{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,29]],"date-time":"2026-04-29T21:53:10Z","timestamp":1777499590327,"version":"3.51.4"},"reference-count":41,"publisher":"Wiley","issue":"15","license":[{"start":{"date-parts":[[2023,3,22]],"date-time":"2023-03-22T00:00:00Z","timestamp":1679443200000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100019370","name":"Foundation for Science and Technology","doi-asserted-by":"publisher","award":["UIDB\/04650\/2020"],"award-info":[{"award-number":["UIDB\/04650\/2020"]}],"id":[{"id":"10.13039\/501100019370","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100000287","name":"Royal Academy of Engineering","doi-asserted-by":"publisher","award":["CIET1819_24"],"award-info":[{"award-number":["CIET1819_24"]}],"id":[{"id":"10.13039\/501100000287","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["advanced.onlinelibrary.wiley.com"],"crossmark-restriction":true},"short-container-title":["Advanced Science"],"published-print":{"date-parts":[[2023,5]]},"abstract":"<jats:title>Abstract<\/jats:title><jats:p>A new approach for the stabilization of the ferroelectric orthorhombic ZrO<jats:sub>2<\/jats:sub> films is demonstrated through nanosecond laser annealing (NLA) of as\u2010deposited Si\/SiO<jats:italic><jats:sub>x<\/jats:sub><\/jats:italic>\/W(14\u00a0nm)\/ZrO<jats:sub>2<\/jats:sub>(8\u00a0nm)\/W(22\u00a0nm), grown by ion beam sputtering at low temperatures. The NLA process optimization is guided by COMSOL multiphysics simulations. The films annealed under the optimized conditions reveal the presence of the orthorhombic phase, as confirmed by X\u2010ray diffraction, electron backscatter diffraction, and transmission electron microscopy. Macroscopic polarization\u2010electric field hysteresis loops show ferroelectric behavior, with saturation polarization of 12.8\u00a0\u00b5C cm<jats:sup>\u22122<\/jats:sup>, remnant polarization of 12.7\u00a0\u00b5C\u00a0cm<jats:sup>\u22122<\/jats:sup> and coercive field of 1.2\u00a0MV\u00a0cm<jats:sup>\u22121<\/jats:sup>. The films exhibit a wake\u2010up effect that is attributed to the migration of point defects, such as oxygen vacancies, and\/or a transition from nonferroelectric (monoclinic and tetragonal phase) to the ferroelectric orthorhombic phase. The capacitors demonstrate a stable polarization with an endurance of 6.0\u00a0\u00d7 10<jats:sup>5<\/jats:sup> cycles, demonstrating the potential of the NLA process for the fabrication of ferroelectric memory devices with high polarization, low coercive field, and high cycling stability.<\/jats:p>","DOI":"10.1002\/advs.202207390","type":"journal-article","created":{"date-parts":[[2023,3,23]],"date-time":"2023-03-23T02:32:31Z","timestamp":1679538751000},"update-policy":"https:\/\/doi.org\/10.1002\/crossmark_policy","source":"Crossref","is-referenced-by-count":38,"title":["Ferroelectric Orthorhombic ZrO<sub>2<\/sub> Thin Films Achieved Through Nanosecond Laser Annealing"],"prefix":"10.1002","volume":"10","author":[{"given":"Anna P. S.","family":"Crema","sequence":"first","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]},{"given":"Marian C.","family":"Istrate","sequence":"additional","affiliation":[{"name":"University of Bucharest Faculty of Physics  Atomistilor 405, Magurele Ilfov 077125 Romania"},{"name":"National Institute of Materials Physics Lab. of Atomic Structures and Defects in Advanced Materials  405A Atomistilor Str. Magurele Ilfov 077125 Romania"}]},{"given":"Alexandre","family":"Silva","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]},{"given":"Veniero","family":"Lenzi","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]},{"given":"Leonardo","family":"Domingues","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]},{"given":"Megan