{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,17]],"date-time":"2026-03-17T20:44:21Z","timestamp":1773780261080,"version":"3.50.1"},"reference-count":68,"publisher":"Wiley","issue":"3","license":[{"start":{"date-parts":[[2006,12,7]],"date-time":"2006-12-07T00:00:00Z","timestamp":1165449600000},"content-version":"vor","delay-in-days":4238,"URL":"http:\/\/onlinelibrary.wiley.com\/termsAndConditions#vor"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Scanning"],"published-print":{"date-parts":[[1995,5]]},"abstract":"<jats:title>Abstract<\/jats:title><jats:p>This article gives an account of the origins of the scanning electron microscope (SEM) and traces its development up to 1965 when the first SEM was marketed by the Cambridge Instrument Company. The survey concentrates on the SEM, as distinct from the microanalytic electron probe instruments that were also being developed during this period.<\/jats:p>","DOI":"10.1002\/sca.4950170309","type":"journal-article","created":{"date-parts":[[2010,6,24]],"date-time":"2010-06-24T16:39:16Z","timestamp":1277397556000},"page":"175-185","source":"Crossref","is-referenced-by-count":148,"title":["Scanning electron microscopy 1928\u20131965"],"prefix":"10.1002","volume":"17","author":[{"given":"D.","family":"McMullan","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"311","published-online":{"date-parts":[[2006,12,7]]},"reference":[{"key":"e_1_2_1_2_1","unstructured":"AhmedH:Studies on high current density thermionic cathodes. Ph.D. Dissertation Cambridge University (1962)."},{"key":"e_1_2_1_3_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.1740838"},{"key":"e_1_2_1_4_1","first-page":"245","article-title":"The scanning electron microscope\u2014A new tool in fibre technology","volume":"1","author":"Atack D","year":"1956","journal-title":"Pulp Pap Mag Can"},{"key":"e_1_2_1_5_1","unstructured":"BainA: Electric time pieces and telegraphs. British patent no. 9745 filed 27 May1843."},{"key":"e_1_2_1_6_1","unstructured":"BaxterAS:Detection and analysis of low energy disintegration particles. Ph.D. Dissertation Cambridge University (1949)."},{"key":"e_1_2_1_7_1","first-page":"78","article-title":"The scanning electron microscope","volume":"10","author":"Bernard R","year":"1957","journal-title":"Ann Univ Lyon Sci Sect B [3]"},{"key":"e_1_2_1_8_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.1715982"},{"key":"e_1_2_1_9_1","first-page":"369","article-title":"Note sur le pouvoir s\u00e9parateur du microscope \u00e9lectronique \u00e0 balayage","volume":"45","author":"Brachet C","year":"1946","journal-title":"Bull Assoc Tech Marit Aeronaut no"},{"key":"e_1_2_1_10_1","unstructured":"BroersAN:Selective ion beam etching in the scanning electron microscope. Ph.D. Dissertation Cambridge University (1965)."},{"key":"e_1_2_1_11_1","first-page":"5","article-title":"Secondary emission","volume":"17","author":"Bruining H","year":"1938","journal-title":"Physica (Amsterdam)"},{"key":"e_1_2_1_12_1","first-page":"414","article-title":"The monoscope","volume":"2","author":"Burnett CE","year":"1938","journal-title":"RCA Review"},{"key":"e_1_2_1_13_1","unstructured":"CastaingR GuinierA: Application des sondes \u00e9lectroniques \u00e0 analyse m\u00e9tallographique.Proc Conf Electron Microsc Delft60\u201363(1949)."