{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2022,4,4]],"date-time":"2022-04-04T06:07:58Z","timestamp":1649052478014},"reference-count":39,"publisher":"Springer Science and Business Media LLC","issue":"9-10","license":[{"start":{"date-parts":[[2003,9,1]],"date-time":"2003-09-01T00:00:00Z","timestamp":1062374400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.springer.com\/tdm"},{"start":{"date-parts":[[2003,9,1]],"date-time":"2003-09-01T00:00:00Z","timestamp":1062374400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Ann. T\u00e9l\u00e9commun."],"published-print":{"date-parts":[[2003,9]]},"DOI":"10.1007\/bf03001737","type":"journal-article","created":{"date-parts":[[2021,7,7]],"date-time":"2021-07-07T08:42:56Z","timestamp":1625647376000},"page":"1401-1423","source":"Crossref","is-referenced-by-count":0,"title":["MOEMS devices and their applications to optical telecommunication systems"],"prefix":"10.1007","volume":"58","author":[{"given":"Michel","family":"de Labachelerie","sequence":"first","affiliation":[]},{"given":"Julien","family":"Thevenet","sequence":"additional","affiliation":[]}],"member":"297","reference":[{"issue":"1","key":"BF03001737_CR1","doi-asserted-by":"publisher","first-page":"106","DOI":"10.1109\/84.260254","volume":"3","author":"(T.) Akiyama","year":"1993","unstructured":"Akiyama (T.), Shono (K.), \u00abControlled Stepwise motion in polysilicon microstructres\u00bb, IEEEJourn. Of Microelectromech. Syst.,3, no 1, (1993), pp. 106\u2013110.","journal-title":"IEEE Journ. Of Microelectromech. Syst."},{"key":"BF03001737_CR2","unstructured":"Ahlfeldt (H.) et al., Proc. of International Conference on Optical MEMS and their applications (MOEMS\u201997), Nara (Japan), 1997, pp. 155\u2013159."},{"key":"BF03001737_CR3","unstructured":"Aksyuk (V. A.),Prado (F.),Bolle (C. A.),Arney (S.),Giles (C. R.),Bishop (D. J.), \u00ab Lucent Microstar\u2122 micromirror array technology for larges optical crossconnect\u00bb, inmoems and Miniaturized Systems, Proc. ofspie,4178, pp. 320\u2013324."},{"issue":"4","key":"BF03001737_CR4","doi-asserted-by":"publisher","first-page":"15","DOI":"10.1063\/1.93079","volume":"40","author":"(H.) Blauvelt","year":"1982","unstructured":"Blauvelt (H.), Bar-Chaim (N.), Fekete (D.), Margalit (S.), Yariv (A.), \u201cAlGaAs lasers with micro-cleaved mirrors suitable for monolithic integration\u201d,Appl. Phys. Lett.,40 (4), 15 Feb. 1982, pp. 289\u2013290.","journal-title":"Appl. Phys. Lett."},{"key":"BF03001737_CR5","doi-asserted-by":"crossref","unstructured":"Bruno (A.),Mersali (B.),Menigaux (L.) \u00abMulti-pigtailing using V-grooves and mechanical cleaving on the same InP substrate\u00bb,Electronics Letters 5th June 1997,33, no 12.","DOI":"10.1049\/el:19970694"},{"key":"BF03001737_CR6","doi-asserted-by":"publisher","first-page":"196","DOI":"10.1016\/0924-4247(93)00694-Y","volume":"43","author":"(M. A.) Chan","year":"1994","unstructured":"Chan (M. A.), Collins (S. D.), Smith (R. L.), \u201cA micromachined pressure sensor with fiber-optic interferometric readout\u201d,Sensors and Actuators A,43, (1994), pp. 196\u2013201.","journal-title":"Sensors and Actuators A"},{"issue":"3","key":"BF03001737_CR7","doi-asserted-by":"publisher","first-page":"396","DOI":"10.1109\/68.481129","volume":"8","author":"(M. J.) Daneman","year":"1996","unstructured":"Daneman (M. J.), Solgaard (O.), Tien (N. C.), Lau (K. Y.), Muller (R. S.), \u201cLaser-to-fiber coupling module using a micromachined alignment mirror\u201d,IEEE Photon. Tech. Lett.,8, No 3, (1996), pp. 396\u2013398.","journal-title":"IEEE Photon. Tech. Lett."