{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,21]],"date-time":"2026-08-21T13:30:41Z","timestamp":1787319041563,"version":"build-2736575974"},"reference-count":50,"publisher":"Wiley","issue":"51","license":[{"start":{"date-parts":[[2025,11,7]],"date-time":"2025-11-07T00:00:00Z","timestamp":1762473600000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/onlinelibrary.wiley.com\/termsAndConditions#vor"},{"start":{"date-parts":[[2025,11,7]],"date-time":"2025-11-07T00:00:00Z","timestamp":1762473600000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/doi.wiley.com\/10.1002\/tdm_license_1.1"}],"funder":[{"DOI":"10.13039\/501100012166","name":"National Key Research and Development Program of China","doi-asserted-by":"publisher","award":["2024YFA1211400"],"award-info":[{"award-number":["2024YFA1211400"]}],"id":[{"id":"10.13039\/501100012166","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62304146"],"award-info":[{"award-number":["62304146"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52202183"],"award-info":[{"award-number":["52202183"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52302190"],"award-info":[{"award-number":["52302190"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52350410475"],"award-info":[{"award-number":["52350410475"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["52572179"],"award-info":[{"award-number":["52572179"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100021171","name":"Basic and Applied Basic Research Foundation of Guangdong Province","doi-asserted-by":"publisher","award":["2023B1515120041"],"award-info":[{"award-number":["2023B1515120041"]}],"id":[{"id":"10.13039\/501100021171","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Small"],"published-print":{"date-parts":[[2025,12]]},"abstract":"<jats:title>Abstract<\/jats:title>\n                  <jats:p>2D semiconductors hold great potential for post\u2010Moore complementary\u2010metal\u2010oxide semiconductor (CMOS) technology. However, the doping\u2010free CMOS logic circuits utilizing identical 2D semiconductors pose a critical challenge in achieving efficient metal\u2010dependent polarity modulation, predominantly due to interface defects and Fermi\u2010level pinning (FLP) caused by metallization\u2010induced chemical interactions. Here, a doping\u2010free CMOS fabrication strategy is reported that employs a tellurium (Te) buffer\u2010layer\u2010assisted thermal deposition of the same metal to enable complementary polarity transport on the same 2D semiconductor. By introducing a sacrificial Te buffer\u2010layer onto the 2D semiconductors prior to the thermal deposition of metal and subsequent controlled annealing for its complete removal, the created quasi\u2010van der Waals (vdW) metal\u2010semiconductor interface achieves work\u2010function\u2010dependent polarity control. This contrasts with conventional deposited contacts that lead to FLP\u2010dominated n\u2010type behavior. By utilizing high\u2010work\u2010function Au metal to modulate the polarity of the same 2D semiconductor, the fabricated CMOS inverter realizes a voltage gain of 165 at a 5\u00a0V bias and a 95% total noise margin. Importantly, this technique is readily applicable to scalable, industry\u2010compatible CMOS devices manufacturing while concurrently optimizing interfacial charge transport characteristics, demonstrating back\u2010end\u2010of\u2010line (BEOL) compatibility. This study establishes a foundational framework for 3D monolithic integration through Fermi\u2010level engineering, paving the way for next\u2010generation vertically integrated nanoelectronics.<\/jats:p>","DOI":"10.1002\/smll.202511473","type":"journal-article","created":{"date-parts":[[2025,11,7]],"date-time":"2025-11-07T13:07:11Z","timestamp":1762520831000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Doping\u2010Free Monolithic 2D CMOS Logic by Fermi\u2010Level Engineering via Tellurium Buffer\u2010Layer"],"prefix":"10.1002","volume":"21","author":[{"given":"Hao","family":"Liu","sequence":"first","affiliation":[{"name":"Songshan Lake Materials Laboratory  Dongguan 523808 China"},{"name":"College of Physics Liaoning University  Shenyang 110036 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lingan","family":"Kong","sequence":"additional","affiliation":[{"name":"Songshan Lake Materials Laboratory  Dongguan 523808 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaolong","family":"Meng","sequence":"additional","affiliation":[{"name":"Songshan Lake Materials Laboratory  Dongguan 523808 China"},{"name":"College of Physics Liaoning University  Shenyang 110036 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xiaowei","family":"Wang","sequence":"additional","affiliation":[{"name":"Songshan Lake Materials Laboratory  Dongguan 523808 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Wenbo","family":"Li","sequence":"additional","affiliation":[{"name":"Songshan Lake Materials Laboratory  Dongguan 523808 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lei","family":"Tang","sequence":"additional","affiliation":[{"name":"Songshan Lake Materials Laboratory  Dongguan 523808 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shen","family":"Lai","sequence":"additional","affiliation":[{"name":"Institute of Applied Physics and Materials Engineering University of Macau  Macau 999078 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Shi","family":"Chen","sequence":"additional","affiliation":[{"name":"Institute of Applied Physics and Materials Engineering University of Macau  Macau 999078 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jiwei","family":"Wang","sequence":"additional","affiliation":[{"name":"College of Physics Liaoning University  