{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2024,6,9]],"date-time":"2024-06-09T22:53:34Z","timestamp":1717973614586},"reference-count":24,"publisher":"Springer Science and Business Media LLC","issue":"3","license":[{"start":{"date-parts":[[2006,9,7]],"date-time":"2006-09-07T00:00:00Z","timestamp":1157587200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.springer.com\/tdm"},{"start":{"date-parts":[[2006,9,7]],"date-time":"2006-09-07T00:00:00Z","timestamp":1157587200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["OR Spectrum"],"published-print":{"date-parts":[[2007,7]]},"DOI":"10.1007\/s00291-006-0061-4","type":"journal-article","created":{"date-parts":[[2006,9,6]],"date-time":"2006-09-06T10:29:21Z","timestamp":1157538561000},"page":"375-389","update-policy":"http:\/\/dx.doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":24,"title":["Performance evaluation of photolithography cluster tools"],"prefix":"10.1007","volume":"29","author":[{"given":"James R.","family":"Morrison","sequence":"first","affiliation":[]},{"given":"Donald P.","family":"Martin","sequence":"additional","affiliation":[]}],"member":"297","published-online":{"date-parts":[[2006,9,7]]},"reference":[{"key":"61_CR1","doi-asserted-by":"crossref","unstructured":"Butler K, Matthews J (2001) How differentiating between utilization of effective availability and utilization of effective capacity leads to a better understanding of performance metrics. 12th IEEE\/SEMI advanced semiconductor manufacturing conference, pp 21\u201322","DOI":"10.1109\/ASMC.2001.925609"},{"key":"61_CR2","unstructured":"Connerney K, Martin D, Tomka R (2001) Determining the capacity components of different classes of multichamber tools. 12th IEEE\/SEMI advanced semiconductor manufacturing conference, pp 29\u201332"},{"issue":"2","key":"61_CR3","doi-asserted-by":"publisher","first-page":"181","DOI":"10.1109\/66.843634","volume":"13","author":"JW Hermann","year":"2000","unstructured":"Hermann JW, Chandrasekaran N, Conaghan BF, Nguyen MQ, Rublof GW, Shi RZ (2000) Evaluating the impact of process changes on cluster tool performance. IEEE Trans Semicond Manuf 13(2):181\u2013192","journal-title":"IEEE Trans Semicond Manuf"},{"key":"61_CR4","unstructured":"International Technology Roadmap for Semiconductors (2005) http:\/\/public.itrs.net\/"},{"issue":"3","key":"61_CR5","doi-asserted-by":"publisher","first-page":"33","DOI":"10.1109\/MRA.2004.1337825","volume":"11","author":"YJ Joo","year":"2004","unstructured":"Joo YJ, Lee TE (2004) Virtual control\u2014a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler. IEEE Robot Autom Mag 11(3):33\u201349","journal-title":"IEEE Robot Autom Mag"},{"issue":"3","key":"61_CR6","doi-asserted-by":"publisher","first-page":"521","DOI":"10.1109\/TSM.2003.815203","volume":"16","author":"JH Kim","year":"2003","unstructured":"Kim JH, Lee TE, Lee HY, Park DB (2003) Scheduling analysis of time-constrained dual-armed cluster tools. IEEE Trans Semicond Manuf 16(3):521\u2013534","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"3","key":"61_CR7","doi-asserted-by":"publisher","first-page":"187","DOI":"10.1109\/66.939811","volume":"14","author":"M Kishimoto","year":"2001","unstructured":"Kishimoto M, Ozawa K, Watanabe K, Martin D (2001) Optimized operations by extended X-factor theory including unit hours concept. IEEE Trans Semicond Manuf 14(3):187\u2013195","journal-title":"IEEE Trans Semicond Manuf"},{"key":"61_CR8","volume-title":"Queueing theory, vol 1: theory","author":"L Kleinrock","year":"1975","unstructured":"Kleinrock L (1975) Queueing theory, vol 1: theory. John Wiley-Interscience, New York, NY"},{"key":"61_CR9","unstructured":"LeBaron HT, Hendrickson RA (2000) Using emulation to validate a cluster tool simulation model. Winter simulation conference, vol 2. pp 1417\u20131422"},{"issue":"3","key":"61_CR10","doi-asserted-by":"publisher","first-page":"465","DOI":"10.1109\/66.705381","volume":"11","author":"MJ Lopez","year":"1998","unstructured":"Lopez MJ, Wood SC (1998) Systems of multiple cluster tools: configuration and performance under perfect reliability. IEEE Trans Semicond Manuf 11(3):465\u2013474","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"2","key":"61_CR11","doi-asserted-by":"publisher","first-page":"170","DOI":"10.1109\/TSM.2003.810936","volume":"16","author":"MJ Lopez","year":"2003","unstructured":"Lopez MJ, Wood SC (2003) Systems of multiple cluster tools: configuration, reliability and performance. IEEE Trans Semicond Manuf 16(2):170\u2013178","journal-title":"IEEE Trans Semicond Manuf"},{"key":"61_CR12","unstructured":"Martin DP (1999) Capacity and cycle time throughput understanding system. 10th IEEE\/SEMI advanced semiconductor manufacturing conference. pp 127\u2013131"},{"key":"61_CR13","unstructured":"Martin DP (1999) Total operational efficiency (TOE). 