{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,9,25]],"date-time":"2025-09-25T15:26:17Z","timestamp":1758813977213,"version":"3.37.3"},"publisher-location":"Berlin, Heidelberg","reference-count":22,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"type":"print","value":"9783642125379"},{"type":"electronic","value":"9783642125386"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010]]},"DOI":"10.1007\/978-3-642-12538-6_17","type":"book-chapter","created":{"date-parts":[[2010,4,16]],"date-time":"2010-04-16T05:35:14Z","timestamp":1271396114000},"page":"199-210","source":"Crossref","is-referenced-by-count":5,"title":["Evolutionary Algorithms for Planar MEMS Design Optimisation: A Comparative Study"],"prefix":"10.1007","author":[{"given":"Elhadj","family":"Benkhelifa","sequence":"first","affiliation":[]},{"given":"Michael","family":"Farnsworth","sequence":"additional","affiliation":[]},{"given":"Ashutosh","family":"Tiwari","sequence":"additional","affiliation":[]},{"given":"Meiling","family":"Zhu","sequence":"additional","affiliation":[]}],"member":"297","reference":[{"key":"17_CR1","unstructured":"Fujita, H.: Two Decades of MEMS\u2013 from Surprise to Enterprise. In: Proceedings of MEMS, Kobe, Japan, January 21-25 (2007)"},{"key":"17_CR2","volume-title":"MEMS and Microsystems","author":"T.R. Hsu","year":"2008","unstructured":"Hsu, T.R.: MEMS and Microsystems, 2nd edn. Wiley, Chichester (2008)","edition":"2"},{"issue":"11","key":"17_CR3","first-page":"583","volume":"126","author":"T. Isoda","year":"2006","unstructured":"Isoda, T., Ishida, Y.: Seperation of Cells using Fluidic MEMS Device and a Quantitative Analysis of Cell Movement. Transactions of the Institute of Electrical Engineering of Japan\u00a0126(11), 583\u2013589 (2006)","journal-title":"Transactions of the Institute of Electrical Engineering of Japan"},{"key":"17_CR4","doi-asserted-by":"crossref","unstructured":"Hostis, F.l., Green, N.G., Morgan, H., Akaisi, M.: Solid state AC electroosmosis micro pump on a Chip. In: International Conference on Nanoscience and Nanotechnology, ICONN, Brisbane, Qld, July 2006, pp. 282\u2013285 (2006)","DOI":"10.1109\/ICONN.2006.340607"},{"key":"17_CR5","doi-asserted-by":"crossref","unstructured":"Hao, Y., Zhang, D.: Silicon-based MEMS process and standardization. In: Proceedings of the 7th International Conference on Solid-State and Integrated Circuits Technology 2004, vol.\u00a03, pp. 1835\u20131838 (2004)","DOI":"10.1109\/ICSICT.2004.1435192"},{"key":"17_CR6","doi-asserted-by":"crossref","unstructured":"Fedder, G.: Structured Design of Integrated MEM. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, FL, USA, pp. 1\u20138 (1999)","DOI":"10.1109\/MEMSYS.1999.746742"},{"key":"17_CR7","doi-asserted-by":"crossref","DOI":"10.1007\/b117574","volume-title":"Microsystem Design","author":"S.D. Senturia","year":"2001","unstructured":"Senturia, S.D.: Microsystem Design. Kluwer Academic Publishers, Dordrecht (2001)"},{"key":"17_CR8","doi-asserted-by":"publisher","first-page":"223","DOI":"10.1016\/0924-4247(96)80111-7","volume":"50","author":"D. Haronain","year":"1995","unstructured":"Haronain, D.: Maximizing microelectromechanical sensor and actuator sensitivity by optimizing geometry. Sensors and Actuators A\u00a050, 223\u2013236 (1995)","journal-title":"Sensors and Actuators A"},{"key":"17_CR9","unstructured":"Iyer, S., Mukherjee, T., Fedder, G.: Automated Optimal Synthesis of Microresonators. In: Solid-State Sensors and Actuators, Chicago, IL, pp. 12\u201319 (1997)"},{"key":"17_CR10","unstructured":"Kamalian, R., Zhou, N., Agogino, A.M.: A Comparison of MEMS Synthesis Techniques. In: Proceedings of the 1st Pacific Rim Workshop on Transducers and Micro\/Nano Technologies, Xiamen, China, July 22-24, pp. 239\u2013242 (2002)"},{"key":"17_CR11","doi-asserted-by":"crossref","unstructured":"Li, H., Antonsson, E.K.: Evolutionary Techniques in MEMS Synthesis. In: Proc. DETC 1998, 1998 ASME Design Engineering Technical Conferences, Atlanta, GA (1998)","DOI":"10.1115\/DETC98\/MECH-5840"},{"key":"17_CR12","doi-asserted-by":"crossref","unstructured":"Zhou, N., Agogino, A.M., Pister, K.S.: Automated Design Synthesis for Micro-Electro-Mechanical Systems (MEMS). In: Proceedings of the ASME Design Automation Conference, ASME CD ROM, Montreal, Canada, September 29-October 2 (2002)","DOI":"10.1115\/DETC2002\/DAC-34065"},{"key":"17_CR13","series-title":"Lecture Notes in Computer Science","doi-asserted-by":"crossref","first-page":"1030","DOI":"10.1007\/978-3-540-24855-2_114","volume-title":"Genetic and Evolutionary Computation \u2013 GECCO 2004","author":"R.H. Kamalian","year":"2004","unstructured":"Kamalian, R.H., Takagi, H., Agogino, A.M.: Optimized Design of MEMS by Evolutionary Multi-objective Optimization with Interactive Evolutionary Computation. In: Deb, K., et al. (eds.) GECCO 2004. LNCS, vol.