},{"key":"BF03001737_CR8","first-page":"1440","volume":"10","author":"(J. E.) Ford","year":"1999","unstructured":"Ford (J. E.), Walker (J. A.), R\u00e9seau FP\/membrane, \u201cDynamic Spectral Power Equalization Using Micro-Opto-Mechanics\u201d,IEEE J. Light. Tech.,10, (1999), pp. 1440\u20131442.","journal-title":"IEEE J. Light. Tech."},{"key":"BF03001737_CR9","doi-asserted-by":"publisher","first-page":"904","DOI":"10.1109\/50.762910","volume":"17","author":"(J. E.) Ford","year":"1999","unstructured":"Ford (J. E.), add-drop, \u201cWavelength Add-Drop Switching Using Tilting Micromirrors\u201d,IEEE J. Light. Tech., (1999),17, pp. 904\u2013911.","journal-title":"IEEE J. Light. Tech."},{"key":"BF03001737_CR10","doi-asserted-by":"crossref","unstructured":"Grand (G.),Denis (H.),Valette (S.), \u201cNew method for low cost and efficient optical connections between singlemode fibres and silica guides\u201d,Electronics Letters,27, no 1, January 1991.","DOI":"10.1049\/el:19910011"},{"key":"BF03001737_CR11","unstructured":"Halm (J.),Vieider (C.),Ahlfeldt (H.),mst for laser packaging,MST News, April 1998, pp. 22\u201323."},{"key":"BF03001737_CR12","unstructured":"Harris (J. S.),Larson (M. C.),Massengale (A. R.), \u201cBroad-Range Continuous Wavelength Tuning in Microelectromechanical Vertical-cavity Surface Emitting Lasers\u201d Proc.Optical MEMS Conf., 5\u20139 august 1996, Keystone,usa, pp. 31\u201332."},{"issue":"2","key":"BF03001737_CR13","doi-asserted-by":"publisher","first-page":"225","DOI":"10.1109\/33.142898","volume":"15","author":"(T.) Hayashi","year":"1992","unstructured":"Hayashi (T.) \u201cAn innovative bonding technique for optical chips using solder bumps that eliminate chip positioning adjustments\u201d, IEEE transactions on components, Hybrids and manufacturing technology,15, No 2, Avril 1992, pp.225\u2013230.","journal-title":"IEEE transactions on components, Hybrids and manufacturing technology"},{"issue":"7","key":"BF03001737_CR14","doi-asserted-by":"publisher","first-page":"828","DOI":"10.1109\/68.853514","volume":"12","author":"(M.) Hoffmann","year":"2000","unstructured":"Hoffmann (M.), Dickhut (S.), Voges (E.), \u201cFiber ribbon alignment structures based on Rhomboid-shaped channels in silicon\u201d,IEEE Photon. Technol. Lett.,12 (7), 2000, pp. 828\u2013830.","journal-title":"IEEE Photon. Technol. Lett."},{"key":"BF03001737_CR15","doi-asserted-by":"publisher","first-page":"28","DOI":"10.1016\/S0924-4247(99)00200-9","volume":"78","author":"(M.) Hoffmann","year":"1999","unstructured":"Hoffmann (M.), Kopka (P.), Voges (E.), \u201cBistalble micromechanical fiber-optic switches on silicon with thermal actuators\u201d,Sensors and Actuators,78, 1999, pp. 28\u201335.","journal-title":"Sensors and Actuators"},{"key":"BF03001737_CR16","unstructured":"http:\/\/www-imt.unine.ch\/"},{"issue":"7","key":"BF03001737_CR17","doi-asserted-by":"publisher","first-page":"1185","DOI":"10.1109\/50.301811","volume":"12","author":"(K. P.) Jackson","year":"1994","unstructured":"Jackson (K. P.), Flint (E. B.), Cina (M. F.), Lacey (D.), Kwarla (Y.), Trewhella (J. M.), Canlfield (T.), Buchmann (P.), Harder (C.), Vettiger (P.), \u201cA high density, four-channel oeic Transceiver Module utilizing planer-processed optical waveguides and flips-chip, solder-lomp technology\u201d,Journ. of Lightwave Techn.,12 (7), (1994), pp. 1185\u20131191.","journal-title":"Journ. of Lightwave Techn."