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Here, we overcome this long\u2010standing integration barrier by demonstrating, for the first time, the wafer\u2010scale synthesis of the 2D van der Waals (vdW) magnet FePS\n                    <jats:sub>3<\/jats:sub>\n                    , and more broadly, other transition metal phosphorus trisulfides. Our Si\u2010CMOS compatible, two\u2010step strategy couples magnetron sputtering of a metal precursor with a precisely controlled phosphosulfurization process at a low temperature of 350\u00b0C, enabling the direct growth of high\u2010quality, uniform crystalline films on amorphous SiO\n                    <jats:sub>2<\/jats:sub>\n                    and sapphire substrates. The synthesized films exhibit prominent ferromagnetism with perpendicular magnetic anisotropy and a Curie temperature of approximately 220 K. This work establishes a technologically viable materials platform, poised to accelerate the integration of 2D magnets into advanced spintronic and quantum computing architectures.\n                  <\/jats:p>","DOI":"10.1002\/smtd.202502173","type":"journal-article","created":{"date-parts":[[2026,1,22]],"date-time":"2026-01-22T06:36:32Z","timestamp":1769063792000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["A CMOS\u2010Compatible Route to Wafer\u2010Scale Van der Waals Magnets"],"prefix":"10.1002","volume":"10","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5014-6732","authenticated-orcid":false,"given":"Zhihao","family":"Li","sequence":"first","affiliation":[{"name":"National Key Laboratory of Spintronics Nanjing University  Suzhou China"},{"name":"Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials School of Electronic Science and Engineering Nanjing University  Nanjing China"},{"name":"School of Integrated Circuits Nanjing University  Suzhou China"},{"name":"Interdisciplinary Research Center for Future Intelligent Chips (Chip\u2010X) Nanjing University  Suzhou China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sicong","family":"Hu","sequence":"additional","affiliation":[{"name":"National Key Laboratory of Spintronics Nanjing University  Suzhou China"},{"name":"Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials School of Electronic Science and Engineering Nanjing University  Nanjing China"},{"name":"School of Integrated Circuits Nanjing University  Suzhou China"},{"name":"Interdisciplinary Research Center for Future Intelligent Chips (Chip\u2010X) Nanjing University  Suzhou China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Taotao","family":"Li","sequence":"additional","affiliation":[{"name":"School of Integrated Circuits Nanjing University  Suzhou China"},{"name":"Interdisciplinary Research Center for Future Intelligent Chips (Chip\u2010X) Nanjing University  Suzhou China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Boxin","family":"Cheng","sequence":"additional","affiliation":[{"name":"National Key Laboratory of Spintronics Nanjing University  Suzhou China"},{"name":"Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials School of Electronic Science and Engineering Nanjing University  Nanjing China"},{"name":"School of Integrated Circuits Nanjing University  Suzhou China"},{"name":"Interdisciplinary Research Center for Future Intelligent Chips (Chip\u2010X) Nanjing University  Suzhou China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jing","family":"Wu","sequence":"additional","affiliation":[{"name":"York\u2010Nanjing International Center for Spintronics (YNICS) School of Physics, Engineering and Technology University of York  York UK"},{"name":"School of Integrated Circuits Guangdong University of Technology  Guangzhou China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jun","family":"Du","sequence":"additional","affiliation":[{"name":"National Laboratory of Solid State Microstructures and Department of Physics Nanjing University  Nanjing China"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yongbing","family":"Xu","sequence":"additional","affiliation":[{"name":"National Key Laboratory of Spintronics Nanjing University  Suzhou China"},{"name":"Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials School of Electronic Science and Engineering Nanjing University  Nanjing China"},{"name":"School of Integrated Circuits Nanjing University  Suzhou China"},{"name":"Interdisciplinary Research Center for Future Intelligent Chips (Chip\u2010X) Nanjing University  Suzhou China"},{"name":"York\u2010Nanjing International Center for Spintronics (YNICS) School of Physics, Engineering and Technology University of York  York 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