{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,5]],"date-time":"2024-09-05T22:45:37Z","timestamp":1725576337207},"publisher-location":"Berlin, Heidelberg","reference-count":12,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"type":"print","value":"9783540244776"},{"type":"electronic","value":"9783540305859"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2005]]},"DOI":"10.1007\/978-3-540-30585-9_57","type":"book-chapter","created":{"date-parts":[[2011,1,18]],"date-time":"2011-01-18T05:39:11Z","timestamp":1295329151000},"page":"514-520","source":"Crossref","is-referenced-by-count":4,"title":["Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems)"],"prefix":"10.1007","author":[{"given":"Youngshin","family":"Han","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dongsik","family":"Park","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Sangwon","family":"Chae","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Chilgee","family":"Lee","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","reference":[{"key":"57_CR1","doi-asserted-by":"publisher","first-page":"115","DOI":"10.1109\/66.4384","volume":"3","author":"L.M. Wein","year":"1988","unstructured":"Wein, L.M.: Scheduling Semiconductor Wafer Fabrication. IEEE Transactions on Semiconductor Manufacturing\u00a03, 115\u2013130 (1988)","journal-title":"IEEE Transactions on Semiconductor Manufacturing"},{"key":"57_CR2","doi-asserted-by":"publisher","first-page":"273","DOI":"10.1109\/66.939828","volume":"14","author":"G. Mackulak","year":"2001","unstructured":"Mackulak, G., Savory, P.: A Simulation-based Experiment for Comparing AMHS performance in a Semiconductor Fabrication Facility. IEEE Transactions on Semiconductor Manufacturing\u00a014, 273\u2013280 (2001)","journal-title":"IEEE Transactions on Semiconductor Manufacturing"},{"key":"57_CR3","volume-title":"Solid State Electornic Devices","author":"B.G. Streetman","year":"1995","unstructured":"Streetman, B.G.: Solid State Electornic Devices. Prentice-Hall, Englewood Cliffs (1995)"},{"key":"57_CR4","volume-title":"Simulation Modeling & Analysis","author":"A.M. Law","year":"1991","unstructured":"Law, A.M., Kelton, W.D.: Simulation Modeling & Analysis. McGraw-Hill, New York (1991)"},{"key":"57_CR5","volume-title":"Object-oriented Simulation with Hierarchical, Modular Models","author":"B.P. Zeigler","year":"1990","unstructured":"Zeigler, B.P.: Object-oriented Simulation with Hierarchical, Modular Models. Academic Press, London (1990)"},{"key":"57_CR6","unstructured":"Liu, C.: A Modular Production Planning System for Semiconductor Manufacturing, Ph. D. Dissertation, Univ. of California, Berkeley (1992)"},{"key":"57_CR7","volume-title":"Modeling Techniques for Automated Production Planning in the Semiconductor Industry","author":"R.C. Leachman","year":"1993","unstructured":"Leachman, R.C.: Modeling Techniques for Automated Production Planning in the Semiconductor Industry. Wiley, Chichester (1993)"},{"key":"57_CR8","volume-title":"Simulation with Arena","author":"S. Kelton","year":"1998","unstructured":"Kelton, S.: Simulation with Arena. McGraw-Hill, New York (1998)"},{"key":"57_CR9","unstructured":"Pierrer, R.F.: Semiconductor Device Fundamentals. Addison Wesly, London"},{"key":"57_CR10","unstructured":"Dynamic Factory Modeling Person Guided Vehicle (PGV) Report (2000), \n                    \n                      www.sematech.org"},{"key":"57_CR11","unstructured":"Evaluation of Valves Used for Delivering Semiconductor Process Chemicals (1994), \n                    \n                      www.sematech.org"},{"key":"57_CR12","unstructured":"Metrics for 300 mm Automated Material Handling Systems (AMHS) and Production Equipment Interfaces_ Revision 1.0 (1998), \n                    \n                      www.sematech.org"}],"container-title":["Lecture Notes in Computer Science","Systems Modeling and Simulation: Theory and Applications"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-540-30585-9_57.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,5,2]],"date-time":"2021-05-02T23:32:21Z","timestamp":1619998341000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-540-30585-9_57"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2005]]},"ISBN":["9783540244776","9783540305859"],"references-count":12,"URL":"https:\/\/doi.org\/10.1007\/978-3-540-30585-9_57","relation":{},"ISSN":["0302-9743","1611-3349"],"issn-type":[{"type":"print","value":"0302-9743"},{"type":"electronic","value":"1611-3349"}],"subject":[],"published":{"date-parts":[[2005]]}}}