{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,28]],"date-time":"2026-09-28T14:02:31Z","timestamp":1790604151517,"version":"4.1.0"},"reference-count":37,"publisher":"Wiley","license":[{"start":{"date-parts":[[2026,9,28]],"date-time":"2026-09-28T00:00:00Z","timestamp":1790553600000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"},{"start":{"date-parts":[[2026,9,28]],"date-time":"2026-09-28T00:00:00Z","timestamp":1790553600000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/doi.wiley.com\/10.1002\/tdm_license_1.1"}],"funder":[{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52275401"],"award-info":[{"award-number":["52275401"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52488301"],"award-info":[{"award-number":["52488301"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["advanced.onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Advanced Science"],"abstract":"<jats:title>ABSTRACT<\/jats:title>\n                  <jats:p>\n                    Three\u2010dimensional processing is a key trend in micro\/nano manufacturing, with widespread applications in photonics, manufacturing, and optical storage. However, simultaneously achieving high fabrication resolution, throughput, and quality for three\u2010dimensional structures remains challenging. Here, we propose a three\u2010dimensional multi\u2010foci light\u2010field shaping and high\u2010throughput micro\/nano manufacturing method based on a single pulse. This method combines a multi\u2010layer noise threshold filtering algorithm with a multi\u2010layer over\u2010sampling algorithm to generate a three\u2010dimensional multi\u2010foci light field with up to 5,400 laser foci across six layers using a dual\u2010spatial\u2010light\u2010modulator parallel system. In processing experiments, a representative single\u2010spatial\u2010light\u2010modulator light field contains 1,200 laser foci per pulse. Under the dual\u2010spatial\u2010light\u2010modulator parallel system, this configuration corresponds to 2,400 processing points per incident pulse, enabling a demonstrated processing throughput of 24\u00a0000\u00a0000 processing points s\n                    <jats:sup>\u22121<\/jats:sup>\n                    . In addition, the method achieves an isolated smallest feature of approximately 50\u00a0nm and demonstrates high manufacturing flexibility and broad material compatibility across inorganic, organic, and hydrogel materials. This strategy provides a precise, scalable, and efficient route for high\u2010quality three\u2010dimensional micro\/nano manufacturing.\n                  <\/jats:p>","DOI":"10.1002\/advs.77988","type":"journal-article","created":{"date-parts":[[2026,9,28]],"date-time":"2026-09-28T13:21:45Z","timestamp":1790601705000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Single\u2010Pulse Femtosecond Laser 3D Multi\u2010Foci Light\u2010Field Engineering via Multi\u2010Layer Noise Threshold Filtering"],"prefix":"10.1002","author":[{"given":"Shouyu","family":"Wu","sequence":"first","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ruiyang","family":"Wang","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0488-1987","authenticated-orcid":false,"given":"Lan","family":"Jiang","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"},{"name":"Complex and Microscopic Structure Fabrication Technologies National\u2010level Innovation Center  Beijing P. R. China"},{"name":"Yangtze Delta Region Academy of Beijing Institute of Technology  Jiaxing P. R. China"},{"name":"Beijing Institute of Technology Chongqing Innovation Center  Chongqing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Mengyao","family":"Tian","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-0473-1225","authenticated-orcid":false,"given":"Yongjiu","family":"Yuan","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Junrui","family":"Wu","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1503-4708","authenticated-orcid":false,"given":"Liang","family":"Zhao","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ruochen","family":"Zhang","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ziqian","family":"Ning","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4743-5509","authenticated-orcid":false,"given":"Xin","family":"Li","sequence":"additional","affiliation":[{"name":"Laser Micro\/Nano\u2010Fabrication Laboratory School of Mechanical Engineering Beijing Institute of Technology  Beijing P. R. China"},{"name":"Complex and Microscopic Structure Fabrication Technologies National\u2010level Innovation Center  Beijing