{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,10]],"date-time":"2026-04-10T12:34:01Z","timestamp":1775824441326,"version":"3.50.1"},"reference-count":57,"publisher":"Springer Science and Business Media LLC","issue":"6","license":[{"start":{"date-parts":[[2018,7,31]],"date-time":"2018-07-31T00:00:00Z","timestamp":1532995200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Elektrotech. Inftech."],"published-print":{"date-parts":[[2018,10]]},"DOI":"10.1007\/s00502-018-0635-2","type":"journal-article","created":{"date-parts":[[2018,7,31]],"date-time":"2018-07-31T09:02:58Z","timestamp":1533027778000},"page":"408-415","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":159,"title":["MEMS-based lidar for autonomous driving","MEMS-basiertes Lidar f\u00fcr autonomes Fahren"],"prefix":"10.1007","volume":"135","author":[{"given":"Han Woong","family":"Yoo","sequence":"first","affiliation":[]},{"given":"Norbert","family":"Druml","sequence":"additional","affiliation":[]},{"given":"David","family":"Brunner","sequence":"additional","affiliation":[]},{"given":"Christian","family":"Schwarzl","sequence":"additional","affiliation":[]},{"given":"Thomas","family":"Thurner","sequence":"additional","affiliation":[]},{"given":"Marcus","family":"Hennecke","sequence":"additional","affiliation":[]},{"given":"Georg","family":"Schitter","sequence":"additional","affiliation":[]}],"member":"297","published-online":{"date-parts":[[2018,7,31]]},"reference":[{"issue":"8","key":"635_CR1","doi-asserted-by":"publisher","DOI":"10.1088\/0034-4885\/76\/8\/086801","volume":"76","author":"C. L. Glennie","year":"2013","unstructured":"Glennie, C. L., Carter, W. E., Shrestha, R. L., Dietrich, W. E. (2013): Geodetic imaging with airborne LiDAR: the Earth\u2019s surface revealed. Rep. Prog. Phys., 76(8), 086801.","journal-title":"Rep. Prog. Phys."},{"key":"635_CR2","doi-asserted-by":"publisher","first-page":"817","DOI":"10.5194\/amt-9-817-2016","volume":"9","author":"A. J. Manninen","year":"2016","unstructured":"Manninen, A. J., O\u2019Connor, E. J., Vakkari, V., Pet\u00e4j\u00e4, T. (2016): A generalised background correction algorithm for a Halo Doppler lidar and its application to data from Finland. Atmos. Meas. Tech., 9, 817\u2013827.","journal-title":"Atmos. Meas. Tech."},{"issue":"9","key":"635_CR3","doi-asserted-by":"publisher","first-page":"2523","DOI":"10.1109\/TGRS.2006.874137","volume":"44","author":"K. Zhang","year":"2006","unstructured":"Zhang, K., Yan, J., Chen, S.-C. (2006): Automatic construction of building footprints from airborne LIDAR data. IEEE Trans. Geosci. Remote Sens., 44(9), 2523\u20132533.","journal-title":"IEEE Trans. Geosci. Remote Sens."},{"issue":"4","key":"635_CR4","doi-asserted-by":"publisher","first-page":"435","DOI":"10.1127\/1860-1804\/2011\/0162-0435","volume":"162","author":"A. Schumann","year":"2011","unstructured":"Schumann, A., Arndt, D., Wiatr, T., G\u00f6tz, A. E., Hoppe, A. (2011): High-resolution terrestrial laser scanning and 3D modelling of a mineral deposit for extraction management optimisation. Z. Deutsch. Gesellschaft Geowissenschaft., 162(4), 435\u2013442.","journal-title":"Z. Deutsch. Gesellschaft Geowissenschaft."},{"issue":"1","key":"635_CR5","doi-asserted-by":"publisher","first-page":"14","DOI":"10.3733\/ca.v069n01p14","volume":"69","author":"M. Kelly","year":"2015","unstructured":"Kelly, M., Di Tommaso, S. (2015): Mapping forests with Lidar provides flexible, accurate data with many uses. California Agricult., 69(1), 14\u201320.","journal-title":"California Agricult."