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However, enzymatic activity decreases rapidly ex vivo, which highlights the need for precise on\u2010site detection of DNase\u2010I. Here, a localized surface plasmon resonance (LSPR) biosensor that enables the simple and rapid detection of DNase\u2010I is reported. Moreover, a novel technique named electrochemical deposition and mild thermal annealing (EDMIT) is applied to overcome signal variations. By taking advantage of the low adhesion of gold clusters on indium tin oxide substrates, both the uniformity and sphericity of gold nanoparticles are increased under mild thermal annealing conditions via coalescence and Ostwald ripening. This ultimately results in an approximately 15\u2010fold decrease in LSPR signal variations. The linear range of the fabricated sensor is 20\u20131000\u00a0ng\u00a0mL<jats:sup>\u22121<\/jats:sup> with a limit of detection (LOD) of 127.25 pg\u00a0mL<jats:sup>\u22121<\/jats:sup>, as demonstrated by spectral absorbance analyses. The fabricated LSPR sensor stably measured DNase\u2010I concentrations from samples collected from both an inflammatory bowel disease (IBD) mouse model, as well as human patients with severe COVID\u201019 symptoms. Therefore, the proposed LSPR sensor fabricated via the EDMIT method can be used for early diagnosis of other infectious diseases.<\/jats:p>","DOI":"10.1002\/smll.202302023","type":"journal-article","created":{"date-parts":[[2023,5,29]],"date-time":"2023-05-29T03:41:45Z","timestamp":1685331705000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":9,"title":["Uniform Gold Nanostructure Formation via Weakly Adsorbed Gold Films and Thermal Annealing for Reliable Localized Surface Plasmon Resonance\u2010Based Detection of DNase\u2010I"],"prefix":"10.1002","volume":"19","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-0238-8403","authenticated-orcid":false,"given":"Joon\u2010Ha","family":"Park","sequence":"first","affiliation":[{"name":"School of Integrative Engineering Chung\u2010Ang University 06974 Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chi\u2010Pin James","family":"Wang","sequence":"additional","affiliation":[{"name":"Department of Biomedical Engineering SKKU Institute for Convergence Sungkyunkwan University (SKKU) 16419 Suwon Republic of Korea"},{"name":"Department of Intelligent Precision Healthcare Convergence SKKU Institute for Convergence Sungkyunkwan University (SKKU) 16419 Suwon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hye\u2010Jin","family":"Lee","sequence":"additional","affiliation":[{"name":"Department of Chemistry Sungkyunkwan University 16419 Suwon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Kyung Soo","family":"Hong","sequence":"additional","affiliation":[{"name":"Division of Pulmonology and Allergy Department of Internal Medicine College of Medicine Yeungnam University Regional Center for Respiratory Diseases Yeungnam University Medical Center 42415 Daegu Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jung Hong","family":"Ahn","sequence":"additional","affiliation":[{"name":"Division of Pulmonology and Allergy Department of Internal Medicine College of Medicine Yeungnam University Regional Center for Respiratory Diseases Yeungnam University Medical Center 42415 Daegu Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7172-4469","authenticated-orcid":false,"given":"Yeon\u2010Woo","family":"Cho","sequence":"additional","affiliation":[{"name":"School of Integrative Engineering Chung\u2010Ang University 06974 Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jeong\u2010Hyeon","family":"Lee","sequence":"additional","affiliation":[{"name":"School of Integrative Engineering Chung\u2010Ang University 06974 Seoul Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hee Seung","family":"Seo","sequence":"additional","affiliation":[{"name":"Department of Biomedical Engineering SKKU Institute for Convergence Sungkyunkwan University (SKKU) 16419 Suwon Republic of Korea"},{"name":"Department of Intelligent Precision Healthcare Convergence SKKU Institute for Convergence Sungkyunkwan University (SKKU) 16419 Suwon Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wooram","family":"Park","sequence":"additional","affiliation":[{"name":"Department of Integrative Biotechnology College of Biotechnology and Bioengineering Sungkyunkwan University Seoburo 2066 Suwon Gyeonggi 16419 Republic of Korea"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Se\u2010Na","family":"Kim","sequence":"additional","affiliation":[{"name":"Research and Development Center MediArk Inc. 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