{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,4]],"date-time":"2025-11-04T10:14:16Z","timestamp":1762251256504},"reference-count":19,"publisher":"Wiley","issue":"S1","license":[{"start":{"date-parts":[[2015,9,1]],"date-time":"2015-09-01T00:00:00Z","timestamp":1441065600000},"content-version":"tdm","delay-in-days":3075,"URL":"http:\/\/doi.wiley.com\/10.1002\/tdm_license_1.1"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Plasma Process. Polym."],"published-print":{"date-parts":[[2007,4]]},"DOI":"10.1002\/ppap.200731301","type":"journal-article","created":{"date-parts":[[2007,5,23]],"date-time":"2007-05-23T06:18:24Z","timestamp":1179901104000},"page":"S522-S526","source":"Crossref","is-referenced-by-count":13,"title":["Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing"],"prefix":"10.1002","volume":"4","author":[{"given":"Tom\u00e1\u0161","family":"Kubart","sequence":"first","affiliation":[]},{"given":"Tom\u00e1\u0161","family":"Polcar","sequence":"additional","affiliation":[]},{"given":"Oliver","family":"Kappertz","sequence":"additional","affiliation":[]},{"given":"Nuno","family":"Parreira","sequence":"additional","affiliation":[]},{"given":"Tomas","family":"Nyberg","sequence":"additional","affiliation":[]},{"given":"S\u00f6ren","family":"Berg","sequence":"additional","affiliation":[]},{"given":"Albano","family":"Cavaleiro","sequence":"additional","affiliation":[]}],"member":"311","reference":[{"key":"10.1002\/ppap.200731301-BIB1","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.tsf.2005.05.022","volume":"491","author":"Sproul","year":"2005","journal-title":"Thin Solid Films"},{"key":"10.1002\/ppap.200731301-BIB2","doi-asserted-by":"crossref","first-page":"535","DOI":"10.1016\/0040-6090(80)90544-1","volume":"72","author":"Aronson","year":"1980","journal-title":"Thin Solid Films"},{"key":"10.1002\/ppap.200731301-BIB3","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/0040-6090(81)90201-7","volume":"80","author":"Thornton","year":"1981","journal-title":"Thin Solid Films"},{"key":"10.1002\/ppap.200731301-BIB4","doi-asserted-by":"crossref","first-page":"32","DOI":"10.1016\/S0040-6090(99)00081-4","volume":"351","author":"Howson","year":"1999","journal-title":"Thin Solid Films"},{"key":"10.1002\/ppap.200731301-BIB5","doi-asserted-by":"crossref","first-page":"550","DOI":"10.1016\/S0040-6090(00)01440-1","volume":"377","author":"Martin","year":"2000","journal-title":"Thin Solid Films"},{"key":"10.1002\/ppap.200731301-BIB6","doi-asserted-by":"crossref","first-page":"916","DOI":"10.1016\/S0257-8972(99)00262-5","volume":"119","author":"Mercs","year":"1999","journal-title":"Surf. Coat. Technol."},{"key":"10.1002\/ppap.200731301-BIB7","doi-asserted-by":"crossref","first-page":"8565","DOI":"10.1063\/1.353386","volume":"73","author":"Kusano","year":"1993","journal-title":"J. Appl. Phys."},{"key":"10.1002\/ppap.200731301-BIB8","doi-asserted-by":"crossref","first-page":"503","DOI":"10.1116\/1.582216","volume":"18","author":"Jonsson","year":"2000","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1002\/ppap.200731301-BIB9","doi-asserted-by":"crossref","first-page":"184","DOI":"10.1016\/j.surfcoat.2003.10.006","volume":"183","author":"Depla","year":"2004","journal-title":"Surf. Coat. Technol."},{"key":"10.1002\/ppap.200731301-BIB10","doi-asserted-by":"crossref","first-page":"1371","DOI":"10.1116\/1.2006135","volume":"23","author":"Abe","year":"2005","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1002\/ppap.200731301-BIB11","doi-asserted-by":"crossref","first-page":"421","DOI":"10.1016\/j.tsf.2005.12.250","volume":"515","author":"Kubart","year":"2006","journal-title":"Thin Solid Films"},{"key":"10.1002\/ppap.200731301-BIB12","doi-asserted-by":"crossref","first-page":"202","DOI":"10.1116\/1.574104","volume":"5","author":"Berg","year":"1987","journal-title":"J. Vac. Sci. Technol. A"},{"key":"10.1002\/ppap.200731301-BIB13","doi-asserted-by":"crossref","first-page":"215","DOI":"10.1016\/j.tsf.2004.10.051","volume":"476","author":"Berg","year":"2005","journal-title":"Thin Solid Films"},{"key":"10.1002\/ppap.200731301-BIB14","doi-asserted-by":"crossref","first-page":"29","DOI":"10.1016\/S0042-207X(02)00664-4","volume":"70","author":"Buyle","year":"2003","journal-title":"Vacuum"},{"key":"10.1002\/ppap.200731301-BIB15","author":"Kappertz","year":"2004","unstructured":"Ph.D. Thesis, RWTH Aachen, Aachen 2004; http:\/\/darwin.bth.rwth-aachen.de\/opus\/volltexte\/2004\/800\/."},{"key":"10.1002\/ppap.200731301-BIB16","author":"De Gryse","year":"2005","unstructured":", , Proceedings of 48th Annual SVC Technical Conference Denver, Colorado, April 2005, p. 290."},{"key":"10.1002\/ppap.200731301-BIB17","doi-asserted-by":"crossref","first-page":"848","DOI":"10.1016\/j.surfcoat.2005.12.047","volume":"201","author":"Depla","year":"2006","journal-title":"Surf. Coat. Technol."},{"key":"10.1002\/ppap.200731301-BIB18","doi-asserted-by":"crossref","first-page":"5481","DOI":"10.1016\/j.surfcoat.2006.07.017","volume":"201","author":"Parreira","year":"2007","journal-title":"Surf. Coat. Technol."},{"key":"10.1002\/ppap.200731301-BIB19","doi-asserted-by":"crossref","first-page":"191","DOI":"10.1016\/j.tsf.2005.12.299","volume":"510","author":"Parreira","year":"2006","journal-title":"Thin Solid Films"}],"container-title":["Plasma Processes and Polymers"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.wiley.com\/onlinelibrary\/tdm\/v1\/articles\/10.1002%2Fppap.200731301","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/full\/10.1002\/ppap.200731301","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,7,4]],"date-time":"2021-07-04T07:53:33Z","timestamp":1625385213000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/ppap.200731301"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2007,4]]},"references-count":19,"journal-issue":{"issue":"S1","published-print":{"date-parts":[[2007,4]]}},"URL":"https:\/\/doi.org\/10.1002\/ppap.200731301","relation":{},"ISSN":["1612-8850","1612-8869"],"issn-type":[{"value":"1612-8850","type":"print"},{"value":"1612-8869","type":"electronic"}],"subject":[],"published":{"date-parts":[[2007,4]]}}}