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Hence, the inner surface of a Pyrex tube was treated by a capacitively coupled RF plasma at low pressure. The post\u2010plasma oxidation of gas mixtures containing 1 % NO into NO<jats:sub>2<\/jats:sub> has been studied by means of quantum cascade laser absorption spectroscopy in the mid\u2010infrared spectral range. The plasma pre\u2010treatment experiments with oxygen containing precursors suggest O atom adsorption on the Pyrex tube with a surface density of 2.7 x 10<jats:sup>14<\/jats:sup> cm<jats:sup>\u20132<\/jats:sup>. A simple kinetic model was developed and shows good agreement with the measured NO and NO<jats:sub>2<\/jats:sub> gas phase concentrations. In the model a fraction of the surface is considered to be covered with chemisorption sites where atoms and molecules can be adsorbed, whereas they can be removed only by recombination (\u00a9 2011 WILEY\u2010VCH Verlag GmbH &amp; Co. 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