},{"issue":"2","key":"635_CR6","doi-asserted-by":"publisher","first-page":"410","DOI":"10.1109\/TASE.2014.2357216","volume":"12","author":"B. D. Gouveia","year":"2015","unstructured":"Gouveia, B. D., Portugal, D., Silva, D. C., Marques, L. (2015): Computation sharing in distributed robotic systems: a case study on SLAM. IEEE Trans. Autom. Sci. Eng., 12(2), 410\u2013422.","journal-title":"IEEE Trans. Autom. Sci. Eng."},{"key":"635_CR7","unstructured":"Lidar: driving the future of autonomous navigation. Frost & Sullivan, CA, USA, 2016."},{"key":"635_CR8","doi-asserted-by":"publisher","first-page":"205","DOI":"10.5194\/ars-3-205-2005","volume":"3","author":"R. H. Rasshofer","year":"2005","unstructured":"Rasshofer, R. H., Gresser, K. (2005): Automotive radar and lidar systems for next generation driver assistance function. Adv. Radio Sci., 3, 205\u2013209.","journal-title":"Adv. Radio Sci."},{"key":"635_CR9","doi-asserted-by":"crossref","first-page":"317","DOI":"10.1007\/978-3-658-05734-3_18","volume-title":"Handbuch Fahrerassistenzsysteme: Grundlagen, Komponenten und Systeme f\u00fcr aktive Sicherheit und Komfort","author":"H. Gotzig","year":"2015","unstructured":"Gotzig, H., Geduld, G., (2015): LIDAR-sensorik. In Handbuch Fahrerassistenzsysteme: Grundlagen, Komponenten und Systeme f\u00fcr aktive Sicherheit und Komfort (S. 317\u2013334). Berlin: Springer."},{"key":"635_CR10","series-title":"Proc. SPIE","volume-title":"Degraded visual environments: enhanced, synthetic, and external vision solution","author":"T. E. Laux","year":"2014","unstructured":"Laux, T. E., Chen, C.-I. (2014): 3D flash lidar visiton systems for imaging in degraded visual environments. In Degraded visual environments: enhanced, synthetic, and external vision solution. Proc. SPIE (Vol.\u00a09087)."},{"key":"635_CR11","doi-asserted-by":"publisher","first-page":"71","DOI":"10.1016\/j.robot.2016.11.014","volume":"88","author":"H. Wang","year":"2017","unstructured":"Wang, H., Wang, B., Liu, B., Meng, X., Yang, G. (2017): Pedestrian recognition and tracking using 3D LiDAR for autonomous vehicle. Robot. Auton. Syst., 88, 71\u201378.","journal-title":"Robot. Auton. Syst."},{"key":"635_CR12","volume-title":"Proceedings of 1st international workshop on cognition for technical systems","author":"M. Himmelsbach","year":"2008","unstructured":"Himmelsbach, M., M\u00fcller, A., L\u00fcttel, T., W\u00fcnsche, H.-J. (2008): LIDAR-based 3D object perception. In Proceedings of 1st international workshop on cognition for technical systems."},{"key":"635_CR13","volume-title":"IEEE17th international conference on intelligent transportation system","author":"A. Hata","year":"2014","unstructured":"Hata, A., Wolf, D. (2014): Road marking detection using lidar reflective intensity deata and its application to vehicle localization. In IEEE17th international conference on intelligent transportation system, Qingdau, China."},{"issue":"1","key":"635_CR14","doi-asserted-by":"publisher","first-page":"7","DOI":"10.19030\/jbcs.v10i1.8324","volume":"10","author":"S. L. Poczter","year":"2014","unstructured":"Poczter, S. L., Jankovic, L. M. (2014): The Google car: driving toward a better future? J. Business Case Stud., 10(1), 7\u201314.","journal-title":"J. Business Case Stud."},{"key":"635_CR15","unstructured":"Chauffeur Inklusive: BMW Active Assist, BMW [Online]. Available: \n                    http:\/\/www.bmw.com\/\n                    \n                   [Accessed 3 Feb. 2017]."},{"key":"635_CR16","unstructured":"Ross, P. E. (11 May 2016): Volvo\u2019s self-driving program will have redundancy for everything. IEEE Spectrum."