\u00a03103, pp. 1030\u20131041. Springer, Heidelberg (2004)"},{"key":"17_CR14","doi-asserted-by":"crossref","unstructured":"Zhang, Y., Kamalian, R., Agogino, A.M., Sequin, C.: Hierarchical MEMS Synthesis and Optimization. In: Varadan, V.K. (ed.) Proceedings of SPIE, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology. International Society for Optical Engineering, CD ROM. Paper 5763-12, vol.\u00a05763, pp. 96\u2013106 (2005)","DOI":"10.1117\/12.600376"},{"key":"17_CR15","unstructured":"Zhou, N., Zhu, B., Agogino, A.M., Pister, K.: Evolutionary Synthesis of MEMS (Microelectronic Mechanical Systems) Design. In: Proceedings of ANNIE 2001, IEEE Neural Networks Council and Smart Engineering Systems Laboratory, Marriott Pavilion Hotel, St. Louis, Missouri, November 4-7, vol.\u00a011, pp. 197\u2013202. ASME Press (2001)"},{"key":"17_CR16","unstructured":"Benkhelifa, E., Farnsworth, M., Tiwari, A., Zhu, M.: An Integrated Framework for MEMS Design Optimisation using modeFrontier. In: EnginSoft International Conference 2009, CAE Technologies For Industry and ANSYS Italian Conference 2009 (2009)"},{"key":"17_CR17","doi-asserted-by":"crossref","unstructured":"Lohn, J.D., Kraus, W.F., Hornby, G.S.: Automated Design of a MEMS Resonator. In: Proceedings of the Congress on Evolutionary Computation, pp. 3486\u20133491 (2007)","DOI":"10.1109\/CEC.2007.4424924"},{"key":"17_CR18","unstructured":"Poles, S.: MOGA-II An Improved Multi-Objective Genetic Algorithm. Technical report 2003-006, Esteco, Trieste (2003)"},{"key":"17_CR19","series-title":"Lecture Notes in Computer Science","doi-asserted-by":"publisher","first-page":"849","DOI":"10.1007\/3-540-45356-3_83","volume-title":"Parallel Problem Solving from Nature-PPSN VI","author":"K. Deb","year":"2000","unstructured":"Deb, K., Agrawal, S., Pratap, A., Meyarivan, T.: A fast elitist non-dominated sorting genetic algorithm for multi-objective optimization: NSGA-II. In: Schonauer, M., et al. (eds.) PPSN 2000. LNCS, vol.\u00a01917, pp. 849\u2013858. Springer, Heidelberg (2000)"},{"key":"17_CR20","doi-asserted-by":"crossref","unstructured":"Benkhelifa, E., Farnsworth, M., Bandi, G., Tiwari, A., Zhu, M., Ramsden, J.: Design and Optimisation of Microelectromechanical Systems: A Review of the State-of-the-Art. International Journal of Design Engineering, Special Issue Evolutionary Computing for Engineering Design (2009) (accepted to be published)","DOI":"10.1504\/IJDE.2010.032822"},{"key":"17_CR21","doi-asserted-by":"crossref","unstructured":"Zhang, Y., Kamalian, R., Agogino, A.M., S\u00e9quin, C.H.: Design Synthesis of Microelectromechanical Systems Using Genetic Algorithms with Component-Based Geno-type Representation. In: Proc. of GECCO 2006 (Genetic and Evolutionary Computation Conference), Seattle, July 8-12, vol.\u00a01, pp. 731\u2013738 (2006) ISBN 1-59593 187-2","DOI":"10.1145\/1143997.1144124"},{"key":"17_CR22","first-page":"267","volume-title":"Genetic Algorithms and Evolution Strategies in Engineering and Computer Science","author":"C. Poloni","year":"1997","unstructured":"Poloni, C., Pediroda, V.: GA coupled with computationally expensive simulations: tools to improve efficiency. In: Genetic Algorithms and Evolution Strategies in Engineering and Computer Science, pp. 267\u2013288. John Wiley and Sons, England (1997)"}],"container-title":["Studies in Computational Intelligence","Nature Inspired Cooperative Strategies for Optimization (NICSO 2010)"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-642-12538-6_17.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,2,20]],"date-time":"2025-02-20T01:17:24Z","timestamp":1740014244000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-642-12538-6_17"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010]]},"ISBN":["9783642125379","9783642125386"],"references-count":22,"URL":"https:\/\/doi.org\/10.1007\/978-3-642-12538-6_17","relation":{},"ISSN":["1860-949X","1860-9503"],"issn-type":[{"type":"print","value":"1860-949X"},{"type":"electronic","value":"1860-9503"}],"subject":[],"published":{"date-parts":[[2010]]}}}