P. R. China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2026,9,28]]},"reference":[{"key":"e_1_2_10_2_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.aax8760"},{"key":"e_1_2_10_3_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586\u2010026\u201010114\u20105"},{"key":"e_1_2_10_4_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41566\u2010026\u201001896\u20101"},{"key":"e_1_2_10_5_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202314204"},{"key":"e_1_2_10_6_1","doi-asserted-by":"publisher","DOI":"10.1002\/admt.202500131"},{"key":"e_1_2_10_7_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202420369"},{"key":"e_1_2_10_8_1","doi-asserted-by":"publisher","DOI":"10.1002\/adom.201900598"},{"key":"e_1_2_10_9_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010023\u201039227\u20105"},{"key":"e_1_2_10_10_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.4c10964"},{"key":"e_1_2_10_11_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010023\u201037163\u2010y"},{"key":"e_1_2_10_12_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010020\u201019985\u20102"},{"key":"e_1_2_10_13_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010023\u201039760\u20103"},{"key":"e_1_2_10_14_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586\u2010020\u20103029\u20107"},{"key":"e_1_2_10_15_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41566\u2010022\u201001081\u20100"},{"key":"e_1_2_10_16_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.abm8420"},{"key":"e_1_2_10_17_1","doi-asserted-by":"publisher","DOI":"10.1038\/lsa.2017.134"},{"key":"e_1_2_10_18_1","doi-asserted-by":"publisher","DOI":"10.1364\/OE.483524"},{"key":"e_1_2_10_19_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010025\u201057390\u20109"},{"key":"e_1_2_10_20_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.1c00559"},{"key":"e_1_2_10_21_1","doi-asserted-by":"publisher","DOI":"10.1088\/2040\u20108978\/15\/3\/035401"},{"key":"e_1_2_10_22_1","doi-asserted-by":"publisher","DOI":"10.1002\/marc.201900041"},{"key":"e_1_2_10_23_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41598\u2010017\u201010450\u20107"},{"key":"e_1_2_10_24_1","doi-asserted-by":"publisher","DOI":"10.1002\/lpor.202501811"},{"key":"e_1_2_10_25_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010022\u201033644\u20108"},{"key":"e_1_2_10_26_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41377\u2010023\u201001178\u20103"},{"key":"e_1_2_10_27_1","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms11928"},{"key":"e_1_2_10_28_1","doi-asserted-by":"publisher","DOI":"10.1364\/OL.39.001621"},{"key":"e_1_2_10_29_1","doi-asserted-by":"publisher","DOI":"10.1117\/1.3577704"},{"key":"e_1_2_10_30_1","doi-asserted-by":"publisher","DOI":"10.1038\/lsa.2017.11"},{"key":"e_1_2_10_31_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010019\u201010249\u20102"},{"key":"e_1_2_10_32_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.addma.2021.102491"},{"key":"e_1_2_10_33_1","doi-asserted-by":"publisher","DOI":"10.1364\/OPTICA.539108"},{"key":"e_1_2_10_34_1","doi-asserted-by":"publisher","DOI":"10.1364\/OE.18.017193"},{"issue":"2","key":"e_1_2_10_35_1","first-page":"237","article-title":"A Practical Algorithm for Determination of Phase From Image and Diffraction Plane Pictures","volume":"35","author":"Gerchberg R. W.","year":"1972","journal-title":"Optik"},{"key":"e_1_2_10_36_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijheatmasstransfer.2004.09.016"},{"key":"e_1_2_10_37_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41377\u2010022\u201000935\u20100"},{"key":"e_1_2_10_38_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41377\u2010019\u20100215\u20101"}],"container-title":["Advanced Science"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/advs.77988","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/full-xml\/10.1002\/advs.77988","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/advs.77988","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,9,28]],"date-time":"2026-09-28T13:21:46Z","timestamp":1790601706000},"score":1,"resource":{"primary":{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/10.1002\/advs.77988"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,9,28]]},"references-count":37,"alternative-id":["10.1002\/advs.77988"],"URL":"https:\/\/doi.org\/10.1002\/advs.77988","archive":["Portico"],"relation":{},"ISSN":["2198-3844","2198-3844"],"issn-type":[{"value":"2198-3844","type":"print"},{"value":"2198-3844","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,9,28]]},"assertion":[{"value":"2026-06-17","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2026-09-17","order":2,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"2026-09-28","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}],"article-number":"e77988"}}