Nanopatterning"],"prefix":"10.1002","author":[{"given":"Rui\u2010An","family":"Liu","sequence":"first","affiliation":[{"name":"State Key Laboratory of Supramolecular Structure and Materials College of Chemistry Jilin University  Changchun P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiale","family":"He","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Supramolecular Structure and Materials College of Chemistry Jilin University  Changchun P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiaheng","family":"Gao","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Supramolecular Structure and Materials College of Chemistry Jilin University  Changchun P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xue\u2010Song","family":"Liu","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Supramolecular Structure and Materials College of Chemistry Jilin University  Changchun P. R. 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China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4220-6157","authenticated-orcid":false,"given":"Yu\u2010Mo","family":"Zhang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Supramolecular Structure and Materials College of Chemistry Jilin University  Changchun P. R. 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