{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,3,27]],"date-time":"2025-03-27T02:23:12Z","timestamp":1743042192646,"version":"3.40.3"},"publisher-location":"Cham","reference-count":13,"publisher":"Springer International Publishing","isbn-type":[{"type":"print","value":"9783319202266"},{"type":"electronic","value":"9783319202273"}],"license":[{"start":{"date-parts":[[2015,8,8]],"date-time":"2015-08-08T00:00:00Z","timestamp":1438992000000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"},{"start":{"date-parts":[[2015,8,8]],"date-time":"2015-08-08T00:00:00Z","timestamp":1438992000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2016]]},"DOI":"10.1007\/978-3-319-20227-3_7","type":"book-chapter","created":{"date-parts":[[2015,8,7]],"date-time":"2015-08-07T13:36:52Z","timestamp":1438954612000},"page":"51-57","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Advancements on Silicon Ultrasound Probes (CMUT) for Medical Imaging Applications"],"prefix":"10.1007","author":[{"given":"Giosu\u00e8","family":"Caliano","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Alessandro S.","family":"Savoia","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","published-online":{"date-parts":[[2015,8,8]]},"reference":[{"key":"7_CR1","doi-asserted-by":"publisher","first-page":"1241","DOI":"10.1109\/ULTSYM.1994.401810","volume":"2","author":"MI Haller","year":"1994","unstructured":"Haller, M.I., Khuri-Yakub, B.T.: A surface micromachined electrostatic ultrasonic air transducer. Proc. IEEE Ultrason. Symp. 2, 1241\u20131244 (1994)","journal-title":"Proc. IEEE Ultrason. Symp."},{"key":"7_CR2","first-page":"963","volume":"1","author":"G Caliano","year":"2000","unstructured":"Caliano, G., Galanello, F., Caronti, A., Carotenuto, R., Pappalardo, M., Foglietti, V., Lamberti, N.: Micromachined ultrasonic transducers using silicon nitride membrane fabricated in PECVD technology. Proc. IEEE Ultrason. Symp. 1, 963\u2013968 (2000)","journal-title":"Proc. IEEE Ultrason. Symp."},{"key":"7_CR3","first-page":"1067","volume":"2","author":"G Caliano","year":"2002","unstructured":"Caliano, G., Carotenuto, R., Caronti, A., Pappalardo, M.: cMUT echographic probes: design and fabrication process. Proc. IEEE Ultrason. Symp. 2, 1067\u20131070 (2002)","journal-title":"Proc. IEEE Ultrason. Symp."},{"key":"7_CR4","first-page":"568","volume":"1","author":"DM Mills","year":"2003","unstructured":"Mills, D.M., Smith, L.S.: Real-time in-vivo imaging with capacitive micromachined ultrasound transducer (cMUT) linear arrays. Proc. IEEE Ultrason. Symp. 1, 568\u2013571 (2003)","journal-title":"Proc. IEEE Ultrason. Symp."},{"key":"7_CR5","doi-asserted-by":"crossref","unstructured":"Panda, S., Daft, C., Wagner, P., Ladabaum, I., Pellegretti, P., Bertora, F.: Microfabricated ultrasonic transducer (cMUT) probes: imaging advantages over PZT probes. In: Proceedings WFUMB (hosted by AIUM) Conference, Montreal, Canada (2003)","DOI":"10.1016\/S0301-5629(03)00312-0"},{"key":"7_CR6","first-page":"395","volume":"1","author":"G Caliano","year":"2004","unstructured":"Caliano, G., Carotenuto, R., Cianci, E., Foglietti, V., Caronti, A., Pappalardo, M.: A cMUT linear array used as echographic probe: fabrication, characterization, and images. Proc. IEEE Ultrason. Symp. 1, 395\u2013398 (2004)","journal-title":"Proc. IEEE Ultrason. Symp."},{"key":"7_CR7","first-page":"1960","volume":"4","author":"A Savoia","year":"2005","unstructured":"Savoia, A., Caliano, G., Carotenuto, R., Longo, C., Gatta, P., Caronti, A., Cianci, E., Foglietti, V., Pappalardo, M.: Enhanced echographic images obtained improving the membrane structural layer of the cMUT probe. Proc. IEEE Ultrason. Symp. 4, 1960\u20131963 (2005)","journal-title":"Proc. IEEE Ultrason. Symp."},{"issue":"5","key":"7_CR8","doi-asserted-by":"crossref","first-page":"3375","DOI":"10.1121\/1.2934002","volume":"123","author":"Alessandro Caronti","year":"2008","unstructured":"Caronti, A., Caliano, G., Gatta, P., Longo, C., Savoia, A., Pappalardo, M.: A finite element tool for the analysis and the design of capacitive micromachined ultrasonic transducer (cMUT) arrays for medical imaging. J. Acoust. Soc. Am. 123, 3375 (2008)","journal-title":"The Journal of the Acoustical Society of America"},{"key":"7_CR9","first-page":"479","volume":"1","author":"G Caliano","year":"2005","unstructured":"Caliano, G., Caronti, A., Savoia, A., Longo, C., Pappalardo, M., Cianci, E., Foglietti, V.: Capacitive micromachined ultrasonic transducer (cMUT) made by a novel \u201cReverse Fabrication Process\u201d. Proc. IEEE Ultrason. Symp. 1, 479\u2013482 (2005)","journal-title":"Proc. IEEE Ultrason. Symp."},{"key":"7_CR10","unstructured":"Caliano, G., et al.: Surface micromechanical process for manufacturing micromachined capacitive ultra-acoustic transducers and relevant micromachined capacitive ultra-acoustic transducer. United States Patent 7790490, 7 Sept 2010"},{"key":"7_CR11","doi-asserted-by":"publisher","first-page":"1127","DOI":"10.1109\/TUFFC.2012.2303","volume":"59","author":"AS Savoia","year":"2012","unstructured":"Savoia, A.S., Caliano, G., Pappalardo, M.: A CMUT probe for medical ultrasonography: from microfabrication to system integration. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 59, 1127\u20131138 (2012)","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control"},{"key":"7_CR12","doi-asserted-by":"crossref","unstructured":"Savoia, A., Caliano, G., Mauti, B., Pappalardo, M.: Performance optimization of a high frequency CMUT probe for medical imaging presented at the IEEE Ultrason. Symp, 2011","DOI":"10.1109\/ULTSYM.2011.0145"},{"key":"7_CR13","doi-asserted-by":"crossref","unstructured":"Savoia, A., Caliano, G.: MEMS-based Transducers (CMUT) For medical ultrasound imaging. In: Chen, C.H. (ed.) Frontiers of Medical Imaging, pp. 445\u2013464. World Scientific, 2014","DOI":"10.1142\/9789814611107_0021"}],"container-title":["Lecture Notes in Electrical Engineering","Applications in Electronics Pervading Industry, Environment and Society"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-319-20227-3_7","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2023,2,10]],"date-time":"2023-02-10T11:35:20Z","timestamp":1676028920000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1007\/978-3-319-20227-3_7"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2015,8,8]]},"ISBN":["9783319202266","9783319202273"],"references-count":13,"URL":"https:\/\/doi.org\/10.1007\/978-3-319-20227-3_7","relation":{},"ISSN":["1876-1100","1876-1119"],"issn-type":[{"type":"print","value":"1876-1100"},{"type":"electronic","value":"1876-1119"}],"subject":[],"published":{"date-parts":[[2015,8,8]]},"assertion":[{"value":"8 August 2015","order":1,"name":"first_online","label":"First Online","group":{"name":"ChapterHistory","label":"Chapter History"}}]}}