},{"key":"BF03001737_CR18","volume-title":"Conception et r\u00e9alisation d\u2019un dispositif en silicium permettant une connexion passive entre un circuit d\u2019optique int\u00e9gr\u00e9e et un ruban de fibres optiques","author":"(N.) Kaou","year":"1999","unstructured":"Kaou (N.), Conception et r\u00e9alisation d\u2019un dispositif en silicium permettant une connexion passive entre un circuit d\u2019optique int\u00e9gr\u00e9e et un ruban de fibres optiques, PhD thesis, Universit\u00e9 de Franche-Comt\u00e9, France, 1999."},{"key":"BF03001737_CR19","first-page":"3954","volume":"2847","author":"(N.) Kaou","year":"2001","unstructured":"Kaou (N.) et al.,Sensors and Actuators A\n                  2847, p. 3954, (2001).","journal-title":"Sensors and Actuators A"},{"issue":"12","key":"BF03001737_CR20","doi-asserted-by":"publisher","first-page":"642","DOI":"10.1049\/el:19860440","volume":"22","author":"(H.) Kaufmann","year":"1986","unstructured":"Kaufmann (H.), Buchmann (P.), Hirter (R.), Melchior (H.), Guekos (G.), \u201cSelf-adjusted permanent attachement of fiber to GaAs waveguides composants\u201d,Electronics Letters,22 (12), June 1986, pp. 642\u2013644.","journal-title":"Electronics Letters"},{"issue":"12","key":"BF03001737_CR21","doi-asserted-by":"publisher","first-page":"1051","DOI":"10.1049\/el:19970698","volume":"33","author":"(M. Y.) Li","year":"1997","unstructured":"Li (M. Y.), Yuen (W.), Li (G. S.), Chang-Hasnain (C. J.), \u201cHigh performance continuously tunable top-emitting vertical cavity laser with 20 nm wavelength range\u201d,Electron. Lett.,33 (12), 1997, pp. 1051\u20131052.","journal-title":"Electron. Lett."},{"issue":"1","key":"BF03001737_CR22","doi-asserted-by":"publisher","first-page":"163","DOI":"10.1109\/2944.991412","volume":"8","author":"(L. Y.) Lin","year":"2002","unstructured":"Lin (L. Y.), Goldstein (E. L.), \u201cOpportunities and Challenges for MEMS in lightwave communications\u201dIEEE Journal of selected topics in quantum electron., (2002),8 (1), pp. 163\u2013172.","journal-title":"IEEE Journal of selected topics in quantum electron."},{"issue":"3","key":"BF03001737_CR23","doi-asserted-by":"publisher","first-page":"277","DOI":"10.1109\/84.623118","volume":"6","author":"(C.) Marxer","year":"1997","unstructured":"Marxer (C.), Thio (C.), Gr\u00e9tillat (M. A.), De Rooij (N. F.), B\u00e4ttig (R.), Anthamatten (O.), Valk (B.), Vogel (P.), \u201cVertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications\u201d,Journ. of Micromechanical Systems,6 (3), pp. 277\u2013285, 1997.","journal-title":"Journ. of Micromechanical Systems"},{"key":"BF03001737_CR24","unstructured":"Marxer (C.),De Rooij (N. F.), \u201cReflective modulators and By-Pass-Switches: two MEMS components for fiber optic communication\u201d, Proc.Optical MEMS Conf., 20\u201324 July 1998, Monterey, USA, pp. 27\u201328."