},{"key":"e_1_2_1_14_1","first-page":"3937","article-title":"Electron beam machining of silicon observed with SEM (abstr)","volume":"37","author":"Chang THP","year":"1966","journal-title":"J Appl Phys"},{"key":"e_1_2_1_15_1","doi-asserted-by":"publisher","DOI":"10.1038\/1771172b0"},{"key":"e_1_2_1_16_1","first-page":"331","article-title":"R\u00fcckstreukoeffizient und Sekund\u00e4relektronen\u2010Ausbeute von 10\u2013100 keV\u2010Elektronen und Beziehungen zur Raster\u2010Elektronenmikroskopie","volume":"29","author":"Drescher H","year":"1970","journal-title":"Zangew Phys"},{"key":"e_1_2_1_17_1","unstructured":"DuncumbP MelfordDA:Design considerations of an x\u2010ray scanning microanalyser used mainly for metallurgical applications.Proc 2nd Int Symp X\u2010ray Microsc Microanalysis Stockholm358\u2013367(1960)."},{"key":"e_1_2_1_18_1","doi-asserted-by":"publisher","DOI":"10.1088\/0950-7671\/37\/7\/307"},{"key":"e_1_2_1_19_1","volume-title":"The Electron Microscope","author":"Gabor D","year":"1945"},{"key":"e_1_2_1_20_1","unstructured":"HillierJ: Electron probe analysis employing x\u2010ray spectrography. US Patent No 2 418 029 (1947)."},{"key":"e_1_2_1_21_1","doi-asserted-by":"publisher","DOI":"10.1016\/0048-7333(72)90017-0"},{"key":"e_1_2_1_22_1","first-page":"467","article-title":"Aufladepotentiel und Sekund\u00e4remission elektronenbestrahlter K\u00f6rper","volume":"16","author":"Knoll M","year":"1935","journal-title":"Z tech Phys"},{"key":"e_1_2_1_23_1","first-page":"120","article-title":"Nachweis aufgewachsener Oxydschichten des Eisens mit dem Elektronenabtaster","volume":"42","author":"Knoll M","year":"1941","journal-title":"Phys Z"},{"key":"e_1_2_1_24_1","first-page":"709","article-title":"Scanning electron microscope and x\u2010ray microanalyser","volume":"25","author":"Kushnir YuM","year":"1961","journal-title":"Bull Acad Sci USSR Phys Ser"},{"key":"e_1_2_1_25_1","doi-asserted-by":"publisher","DOI":"10.1088\/0370-1301\/68\/9\/414"},{"key":"e_1_2_1_26_1","first-page":"33","article-title":"\u00dcber das plastische Abdruckverfahren zur \u00fcbermikroskopischen Untersuchung von Oberfl\u00e4chen","volume":"22","author":"Mahl H","year":"1941","journal-title":"Z tech Phys"},{"key":"e_1_2_1_27_1","first-page":"232","article-title":"Untersuchungen \u00fcber die Sekund\u00e4relektronenemission von verschiedenen Legierungen","volume":"22","author":"Matthes I","year":"1942","journal-title":"Z tech Phys"},{"key":"e_1_2_1_28_1","unstructured":"McMullanD:Investigations relating to the design of electron microscopes. Ph.D. Dissertation Cambridge University (1952)."},{"key":"e_1_2_1_29_1","doi-asserted-by":"crossref","unstructured":"McMullanD:An improved scanning microscope for opaque specimens.Proc Inst Electr Engrs 100 Part II 245\u2013259(1953): reprinted inSelected Papers on Electron OpticsVol. MS94 (Ed. Hawkes PW). SPIE Milestones (1994) 186\u2013200.","DOI":"10.1049\/pi-2.1953.0095"},{"key":"e_1_2_1_30_1","first-page":"283","article-title":"Von Ardenne and the scanning electron microscope","volume":"23","author":"McMullan D","year":"1988","journal-title":"Proc Roy Microsc Soc"},{"key":"e_1_2_1_31_1","first-page":"127","article-title":"The prehistory of scanned image microscopy, Part 1: Scanned optical