O.","family":"Hill","sequence":"additional","affiliation":[{"name":"Dept. of Materials Science and Metallurgy University of Cambridge  27 Charles Babbage Rd Cambridge CB3 OFS United Kingdom"}]},{"given":"Valentin S.","family":"Teodorescu","sequence":"additional","affiliation":[{"name":"University of Bucharest Faculty of Physics  Atomistilor 405, Magurele Ilfov 077125 Romania"},{"name":"National Institute of Materials Physics Lab. of Atomic Structures and Defects in Advanced Materials  405A Atomistilor Str. Magurele Ilfov 077125 Romania"}]},{"given":"Corneliu","family":"Ghica","sequence":"additional","affiliation":[{"name":"National Institute of Materials Physics Lab. of Atomic Structures and Defects in Advanced Materials  405A Atomistilor Str. Magurele Ilfov 077125 Romania"}]},{"given":"Maria J. M.","family":"Gomes","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]},{"given":"Mario","family":"Pereira","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]},{"given":"Lu\u00eds","family":"Marques","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4987-6620","authenticated-orcid":false,"given":"Judith L.","family":"MacManus\u2010Driscoll","sequence":"additional","affiliation":[{"name":"Dept. of Materials Science and Metallurgy University of Cambridge  27 Charles Babbage Rd Cambridge CB3 OFS United Kingdom"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-3485-7032","authenticated-orcid":false,"given":"Jos\u00e9 P. B.","family":"Silva","sequence":"additional","affiliation":[{"name":"Physics Center of Minho and Porto Universities (CF\u2010UM\u2010UP) University of Minho  Campus de Gualtar Braga 4710\u2010057 Portugal"},{"name":"Laboratory of Physics for Materials and Emergent Technologies LapMET University of Minho  Braga 4710\u2010057 Portugal"}]}],"member":"311","published-online":{"date-parts":[[2023,3,22]]},"reference":[{"key":"e_1_2_8_1_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41578-022-00431-2"},{"key":"e_1_2_8_2_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.apmt.2022.101394"},{"key":"e_1_2_8_3_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.3634052"},{"key":"e_1_2_8_4_1","doi-asserted-by":"publisher","DOI":"10.1149\/2.013202jss"},{"key":"e_1_2_8_5_1","doi-asserted-by":"publisher","DOI":"10.1002\/adfm.201103119"},{"key":"e_1_2_8_6_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsaelm.1c00122"},{"key":"e_1_2_8_7_1","doi-asserted-by":"publisher","DOI":"10.1038\/s41563-022-01282-6"},{"key":"e_1_2_8_8_1","doi-asserted-by":"publisher","DOI":"10.1021\/nl302049k"},{"key":"e_1_2_8_9_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsenergylett.1c00313"},{"key":"e_1_2_8_10_1","doi-asserted-by":"publisher","DOI":"10.1063\/5.0064700"},{"key":"e_1_2_8_11_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsaelm.9b00256"},{"key":"e_1_2_8_12_1","first-page":"3486","volume":"9","author":"Estand\u00eda S.","year":"2021","journal-title":"J. Mater. Chem."},{"key":"e_1_2_8_13_1","doi-asserted-by":"publisher","DOI":"10.1002\/aelm.202200601"},{"key":"e_1_2_8_14_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.apmt.2022.101621"},{"key":"e_1_2_8_15_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jmst.2021.07.016"},{"key":"e_1_2_8_16_1","doi-asserted-by":"publisher","DOI":"10.1039\/D0NR00933D"},{"key":"e_1_2_8_17_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsaelm.9b00367"},{"key":"e_1_2_8_18_1","doi-asserted-by":"publisher","DOI":"10.1002\/adma.202006089"},{"key":"e_1_2_8_19_1","doi-asserted-by":"publisher","DOI":"10.1109\/LED.2018.2846570"},{"key":"e_1_2_8_20_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsaelm.0c00671"},{"key":"e_1_2_8_21_1","first-page":"2575","volume":"0","author":"Lenzi V.","year":"2022","journal-title":"Energy Environ. Mater."