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Here, we demonstrate CMOS\u2010compatible synthesis of rhombohedral\n                    <jats:italic>\u03b1<\/jats:italic>\n                    \u2010GeTe(111) thin films on 200\/300\u00a0mm Si wafers using an industrial deposition process based on van der Waals epitaxy, applied to this material class for the first time. Scanning Transmission Electron microscopy and advanced simulations of anomalous X\u2010ray diffraction measurements at synchrotron reveal that films are intrinsically self\u2010poled, exhibiting a robust upward out\u2010of\u2010plane ferroelectric polarization. The growth strategy is universal, enabling high\u2010quality\n                    <jats:italic>\u03b1<\/jats:italic>\n                    \u2010GeTe(111) on metals and insulators without compromising structural or ferroelectric performance. Piezoresponse force microscopy confirms reversible 180\u00b0 ferroelectric switching with performance comparable to molecular\u2010beam\u2010epitaxy benchmarks. This substrate\u2010independent growth strategy represents a decisive step toward the future large\u2010scale integration of FERSCs into functional spin\u2010orbit architectures, with the hope of bridging the gap between Rashba's fundamental physics and microelectronic implementation.\n                  <\/jats:p>","DOI":"10.1002\/advs.75711","type":"journal-article","created":{"date-parts":[[2026,5,22]],"date-time":"2026-05-22T12:17:02Z","timestamp":1779452222000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Large\u2010Scale Growth of Self\u2010Poled Ferroelectric Rashba Semiconductor\n                    <i>\u03b1<\/i>\n                    \u2010GeTe(111) Thin Films: A Crucial Step Towards Future CMOS\u2010Compatible Ferroelectric Spintronic Devices"],"prefix":"10.1002","volume":"13","author":[{"ORCID":"https:\/\/orcid.org\/0009-0000-4829-6275","authenticated-orcid":false,"given":"Jules","family":"Lagrave","sequence":"first","affiliation":[{"name":"Universit\u00e9 Grenoble Alpes, CEA, LETI  Grenoble France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Nicolas","family":"Bernier","sequence":"additional","affiliation":[{"name":"Universit\u00e9 Grenoble Alpes, CEA, LETI  Grenoble France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2012-5022","authenticated-orcid":false,"given":"Thomas","family":"Jalabert","sequence":"additional","affiliation":[{"name":"Universit\u00e9 Grenoble Alpes, CEA, LETI  Grenoble France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8826-9079","authenticated-orcid":false,"given":"Yoann","family":"Br\u00fbl\u00e9","sequence":"additional","affiliation":[{"name":"Universit\u00e9 Grenoble 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