},{"issue":"1","key":"BF03001737_CR25","doi-asserted-by":"publisher","first-page":"2","DOI":"10.1109\/50.737413","volume":"17","author":"(C.) Marxer","year":"1999","unstructured":"Marxer (C.), De Rooij (N. F.), \u201cMicro-Opto-Mechanical 2X2 Swicth for Single Mode Fibers based on Plasma Etched Silicon Mirror and Electrostatic Actuation,\u201dJ. of Lightwave Technology,17 (1), (1999), pp. 2\u20136.","journal-title":"J. of Lightwave Technology"},{"issue":"1","key":"BF03001737_CR26","doi-asserted-by":"publisher","first-page":"155","DOI":"10.1109\/2944.991411","volume":"8","author":"(E.) Ollier","year":"2002","unstructured":"Ollier (E.), \u201cOptical MEMS Devices Based on Moving waveguides\u201d, Journal of selected topics in quantum electron., (2002),8 (1), pp. 155\u2013162.","journal-title":"Journal of selected topics in quantum electron."},{"key":"BF03001737_CR27","doi-asserted-by":"publisher","first-page":"249","DOI":"10.1016\/0924-4247(92)80172-Y","volume":"33","author":"(K. S. J.) Pister","year":"1992","unstructured":"(K. S. J.) Pister, (M. W.) Judy, (S. R.) Burgett, (R. S.) Fearing, \u201cMicrofabricated hinges\u201d,Sensors And Actuators A,33, (1992), pp. 249\u2013256.","journal-title":"Sensors And Actuators A"},{"key":"BF03001737_CR28","doi-asserted-by":"publisher","first-page":"233","DOI":"10.1016\/S0030-4018(99)00377-6","volume":"169","author":"(N. A.) Riza","year":"1999","unstructured":"Riza (N. A.), Smuriddetchkajorn (S. S.), \u201cVersatile multi-wavelength fiber-optic switch and attenuator structures using mirror manipulations\u201d, Optics Communications,169, (1999), pp. 233\u2013244.","journal-title":"Optics Communications"},{"key":"BF03001737_CR29","unstructured":"http:\/\/www.solustech.com"},{"issue":"1","key":"BF03001737_CR30","doi-asserted-by":"publisher","first-page":"35","DOI":"10.1109\/84.557528","volume":"6","author":"(C.) Strandman","year":"1997","unstructured":"Strandman (C.), B\u00e4cklund (Y.), \u00abBulk silicon holding structures for mounting of optical fibers in V-grooves\u00bb,Journ. of Microelectromechanical systems,6 (1), March 1997, pp 35\u201340.","journal-title":"Journ. of Microelectromechanical systems"},{"issue":"4","key":"BF03001737_CR31","doi-asserted-by":"publisher","first-page":"448","DOI":"10.1109\/84.809060","volume":"8","author":"(R A.) Syms","year":"1999","unstructured":"Syms (R A.), \u201cSurface tension powedred self-assembly of 3-D micro-optomechanical structures,\u201dJourn. Of Microelectromechanical Syst.,8, No 4, (1999), pp. 448\u2013455.","journal-title":"Journ. Of Microelectromechanical Syst."},{"key":"BF03001737_CR32","doi-asserted-by":"publisher","first-page":"1679","DOI":"10.1109\/68.730467","volume":"10","author":"(P.) Tayebati","year":"1998","unstructured":"Tayebati (P.), Wang (P.), Vakhshoori (D.), Lu (C.-C.), Azimi (M.), Sacks (R. N.), \u201cHalf-Symmetric Cavity Tunable Micromechanical VCSEL with Single Spatial Mode\u201d,IEEE Photon. Tech. Lett. (1998),10, pp. 1679\u20131681.","journal-title":"IEEE Photon. Tech. Lett."},{"issue":"20","key":"BF03001737_CR33","doi-asserted-by":"publisher","first-page":"1967","DOI":"10.1049\/el:19981350","volume":"34","author":"(P.) Tayebati","year":"1998","unstructured":"Tayebati (P.), Wang (P.), Azimi (M.), Maflah (L.), Vakhshoori (D.),Electron. Lett.,34 (20), pp. 1967\u20131968, 1998.","journal-title":"Electron. Lett."