},{"key":"e_1_2_8_22_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.actamat.2020.116536"},{"key":"e_1_2_8_23_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.1c15875"},{"key":"e_1_2_8_24_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.ceramint.2021.11.152"},{"key":"e_1_2_8_25_1","doi-asserted-by":"publisher","DOI":"10.1126\/science.abm8642"},{"key":"e_1_2_8_26_1","doi-asserted-by":"publisher","DOI":"10.1111\/jace.12975"},{"key":"e_1_2_8_27_1","doi-asserted-by":"publisher","DOI":"10.1002\/aelm.201900303"},{"key":"e_1_2_8_28_1","doi-asserted-by":"publisher","DOI":"10.1002\/pssr.202100082"},{"key":"e_1_2_8_29_1","volume-title":"2022 IEEE International Memory Workshop, IMW 2022 \u2013 Proceedings","author":"Ali T.","year":"2022"},{"key":"e_1_2_8_30_1","first-page":"1","volume-title":"2020 IEEE Symposium on VLSI Technology","author":"Grenouillet L.","year":"2020"},{"key":"e_1_2_8_31_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jeurceramsoc.2016.10.028"},{"key":"e_1_2_8_32_1","doi-asserted-by":"publisher","DOI":"10.1002\/pssr.202100589"},{"key":"e_1_2_8_33_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.matdes.2020.109020"},{"key":"e_1_2_8_34_1","doi-asserted-by":"publisher","DOI":"10.1016\/j.jsg.2016.12.006"},{"key":"e_1_2_8_35_1","unstructured":"https:\/\/next\u2010gen.materialsproject.org\/materials\/mp\u2010556605?formula=ZrO2."},{"key":"e_1_2_8_36_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.5093793"},{"key":"e_1_2_8_37_1","unstructured":"R. M. P.Pereira M. C.Istrate F. G.Figueiras V.Lenzi B. M.Silva M.Benamara K. N.Romanyuk C.Ghica B. G.Almeida L.Marques M.Pereira J. P. B.Silva Phase transitions and ferroelectric properties in ZrO2thin films (under review)."},{"key":"e_1_2_8_38_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsami.2c03151"},{"key":"e_1_2_8_39_1","doi-asserted-by":"publisher","DOI":"10.1021\/acsaelm.2c00608"},{"key":"e_1_2_8_40_1","doi-asserted-by":"publisher","DOI":"10.35848\/1347-4065\/ab80de"},{"key":"e_1_2_8_41_1","doi-asserted-by":"publisher","DOI":"10.1063\/1.4983031"}],"container-title":["Advanced Science"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/advs.202207390","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/full-xml\/10.1002\/advs.202207390","content-type":"application\/xml","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/advs.202207390","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,6]],"date-time":"2025-10-06T09:26:08Z","timestamp":1759742768000},"score":1,"resource":{"primary":{"URL":"https:\/\/advanced.onlinelibrary.wiley.com\/doi\/10.1002\/advs.202207390"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,3,22]]},"references-count":41,"journal-issue":{"issue":"15","published-print":{"date-parts":[[2023,5]]}},"alternative-id":["10.1002\/advs.202207390"],"URL":"https:\/\/doi.org\/10.1002\/advs.202207390","archive":["Portico"],"relation":{},"ISSN":["2198-3844","2198-3844"],"issn-type":[{"value":"2198-3844","type":"print"},{"value":"2198-3844","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,3,22]]},"assertion":[{"value":"2022-12-15","order":0,"name":"received","label":"Received","group":{"name":"publication_history","label":"Publication History"}},{"value":"2023-03-22","order":3,"name":"published","label":"Published","group":{"name":"publication_history","label":"Publication History"}}],"article-number":"2207390"}}