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Typically, the high\u2010quality epitaxial growth of these complex oxide thin films requires single crystalline oxide substrates such as SrTiO\n                    <jats:sub>3<\/jats:sub>\n                    (STO), MgO, LaAlO\n                    <jats:sub>3<\/jats:sub>\n                    , a\u2010Al\n                    <jats:sub>2<\/jats:sub>\n                    O\n                    <jats:sub>3,<\/jats:sub>\n                    and many others. Recent successes in transferring these complex oxides as free\u2010standing films not only offer great opportunities in integrating complex oxides on other devices, but also present enormous opportunities in recycling the deposited substrates after transfer for cost\u2010effective and sustainable processing of complex oxide thin films. In this work, the surface modification effects introduced on the recycled STO are investigated, and their impacts on the microstructure and properties of subsequently grown epitaxial oxide thin films are assessed and compared with those grown on the pristine substrates. Detailed analyses using high\u2010resolution scanning transmission electron microscopy and geometric phase analysis demonstrate distinct strain states on the surfaces of the recycled STO versus the pristine substrates, suggesting a pre\u2010strain state in the recycled STO substrates due to the previous deposition layer. These findings offer opportunities in growing highly mismatched oxide films on the recycled STO substrates with enhanced physical properties. Specifically, yttrium iron garnet (Y\n                    <jats:sub>3<\/jats:sub>\n                    Fe\n                    <jats:sub>5<\/jats:sub>\n                    O\n                    <jats:sub>12<\/jats:sub>\n                    ) films grown on recycled STO present different ferromagnetic responses compared to that on the pristine substrates, underscoring the effects of surface modification. The study demonstrates the feasibility of reuse and redeposition using recycled substrates. Via careful handling and preparation, high\u2010quality epitaxial thin films can be grown on recycled substrates with comparable or even better structural and physical properties toward sustainable process of complex oxide devices.\n                  <\/jats:p>","DOI":"10.1002\/smtd.202401148","type":"journal-article","created":{"date-parts":[[2024,10,29]],"date-time":"2024-10-29T02:31:55Z","timestamp":1730169115000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Epitaxial Thin Film Growth on Recycled SrTiO\n                    <sub>3<\/sub>\n                    Substrates Toward Sustainable Processing of Complex Oxides"],"prefix":"10.1002","volume":"9","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-3226-2761","authenticated-orcid":false,"given":"Jianan","family":"Shen","sequence":"first","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lizabeth","family":"Quigley","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"James P.","family":"Barnard","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Ping","family":"Lu","sequence":"additional","affiliation":[{"name":"Sandia National Laboratory  Albuquerque New Mexico 87185 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Benson Kunhung","family":"Tsai","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Dmitry","family":"Zemlyanov","sequence":"additional","affiliation":[{"name":"Birck Nanotechnology Center Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yizhi","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xuanyu","family":"Sheng","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jeremy","family":"Gan","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Matteo","family":"Moceri","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zedong","family":"Hu","sequence":"additional","affiliation":[{"name":"Elmore Family School of Electrical and Computer Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Jialong","family":"Huang","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chao","family":"Shen","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Julia","family":"Deitz","sequence":"additional","affiliation":[{"name":"Sandia National Laboratory  Albuquerque New Mexico 87185 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xinghang","family":"Zhang","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-7397-1209","authenticated-orcid":false,"given":"Haiyan","family":"Wang","sequence":"additional","affiliation":[{"name":"School of Materials Engineering Purdue University  West Lafayette Indiana 47907 United States"},{"name":"Elmore Family School of Electrical and Computer Engineering Purdue University  West Lafayette Indiana 47907 United States"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2024,10,28]]},"reference":[{"key":"e_1_2_9_1_1","doi-asserted-by":"crossref","unstructured":"A.Cano D.Meier M.Trassin Multiferroics: Fundamentals and Applications. 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