{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,11]],"date-time":"2025-11-11T12:44:39Z","timestamp":1762865079983},"reference-count":9,"publisher":"Wiley","issue":"6","license":[{"start":{"date-parts":[[2006,4,18]],"date-time":"2006-04-18T00:00:00Z","timestamp":1145318400000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/onlinelibrary.wiley.com\/termsAndConditions#vor"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Physica Status Solidi (a)"],"published-print":{"date-parts":[[2006,5]]},"abstract":"<jats:title>Abstract<\/jats:title><jats:p>Amorphous SiGe nanoparticles embedded in an oxide matrix, with controlled composition, diameter of a few nm, located in the same plane and with an areal density above 10<jats:sup>12<\/jats:sup> cm<jats:sup>\u20132<\/jats:sup> have been deposited by Low Pressure Chemical Vapour Deposition in a single run using a conventional hot wall reactor. The deposited nanoparticles were crystallized by Rapid Thermal Annealing. X\u2010ray Reflectometry and Rutherford Backscattering Spectrometry, with models developed for these purposes, have been tested as fast and reliable analytical tools to determine the composition, size and areal density of the nanoparticles. Transmission Electron Microscopy has been used to validate the results and to study the nanoparticle crystallization. (\u00a9 2006 WILEY\u2010VCH Verlag GmbH &amp; Co. KGaA, Weinheim)<\/jats:p>","DOI":"10.1002\/pssa.200566105","type":"journal-article","created":{"date-parts":[[2006,4,18]],"date-time":"2006-04-18T15:50:33Z","timestamp":1145375433000},"page":"1284-1290","source":"Crossref","is-referenced-by-count":14,"title":["Growth by LPCVD, crystallization and characterization of SiGe nanoparticles for nanoelectronic devices"],"prefix":"10.1002","volume":"203","author":[{"given":"M. I.","family":"Ortiz","sequence":"first","affiliation":[]},{"given":"J.","family":"Sangrador","sequence":"additional","affiliation":[]},{"given":"A.","family":"Rodr\u00edguez","sequence":"additional","affiliation":[]},{"given":"T.","family":"Rodr\u00edguez","sequence":"additional","affiliation":[]},{"given":"A.","family":"Kling","sequence":"additional","affiliation":[]},{"given":"N.","family":"Franco","sequence":"additional","affiliation":[]},{"given":"N. P.","family":"Barradas","sequence":"additional","affiliation":[]},{"given":"C.","family":"Ballesteros","sequence":"additional","affiliation":[]}],"member":"311","published-online":{"date-parts":[[2006,4,18]]},"reference":[{"key":"e_1_2_1_2_2","doi-asserted-by":"publisher","DOI":"10.1063\/1.1645639"},{"key":"e_1_2_1_3_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(98)01077-3"},{"key":"e_1_2_1_4_2","doi-asserted-by":"publisher","DOI":"10.1063\/1.1604471"},{"key":"e_1_2_1_5_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0040-6090(97)01032-8"},{"key":"e_1_2_1_6_2","doi-asserted-by":"publisher","DOI":"10.1557\/PROC-794-T3.35"},{"key":"e_1_2_1_7_2","doi-asserted-by":"publisher","DOI":"10.1149\/1.1399277"},{"key":"e_1_2_1_8_2","unstructured":"V.Hol\u00fd U.Pietsch andT.Baumbach High\u2010Resolution X\u2010ray Scattering from Thin Films and Multi\u2010 layers Springer Tracts in Modern Physics (Springer\u2010Verlag Berlin Heidelberg New York 1999) ISBN 3\u2010540\u201062029\u2010X."},{"key":"e_1_2_1_9_2","doi-asserted-by":"publisher","DOI":"10.1016\/S0921-4526(98)00398-6"},{"key":"e_1_2_1_10_2","doi-asserted-by":"publisher","DOI":"10.1016\/0168-583X(85)90762-1"}],"container-title":["physica status solidi (a)"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/api.wiley.com\/onlinelibrary\/tdm\/v1\/articles\/10.1002%2Fpssa.200566105","content-type":"unspecified","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/pdf\/10.1002\/pssa.200566105","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,9,11]],"date-time":"2023-09-11T23:08:05Z","timestamp":1694473685000},"score":1,"resource":{"primary":{"URL":"https:\/\/onlinelibrary.wiley.com\/doi\/10.1002\/pssa.200566105"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2006,4,18]]},"references-count":9,"journal-issue":{"issue":"6","published-print":{"date-parts":[[2006,5]]}},"alternative-id":["10.1002\/pssa.200566105"],"URL":"https:\/\/doi.org\/10.1002\/pssa.200566105","archive":["Portico"],"relation":{},"ISSN":["1862-6300","1862-6319"],"issn-type":[{"value":"1862-6300","type":"print"},{"value":"1862-6319","type":"electronic"}],"subject":[],"published":{"date-parts":[[2006,4,18]]}}}