{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,26]],"date-time":"2026-09-26T16:44:48Z","timestamp":1790441088285,"version":"4.1.0"},"reference-count":58,"publisher":"Wiley","issue":"27","license":[{"start":{"date-parts":[[2023,3,16]],"date-time":"2023-03-16T00:00:00Z","timestamp":1678924800000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by-nc\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100008967","name":"Bilim Akademisi","doi-asserted-by":"publisher","award":["YoungScientistAwardsProgram(BAGEP)"],"award-info":[{"award-number":["YoungScientistAwardsProgram(BAGEP)"]}],"id":[{"id":"10.13039\/501100008967","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Small"],"published-print":{"date-parts":[[2023,7]]},"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>\n                    Although hypodermic needles are a \u201cgold standard\u201d for transdermal drug delivery (TDD), microneedle (MN)\u2010mediated TDD denotes an unconventional approach in which drug compounds are delivered via micron\u2010size needles. Herein, an isotropic XeF\n                    <jats:sub>2<\/jats:sub>\n                    dry etching process is explored to fabricate silicon\u2010based solid MNs. A photolithographic process, including mask writing, UV exposure, and dry etching with XeF\n                    <jats:sub>2<\/jats:sub>\n                    is employed, and the MN fabrication is successfully customized by modifying the CAD designs, photolithographic process, and etching conditions. This study enables fabrication of a very dense MNs (up to 1452 MNs cm\n                    <jats:sup>\u22122<\/jats:sup>\n                    ) with height varying between 80 and 300\u00a0\u00b5m. Geometrical features are also assessed using scanning electron microscopy (SEM) and 3D laser scanning microscope. Roughness of the MNs are improved from 0.71 to 0.35\u00a0\u00b5m after titanium and chromium coating. Mechanical failure test is conducted using dynamic mechanical analyzer to determine displacement and stress\/strain values. The coated MNs are subjected to less displacement (\u224815\u00a0\u00b5m) upon the\u00a0applied force. COMSOL Multiphysics analysis indicates that\u00a0MNs are safe to use in real\u2010life applications with no fracture. This technique also\u00a0enables the production of MNs with distinct shape and dimensions. The optimized process provides a wide range of solid MN types to be utilized for epidermis targeting.\n                  <\/jats:p>","DOI":"10.1002\/smll.202206510","type":"journal-article","created":{"date-parts":[[2023,3,16]],"date-time":"2023-03-16T08:14:41Z","timestamp":1678954481000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":26,"title":["Xenon Difluoride Dry Etching for the Microfabrication of Solid Microneedles as a Potential Strategy in Transdermal Drug Delivery"],"prefix":"10.1002","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-7369-1039","authenticated-orcid":false,"given":"Ismail","family":"E\u015f","sequence":"first","affiliation":[{"name":"UNAM\u2014National Nanotechnology Research Center Bilkent University  Ankara 06800 Turkey"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Abdullah","family":"Kafadenk","sequence":"additional","affiliation":[{"name":"UNAM\u2014National Nanotechnology Research Center Bilkent University  Ankara 06800 Turkey"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"M. Burak","family":"Gormus","sequence":"additional","affiliation":[{"name":"UNAM\u2014National Nanotechnology Research Center Bilkent University  Ankara 06800 Turkey"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9918-5038","authenticated-orcid":false,"given":"Fatih","family":"Inci","sequence":"additional","affiliation":[{"name":"UNAM\u2014National Nanotechnology Research Center Bilkent University  Ankara 06800 Turkey"},{"name":"Institute of Materials Science and Nanotechnology Bilkent University  Ankara 06800 Turkey"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2023,3,16]]},"reference":[{"key":"e_1_2_9_1_1","doi-asserted-by":"publisher","DOI":"10.1111\/srt.12968"},{"key":"e_1_2_9_2_1","doi-asserted-by":"publisher","DOI":"10.4103\/tjps.TJPS_2_17"},{"key":"e_1_2_9_3_1","doi-asserted-by":"publisher","DOI":"10.1186\/s40824-021-00226-6"},{"key":"e_1_2_9_4_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.actbio.2020.12.023"},{"key":"e_1_2_9_5_1","doi-asserted-by":"publisher","DOI":"10.2165\/00137696-200604030-00003"},{"key":"e_1_2_9_6_1","doi-asserted-by":"publisher","DOI":"10.1038\/nbt.1504"},{"key":"e_1_2_9_7_1","first-page":"184","volume":"256","author":"Fernandes M.","year":"2005","journal-title":"J. Membr. Sci."},{"key":"e_1_2_9_8_1","doi-asserted-by":"publisher","DOI":"10.1002\/adhm.201801054"},{"key":"e_1_2_9_9_1","doi-asserted-by":"publisher","DOI":"10.1021\/js980042"},{"key":"e_1_2_9_10_1","doi-asserted-by":"publisher","DOI":"10.3390\/bios11090296"},{"key":"e_1_2_9_11_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jddst.2022.103653"},{"key":"e_1_2_9_12_1","first-page":"1","volume":"17","author":"Tariq N.","year":"2021","journal-title":"J. Pharm. Innovation"},{"key":"e_1_2_9_13_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ijpharm.2021.121092"},{"key":"e_1_2_9_14_1","doi-asserted-by":"publisher","DOI":"10.3762\/bjnano.12.77"},{"key":"e_1_2_9_15_1","doi-asserted-by":"publisher","DOI":"10.1039\/D0RA06070D"},{"key":"e_1_2_9_16_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00170-018-2596-3"},{"key":"e_1_2_9_17_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-021-00284-9"},{"key":"e_1_2_9_18_1","doi-asserted-by":"publisher","DOI":"10.1038\/micronano.2017.73"},{"key":"e_1_2_9_19_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi11110961"},{"key":"e_1_2_9_20_1","doi-asserted-by":"publisher","DOI":"10.1007\/s00542-012-1552-7"},{"key":"e_1_2_9_21_1","first-page":"9","volume":"108","author":"Wu B.","year":"2010","journal-title":"J. Appl. Phys."