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However, 2D flakes and related van der Waals (vdW)\u00a0heterostructure devices are largely produced through mechanical peeling of bulk crystals with uncontrollable 2D flake thickness. Here, we report a low\u2010energy vdW etching approach to manipulate 2D thickness on\u2010chip, which enables re\u2010peeling MoS\n                    <jats:sub>2<\/jats:sub>\n                    flakes after exfoliation on a substrate. By designing the interaction force between 2D flakes and metals, the top MoS\n                    <jats:sub>2<\/jats:sub>\n                    layers can be physically etched when the metal is peeled off on\u2010chip, and the intrinsic properties of the remaining 2D layers are well retained, resulting in a controlled etching process with atomic\u2010layer precision. Atomic force microscopy confirms the atomically flat surface (roughness of 0.21\u00a0nm), which is in great contrast to conventional plasma etching methods (roughness of 1.26\u00a0nm). Furthermore, we found that etched thickness could be controlled from 2\u00a0nm to over 50\u00a0nm by adopting different metals on\u2010chip. This behavior is further explained by a simple mechanical model based on the competition between in\u2010plane force and out\u2010of\u2010plane vdW interactions.\n                  <\/jats:p>","DOI":"10.1002\/smtd.202502332","type":"journal-article","created":{"date-parts":[[2026,4,9]],"date-time":"2026-04-09T04:22:06Z","timestamp":1775708526000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Manipulating MoS\n                    <sub>2<\/sub>\n                    Thickness On\u2010Chip via Van Der Waals Delamination"],"prefix":"10.1002","volume":"10","author":[{"ORCID":"https:\/\/orcid.org\/0009-0004-9509-5600","authenticated-orcid":false,"given":"Zehao","family":"Li","sequence":"first","affiliation":[{"name":"School of Physics and Electronics Key Laboratory for Micro\u2010Nano Optoelectronic Devices of Ministry of Education Hunan University  Changsha 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