{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,4]],"date-time":"2024-09-04T20:33:48Z","timestamp":1725482028680},"publisher-location":"Berlin, Heidelberg","reference-count":23,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"type":"print","value":"9783540497721"},{"type":"electronic","value":"9783540497745"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2007]]},"DOI":"10.1007\/978-3-540-49774-5_23","type":"book-chapter","created":{"date-parts":[[2007,4,2]],"date-time":"2007-04-02T16:18:34Z","timestamp":1175530714000},"page":"519-542","source":"Crossref","is-referenced-by-count":2,"title":["An Evolutionary Approach For Robust Layout Synthesis of MEMS"],"prefix":"10.1007","author":[{"given":"Zhun","family":"Fan","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jiachuan","family":"Wang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Min","family":"Wen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Erik","family":"Goodman","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ronald","family":"Rosenberg","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","reference":[{"key":"23_CR1_23","doi-asserted-by":"publisher","first-page":"311","DOI":"10.1016\/S0045-7825(99)00389-8","volume":"186","author":"K Deb","year":"2000","unstructured":"K. Deb, \u201cAn efficient constraint handling method for genetic algorithms,\u201d Comput. Methods Appl. Mech. Engrg., Vol. 186, pp. 311-338, 2000.","journal-title":"Comput. Methods Appl. Mech. Engrg."},{"key":"23_CR2_23","unstructured":"K. Deb, and H. Gupta, \u201cA constraint handling strategy for robust multicriterion optimization,\u201d KanGAL Report No. 2005001, 2005."},{"key":"23_CR3_23","unstructured":"K. Deb, and H. Gupta, \u201cIntroducing Robustness in Multi-Objective Optimization,\u201d KanGAL Report No. 2004016, 2004."},{"key":"23_CR4_23","doi-asserted-by":"crossref","unstructured":"Z. Fan, K. Seo, R. Rosenberg, J. Hu, E. Goodman, \u201cSystem-Level Synthesis of MEMS via Genetic Programming and Bond Graphs,\u201d in Proc. 2003 Genetic and Evolutionary Computing Conference, Chicago, Springer, Lecture Notes in Computer Science, July, 2003, pp. 2058-2071.","DOI":"10.1007\/3-540-45110-2_103"},{"key":"23_CR5_23","unstructured":"G. Fedder, \u201cA Vision of Structured CAD for MEMS,\u201d in Proceedings of the Fifth ACM\/SIGDA Physical Design Workshop, April, 1996, pp. 76-80."},{"key":"23_CR6_23","doi-asserted-by":"crossref","unstructured":"G. Fedder, S. V. Iyer and T. Mukherjee, \u201cAutomated Optimal Synthesis Of Microresonators,\u201d in Proceedings of 9th International Conference on Solid State Sensors and Actuators (TRANSDUCERS \u201997), June 16-19, 1997, Chicago, IL, USA pp, 1109-1112.","DOI":"10.1109\/SENSOR.1997.635395"},{"key":"23_CR7_23","unstructured":"G. Fedder and T. Mukherjee, \u201cPhysical Design for Surface-Micromachined MEMS,\u201d in Proceedings of the Fifth ACM\/SIGDA Physical Design Workshop, April 1996, pp. 53-60."},{"issue":"28","key":"23_CR8_23","doi-asserted-by":"publisher","first-page":"5477","DOI":"10.1364\/AO.35.005477","volume":"35","author":"H Greiner","year":"1996","unstructured":"H. Greiner, \u201cRobust Optical Coating Design With Evolutionary Strategies,\u201d Applied Optics, Vol. 35, No. 28, pp. 5477-5483, 1996.","journal-title":"Applied Optics"},{"key":"23_CR9_23","doi-asserted-by":"publisher","first-page":"452","DOI":"10.1088\/0960-1317\/10\/3\/322","volume":"10","author":"YS Hong","year":"2000","unstructured":"Y. S. Hong, J. H. Lee, and S. H. Kim, \u201cA laterally driven symmetric microresonator for gyroscopic applications,\u201d Journal of Micromechanics and Microengineering, vol. 10, pp 452-458, 2000.","journal-title":"Journal of Micromechanics and Microengineering"},{"key":"23_CR10_23","doi-asserted-by":"crossref","unstructured":"K. Hwang, K. Lee, G. Park, B. Lee, Y. Cho, and S. Lee, \u201cRobust Design of a Vibratory Gyroscope With an Unbalanced Inner Torsion Gimbal Using Axiomatic Design,\u201d Journal of Micromechanics and Microengineering, No. 13, pp 8-17, 2003.","DOI":"10.1088\/0960-1317\/13\/1\/302"},{"issue":"3","key":"23_CR11_23","doi-asserted-by":"publisher","first-page":"303","DOI":"10.1109\/TEVC.2005.846356","volume":"9","author":"Y Jin","year":"2005","unstructured":"Y. Jin and J. Branke, \u201cEvolutionary optimization in uncertain environments - A survey. IEEE Transactions on Evolutionary Computation,\u201d Vol. 9, No. 3, pp. 303-317, 2005","journal-title":"IEEE Transactions on Evolutionary Computation,\u201d"},{"key":"23_CR12_23","doi-asserted-by":"crossref","unstructured":"Y. Jin and B. Sendhoff, \u201cTrade-off between Optimality and Robustness: An Evolutionary Multiobjective Approach,\u201d Proceedings of the Second International Conference on Evolutionary Multi-criterion Optimization, C. M. Fonseca et al (Eds.) LNCS 2632, Springer, 2003, pp 237-251.","DOI":"10.1007\/3-540-36970-8_17"},{"key":"23_CR13_23","first-page":"1030","volume-title":"GECCO 2004","author":"R Kamalian","year":"2004","unstructured":"R. Kamalian, H. Takagi, and A. M. Agogino, \u201cOptimized Design of MEMS by Evolutionary Multi-objective Optimization with Interactive Evolutionary Computation,\u201d in K. Deb et al. (Eds.): GECCO 2004, LNCS 3103, Springer-Verlag Berlin Heidelberg, 2004, pp. 1030-1041."