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Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr<jats:sub>3<\/jats:sub>N<jats:sub>4<\/jats:sub>\u2010type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating\u2010to\u2010substrate were directly determined. Empirical correlations between processing conditions, the films' composition and structure, and thermal transport properties were found.<\/jats:p>","DOI":"10.1002\/ppap.200931802","type":"journal-article","created":{"date-parts":[[2009,7,14]],"date-time":"2009-07-14T11:48:58Z","timestamp":1247572138000},"source":"Crossref","is-referenced-by-count":6,"title":["The Role of Modulated IR Radiometry Measurements in the Characterization of Zr\uf8ffO\uf8ffN Thin Films"],"prefix":"10.1002","volume":"6","author":[{"given":"Francisco","family":"Macedo","sequence":"first","affiliation":[]},{"given":"Pedro","family":"Carvalho","sequence":"additional","affiliation":[]},{"given":"Lu\u00eds","family":"Cunha","sequence":"additional","affiliation":[]},{"given":"Filipe","family":"Vaz","sequence":"additional","affiliation":[]},{"given":"Jurgen","family":"Gibkes","sequence":"additional","affiliation":[]},{"given":"Bruno K.","family":"Bein","sequence":"additional","affiliation":[]},{"given":"Josef","family":"Pelzl","sequence":"additional","affiliation":[]}],"member":"311","published-online":{"date-parts":[[2009,7,14]]},"reference":[{"key":"e_1_2_6_1_2","doi-asserted-by":"publisher","DOI":"10.1016\/0025-5416(88)90732-X"},{"key":"e_1_2_6_2_2","doi-asserted-by":"publisher","DOI":"10.1016\/0257-8972(91)90191-X"},{"key":"e_1_2_6_3_2","doi-asserted-by":"publisher","DOI":"10.1016\/0257-8972(93)90215-A"},{"key":"e_1_2_6_4_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0257-8972(96)02987-8"},{"key":"e_1_2_6_5_2","doi-asserted-by":"publisher","DOI":"10.1016\/0040-6090(87)90168-4"},{"key":"e_1_2_6_6_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0257-8972(00)00947-6"},{"key":"e_1_2_6_7_2","doi-asserted-by":"publisher","DOI":"10.1016\/0040-6090(95)06695-0"},{"key":"e_1_2_6_8_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(03)01123-4"},{"key":"e_1_2_6_9_2","doi-asserted-by":"publisher","DOI":"10.1063\/1.2927494"},{"key":"e_1_2_6_10_2","doi-asserted-by":"publisher","DOI":"10.1002\/ppap.200732005"},{"key":"e_1_2_6_11_2"},{"key":"e_1_2_6_12_2","doi-asserted-by":"publisher","DOI":"10.1002\/ppap.200730609"},{"key":"e_1_2_6_13_2","doi-asserted-by":"publisher","DOI":"10.1364\/AO.21.000049"},{"key":"e_1_2_6_14_2","unstructured":"DIN EN 15042\u20102:2006 \u201cThickness measurement of coatings and characterization of surfaces with surface waves\u201d."},{"key":"e_1_2_6_15_2","doi-asserted-by":"publisher","DOI":"10.1063\/1.2058180"},{"key":"e_1_2_6_16_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.vacuum.2008.03.007"},{"key":"e_1_2_6_17_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.vacuum.2008.03.066"},{"key":"e_1_2_6_18_2","doi-asserted-by":"publisher","DOI":"10.1016\/j.spmi.2003.09.015"},{"key":"e_1_2_6_19_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0257-8972(01)01149-5"},{"key":"e_1_2_6_20_2","doi-asserted-by":"publisher","DOI":"10.1002\/pssa.200306707"},{"key":"e_1_2_6_21_2","doi-asserted-by":"publisher","DOI":"10.1063\/1.1851000"},{"key":"e_1_2_6_22_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0169-4332(99)00233-0"},{"key":"e_1_2_6_23_2","doi-asserted-by":"publisher","DOI":"10.1023\/A:1006559823097"},{"key":"e_1_2_6_24_2","doi-asserted-by":"publisher","DOI":"10.1002\/(SICI)1096-9918(199607)24:7<448::AID-SIA137>3.0.CO;2-F"}],"container-title":["Plasma Processes and Polymers"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.wiley.com\/onlinelibrary\/tdm\/v1\/articles\/10.1002%2Fppap.200931802","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/ppap.200931802","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,8,5]],"date-time":"2024-08-05T11:04:16Z","timestamp":1722855856000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/ppap.200931802"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009,6]]},"references-count":24,"journal-issue":{"issue":"S1","published-print":{"date-parts":[[2009,6]]}},"alternative-id":["10.1002\/ppap.200931802"],"URL":"https:\/\/doi.org\/10.1002\/ppap.200931802","archive":["Portico"],"relation":{},"ISSN":["1612-8850","1612-8869"],"issn-type":[{"value":"1612-8850","type":"print"},{"value":"1612-8869","type":"electronic"}],"subject":[],"published":{"date-parts":[[2009,6]]}}}