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Silicon photonic programmable processors bring these advantages to a solid\u2010state platform, providing compact form factors and low power consumption, although the scalability of densely integrated circuits is still under active investigation. In this article, we present a comprehensive study of the essential photonic components required for large\u2010scale integration of silicon photonic processors, covering both design and experimental demonstration. We analyse and optimise the fundamental building blocks\u2014including splitters, phase shifters, and crossings\u2014and experimentally validate their scalability through wafer\u2010scale characterisation. 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