},{"issue":"1","key":"BF03001737_CR34","doi-asserted-by":"publisher","first-page":"10","DOI":"10.1109\/2944.748099","volume":"5","author":"(H.) Toshiyoshi","year":"1999","unstructured":"Toshiyoshi (H.), Miyauchi (D.), Fujita (H.), \u201cElectromagnetic torsion mirrors for self-aligned fiber-optics crossconnectors by silicon micromachining\u201d,IEEE Journ. of selected topics in quantum electron.,5 (1), pp. 10\u201317, 1999.","journal-title":"IEEE Journ. of selected topics in quantum electron."},{"key":"BF03001737_CR35","unstructured":"Viktorovitch (P.),Leclercq (J. L.),Spisser (A.),Daleiden (J.),Chitica (N.),Strassener (M.),Rondi (D.),Goutain (E.),Peerlings (J.),Pfeiffer (J.),Riemenschneider (R.),Hojrt (K.),Greek (S.),Benyattou (T.),Ledantec (R.), \u201cmoems applications for Telecommunications\u201d Proc.Optical MEMS Conf., 20\u201324 July 1998, Monterey,usa, pp. 35\u201338."},{"issue":"1","key":"BF03001737_CR36","doi-asserted-by":"publisher","first-page":"45","DOI":"10.1109\/84.485215","volume":"5","author":"(J. A.) Walker","year":"1996","unstructured":"Walker (J. A.), Goosen (K. W.), Arney (S. C.), \u201cfabrication of a mechanical antireflection switch for Fiber-to-the-home systems\u201d,Journ. of Micromechanical Systems,5 (1), 1996, pp. 45\u201350.","journal-title":"Journ. of Micromechanical Systems"},{"key":"BF03001737_CR37","doi-asserted-by":"publisher","first-page":"127","DOI":"10.1016\/0924-4247(96)80096-3","volume":"50","author":"(M. C.) Wu","year":"1995","unstructured":"Wu (M. C.), Lin (L.-Y.), Lee (S.-S.), Pister (K.S.J.), \u201cMicromachined free-space integrated micro-optics\u201d,Sensors and actuators A 50 (1995), pp. 127\u2013134.","journal-title":"Sensors and actuators A"},{"issue":"8","key":"BF03001737_CR38","doi-asserted-by":"publisher","first-page":"313","DOI":"10.1049\/el:19840212","volume":"20","author":"(Y.) Yamada","year":"1984","unstructured":"Yamada (Y.), Kawachi (M.), Yassu (M.), Kobayashi (M.), \u00abOptical-fiber coupling to high-silica channel waveguides with fiber-guiding grooves\u00bb,Electronics Letters,20 (8), April 1984, pp. 313\u2013314.","journal-title":"Electronics Letters"},{"issue":"12","key":"BF03001737_CR39","doi-asserted-by":"publisher","first-page":"1716","DOI":"10.1109\/JLT.1987.1075470","volume":"5","author":"(Y.) Yamada","year":"1997","unstructured":"Yamada (Y.), Kobayashi (M.), \u00abSingle mode optical Fiber connection to highSilica waveguides with guiding grooves\u00bb,Journ. of Lightwave Techn.,5 (12), December 1997, pp. 1716\u20131720.","journal-title":"Journ. of Lightwave Techn."}],"container-title":["Annales Des T\u00e9l\u00e9communications"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/BF03001737.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/article\/10.1007\/BF03001737\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/BF03001737.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2021,7,7]],"date-time":"2021-07-07T09:35:52Z","timestamp":1625650552000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1007\/BF03001737"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2003,9]]},"references-count":39,"journal-issue":{"issue":"9-10","published-print":{"date-parts":[[2003,9]]}},"alternative-id":["BF03001737"],"URL":"https:\/\/doi.org\/10.1007\/bf03001737","relation":{},"ISSN":["0003-4347","1958-9395"],"issn-type":[{"value":"0003-4347","type":"print"},{"value":"1958-9395","type":"electronic"}],"subject":[],"published":{"date-parts":[[2003,9]]}}}