{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,1,21]],"date-time":"2026-01-21T08:09:11Z","timestamp":1768982951033,"version":"3.49.0"},"publisher-location":"Berlin, Heidelberg","reference-count":19,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"value":"9783540693888","type":"print"},{"value":"9783540693895","type":"electronic"}],"license":[{"start":{"date-parts":[[2008,1,1]],"date-time":"2008-01-01T00:00:00Z","timestamp":1199145600000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"},{"start":{"date-parts":[[2008,1,1]],"date-time":"2008-01-01T00:00:00Z","timestamp":1199145600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2008]]},"DOI":"10.1007\/978-3-540-69389-5_5","type":"book-chapter","created":{"date-parts":[[2008,7,31]],"date-time":"2008-07-31T06:39:18Z","timestamp":1217486358000},"page":"26-35","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Symbiotic Simulation Control in Semiconductor Manufacturing"],"prefix":"10.1007","author":[{"given":"Heiko","family":"Aydt","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stephen John","family":"Turner","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wentong","family":"Cai","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Malcolm Yoke Hean","family":"Low","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Peter","family":"Lendermann","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Boon Ping","family":"Gan","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","reference":[{"key":"5_CR1","doi-asserted-by":"crossref","unstructured":"Potoradi, J., Boon, O., Fowler, J., Pfund, M., Mason, S.: Using simulation-based scheduling to maximize demand fulfillment in a semiconductor assembly facility. In: Proceedings of the Winter Simulation Conference, pp. 1857\u20131861 (2002)","DOI":"10.1109\/WSC.2002.1166479"},{"key":"5_CR2","doi-asserted-by":"crossref","unstructured":"Gan, B.P., Chan, L.P., Turner, S.J.: Interoperating simulations of automatic material handling systems and manufacturing processes. In: Proceedings of the Winter Simulation Conference, pp. 1129\u20131135 (2006)","DOI":"10.1109\/WSC.2006.323203"},{"key":"5_CR3","doi-asserted-by":"crossref","unstructured":"Scholl, W., Domaschke, J.: Implementation of modeling and simulation in semiconductor wafer fabrication with time constraints between wet etch and furnace operations. In: IEEE Transactions on Semiconductor Manufacturing, August 2000, vol.\u00a013, pp. 273\u2013277 (2000)","DOI":"10.1109\/66.857935"},{"key":"5_CR4","series-title":"International Series in Operations Research & Management Science","doi-asserted-by":"crossref","first-page":"213","DOI":"10.1007\/0-387-33117-4_9","volume-title":"Handbook of Production Scheduling","author":"M.E. Pfund","year":"2006","unstructured":"Pfund, M.E., Mason, S.J., Fowler, J.W.: Semiconductor Manufacturing Scheduling and Dispatching. In: Handbook of Production Scheduling. International Series in Operations Research & Management Science, vol.\u00a089, pp. 213\u2013241. Springer, New York (2006)"},{"key":"5_CR5","unstructured":"Huang, S.Y., Cai, W., Turner, S., Hsu, W.J., Zhou, S., Low, M.Y.H., Fujimoto, R., Ayani, R.: A generic symbiotic simulation framework. In: Proceedings of the 20th Workshop on Principles of Advanced and Distributed Simulation, pp. 131\u2013131 (2006)"},{"key":"5_CR6","unstructured":"Fujimoto, R., Lunceford, D., Page, E. (eds.): A.M.U.: Grand challenges for modeling and simulation: Dagstuhl report. Technical Report 350, Schloss Dagstuhl. Seminar No 02351 (August 2002)"},{"key":"5_CR7","doi-asserted-by":"crossref","unstructured":"Kamrani, F., Ayani, R.: Using on-line simulation for adaptive path planning of UAVs. In: Proceedings of the 11th IEEE International Symposium on Distributed Simulation and Real-time Applications, Chania, Greece, October 2007, pp. 167\u2013174 (2007)","DOI":"10.1109\/DS-RT.2007.23"},{"key":"5_CR8","doi-asserted-by":"crossref","unstructured":"Kennedy, C., Theodoropoulos, G.K., Sorge, V., Ferrari, E., Lee, P., Skelcher, C.: AIMSS: An architecture for data driven simulations in the social sciences. In: Proceedings of the International Conference on Computational Science, pp. 1098\u20131105 (2007)","DOI":"10.1007\/978-3-540-72584-8_144"},{"key":"5_CR9","doi-asserted-by":"crossref","unstructured":"Kennedy, C., Theodoropoulos, G.K.: Intelligent management of data driven simulations to support model building in the social sciences. In: Proceedings of the International Conference on Computational Science, pp. 562\u2013569 (2006)","DOI":"10.1007\/11758532_74"},{"key":"5_CR10","doi-asserted-by":"crossref","unstructured":"Low, M.Y.H., Turner, S.J., Ling, D., Peng, H.L., Chai, L.P., Lendermann, P., Buckley, S.: Symbiotic simulation for business process re-engineering in high-tech