{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,1]],"date-time":"2026-03-01T01:31:10Z","timestamp":1772328670406,"version":"3.50.1"},"publisher-location":"Berlin, Heidelberg","reference-count":12,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"value":"9783642108167","type":"print"},{"value":"9783642108174","type":"electronic"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2009]]},"DOI":"10.1007\/978-3-642-10817-4_109","type":"book-chapter","created":{"date-parts":[[2009,12,15]],"date-time":"2009-12-15T08:36:47Z","timestamp":1260866207000},"page":"1123-1137","source":"Crossref","is-referenced-by-count":5,"title":["A Study on Wafer-Handling Robot with Coaxial Twin-Shaft Magnetic Fluid Seals"],"prefix":"10.1007","author":[{"given":"Ming","family":"Cong","sequence":"first","affiliation":[]},{"given":"Penglei","family":"Dai","sequence":"additional","affiliation":[]},{"given":"Huili","family":"Shi","sequence":"additional","affiliation":[]}],"member":"297","reference":[{"key":"109_CR1","first-page":"70","volume":"39","author":"E. Korczynski","year":"1996","unstructured":"Korczynski, E.: Design challenges in vacuum robotics. Solid State Technology\u00a039, 70\u201376 (1996)","journal-title":"Solid State Technology"},{"key":"109_CR2","doi-asserted-by":"publisher","first-page":"324","DOI":"10.1108\/01439910210441119","volume":"29","author":"K. Takashi","year":"2002","unstructured":"Takashi, K.: Vacuum manipulator for semiconductor manufacturing equipment. Industrial Robot\u00a029, 324\u2013328 (2002)","journal-title":"Industrial Robot"},{"key":"109_CR3","doi-asserted-by":"publisher","first-page":"377","DOI":"10.1115\/1.2833950","volume":"1999","author":"Y. Mitsuya","year":"1999","unstructured":"Mitsuya, Y., Tomita, K., Takeuchi, K.: Meniscus shape and splashing of magnetic fluid in a magnetic fluid seal. Journal of Tribology\u00a01999, 377\u2013383 (1999)","journal-title":"Journal of Tribology"},{"key":"109_CR4","doi-asserted-by":"publisher","first-page":"107","DOI":"10.1108\/00368790510595075","volume":"57","author":"W. Ochonski","year":"2005","unstructured":"Ochonski, W.: New designs of magnetic fluid exclusion seals for rolling bearings. Industrial Lubrication and Tribology\u00a057, 107\u2013115 (2005)","journal-title":"Industrial Lubrication and Tribology"},{"key":"109_CR5","doi-asserted-by":"publisher","first-page":"288","DOI":"10.1108\/00368799710189507","volume":"49","author":"Z. Bhimani","year":"1997","unstructured":"Bhimani, Z., Wilson, B.: New low cost ferrofluidic sealing challenges the mechanical seal. Industrial Lubrication and Tribology\u00a049, 288\u2013290 (1997)","journal-title":"Industrial Lubrication and Tribology"},{"key":"109_CR6","doi-asserted-by":"crossref","unstructured":"Ming, C., Yumin, Z., Ying, J., Renke, K., Dongming, G.: An automated wafer-handling system based on the integrated circuit equipments. In: IEEE International Conference on Robotics and Biomimetics, ROBIO, July 2005, vol.\u00a02005, pp. 240\u2013245 (2005)","DOI":"10.1109\/ROBIO.2005.246270"},{"key":"109_CR7","doi-asserted-by":"publisher","first-page":"345","DOI":"10.1002\/tt.3020110406","volume":"11","author":"Z. Szydlo","year":"2005","unstructured":"Szydlo, Z., Ochonski, W., Zachara, B.: Experiments on magnetic fluid rotary seals operating under vacuum conditions. TriboTest\u00a011, 345\u2013354 (2005)","journal-title":"TriboTest"},{"key":"109_CR8","doi-asserted-by":"publisher","first-page":"204","DOI":"10.1088\/0953-8984\/20\/20\/204145","volume":"20","author":"Y. Mitamura","year":"2008","unstructured":"Mitamura, Y., Arioka, S., Sakota, D., Sekine, K., Azegami, M.: Application of a magnetic fluid seal to rotary blood pumps. Journal of Physics Condensed Matter\u00a020, 204\u2013208 (2008)","journal-title":"Journal of Physics Condensed Matter"},{"key":"109_CR9","doi-asserted-by":"publisher","first-page":"174","DOI":"10.1016\/0304-8853(95)00365-7","volume":"149","author":"K. Raj","year":"1995","unstructured":"Raj, K., Moskowitz, B., Casciari, R.: Advances in ferrofluid technology. Journal of Magnetism and Magnetic Materials\u00a0149, 174\u2013180 (1995)","journal-title":"Journal of Magnetism and Magnetic Materials"},{"key":"109_CR10","volume-title":"Ferrohydrodynamics","author":"R.E. Rosensweig","year":"1985","unstructured":"Rosensweig, R.E.: Ferrohydrodynamics. Cambridge University Press, Cambridge (1985)"},{"key":"109_CR11","doi-asserted-by":"publisher","first-page":"2595","DOI":"10.1063\/1.333246","volume":"55","author":"M.S. Sarma","year":"1983","unstructured":"Sarma, M.S., Stahl, P., Ward, A.: Magnetic-field analysis of ferrofluidic seals for optimum design. Journal of Applied Physics\u00a055, 2595\u20132597 (1983)","journal-title":"Journal of Applied Physics"},{"key":"109_CR12","doi-asserted-by":"crossref","unstructured":"Cong, M., Shi, H.: A study of magnetic fluid rotary seals for wafer handling robot. In: The 15th international conference on mechatronics and machine vision in practice, December 2008, vol.\u00a02008, pp. 269\u2013273 (2008)","DOI":"10.1109\/MMVIP.2008.4749545"}],"container-title":["Lecture Notes in Computer Science","Intelligent Robotics and Applications"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-642-10817-4_109.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,4,30]],"date-time":"2021-04-30T11:41:32Z","timestamp":1619782892000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-642-10817-4_109"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2009]]},"ISBN":["9783642108167","9783642108174"],"references-count":12,"URL":"https:\/\/doi.org\/10.1007\/978-3-642-10817-4_109","relation":{},"ISSN":["0302-9743","1611-3349"],"issn-type":[{"value":"0302-9743","type":"print"},{"value":"1611-3349","type":"electronic"}],"subject":[],"published":{"date-parts":[[2009]]}}}