{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,19]],"date-time":"2026-08-19T20:06:25Z","timestamp":1787169985403,"version":"build-2736575974"},"reference-count":62,"publisher":"Wiley","issue":"32","license":[{"start":{"date-parts":[[2026,6,8]],"date-time":"2026-06-08T00:00:00Z","timestamp":1780876800000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"},{"start":{"date-parts":[[2026,6,8]],"date-time":"2026-06-08T00:00:00Z","timestamp":1780876800000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/doi.wiley.com\/10.1002\/tdm_license_1.1"}],"funder":[{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Angew Chem Int Ed"],"published-print":{"date-parts":[[2026,8,3]]},"abstract":"<jats:title>ABSTRACT<\/jats:title>\n                  <jats:p>\n                    Tetrafluoromethane (CF\n                    <jats:sub>4<\/jats:sub>\n                    ) is a potent, long\u2010lived greenhouse gas widely used in semiconductor dry\u2010etching processes, yet its abatement via hydrolysis remains challenging due to the lack of catalysts that simultaneously exhibit high activity and durability under strongly fluorinating, steam\u2010rich conditions. Conventional alumina\u2010based catalysts suffer from severe activity\u2013stability tradeoffs, offering good activity only at the cost of rapid deactivation through surface\u2010area loss, bulk fluorination, and the formation of catalytically inactive\n                    <jats:italic>\u03b1<\/jats:italic>\n                    \u2010Al\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>3<\/jats:sub>\n                    . Here, we report an entropy\u2010stabilized aluminate catalyst that overcomes this long\u2010standing tradeoff by combining a multication aluminate framework with an entropy\u2010stabilized lattice. The incorporation of multiple metal cations produces an electron\u2010deficient Al\u2013O environment that enhances heterolytic C\u2013F bond activation while suppressing H\n                    <jats:sub>2<\/jats:sub>\n                    O poisoning, thereby increasing intrinsic activity under practical conditions. Simultaneously, the lattice stabilization via high configurational entropy inhibits the propagation of fluorination into the bulk lattice, effectively suppressing in situ AlF\n                    <jats:sub>3<\/jats:sub>\n                    formation and its subsequent hydrolysis to\n                    <jats:italic>\u03b1<\/jats:italic>\n                    \u2010Al\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>3<\/jats:sub>\n                    . Mechanistic studies further establish that CF\n                    <jats:sub>4<\/jats:sub>\n                    hydrolysis proceeds via a Mars\u2013van Krevelen\u2010type pathway in which lattice oxygen first oxidizes CF\n                    <jats:sub>x<\/jats:sub>\n                    surface intermediates and is replenished by H\n                    <jats:sub>2<\/jats:sub>\n                    O. These findings identify entropy\u2010stabilized aluminates as a robust materials platform capable of simultaneously achieving high activity and long\u2010term durability for CF\n                    <jats:sub>4<\/jats:sub>\n                    hydrolysis.\n                  <\/jats:p>","DOI":"10.1002\/anie.6752036","type":"journal-article","created":{"date-parts":[[2026,6,9]],"date-time":"2026-06-09T01:09:09Z","timestamp":1780967349000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":2,"title":["Entropy\u2010Stabilized Aluminate Catalysts That Break the Activity\u2013Stability Tradeoff in CF\n                    <sub>4<\/sub>\n                    Hydrolysis"],"prefix":"10.1002","volume":"65","author":[{"given":"Seunghyuck","family":"Chi","sequence":"first","affiliation":[{"name":"Department of Chemical and Biomolecular Engineering (BK21 Four) Korea Advanced Institute of Science and Technology (KAIST)  Daejeon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hyungmin","family":"Jeon","sequence":"additional","affiliation":[{"name":"Department of Chemical and Biomolecular Engineering (BK21 Four) Korea Advanced Institute of Science and Technology (KAIST)  Daejeon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yaejun","family":"Baik","sequence":"additional","affiliation":[{"name":"Department of Chemical and Biomolecular Engineering (BK21 Four) Korea Advanced Institute of Science and Technology (KAIST)  Daejeon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"DongHwan","family":"Oh","sequence":"additional","affiliation":[{"name":"Department of Chemical and Biomolecular Engineering (BK21 Four) Korea Advanced Institute of Science and Technology (KAIST)  Daejeon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jin","family":"Seok","sequence":"additional","affiliation":[{"name":"Department of Chemical and Biomolecular Engineering (BK21 Four) Korea Advanced Institute of Science and Technology (KAIST)  Daejeon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Woosung","family":"Choi","sequence":"additional","affiliation":[{"name":"EHS\/Infra Technology Research Center Samsung Electronics Co., Ltd  Hwaseong Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Seungjun","family":"Lee","sequence":"additional","affiliation":[{"name":"EHS\/Infra Technology Research Center Samsung Electronics Co., Ltd  Hwaseong Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Minkee","family":"Choi","sequence":"additional","affiliation":[{"name":"Department of Chemical and Biomolecular Engineering (BK21 Four) Korea Advanced Institute of Science and Technology (KAIST)  Daejeon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2026,6,8]]},"reference":[{"key":"e_1_2_8_2_1","doi-asserted-by":"publisher","DOI":"10.1016\/S0950\u20104230(01)00067\u20105"},{"key":"e_1_2_8_3_1","volume-title":"Intergovernmental Panel on Climate Change, Climate Change 1995: The Science of Climate Change","author":"Houghton J. T.","year":"1996"},{"key":"e_1_2_8_4_1","doi-asserted-by":"publisher","DOI":"10.1201\/b17118"},{"key":"e_1_2_8_5_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.259.5092.194"},{"key":"e_1_2_8_6_1","unstructured":"S.\u2010F.Chiou G.\u2010H.Leu andS.\u2010J.Yu(Industrial Technology Research Institute) \u201cDielectric Barrier Discharge Apparatus and Module for Perfluorocompound Abatement \u201d US Patent 6700093 B2 2004."},{"key":"e_1_2_8_7_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.cej.2012.01.077"},{"key":"e_1_2_8_8_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.surfcoat.2008.06.023"},{"key":"e_1_2_8_9_1","unstructured":"J. L.ArnoandR. M.Vermeulen(Advanced Technology Materials Inc.) \u201cFluorine Abatement Using Steam Injection in Oxidation Treatment of Semiconductor Manufacturing Effluent Gases \u201d US Patent 6423284 B1 2002."},{"key":"e_1_2_8_10_1","unstructured":"D.Bartz R. M.Kendall andF. E.Moreno(Alzeta Corporation) \u201cCombustive Destruction of Halogenated Compounds \u201d US Patent 5510093 A 1996."},{"key":"e_1_2_8_11_1","first-page":"126","article-title":"Highly Efficient Decomposition of CF4 Gases by Combustion","author":"Qin L.","year":"2010","journal-title":"Scientific Research"},{"key":"e_1_2_8_12_1","unstructured":"S.Kanno A.Honji H.Yamashita S.Azuhata S.Tamata andK.Irie(Hitachi Ltd.) \u201cProcess and Apparatus for the Decomposition of Fluorine Compounds \u201d US Patent Application 20050089461 A1 (2005)."},{"key":"e_1_2_8_13_1","unstructured":"S.Kanno T.Arato S.Ikeda K.Yasuda H.Yamashita S.Azuhata S.Tamata andK.Irie(Hitachi Ltd.) \u201cProcess for Treating Fluorine Compound\u2010Containing Gas \u201d US Patent 7347980 B2 (2008)."},{"key":"e_1_2_8_14_1","unstructured":"S.Shin H.Lee S.Choi Y.Choi D.Park Y.Jeon H.Park C.Jeong G.Choi andJ.Lee(Iwoo ENT Co. Ltd. Samsung Engineering Co. Ltd. and Puresphere Co. Ltd.) \u201cA Catalyst with Improved Durability for Treating Hazardous Gas Generated in Semiconductor Manufacturing Process \u201d KR Patent 101537995 B1 (2015)."},{"key":"e_1_2_8_15_1","unstructured":"S. H.Choi K. H.Park M. J.Kim J. S.Min S. J.Cho S. J.Yoon andD.\u2010C.Lee(Ecopro Co. Ltd.) \u201cAcid\u2010Resistant Catalyst for Decomposing Perfluorinated Compound and Use Thereof \u201d WO Patent 2017146554 A1 (2017)."},{"key":"e_1_2_8_16_1","doi-asserted-by":"publisher","DOI":"10.1021\/jacs.4c15280"},{"key":"e_1_2_8_17_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsestengg.3c00583"},{"key":"e_1_2_8_18_1","doi-asserted-by":"publisher","DOI":"10.1016\/S0926\u20103373(02)00143\u20101"},{"key":"e_1_2_8_19_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jcat.2023.08.005"},{"key":"e_1_2_8_20_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.molcata.2006.10.026"},{"key":"e_1_2_8_21_1","doi-asserted-by":"publisher","DOI":"10.1246\/cl.2005.364"},{"key":"e_1_2_8_22_1","doi-asserted-by":"publisher","DOI":"10.1039\/B302064A"},{"key":"e_1_2_8_23_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.cattod.2004.04.039"},{"key":"e_1_2_8_24_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.est.4c11326"},{"key":"e_1_2_8_25_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010026\u201068386\u20104"},{"key":"e_1_2_8_26_1","doi-asserted-by":"publisher","DOI":"10.1021\/jacs.5c23226"},{"key":"e_1_2_8_27_1","doi-asserted-by":"publisher","DOI":"10.1038\/ncomms9485"},{"key":"e_1_2_8_28_1","doi-asserted-by":"publisher","DOI":"10.1021\/jacs.2c11608"},{"key":"e_1_2_8_29_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.actamat.2020.10.043"},{"key":"e_1_2_8_30_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.apcatb.2020.119155"},{"key":"e_1_2_8_31_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010023\u201038889\u20105"},{"key":"e_1_2_8_32_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.cgd.9b01673"},{"key":"e_1_2_8_33_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.jpcc.3c01499"},{"key":"e_1_2_8_34_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jeurceramsoc.2025.117582"},{"key":"e_1_2_8_35_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.apcatb.2021.120264"},{"key":"e_1_2_8_36_1","doi-asserted-by":"publisher","DOI":"10.1039\/D2DT03759A"},{"key":"e_1_2_8_37_1","doi-asserted-by":"publisher","DOI":"10.1002\/cctc.201500379"},{"key":"e_1_2_8_38_1","doi-asserted-by":"publisher","DOI":"10.1007\/s40145\u2010019\u20100317\u20105"},{"key":"e_1_2_8_39_1","doi-asserted-by":"publisher","DOI":"10.1039\/C5RA17418J"},{"key":"e_1_2_8_40_1","doi-asserted-by":"publisher","DOI":"10.1016\/0022\u20101902(67)80008\u20103"},{"key":"e_1_2_8_41_1","first-page":"181","article-title":"Simple Spinels; Crystallographic Parameters, Cation Radii, Lattice Energies, and Cation Distribution","volume":"68","author":"O'Neill H. S. C.","year":"1983","journal-title":"American Mineralogist"},{"key":"e_1_2_8_42_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmst.2019.05.054"},{"key":"e_1_2_8_43_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.cej.2024.152880"},{"key":"e_1_2_8_44_1","doi-asserted-by":"publisher","DOI":"10.1021\/jacs.4c06154"},{"key":"e_1_2_8_45_1","doi-asserted-by":"publisher","DOI":"10.1002\/anie.202207316"},{"key":"e_1_2_8_46_1","doi-asserted-by":"publisher","DOI":"10.1016\/0021\u20109517(92)90239\u2010E"},{"key":"e_1_2_8_47_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jcat.2007.06.029"},{"key":"e_1_2_8_48_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.jpcc.1c03175"},{"key":"e_1_2_8_49_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jcat.2004.04.020"},{"key":"e_1_2_8_50_1","doi-asserted-by":"publisher","DOI":"10.1116\/1.1247880"},{"key":"e_1_2_8_51_1","doi-asserted-by":"publisher","DOI":"10.1039\/b821484k"},{"key":"e_1_2_8_52_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467\u2010022\u201030018\u2010y"},{"key":"e_1_2_8_53_1","doi-asserted-by":"publisher","DOI":"10.1021\/ja00905a001"},{"key":"e_1_2_8_54_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.151.3707.172"},{"key":"e_1_2_8_55_1","doi-asserted-by":"publisher","DOI":"10.1021\/ic00277a030"},{"key":"e_1_2_8_56_1","doi-asserted-by":"publisher","DOI":"10.1039\/df9715200264"},{"key":"e_1_2_8_57_1","doi-asserted-by":"publisher","DOI":"10.1016\/S0022\u20102860(01)00564\u20106"},{"key":"e_1_2_8_58_1","doi-asserted-by":"publisher","DOI":"10.1201\/9781420007282"},{"key":"e_1_2_8_59_1","doi-asserted-by":"publisher","DOI":"10.3390\/chemengineering9010010"},{"key":"e_1_2_8_60_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.cej.2022.135530"},{"key":"e_1_2_8_61_1","doi-asserted-by":"publisher","DOI":"10.1039\/jm9960600073"},{"key":"e_1_2_8_62_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ceramint.2016.03.074"},{"key":"e_1_2_8_63_1","doi-asserted-by":"publisher","DOI":"10.1016\/0022\u20100248(78)90485\u20102"}],"container-title":["Angewandte Chemie International Edition"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/anie.6752036","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/full-xml\/10.1002\/anie.6752036","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/anie.6752036","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,7,31]],"date-time":"2026-07-31T18:08:56Z","timestamp":1785521336000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/anie.6752036"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2026,6,8]]},"references-count":62,"journal-issue":{"issue":"32","published-print":{"date-parts":[[2026,8,3]]}},"alternative-id":["10.1002\/anie.6752036"],"URL":"https:\/\/doi.org\/10.1002\/anie.6752036","archive":["Portico"],"relation":{},"ISSN":["1433-7851","1521-3773"],"issn-type":[{"value":"1433-7851","type":"print"},{"value":"1521-3773","type":"electronic"}],"subject":[],"published":{"date-parts":[[2026,6,8]]},"assertion":[{"value":"2026-02-19","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2026-05-11","order":2,"name":"accepted","label":"Accepted","group":{"name":"publication_history","label":"Publication History"}},{"value":"2026-06-08","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}],"article-number":"e6752036"}}