},{"key":"e_1_2_9_22_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.90562"},{"key":"e_1_2_9_23_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2003.10.069"},{"key":"e_1_2_9_24_1","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2012.2209403"},{"key":"e_1_2_9_25_1","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/17\/2\/026"},{"key":"e_1_2_9_26_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-019-0077-y"},{"key":"e_1_2_9_27_1","doi-asserted-by":"publisher","DOI":"10.1049\/mnl.2012.0585"},{"key":"e_1_2_9_28_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.biomaterials.2011.03.012"},{"key":"e_1_2_9_29_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.actbio.2016.10.021"},{"key":"e_1_2_9_30_1","unstructured":"M.Properties \u201cMaterial Properties contributors \u2018What is Silicone \u2013 Properties of Silicone Element \u2013 Symbol Si \u2019 (accessed October 5 2022 \u201d can be found underhttps:\/\/material-properties.org\/silicon-mechanical-properties-strength-hardness-crystal-structure\/#:~:text=YieldYield\u00a0strength of Silicon is 165\u00a0MPa. n.d."},{"key":"e_1_2_9_31_1","doi-asserted-by":"publisher","DOI":"10.1146\/annurev-chembioeng-060816-101514"},{"key":"e_1_2_9_32_1","doi-asserted-by":"publisher","DOI":"10.1097\/AJP.0b013e31816778f9"},{"key":"e_1_2_9_33_1","doi-asserted-by":"publisher","DOI":"10.1007\/s10544-008-9208-1"},{"key":"e_1_2_9_34_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi11070638"},{"key":"e_1_2_9_35_1","first-page":"186","volume":"34","author":"Ji J.","year":"2006","journal-title":"J. Phys.: Conf. Ser."},{"key":"e_1_2_9_36_1","doi-asserted-by":"publisher","DOI":"10.1557\/PROC-1052-DD07-07"},{"key":"e_1_2_9_37_1","unstructured":"Usage Policies Notebook for Xenon Difluoride (XeF2) Isotropic Si Etch 2014 https:\/\/www.inrf.uci.edu\/wordpress\/wp-content\/uploads\/sop-dry-xef2-etch-notebook.pdf."},{"key":"e_1_2_9_38_1","doi-asserted-by":"publisher","DOI":"10.1007\/s40820-021-00778-1"},{"key":"e_1_2_9_39_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.msec.2015.11.033"},{"key":"e_1_2_9_40_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.mser.2016.03.001"},{"key":"e_1_2_9_41_1","doi-asserted-by":"publisher","DOI":"10.1080\/1061186X.2018.1435664"},{"key":"e_1_2_9_42_1","doi-asserted-by":"publisher","DOI":"10.1080\/01694243.2012.705101"},{"key":"e_1_2_9_43_1","doi-asserted-by":"publisher","DOI":"10.3390\/pharmaceutics7040471"},{"key":"e_1_2_9_44_1","doi-asserted-by":"publisher","DOI":"10.1111\/ics.12636"},{"key":"e_1_2_9_45_1","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/22\/1\/015016"},{"key":"e_1_2_9_46_1","doi-asserted-by":"publisher","DOI":"10.2109\/jcersj2.16034"},{"key":"e_1_2_9_47_1","first-page":"9","volume-title":"2006 10th IEEE Intersociety Conf. Thermal and Thermomechanical Phenomena in Electronic Systems (I\u2010THERM)","author":"Tseng A. A.","year":"2006"},{"key":"e_1_2_9_48_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.apsusc.2019.144673"},{"key":"e_1_2_9_49_1","doi-asserted-by":"publisher","DOI":"10.1021\/acssensors.0c02330"},{"key":"e_1_2_9_50_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.analchem.8b04877"},{"key":"e_1_2_9_51_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.sna.2015.05.020"},{"key":"e_1_2_9_52_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201909197"},{"key":"e_1_2_9_53_1","doi-asserted-by":"publisher","DOI":"10.1186\/1297-9716-45-36"},{"key":"e_1_2_9_54_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.molimm.2014.10.023"},{"key":"e_1_2_9_55_1","doi-asserted-by":"publisher","DOI":"10.1039\/C7RA10928H"},{"key":"e_1_2_9_56_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-020-00206-1"},{"key":"e_1_2_9_57_1","doi-asserted-by":"publisher","DOI":"10.3389\/fbioe.2019.00296"},{"key":"e_1_2_9_58_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jddst.2020.102192"}],"container-title":["Small"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/smll.202206510","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/full-xml\/10.1002\/smll.202206510","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/smll.202206510","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,22]],"date-time":"2025-10-22T14:04:52Z","timestamp":1761141892000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/smll.202206510"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,3,16]]},"references-count":58,"journal-issue":{"issue":"27","published-print":{"date-parts":[[2023,7]]}},"alternative-id":["10.1002\/smll.202206510"],"URL":"https:\/\/doi.org\/10.1002\/smll.202206510","archive":["Portico"],"relation":{},"ISSN":["1613-6810","1613-6829"],"issn-type":[{"value":"1613-6810","type":"print"},{"value":"1613-6829","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,3,16]]},"assertion":[{"value":"2022-10-21","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2023-03-16","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}],"article-number":"2206510"}}