{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,9,7]],"date-time":"2024-09-07T09:48:12Z","timestamp":1725702492649},"publisher-location":"Berlin, Heidelberg","reference-count":6,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"type":"print","value":"9783642327698"},{"type":"electronic","value":"9783642327704"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012]]},"DOI":"10.1007\/978-3-642-32770-4_6","type":"book-chapter","created":{"date-parts":[[2012,9,26]],"date-time":"2012-09-26T00:28:20Z","timestamp":1348619300000},"page":"94-109","source":"Crossref","is-referenced-by-count":1,"title":["Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS"],"prefix":"10.1007","author":[{"given":"Toshiyuki","family":"Tsuchiya","sequence":"first","affiliation":[]},{"given":"Hiroyuki","family":"Tokusaki","sequence":"additional","affiliation":[]},{"given":"Yoshikazu","family":"Hirai","sequence":"additional","affiliation":[]},{"given":"Koji","family":"Sugano","sequence":"additional","affiliation":[]},{"given":"Osamu","family":"Tabata","sequence":"additional","affiliation":[]}],"member":"297","reference":[{"issue":"4","key":"6_CR1","doi-asserted-by":"publisher","first-page":"440","DOI":"10.1109\/4.753677","volume":"34","author":"C.T.-C. Nguyen","year":"1999","unstructured":"Nguyen, C.T.-C., Howe, R.T.: An Integrated CMOS Micromechancial resonator High-Q oscillator. IEEE Journal of Solid-State Circuits\u00a034(4), 440\u2013455 (1999)","journal-title":"IEEE Journal of Solid-State Circuits"},{"issue":"7","key":"6_CR2","first-page":"282","volume":"126","author":"K. Ayano","year":"2006","unstructured":"Ayano, K., Suzuki, K., Hashiguchi, G., Fujita, H.: Electromechanical Analysis of a Micromahicned Comb-Drive Actuator by Admittance Measurement. IEE J. Trans. SM\u00a0126(7), 282\u2013285 (2006)","journal-title":"IEE J. Trans. SM"},{"key":"6_CR3","doi-asserted-by":"publisher","first-page":"2935","DOI":"10.1109\/SICE.2007.4421493","volume-title":"SICE Annual Conference 2007","author":"H. Oiso","year":"2007","unstructured":"Oiso, H., Kariya, S., Hashiguchi, G.: A proposal of gyroscope sensor using asymmetrical comb drive actuator. In: SICE Annual Conference 2007, September 17-20, pp. 2935\u20132939. Kagawa University, Japan (2007)"},{"key":"6_CR4","doi-asserted-by":"crossref","unstructured":"Tokusaki, H., Hirai, Y., Sugano, K., Tsuchiya, T., Tabata, O.: Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection. In: APCOT 2010, Perth, Australia, July 6-9, p. 160 (2010)","DOI":"10.1541\/ieejsmas.130.443"},{"key":"6_CR5","doi-asserted-by":"crossref","unstructured":"Tokusaki, H., Hirai, Y., Sugano, K., Tsuchiya, T., Tabata, O.: Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection. In: IEEE NEMS 2011, Kaohsiung, Taiwan, February 20-23, pp. 1288\u20131292 (2011)","DOI":"10.1109\/NEMS.2011.6017582"},{"issue":"6","key":"6_CR6","doi-asserted-by":"publisher","first-page":"1418","DOI":"10.1109\/JMEMS.2008.2007274","volume":"17","author":"S.E. Alper","year":"2008","unstructured":"Alper, S.E., Temiz, Y., Akin, T.: A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope. Journal of Microelectromechanical Systems\u00a017(6), 1418\u20131429 (2008)","journal-title":"Journal of Microelectromechanical Systems"}],"container-title":["IFIP Advances in Information and Communication Technology","VLSI-SoC: Advanced Research for Systems on Chip"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-642-32770-4_6.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,1,29]],"date-time":"2022-01-29T16:05:53Z","timestamp":1643472353000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-642-32770-4_6"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012]]},"ISBN":["9783642327698","9783642327704"],"references-count":6,"URL":"https:\/\/doi.org\/10.1007\/978-3-642-32770-4_6","relation":{},"ISSN":["1868-4238","1861-2288"],"issn-type":[{"type":"print","value":"1868-4238"},{"type":"electronic","value":"1861-2288"}],"subject":[],"published":{"date-parts":[[2012]]}}}