microscopes","volume":"25","author":"McMullan D","year":"1990","journal-title":"Proc Roy Microsc Soc"},{"key":"e_1_2_1_32_1","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRev.56.705"},{"key":"e_1_2_1_33_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.331666"},{"key":"e_1_2_1_34_1","doi-asserted-by":"publisher","DOI":"10.1080\/00207215708937060"},{"key":"e_1_2_1_35_1","doi-asserted-by":"publisher","DOI":"10.1016\/B978-0-12-014578-2.50019-9"},{"key":"e_1_2_1_36_1","doi-asserted-by":"publisher","DOI":"10.1016\/S0065-2539(08)61010-0"},{"key":"e_1_2_1_37_1","doi-asserted-by":"publisher","DOI":"10.1088\/0950-7671\/31\/6\/303"},{"key":"e_1_2_1_38_1","first-page":"1492","article-title":"Composante rediffus\u00e9e du rayonnement \u00e9lectronique sec\u2010ondaire des m\u00e9taux","volume":"224","author":"Palluel P","year":"1947","journal-title":"CR Acad Sci"},{"key":"e_1_2_1_39_1","doi-asserted-by":"publisher","DOI":"10.1088\/0950-7671\/42\/2\/305"},{"key":"e_1_2_1_40_1","first-page":"363","volume-title":"Electron Beam Interactions with Solids","author":"Peters K\u2010R","year":"1982"},{"key":"e_1_2_1_41_1","first-page":"134","article-title":"An early history of the electron microscope in the United States. In","volume":"73","author":"Reisner JH","year":"1989","journal-title":"Adv Electronics Electron Phys"},{"key":"e_1_2_1_42_1","doi-asserted-by":"publisher","DOI":"10.1007\/BF01338960"},{"key":"e_1_2_1_43_1","doi-asserted-by":"publisher","DOI":"10.1007\/BF01341457"},{"key":"e_1_2_1_44_1","unstructured":"SanderKF:An automatic electron trajectory tracer and contributions to the design of an electrostatic electron microscope. Ph.D. Dissertation Cambridge University (1951)."},{"key":"e_1_2_1_45_1","unstructured":"SmithKCA:The scanning electron microscope and its fields of application. Ph.D. Dissertation Cambridge University (1956)."},{"key":"e_1_2_1_46_1","first-page":"T366","article-title":"Scanning electron microscopy in pulp and paper research","volume":"60","author":"Smith KCA","year":"1959","journal-title":"Pulp Pap Mag Can Tech Sect"},{"key":"e_1_2_1_47_1","unstructured":"SmithKCA:A versatile scanning electron microscope.Proc Europ Conf Electron Microsc Delft 177\u2013180(1961)."},{"key":"e_1_2_1_48_1","doi-asserted-by":"publisher","DOI":"10.1088\/0508-3443\/6\/11\/304"},{"key":"e_1_2_1_49_1","unstructured":"StewartADG SnellingMA:A new scanning electron microscope.Proc 3rd Europ Conf Electron Microsc Prague55\u201356(1965)."},{"key":"e_1_2_1_50_1","unstructured":"StewartADG:Investigation of the topography of ion\u2010bombarded surfaces with a scanning electron microscope.Proc 5th Internat Conf Electron Microsc Philadelphia D12\u2013D13 (1962)."},{"key":"e_1_2_1_51_1","unstructured":"StintzingH: Verfahren und Einrichtung zum automatischen Nachweis Messung und Z\u00e4hlung von Einzelteilchen beliebiger Art Form und Gr\u00f6sse. German patent No. 485155 (1929a)."},{"key":"e_1_2_1_52_1","unstructured":"StintzingH: Einrichtung zum automatischen Nachweis Messung und Z\u00e4hlung von Einzelteilchen beliebiger Art Form und Gr\u00f6sse nach Patent 485155 insbesondere zur Erzeugung sehr enger Strahlen\u2010b\u00fcndel. German patent No. 485156 (1929b)."