{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,2,1]],"date-time":"2026-02-01T04:28:28Z","timestamp":1769920108934,"version":"3.49.0"},"publisher-location":"Berlin, Heidelberg","reference-count":11,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"value":"9783540213789","type":"print"},{"value":"9783540246534","type":"electronic"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2004]]},"DOI":"10.1007\/978-3-540-24653-4_22","type":"book-chapter","created":{"date-parts":[[2011,1,12]],"date-time":"2011-01-12T15:08:30Z","timestamp":1294844910000},"page":"208-218","source":"Crossref","is-referenced-by-count":10,"title":["Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems"],"prefix":"10.1007","author":[{"given":"Tim","family":"F\u00fchner","sequence":"first","affiliation":[]},{"given":"Andreas","family":"Erdmann","sequence":"additional","affiliation":[]},{"given":"Rich\u00e1rd","family":"Farkas","sequence":"additional","affiliation":[]},{"given":"Bernd","family":"Tollk\u00fchn","sequence":"additional","affiliation":[]},{"given":"Gabriella","family":"K\u00f3kai","sequence":"additional","affiliation":[]}],"member":"297","reference":[{"key":"22_CR1","volume-title":"Handbook of Microlithograph, Micromachining and Microfabrication","author":"H. Levinson","year":"1997","unstructured":"Levinson, H.: Optical Lithography. In: Rai-Choudhury, P. (ed.) Handbook of Microlithograph, Micromachining and Microfabrication, vol.\u00a01, SPIE Press, San Jose (1997)"},{"key":"22_CR2","volume-title":"Introduction to Fourier Optics","author":"J.W. Goodman","year":"1992","unstructured":"Goodman, J.W.: Introduction to Fourier Optics. McGraw-Hill, New York (1992)"},{"key":"22_CR3","doi-asserted-by":"crossref","unstructured":"Hopkins, H.H.: On the diffraction theory of optical images. In: Proc. Roy. Soc. A, vol.\u00a0217, p. 408 (1953)","DOI":"10.1098\/rspa.1953.0071"},{"key":"22_CR4","doi-asserted-by":"publisher","first-page":"2086","DOI":"10.1364\/JOSAA.3.002086","volume":"A3","author":"M. Mansuripur","year":"1986","unstructured":"Mansuripur, M.: Distribution of light at and near the focus of high numerical aperture objectives. J. Opt. Soc. Am.\u00a0A3, 2086 (1986)","journal-title":"J. Opt. Soc. Am."},{"key":"22_CR5","doi-asserted-by":"publisher","first-page":"8944","DOI":"10.1364\/AO.36.008944","volume":"36","author":"D.G. Flagello","year":"1997","unstructured":"Flagello, D.G., Milster, T.D.: High numerical aperture effects in photoresist. Applied Optics\u00a036, 8944 (1997)","journal-title":"Applied Optics"},{"key":"22_CR6","doi-asserted-by":"crossref","unstructured":"Erdmann, A., Henke, W.: Simulation of optical lithography. Optics and Optoelectronics \u2013 Theory, Devices and Applications. In: Proc. SPIE, vol. 3729, p. 480 (1999)","DOI":"10.1117\/12.346826"},{"key":"22_CR7","volume-title":"Tutorial Texts in Optical Engineering","author":"A.K. Wong","year":"2001","unstructured":"Wong, A.K.: Resolution Enhancement Techniques in Optical Lithography. In: Tutorial Texts in Optical Engineering, vol.\u00a0TT47, SPIE Press, San Jose (2001)"},{"key":"22_CR8","doi-asserted-by":"crossref","unstructured":"Erdmann, A., Farkas, R., F\u00fchner, T., Tollk\u00fchn, B., K\u00f3kai, G.: Mask and Source Optimization for Lithographic Imaging Systems. In: Proc. SPIE, vol.\u00a05182 (2003) (in print)","DOI":"10.1117\/12.504732"},{"key":"22_CR9","doi-asserted-by":"crossref","unstructured":"Tollk\u00fchn, B., F\u00fchner, T., Matiut, D., Erdmann, A., K\u00f3kai, G., Semmler, A.: Will Darwin\u2019s Law Help Us to Improve Our Resist Models. In: Proc. SPIE, vol.\u00a05039, p. 291 (2003)","DOI":"10.1117\/12.485078"},{"key":"22_CR10","first-page":"24","volume-title":"Proceedings of the Sixth International Conference on Genetic Algorithms","author":"G.R. Harik","year":"1995","unstructured":"Harik, G.R.: Finding multimodal solutions using restricted tournament selection. In: Eshelman, L. (ed.) Proceedings of the Sixth International Conference on Genetic Algorithms, pp. 24\u201331. Morgan Kaufmann, San Francisco (1995)"},{"key":"22_CR11","volume-title":"Evolutionary design by computers","author":"D.E. Goldberg","year":"1999","unstructured":"Goldberg, D.E.: The Race, the Hurdle, and the Sweet Spot: Lessons from Genetic Algorithms for the Automation of Design Innovation and Creativity. In: Evolutionary design by computers, Morgan Kaufmann, San Francisco (1999)"}],"container-title":["Lecture Notes in Computer Science","Applications of Evolutionary Computing"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-540-24653-4_22.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,11,19]],"date-time":"2020-11-19T04:50:16Z","timestamp":1605761416000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-540-24653-4_22"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2004]]},"ISBN":["9783540213789","9783540246534"],"references-count":11,"URL":"https:\/\/doi.org\/10.1007\/978-3-540-24653-4_22","relation":{},"ISSN":["0302-9743","1611-3349"],"issn-type":[{"value":"0302-9743","type":"print"},{"value":"1611-3349","type":"electronic"}],"subject":[],"published":{"date-parts":[[2004]]}}}