{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,15]],"date-time":"2024-09-15T14:24:27Z","timestamp":1726410267771},"publisher-location":"Berlin, Heidelberg","reference-count":11,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"type":"print","value":"9783642166921"},{"type":"electronic","value":"9783642166938"}],"license":[{"start":{"date-parts":[[2010,1,1]],"date-time":"2010-01-01T00:00:00Z","timestamp":1262304000000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2010]]},"DOI":"10.1007\/978-3-642-16693-8_13","type":"book-chapter","created":{"date-parts":[[2010,11,6]],"date-time":"2010-11-06T12:12:05Z","timestamp":1289045525000},"page":"117-127","source":"Crossref","is-referenced-by-count":0,"title":["The 3D Display and Analysis of the Pattern of Photolithography"],"prefix":"10.1007","author":[{"given":"Lih-Shyang","family":"Chen","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Young-Jinn","family":"Lay","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lian-Yong","family":"Lin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jing-Jou","family":"Tang","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Wen-Lin","family":"Cheng","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yu-Jen","family":"Lin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","reference":[{"key":"13_CR1","doi-asserted-by":"crossref","unstructured":"Mack, C.A.: Field Guide to Optical Lithography. SPIE-The International Society for Optical Engineering FG 2006 (2006)","DOI":"10.1117\/3.665802"},{"key":"13_CR2","unstructured":"Tang, J.-J., Tien, T.-K., Wang, L.-Y.: Study of Pattern Transfer Quality for Nanoscale Lithography. In: 7th International Semiconductor Technology Conference (ISTC 2008), Shanghai, pp. 271\u2013276 (2008)"},{"key":"13_CR3","unstructured":"Tang, J.-J., Liao, C.-L., Jheng, P.-C., Chen, S.-H., Lai, K.-M., Lin, L.-J.: Yield Analysis for the 65nm SRAM Cells Design with Resolution Enhancement Techniques (RET). In: 18th VLSI Design\/CAD Symposium, Hualien (2007)"},{"key":"13_CR4","unstructured":"Chen, S.-H.: The Transformation Quality Analysis of Layout Patterns in Nanoscale Lithography. Master\u2019s thesis, Southern Taiwan University of Technology (2009)"},{"key":"13_CR5","unstructured":"Yong, L.-L.: Realization of Automatic Optical Proximity Correction. Master\u2019s thesis, National Chi Nan University (2009)"},{"key":"13_CR6","unstructured":"Chen, S.-H., Lin, L.-Y., Tang, J.-J.: Analysis of Mask Partition to Facilitate SoC Photolithography Simulation. In: 2008 Conference on Innovative Applications of System Prototyping and Circuit Design, pp. 86\u201391 (October 2008)"},{"key":"13_CR7","unstructured":"Tang, J.-J., Jheng, P.-C.: A GDSII Data Translator for Photolithography Simulator \u2013 SPLAT. In: Conference on Electronic Communication and Applications (CECA), EP036, Taiwan Kaoshiung (2007)"},{"key":"13_CR8","unstructured":"Tang, J.-J.: Development of the Graphic User Interface to Backend Design and Photolithography of Integrated Circuits. In: 2005 International Conference on Open Source (ICOS 2005), Taipei (2005)"},{"key":"13_CR9","unstructured":"Tang, J.-J., Sheu, M.-L., Lin, L.-Y.: Mask Yield Analysis System (MaYas). U-Tools Forum., http:\/\/larc.ee.nthu.edu.tw\/utool\/info.php"},{"key":"13_CR10","unstructured":"User\u2019s Guide for SPLAT Version 6.0. Electronics Research Laboratory, University of California Berkeley"},{"key":"13_CR11","unstructured":"Lin, L.-Y., Sheu, M.-L., Tang, J.-J.: A Study of Optical Lithography Simulation Using PC-Cluster. In: 5th Workshop on Grid Technologies and Applications (WoGTA 2008), pp. 73\u201377 (2008)"}],"container-title":["Lecture Notes in Computer Science","Computational Collective Intelligence. Technologies and Applications"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-642-16693-8_13","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,6,6]],"date-time":"2019-06-06T03:32:30Z","timestamp":1559791950000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-642-16693-8_13"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2010]]},"ISBN":["9783642166921","9783642166938"],"references-count":11,"URL":"https:\/\/doi.org\/10.1007\/978-3-642-16693-8_13","relation":{},"ISSN":["0302-9743","1611-3349"],"issn-type":[{"type":"print","value":"0302-9743"},{"type":"electronic","value":"1611-3349"}],"subject":[],"published":{"date-parts":[[2010]]}}}