{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,12]],"date-time":"2026-05-12T03:07:52Z","timestamp":1778555272934,"version":"3.51.4"},"publisher-location":"Berlin, Heidelberg","reference-count":9,"publisher":"Springer Berlin Heidelberg","isbn-type":[{"value":"9783642335143","type":"print"},{"value":"9783642335150","type":"electronic"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2012]]},"DOI":"10.1007\/978-3-642-33515-0_32","type":"book-chapter","created":{"date-parts":[[2012,9,30]],"date-time":"2012-09-30T08:52:32Z","timestamp":1348995152000},"page":"313-322","source":"Crossref","is-referenced-by-count":2,"title":["A Digital Lock-In Amplifier Based Contact Detection Technique for Electrochemical Nanolithography"],"prefix":"10.1007","author":[{"given":"Shi-Yu","family":"Zhou","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Lei-Jie","family":"Lai","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Guo-Ying","family":"Gu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Li-Min","family":"Zhu","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","reference":[{"key":"32_CR1","doi-asserted-by":"publisher","first-page":"18987","DOI":"10.1021\/jp903494e","volume":"113","author":"F.C. Simeone","year":"2009","unstructured":"Simeone, F.C., Albonetti, C., Cavallini, M.: Progress in Micro- and Nanopatterning via Electrochemical Lithography. The Journal of Physical Chemistry C\u00a0113, 18987\u201318994 (2009)","journal-title":"The Journal of Physical Chemistry C"},{"key":"32_CR2","doi-asserted-by":"publisher","first-page":"3912","DOI":"10.1002\/adma.200700300","volume":"19","author":"L. Zhang","year":"2007","unstructured":"Zhang, L., Ma, X.Z., Zhuang, J.L., Qiu, C.K., Du, C.L., Tang, J., Tian, Z.W.: Microfabrication of a Diffractive Microlens Array on n - GaAs by an Efficient Electrochemical Method. Advanced Materials\u00a019, 3912\u20133918 (2007)","journal-title":"Advanced Materials"},{"key":"32_CR3","doi-asserted-by":"publisher","first-page":"802","DOI":"10.1109\/TCST.2007.903345","volume":"15","author":"S. Devasia","year":"2007","unstructured":"Devasia, S., Eleftheriou, E., Moheimani, S.O.R.: A survey of control issues in nanopositioning. IEEE Transactions on Control Systems Technology\u00a015, 802\u2013823 (2007)","journal-title":"IEEE Transactions on Control Systems Technology"},{"key":"32_CR4","first-page":"85","volume":"81","author":"G.Y. Gu","year":"2010","unstructured":"Gu, G.Y., Zhu, L.M.: High-speed tracking control of piezoelectric actuators using an ellipse-based hysteresis model. Review of Scientific Instruments\u00a081, 085\u2013104 (2010)","journal-title":"Review of Scientific Instruments"},{"key":"32_CR5","doi-asserted-by":"publisher","first-page":"320","DOI":"10.1016\/S0141-6359(00)00042-8","volume":"24","author":"W. Gao","year":"2000","unstructured":"Gao, W., Hocken, R.J., Patten, J.A., Lovingood, J., Lucca, D.A.: Construction and testing of a nanomachining instrument. Precision Engineering\u00a024, 320\u2013328 (2000)","journal-title":"Precision Engineering"},{"key":"32_CR6","doi-asserted-by":"publisher","first-page":"873","DOI":"10.1557\/jmr.2009.0114","volume":"24","author":"J. Nohava","year":"2009","unstructured":"Nohava, J., Randall, N., Cont\u00e9, N.: Novel ultra nanoindentation method with extremely low thermal drift: Principle and experimental results. Journal of Materials Research\u00a024, 873\u2013882 (2009)","journal-title":"Journal of Materials Research"},{"key":"32_CR7","doi-asserted-by":"publisher","first-page":"90","DOI":"10.1016\/j.jmapro.2011.10.003","volume":"14","author":"N. Ahmed","year":"2012","unstructured":"Ahmed, N., Carlson, A., Rogers, J.A., Ferreira, P.M.: Automated micro-transfer printing with cantilevered stamps. Journal of Manufacturing Processes\u00a014, 90\u201397 (2012)","journal-title":"Journal of Manufacturing Processes"},{"key":"32_CR8","unstructured":"Remillard, P.A., Amorelli, M.C.: Lock-in amplifier. US Patent. US5210484 (1993)"},{"key":"32_CR9","doi-asserted-by":"publisher","first-page":"157","DOI":"10.1016\/j.micpro.2003.12.002","volume":"28","author":"J. Gaspar","year":"2004","unstructured":"Gaspar, J., Chen, S.F., Gordillo, A., Hepp, M., Ferreyra, P., Marqu\u00e9s, C.: Digital lock in amplifier: study, design and development with a digital signal processor. Microprocessors and Microsystems\u00a028, 157\u2013162 (2004)","journal-title":"Microprocessors and Microsystems"}],"container-title":["Lecture Notes in Computer Science","Intelligent Robotics and Applications"],"original-title":[],"link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/978-3-642-33515-0_32.pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,5,4]],"date-time":"2021-05-04T08:13:46Z","timestamp":1620116026000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/978-3-642-33515-0_32"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2012]]},"ISBN":["9783642335143","9783642335150"],"references-count":9,"URL":"https:\/\/doi.org\/10.1007\/978-3-642-33515-0_32","relation":{},"ISSN":["0302-9743","1611-3349"],"issn-type":[{"value":"0302-9743","type":"print"},{"value":"1611-3349","type":"electronic"}],"subject":[],"published":{"date-parts":[[2012]]}}}