manufacturing and service networks. In: Proceedings of the Winter Simulation Conference (2007)","DOI":"10.1109\/WSC.2007.4419649"},{"key":"5_CR11","doi-asserted-by":"publisher","first-page":"85","DOI":"10.1145\/1082473.1082809","volume-title":"Proceedings of the 4th International Joint Conference on Autonomous Agents and Multiagent Systems","author":"M.Y.H. Low","year":"2005","unstructured":"Low, M.Y.H., Lye, K.W., Lendermann, P., Turner, S.J., Chim, R.T.W., Leo, S.H.: An agent-based approach for managing symbiotic simulation of semiconductor assembly and test operation. In: Proceedings of the 4th International Joint Conference on Autonomous Agents and Multiagent Systems, pp. 85\u201392. ACM Press, New York (2005)"},{"key":"5_CR12","doi-asserted-by":"crossref","unstructured":"Rulkens, H., van Campen, E., van Herk, J., Rooda, J.: Batch size optimization of a furnace and pre-clean area by using dynamic simulations. In: Advanced Semiconductor Manufacturing Conference and Workshop (IEEE\/SEMI), Boston, MA, USA, September 1998, pp. 439\u2013444 (1998)","DOI":"10.1109\/ASMC.1998.731643"},{"key":"5_CR13","doi-asserted-by":"crossref","unstructured":"Potoradi, J., Winz, G., Kam, L.W.: Determining optimal lot-size for a semiconductor back-end factory. In: Proceedings of the Winter Simulation Conference, pp. 720\u2013726 (1999)","DOI":"10.1145\/324138.324466"},{"key":"5_CR14","doi-asserted-by":"crossref","unstructured":"Ak\u00e7ali, E., Uzsoy, R., Hiscock, D.G., Moser, A.L., Teyner, T.J.: Alternative loading and dispatching policies for furnace operations in semiconductor manufacturing: a comparison by simulation. In: Proceedings of the Winter Simulation Conference, pp. 1428\u20131435 (2000)","DOI":"10.1109\/WSC.2000.899121"},{"key":"5_CR15","doi-asserted-by":"publisher","first-page":"487","DOI":"10.1080\/00207540600792531","volume":"45","author":"T.E. Lee","year":"2007","unstructured":"Lee, T.E., Lee, H.Y., Lee, S.J.: Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots. International Journal of Production Research\u00a045, 487\u2013507 (2007)","journal-title":"International Journal of Production Research"},{"key":"5_CR16","doi-asserted-by":"crossref","unstructured":"Gan, B.P., Lendermann, P., Quek, K.P.T., van der Heijden, B., Chin, C.C., Koh, C.Y.: Simulation analysis on the impact of furnace batch size increase in a deposition loop. In: Perrone, L.F., Lawson, B., Liu, J., Wieland, F.P. (eds.) Proceedings of the Winter Simulation Conference, pp. 1821\u20131828 (2006)","DOI":"10.1109\/WSC.2006.322961"},{"key":"5_CR17","series-title":"Lecture Notes in Computer Science","doi-asserted-by":"publisher","first-page":"277","DOI":"10.1007\/10719619_21","volume-title":"Intelligent Agents VI. Agent Theories, Architectures, and Languages","author":"P. Busetta","year":"2000","unstructured":"Busetta, P., Howden, N., R\u00f6nnquist, R., Hodgson, A.: Structuring BDI agents in functional clusters. In: Jennings, N.R. (ed.) ATAL 1999. LNCS, vol.\u00a01757, pp. 277\u2013289. Springer, Heidelberg (2000)"},{"key":"5_CR18","series-title":"Lecture Notes in Artificial Intelligence","doi-asserted-by":"publisher","first-page":"139","DOI":"10.1007\/11678823_9","volume-title":"Programming Multi-Agent Systems","author":"L. Braubach","year":"2006","unstructured":"Braubach, L., Pokahr, A., Lamersdorf, W.: Extending the capability concept for flexible BDI agent modularization. In: Bordini, R.H., Dastani, M., Dix, J., Seghrouchni, A.E.F. (eds.) PROMAS 2005. LNCS (LNAI), vol.\u00a03862, pp. 139\u2013155. Springer, Heidelberg (2006)"},{"key":"5_CR19","doi-asserted-by":"publisher","first-page":"291","DOI":"10.1016\/S0003-2670(99)00818-1","volume":"407","author":"J.K. Lu","year":"2000","unstructured":"Lu, J.K., Ko, F.H., Chu, T.C., Sun, Y.C., Wang, M.Y., Wang, T.K.: Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor processes. Analytica Chimica Acta\u00a0407, 291\u2013300 (2000)","journal-title":"Analytica Chimica Acta"}],"container-title":["Lecture Notes in Computer Science","Computational Science \u2013 ICCS 2008"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-540-69389-5_5","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,1,31]],"date-time":"2025-01-31T07:34:03Z","timestamp":1738308843000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1007\/978-3-540-69389-5_5"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2008]]},"ISBN":["9783540693888","9783540693895"],"references-count":19,"URL":"https:\/\/doi.org\/10.1007\/978-3-540-69389-5_5","relation":{},"ISSN":["0302-9743","1611-3349"],"issn-type":[{"value":"0302-9743","type":"print"},{"value":"1611-3349","type":"electronic"}],"subject":[],"published":{"date-parts":[[2008]]},"assertion":[{"value":"This content has been made available to all.","name":"free","label":"Free to read"}]}}