{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,8]],"date-time":"2026-10-08T03:54:34Z","timestamp":1791431674705,"version":"4.3.3"},"reference-count":45,"publisher":"Wiley","issue":"19","license":[{"start":{"date-parts":[[2026,9,9]],"date-time":"2026-09-09T00:00:00Z","timestamp":1788912000000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"},{"start":{"date-parts":[[2026,9,9]],"date-time":"2026-09-09T00:00:00Z","timestamp":1788912000000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/doi.wiley.com\/10.1002\/tdm_license_1.1"}],"content-domain":{"domain":["onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Small Methods"],"published-print":{"date-parts":[[2026,10]]},"abstract":"<jats:title>ABSTRACT<\/jats:title>\n                  <jats:p>Dynamic phenomena at the micro\u2010 and nanoscale underpin technologies ranging from micro\u2010 and nanoelectromechanical systems (MEMS\/NEMS) actuators and sensors to quantum instrumentation and communication hardware. In this paper, we demonstrate that time\u2010resolved full\u2010field scanning electron microscopy (SEM) for periodically driven micro\u2010 and nanostructures offers access to their spatiotemporal dynamics. This is achieved using a conventional SEM operated with its continuous electron beam and combined with a multi\u2010channel plate (MCP) with a time\u2010to\u2010digital converter (TDC) for time\u2010resolved measurements. Effective frame rates from  to  frames per second are reached and motion tracking with nm spatial and ns temporal jitter is demonstrated, enabling access to both micrometer\u2010scale and nanometer\u2010scale motion. By bringing high temporal resolution to widely available electron microscopes without invasive column modifications, this approach enables a broad range of experiments on dynamic micro\u2010 and nanomechanical\u00a0systems.<\/jats:p>","DOI":"10.1002\/smtd.71029","type":"journal-article","created":{"date-parts":[[2026,9,10]],"date-time":"2026-09-10T06:35:48Z","timestamp":1789022148000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Nanosecond, Nanometer Movies of MEMS\/NEMS Dynamics in a Standard SEM Using Time\u2010Tagged Secondary Electrons"],"prefix":"10.1002","volume":"10","author":[{"ORCID":"https:\/\/orcid.org\/0009-0005-8191-0261","authenticated-orcid":false,"given":"Joel","family":"Rehmann","sequence":"first","affiliation":[{"name":"Laboratory for Solid State Physics ETH Z\u00fcrich Z\u00fcrich Switzerland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0004-2382-0594","authenticated-orcid":false,"given":"Constantin","family":"Schalast","sequence":"additional","affiliation":[{"name":"Laboratory for Solid State Physics ETH Z\u00fcrich Z\u00fcrich Switzerland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4682-8017","authenticated-orcid":false,"given":"Karsten","family":"Kunze","sequence":"additional","affiliation":[{"name":"ScopeM ETH Z\u00fcrich Z\u00fcrich Switzerland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0007-7832-9374","authenticated-orcid":false,"given":"Jan","family":"Rhensius","sequence":"additional","affiliation":[{"name":"QZabre AG Z\u00fcrich Switzerland"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4109-3544","authenticated-orcid":false,"given":"Yves","family":"Acremann","sequence":"additional","affiliation":[{"name":"Laboratory for Solid State Physics ETH Z\u00fcrich Z\u00fcrich Switzerland"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"311","published-online":{"date-parts":[[2026,9,9]]},"reference":[{"key":"e_1_2_7_2_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-025-01006-1"},{"key":"e_1_2_7_3_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-018-0035-0"},{"key":"e_1_2_7_4_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.measurement.2025.116996"},{"key":"e_1_2_7_5_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-024-00696-3"},{"key":"e_1_2_7_6_1","doi-asserted-by":"publisher","DOI":"10.1038\/nnano.2012.119"},{"key":"e_1_2_7_7_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-024-00755-9"},{"key":"e_1_2_7_8_1","doi-asserted-by":"publisher","DOI":"10.3390\/mi12101257"},{"key":"e_1_2_7_9_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41567-021-01402-0"},{"key":"e_1_2_7_10_1","doi-asserted-by":"publisher","DOI":"10.1364\/OPTICA.446407"},{"key":"e_1_2_7_11_1","doi-asserted-by":"publisher","DOI":"10.1103\/RevModPhys.94.045005"},{"key":"e_1_2_7_12_1","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevApplied.15.L021001"},{"key":"e_1_2_7_13_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41378-025-00960-0"},{"key":"e_1_2_7_14_1","doi-asserted-by":"publisher","DOI":"10.1103\/PhysRevApplied.23.054036"},{"key":"e_1_2_7_15_1","doi-asserted-by":"publisher","DOI":"10.1038\/srep46159"},{"key":"e_1_2_7_16_1","doi-asserted-by":"publisher","DOI":"10.1007\/978-3-540-38967-5_1"},{"key":"e_1_2_7_17_1","first-page":"387","article-title":"4D Ultrafast Electron Diffraction, Crystallography, and Microscopy","volume":"61","author":"Zewail A. 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