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In this work, inkjet printing of perhydropolysilazane (PHPS) solution was first adopted to fabricate silicon oxynitride (SiO\n                    <jats:sub>x<\/jats:sub>\n                    N\n                    <jats:sub>y<\/jats:sub>\n                    ) barrier films, which were converted from PHPS via vacuum ultraviolet (VUV) treatment. The transformation process was confirmed by Fourier transform infrared spectroscopy and X\u2010ray photoelectron spectroscopy. Experiment results revealed that multiple thin\u2010layer deposition enables the formation of a more uniform surface ascribed to the synergistic effect of surface energy tuning and precursor self\u2010leveling during layer\u2010by\u2010layer printing. The improved thin film morphology ensures better barrier properties of the barrier films, as proved by the water immersion test on perovskite films. The inkjet\u2010printed SiO\n                    <jats:sub>x<\/jats:sub>\n                    N\n                    <jats:sub>y<\/jats:sub>\n                    film encapsulation process demonstrated exceptional compatibility with PSCs owing to the conformal coating and low\u2010temperature processing (&lt; 80\u00b0C). The encapsulated PSCs retained 93% \u00b1 5% power conversion efficiency after 1000\u00a0h storage under 25\u00b0C\/60%RH environment (ISOS\u2010D\u20101 protocol) and 80% \u00b1 13% after 1\u00a0h water immersion. The stability results demonstrate inkjet printing is a viable encapsulation strategy for perovskite photovoltaics, offering (i) precise pattern control (line width of 59.4 \u00b1 5.0\u00a0\u00b5m), (ii) room\u2010temperature processing compatibility, and (iii) scalable manufacturing potential.\n                  <\/jats:p>","DOI":"10.1002\/smll.74816","type":"journal-article","created":{"date-parts":[[2026,7,26]],"date-time":"2026-07-26T03:59:16Z","timestamp":1785038356000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Inkjet\u2010Printed SiO\n                    <sub>x<\/sub>\n                    N\n                    <sub>y<\/sub>\n                    Barrier Film for Encapsulation of Perovskite Solar Cells"],"prefix":"10.1002","volume":"22","author":[{"given":"Bohan","family":"Li","sequence":"first","affiliation":[{"name":"<i>i<\/i>\u2010Lab &amp; Printable Electronics Research Center Suzhou Institute of 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