Shenyang 110036 China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4252-7997","authenticated-orcid":false,"given":"Qijie","family":"Liang","sequence":"additional","affiliation":[{"name":"Songshan Lake Materials Laboratory  Dongguan 523808 China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2025,11,7]]},"reference":[{"key":"e_1_2_9_1_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586-023-06145-x"},{"key":"e_1_2_9_2_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586-021-04323-3"},{"key":"e_1_2_9_3_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586-023-05797-z"},{"key":"e_1_2_9_4_1","doi-asserted-by":"publisher","DOI":"10.1007\/s11432-024-4033-8"},{"key":"e_1_2_9_5_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-025-56886-8"},{"key":"e_1_2_9_6_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-025-58155-0"},{"key":"e_1_2_9_7_1","doi-asserted-by":"publisher","DOI":"10.1038\/nphoton.2015.282"},{"key":"e_1_2_9_8_1","doi-asserted-by":"publisher","DOI":"10.1093\/nsr\/nwae008"},{"key":"e_1_2_9_9_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41928-021-00670-1"},{"key":"e_1_2_9_10_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.3c10900"},{"key":"e_1_2_9_11_1","doi-asserted-by":"publisher","DOI":"10.1007\/s12274-020-2958-7"},{"key":"e_1_2_9_12_1","doi-asserted-by":"publisher","DOI":"10.1088\/1361-6463\/ab3dc9"},{"key":"e_1_2_9_13_1","doi-asserted-by":"publisher","DOI":"10.1021\/nn4044035"},{"key":"e_1_2_9_14_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41586-018-0129-8"},{"key":"e_1_2_9_15_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.6b07159"},{"key":"e_1_2_9_16_1","doi-asserted-by":"publisher","DOI":"10.1038\/s42254-021-00389-0"},{"key":"e_1_2_9_17_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.9b02497"},{"key":"e_1_2_9_18_1","doi-asserted-by":"publisher","DOI":"10.1038\/s44287-024-00125-7"},{"key":"e_1_2_9_19_1","doi-asserted-by":"publisher","DOI":"10.1007\/s11432-023-3752-3"},{"key":"e_1_2_9_20_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41565-019-0552-5"},{"key":"e_1_2_9_21_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.9b04416"},{"key":"e_1_2_9_22_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.7b03703"},{"key":"e_1_2_9_23_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.5b03278"},{"key":"e_1_2_9_24_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201704539"},{"key":"e_1_2_9_25_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201505154"},{"key":"e_1_2_9_26_1","doi-asserted-by":"publisher","DOI":"10.1002\/smll.201901772"},{"key":"e_1_2_9_27_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5100154"},{"key":"e_1_2_9_28_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.4c06220"},{"key":"e_1_2_9_29_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.scib.2020.06.033"},{"key":"e_1_2_9_30_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41928-022-00858-z"},{"key":"e_1_2_9_31_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.7b01306"},{"key":"e_1_2_9_32_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.8b02739"},{"key":"e_1_2_9_33_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201804470"},{"key":"e_1_2_9_34_1","doi-asserted-by":"publisher","DOI":"10.1126\/sciadv.aav3430"},{"key":"e_1_2_9_35_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41928-020-00512-6"},{"key":"e_1_2_9_36_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.1c07169"},{"key":"e_1_2_9_37_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.201601966"},{"key":"e_1_2_9_38_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41467-020-15776-x"},{"key":"e_1_2_9_39_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41928-022-00746-6"},{"key":"e_1_2_9_40_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsnano.4c15117"},{"key":"e_1_2_9_41_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.4c04467"},{"key":"e_1_2_9_42_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.202421140"},{"key":"e_1_2_9_43_1","doi-asserted-by":"publisher","DOI":"10.1021\/acs.nanolett.4c06553"},{"key":"e_1_2_9_44_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41565-019-0585-9"},{"key":"e_1_2_9_45_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202100860"},{"key":"e_1_2_9_46_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.0c21675"},{"key":"e_1_2_9_47_1","doi-asserted-by":"publisher","DOI":"10.1063\/5.0018045"},{"key":"e_1_2_9_48_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41928-020-0396-x"},{"key":"e_1_2_9_49_1","doi-asserted-by":"publisher","DOI":"10.1016\/0039-6028(91)91153-O"},{"key":"e_1_2_9_50_1","doi-asserted-by":"publisher","DOI":"10.1021\/nl502557g"}],"container-title":["Small"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/smll.202511473","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/full-xml\/10.1002\/smll.202511473","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/smll.202511473","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,6,29]],"date-time":"2026-06-29T13:24:20Z","timestamp":1782739460000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/smll.202511473"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,11,7]]},"references-count":50,"journal-issue":{"issue":"51","published-print":{"date-parts":[[2025,12]]}},"alternative-id":["10.1002\/smll.202511473"],"URL":"https:\/\/doi.org\/10.1002\/smll.202511473","archive":["Portico"],"relation":{},"ISSN":["1613-6810","1613-6829"],"issn-type":[{"value":"1613-6810","type":"print"},{"value":"1613-6829","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,11,7]]},"assertion":[{"value":"2025-09-18","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2025-11-07","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}],"article-number":"e11473"}}