},{"key":"e_1_2_1_53_1","doi-asserted-by":"publisher","DOI":"10.1080\/14786440808564615"},{"key":"e_1_2_1_54_1","doi-asserted-by":"publisher","DOI":"10.1080\/14786443209461931"},{"key":"e_1_2_1_55_1","unstructured":"ThornleyRFM:Recent developments in scanning electron microscopy.Proc Europ Conf Electron Microsc Delft173\u2013176(1961)."},{"key":"e_1_2_1_56_1","doi-asserted-by":"publisher","DOI":"10.1007\/BF01341584"},{"key":"e_1_2_1_57_1","first-page":"407","article-title":"Das Elektronen\u2010Rastermikroskop. Praktische Aus\u2010f\u00fchrung","volume":"19","author":"von Ardenne M","year":"1938","journal-title":"Z tech Phys"},{"key":"e_1_2_1_58_1","unstructured":"von ArdenneM: Improvements in electron microscopes. British patent no. 511204 convention date (Germany) 18Feb1937."},{"key":"e_1_2_1_59_1","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-642-47348-7"},{"key":"e_1_2_1_59_2","volume-title":"Elektronen\u2010 \u00dcbermikroskopie","year":"1943"},{"key":"e_1_2_1_60_1","volume-title":"Ein gl\u00fcckliches Leben f\u00fcr Technik und Forschung","author":"von Ardenne M","year":"1972"},{"key":"e_1_2_1_61_1","doi-asserted-by":"publisher","DOI":"10.1016\/B978-0-12-014578-2.50007-2"},{"key":"e_1_2_1_62_1","doi-asserted-by":"publisher","DOI":"10.1007\/BF01341458"},{"key":"e_1_2_1_63_1","unstructured":"WellsOC:The construction of a scanning electron microscope and its application to the study of fibres. Ph.D. Dissertation Cambridge University (1957)."},{"key":"e_1_2_1_64_1","doi-asserted-by":"publisher","DOI":"10.1088\/0508-3443\/11\/5\/306"},{"key":"e_1_2_1_65_1","doi-asserted-by":"crossref","unstructured":"WellsOC EverhartTE MattaRK:Automatic positioning of device electrodes using the scanning electron microscope.IEEE Trans Electron Dev ED\u201012 556\u2013563(1965).","DOI":"10.1109\/T-ED.1965.15607"},{"key":"e_1_2_1_66_1","first-page":"672","article-title":"Electric microscope. 1\u00b0","author":"Zworykin VA","year":"1934","journal-title":"Congresso Internazionale di Electroradio\u2010biologia"},{"key":"e_1_2_1_67_1","unstructured":"ZworykinVA HillierJ SnyderRL:A scanning electron microscope.ASTM Bull117 15\u201323(1942a): reprinted inSelected Papers on Electron OpticsVol. MS94 (Ed. Hawkes PW). SPIE Milestones (1994) 177\u2013185."},{"key":"e_1_2_1_68_1","first-page":"255","article-title":"A scanning electron microscope (abstr)","volume":"30","author":"Zworykin VA","year":"1942","journal-title":"Proc Inst Radio Engrs"}],"container-title":["Scanning"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.wiley.com\/onlinelibrary\/tdm\/v1\/articles\/10.1002%2Fsca.4950170309","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/sca.4950170309","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,10,26]],"date-time":"2023-10-26T02:36:20Z","timestamp":1698287780000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/sca.4950170309"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[1995,5]]},"references-count":68,"journal-issue":{"issue":"3","published-print":{"date-parts":[[1995,5]]}},"alternative-id":["10.1002\/sca.4950170309"],"URL":"https:\/\/doi.org\/10.1002\/sca.4950170309","archive":["Portico"],"relation":{},"ISSN":["0161-0457","1932-8745"],"issn-type":[{"value":"0161-0457","type":"print"},{"value":"1932-8745","type":"electronic"}],"subject":[],"published":{"date-parts":[[1995,5]]}}}