{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,6]],"date-time":"2024-09-06T15:56:26Z","timestamp":1725638186001},"publisher-location":"Berlin, Heidelberg","reference-count":10,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"type":"print","value":"9783642271793"},{"type":"electronic","value":"9783642271809"}],"license":[{"start":{"date-parts":[[2011,1,1]],"date-time":"2011-01-01T00:00:00Z","timestamp":1293840000000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2011]]},"DOI":"10.1007\/978-3-642-27180-9_26","type":"book-chapter","created":{"date-parts":[[2011,12,3]],"date-time":"2011-12-03T07:42:50Z","timestamp":1322898170000},"page":"213-218","source":"Crossref","is-referenced-by-count":0,"title":["Relationship between the Binding Energy and Boundary Condition in SiOC Film for ILD Application"],"prefix":"10.1007","author":[{"given":"Teresa","family":"Oh","sequence":"first","affiliation":[]},{"given":"Chy Hyung","family":"Kim","sequence":"additional","affiliation":[]},{"given":"Chi Sup","family":"Jung","sequence":"additional","affiliation":[]}],"member":"297","reference":[{"key":"26_CR1","first-page":"1675","volume":"48","author":"R. Navamathavan","year":"2006","unstructured":"Navamathavan, R., Choi, C.K.: Journal of the Korean Physical Society\u00a048, 1675\u20131679 (2006)","journal-title":"Journal of the Korean Physical Society"},{"key":"26_CR2","doi-asserted-by":"publisher","first-page":"6417","DOI":"10.1016\/j.tsf.2010.04.053","volume":"518","author":"S.J. Cho","year":"2010","unstructured":"Cho, S.J., Bae, S., Boo, J.H.: Thin Solid Films\u00a0518, 6417\u20136421 (2010)","journal-title":"Thin Solid Films"},{"key":"26_CR3","doi-asserted-by":"publisher","first-page":"1150","DOI":"10.3938\/jkps.56.1097","volume":"56","author":"T. Oh","year":"2010","unstructured":"Oh, T., Choi, C.K.: Journal of the Korean Physical Society\u00a056, 1150\u20131155 (2010)","journal-title":"Journal of the Korean Physical Society"},{"key":"26_CR4","doi-asserted-by":"publisher","first-page":"234","DOI":"10.1016\/S0925-9635(00)00473-8","volume":"10","author":"Grill","year":"2001","unstructured":"Grill: Diamond and Related Materials\u00a010, 234\u2013239 (2001)","journal-title":"Diamond and Related Materials"},{"key":"26_CR5","doi-asserted-by":"publisher","first-page":"1598","DOI":"10.1109\/TPS.2010.2049665","volume":"38","author":"T. Oh","year":"2010","unstructured":"Oh, T., Kim, C.H.: IEEE Trans. Plasma Science\u00a038, 1598\u20131602 (2010)","journal-title":"IEEE Trans. Plasma Science"},{"key":"26_CR6","doi-asserted-by":"publisher","first-page":"193","DOI":"10.1016\/j.mseb.2005.03.030","volume":"121","author":"M. Damayanti","year":"2005","unstructured":"Damayanti, M., Widodo, J., Sritharan, T., Mhaisalkar, S.G., Lu, W., Gan, Z.H., Zeng, K.Y., Hsia, L.C.: Materials Science and Engineering B\u00a0121, 193\u2013198 (2005)","journal-title":"Materials Science and Engineering B"},{"key":"26_CR7","doi-asserted-by":"publisher","first-page":"240","DOI":"10.1088\/1009-1963\/16\/1\/041","volume":"16","author":"L.D. Yu","year":"2007","unstructured":"Yu, L.D., Lei, S., Dong, Z.S., Yi, W., Yan, L.X., Qi, H.R.: Chin. Phys. Soc.\u00a016, 240\u2013245 (2007)","journal-title":"Chin. Phys. Soc."},{"key":"26_CR8","doi-asserted-by":"publisher","first-page":"157","DOI":"10.1016\/j.susc.2005.08.004","volume":"12","author":"W.J. Huang","year":"2005","unstructured":"Huang, W.J., Li, B.Q., Zuo, J.M.: Surface Science\u00a012, 157\u2013160 (2005)","journal-title":"Surface Science"},{"key":"26_CR9","doi-asserted-by":"publisher","first-page":"6382","DOI":"10.1016\/j.tsf.2010.03.137","volume":"518","author":"H.M. Li","year":"2010","unstructured":"Li, H.M., Zhang, G., Yoo, W.J.: Thin Solid Films\u00a0518, 6382\u20136384 (2010)","journal-title":"Thin Solid Films"},{"key":"26_CR10","doi-asserted-by":"publisher","first-page":"23","DOI":"10.1109\/TNANO.2005.858591","volume":"5","author":"T. Oh","year":"2006","unstructured":"Oh, T.: IEEE transactions on Nanotechnology\u00a05, 23\u201329 (2006)","journal-title":"IEEE transactions on Nanotechnology"}],"container-title":["Communications in Computer and Information Science","Grid and Distributed Computing"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-642-27180-9_26","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,4,20]],"date-time":"2019-04-20T04:33:21Z","timestamp":1555734801000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-642-27180-9_26"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2011]]},"ISBN":["9783642271793","9783642271809"],"references-count":10,"URL":"https:\/\/doi.org\/10.1007\/978-3-642-27180-9_26","relation":{},"ISSN":["1865-0929","1865-0937"],"issn-type":[{"type":"print","value":"1865-0929"},{"type":"electronic","value":"1865-0937"}],"subject":[],"published":{"date-parts":[[2011]]}}}