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Monitoring these neural activities could help understand the complex mechanisms and disorders of the brain. While micro\u2010electro\u2010mechanical systems (MEMS) based neural probes provide multi\u2010sensor integration, their lack of on\u2010chip signal processing limits the channel density. On the other hand, complementary metal\u2010oxide\u2010semiconductor (CMOS) probes offer on\u2010chip amplification and multiplexing to enable high channel density, yet the high foundry tape\u2010out cost hinders their broader adoption. Here, we achieve a near two orders of magnitude reduction in per\u2010wafer cost by applying simplified post\u2010CMOS processing on a multi\u2010project wafer (MPW) while advancing the probe functionality. This approach requires only two photolithography and three etching steps for CMOS post\u2010processing through the decoupled sensor customization, while the front\u2010end circuits are defined by CMOS, multimodal sensors (electrodes and photodiodes) are defined through post\u2010processing. Our 13\u2010shank probe integrates 416 electrodes and 832 photodiodes, and complete on\u2010chip signal processing, enabling simultaneous high\u2010density electrical and optical recording. We validated the operational feasibility of the proposed system under both in vitro and in vivo conditions. Based on these results, we propose the first fully integrated active multimodal neural probe architecture for high\u2010density electrical and optical interfacing.<\/jats:p>","DOI":"10.1002\/advs.202524260","type":"journal-article","created":{"date-parts":[[2026,3,24]],"date-time":"2026-03-24T15:26:46Z","timestamp":1774366006000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Fabrication of High\u2010Density Multimodal Neural Probes Based on Heterogeneously Integrated CMOS"],"prefix":"10.1002","volume":"13","author":[{"given":"Ju Hee","family":"Mun","sequence":"first","affiliation":[{"name":"Brain Science Institute Korea Institute of Science and Technology (KIST)  Seoul Republic of Korea"},{"name":"School of Electrical Engineering Korea University  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Miji","family":"Kim","sequence":"additional","affiliation":[{"name":"Brain Science Institute Korea Institute of Science and Technology (KIST)  Seoul Republic of Korea"},{"name":"Department of Electronic Engineering Hanyang University  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wooyeon","family":"Shin","sequence":"additional","affiliation":[{"name":"Brain Science Institute Korea Institute of Science and Technology (KIST)  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yongjun","family":"Park","sequence":"additional","affiliation":[{"name":"Brain Science Institute Korea Institute of Science and Technology (KIST)  Seoul Republic of Korea"},{"name":"Division of Bio\u2010Medical Science and Technology, KIST School University of Science and Technology  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kanghwan","family":"Kim","sequence":"additional","affiliation":[{"name":"Brain Science Institute Korea Institute of Science and Technology (KIST)  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Il\u2010Joo","family":"Cho","sequence":"additional","affiliation":[{"name":"Department of Biomedical Sciences College of Medicine Korea University  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jae Won","family":"Shim","sequence":"additional","affiliation":[{"name":"School of Electrical Engineering Korea University  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Min Soo","family":"Kim","sequence":"additional","affiliation":[{"name":"Brain Science Institute Korea Institute of Science and Technology (KIST)  Seoul Republic of Korea"},{"name":"Division of Bio\u2010Medical Science and Technology, KIST School University of Science and Technology  Seoul Republic of Korea"},{"name":"KHU\u2010KIST Department of Converging Science and Technology Kyung Hee University  Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Sunwoo","family":"Lee","sequence":"additional","affiliation":[{"name":"School of Electrical &amp; 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