},{"issue":"5","key":"23_CR14_23","doi-asserted-by":"publisher","first-page":"505","DOI":"10.1109\/JMEMS.2002.803279","volume":"11","author":"R Liu","year":"2002","unstructured":"R. Liu, B. Paden, and K. Turner, \u201cMEMS Resonators That are Robust to Process-Induced Feature Width Variations,\u201d Journal of Microelectromechanical Systems, vol. 11, No. 5, pp. 505-511,October 2002.","journal-title":"Journal of Microelectromechanical Systems"},{"key":"23_CR15_23","unstructured":"L. Ma and E. K. Antonsson, \u201cAutomated Mask-Layout and Process Synthesis for MEMS,\u201d in Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems , 2000, pp. 20-23."},{"key":"23_CR16_23","doi-asserted-by":"crossref","unstructured":"T. Mukherjee and G. Fedder, \u201cStructured Design Of Microelectromechanical Systems,\u201d in Proceedings of 34th Design Automation Conference (DAC \u201997), Anaheim, CA, USA, June 9-13, 1997, pp. 680-685.","DOI":"10.1145\/266021.266320"},{"key":"23_CR17_23","doi-asserted-by":"publisher","first-page":"118","DOI":"10.1016\/S0924-4247(98)00134-4","volume":"A 70","author":"T Mukherjee","year":"1998","unstructured":"T. Mukherjee, S. Iyer and G. K. Feeder, \u201cOptimization-based synthesis of micro-resonators,\u201d Sensors Actuators, A 70, pp. 118-127, 1998.","journal-title":"Sensors Actuators"},{"key":"23_CR18_23","doi-asserted-by":"publisher","first-page":"878","DOI":"10.1088\/0960-1317\/12\/6\/320","volume":"12","author":"A Ongkodjojo","year":"2002","unstructured":"A. Ongkodjojo, F. E. H. Tay, \u201cGlobal Optimization and Design for Microelectromechanical Systems devices based on Simulated Annealing,\u201d Journal of Micromechanics and Microengineering, vol. 12, pp. 878-897, 2002.","journal-title":"Journal of Micromechanics and Microengineering"},{"key":"23_CR19_23","unstructured":"P. J. Sedivec, \u201cRobust Optimization: Design in MEMS,\u201d Master Thesis, University of California, Berkeley, 2002"},{"key":"23_CR20_23","doi-asserted-by":"crossref","DOI":"10.1115\/1.800288","volume-title":"\u201cTaguchi on Robust Technology Development: Bringing Quality Engineering Upstream,\u201d","author":"G Taguchi","year":"1993","unstructured":"G. Taguchi, \u201cTaguchi on Robust Technology Development: Bringing Quality Engineering Upstream,\u201d ASME Press, New York, 1993."},{"issue":"3","key":"23_CR21_23","doi-asserted-by":"publisher","first-page":"201","DOI":"10.1109\/4235.661550","volume":"1","author":"S Tsutsui","year":"1997","unstructured":"S. Tsutsui, and A. Ghosh, \u201cGenetic Algorithms with a Robust Solution Searching Scheme,\u201d IEEE Transactions on Evolutionary Computation, Vol. 1, No. 3, pp 201-208, September 1997.","journal-title":"IEEE Transactions on Evolutionary Computation"},{"issue":"4","key":"23_CR22_23","doi-asserted-by":"publisher","first-page":"162","DOI":"10.1109\/4235.738986","volume":"2","author":"D Wiesmann","year":"1998","unstructured":"D. Wiesmann, U. Hammel, and T. Back, \u201cRobust Design of Multilayer Optical Coatings by Means of Evolutionary Algorithms,\u201d IEEE Transactions on Evolutionary Computation, Vol. 2, No. 4, pp. 162-16, November 1998.","journal-title":"IEEE Transactions on Evolutionary Computation"},{"key":"23_CR23_23","doi-asserted-by":"publisher","first-page":"16","DOI":"10.1109\/84.661380","volume":"7","author":"W Yeh","year":"1998","unstructured":"W. Yeh, S. Mukherjee, and N. C. MacDonald, \u201cOptimal Shape Design of An Electrostatic Comb Drive in MEMS,\u201d J. Microelectromech. Syst. vol. 7, pp. 16-26, 1998.","journal-title":"J. Microelectromech. Syst"}],"container-title":["Studies in Computational Intelligence","Evolutionary Computation in Dynamic and Uncertain Environments"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-540-49774-5_23.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,11,19]],"date-time":"2020-11-19T05:07:29Z","timestamp":1605762449000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-540-49774-5_23"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2007]]},"ISBN":["9783540497721","9783540497745"],"references-count":23,"URL":"https:\/\/doi.org\/10.1007\/978-3-540-49774-5_23","relation":{},"ISSN":["1860-949X","1860-9503"],"issn-type":[{"type":"print","value":"1860-949X"},{"type":"electronic","value":"1860-9503"}],"subject":[],"published":{"date-parts":[[2007]]}}}