10th IEEE\/SEMI advanced semiconductor manufacturing conference. pp 37\u201341"},{"key":"61_CR14","doi-asserted-by":"crossref","unstructured":"Morrison JR, Bortnick BS, Martin DP (2006) Performance evaluation of serial photolithography clusters: queueing models, throughput and workload sequence. 17th IEEE\/SEMI advanced semiconductor manufacturing conference. pp 44\u201349","DOI":"10.1109\/ASMC.2006.1638722"},{"key":"61_CR15","unstructured":"Oh HL (1999) Reducing complexity of wafer flow to improve quality and throughput in a single-wafer cluster tool. 24th IEEE\/CPMT electronics manufacturing technology symposium. pp 378\u2013388"},{"issue":"3","key":"61_CR16","doi-asserted-by":"publisher","first-page":"369","DOI":"10.1109\/66.311340","volume":"7","author":"TL Perkinson","year":"1994","unstructured":"Perkinson TL, McLarty PK, Gyurcsik RS, Calvin III RS (1994) Single-wafer cluster tool performance: an analysis of throughput. IEEE Trans Semicond Manuf 7(3):369\u2013373","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"3","key":"61_CR17","doi-asserted-by":"publisher","first-page":"384","DOI":"10.1109\/66.536110","volume":"9","author":"TL Perkinson","year":"1996","unstructured":"Perkinson TL, Gyurcsik RS, McLarty PK (1996) Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput. IEEE Trans Semicond Manuf 9(3):384\u2013400","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"1","key":"61_CR18","doi-asserted-by":"publisher","first-page":"68","DOI":"10.1109\/TSM.2003.822725","volume":"17","author":"S Rostami","year":"2004","unstructured":"Rostami S, Hamidzadeh B (2004) An optimal residency-aware scheduling technique for cluster tools with buffer module. IEEE Trans Semicond Manuf 17(1):68\u201373","journal-title":"IEEE Trans Semicond Manuf"},{"key":"61_CR19","doi-asserted-by":"crossref","unstructured":"Shikalgar ST, Fronckowiak D, MacNair EA (2003) Application of cluster tool modeling to a 300 mm fab simulation. Winter simulation conference, vol 2. pp 1394\u20131397","DOI":"10.1109\/WSC.2003.1261581"},{"issue":"3","key":"61_CR20","doi-asserted-by":"publisher","first-page":"394","DOI":"10.1109\/66.705374","volume":"11","author":"RS Srinivasan","year":"1998","unstructured":"Srinivasan RS (1998) Modeling and performance analysis of cluster tools using Petri nets. IEEE Trans Semicond Manuf 11(3):394\u2013403","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"1","key":"61_CR21","doi-asserted-by":"publisher","first-page":"197","DOI":"10.1109\/TSM.2004.836658","volume":"18","author":"S Venkatesh","year":"2005","unstructured":"Venkatesh S, Smith JS (2005) An evaluation of deadlock-handling strategies in semiconductor cluster tools. IEEE Trans Semicond Manuf 18(1):197\u2013201","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"4","key":"61_CR22","doi-asserted-by":"publisher","first-page":"418","DOI":"10.1109\/66.641483","volume":"10","author":"S Venkatesh","year":"1997","unstructured":"Venkatesh S, Davenport R, Foxhaven P, Nulman J (1997) A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots. IEEE Trans Semicond Manuf 10(4):418\u2013424","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"3","key":"61_CR23","doi-asserted-by":"publisher","first-page":"320","DOI":"10.1109\/66.536105","volume":"9","author":"SC Wood","year":"1996","unstructured":"Wood SC (1996) Simple performance models for integrated processing tools. IEEE Trans Semicond Manuf 9(3):320\u2013328","journal-title":"IEEE Trans Semicond Manuf"},{"issue":"3","key":"61_CR24","doi-asserted-by":"publisher","first-page":"333","DOI":"10.1109\/TSM.2004.831524","volume":"17","author":"WM Zuberek","year":"2004","unstructured":"Zuberek WM (2004) Cluster tools with chamber revisiting\u2014modeling and analysis using timed Petri nets. IEEE Trans Semicond Manuf 17(3):333\u2013344","journal-title":"IEEE Trans Semicond Manuf"}],"container-title":["OR Spectrum"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s00291-006-0061-4.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/article\/10.1007\/s00291-006-0061-4\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s00291-006-0061-4","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"},{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s00291-006-0061-4.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,5,17]],"date-time":"2022-05-17T18:14:43Z","timestamp":1652811283000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1007\/s00291-006-0061-4"}},"subtitle":["Queueing and throughput models"],"short-title":[],"issued":{"date-parts":[[2006,9,7]]},"references-count":24,"journal-issue":{"issue":"3","published-print":{"date-parts":[[2007,7]]}},"alternative-id":["61"],"URL":"https:\/\/doi.org\/10.1007\/s00291-006-0061-4","relation":{},"ISSN":["0171-6468","1436-6304"],"issn-type":[{"value":"0171-6468","type":"print"},{"value":"1436-6304","type":"electronic"}],"subject":[],"published":{"date-parts":[[2006,9,7]]},"assertion":[{"value":"7 September 2006","order":1,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}}]}}