},{"key":"635_CR17","unstructured":"Ackerman, E. (17 August 2016): Ford and Baidu invest $150 million in velodyne for affordable lidar for self-driving cars. IEEE Spectrum."},{"issue":"3","key":"635_CR18","doi-asserted-by":"publisher","first-page":"48","DOI":"10.1109\/MCE.2016.2556878","volume":"5","author":"R. Thakur","year":"2016","unstructured":"Thakur, R. (2016): Scanning LIDAR in advanced driver assistance systems and beyond. IEEE Cosum. Electron. Mag., 5(3), 48\u201354.","journal-title":"IEEE Cosum. Electron. Mag."},{"key":"635_CR19","unstructured":"LeddarTech Inc., (2015): Leddar M16 multi-element sensor module."},{"key":"635_CR20","unstructured":"Continental, SRL 1 + SRL 1C infrrot short range lidar sensor (2009)."},{"key":"635_CR21","volume-title":"Annual conference ASPRS","author":"C. K. Toth","year":"2009","unstructured":"Toth, C. K. (2009): R&D of mobile lidar mapping and future trends. In Annual conference ASPRS, Baltimore, Maryland, US."},{"key":"635_CR22","volume-title":"Data sheet: puck real time 3D LiDAR sensor","author":"Velodyne","year":"2017","unstructured":"Velodyne (2017): Data sheet: puck real time 3D LiDAR sensor."},{"key":"635_CR23","unstructured":"Quanergy Systems, Inc. (2015): 360\u2218 3D LIDAR M8-1 sensor."},{"key":"635_CR24","unstructured":"Ibeo Automotive Systems GmbH (2014): User manual Ibeo ScaLa B2\u00ae laserscanner."},{"key":"635_CR25","doi-asserted-by":"crossref","unstructured":"Stone, W. C., Juberts, M., Daglakis, N., Stone, J., Gorman, J. (2004): Performance analysis of next generation LADAR for manufacturing, construction, and mobility. United states department of commerce.","DOI":"10.6028\/NIST.IR.7117"},{"key":"635_CR26","volume-title":"Riegl laser measurement systems GmbH","author":"A. Ullrich","year":"2013","unstructured":"Ullrich, A., Pfennigbauer, M., Rieger, P. (2013): How to read your LIDAR spec \u2013 a comparison of single-laser-output and multi-laser-output LIDAR instruments. In Riegl laser measurement systems GmbH."},{"key":"635_CR27","first-page":"247","volume-title":"Handbook of optical and laser scanning","author":"G. E. Stutz","year":"2012","unstructured":"Stutz, G. E. (2012): Polygon scanners: components, performance, and design. In G. F. Marshall, G. E. Stutz (Eds.), Handbook of optical and laser scanning (pp. 247\u2013279). Boca Raton: CRC Press."},{"key":"635_CR28","series-title":"Proc. SPIE","volume-title":"Three-dimensional imaging, visualization, and display","author":"T. Fersch","year":"2017","unstructured":"Fersch, T., Weigel, R., Koelpin, A. (2017): Challenges in miniaturized automotive long-range lidar system design. In Three-dimensional imaging, visualization, and display, Anaheim, CA, USA. Proc. SPIE (Vol.\u00a010219)."},{"issue":"15","key":"635_CR29","doi-asserted-by":"publisher","first-page":"4575","DOI":"10.1364\/OL.39.004575","volume":"39","author":"A. Yaacobi","year":"2014","unstructured":"Yaacobi, A., Sun, J., Moresco, M., Leake, G., Coolbaugh, D., Watts, M. R. (2014): Integrated phase array for wide angle beam. Opt. Lett., 39(15), 4575.","journal-title":"Opt. Lett."},{"key":"635_CR30","doi-asserted-by":"publisher","first-page":"195","DOI":"10.1038\/nature11727","volume":"493","author":"J. Sun","year":"2013","unstructured":"Sun, J., Timurdogan, E., Yaacobi, A., Hosseini, E. S., Watts, M. R. (2013): Large-scale nanophotonic phase array. Nature, 493, 195\u2013199.","journal-title":"Nature"},{"key":"635_CR31","unstructured":"Ackerman, E. (7 January 2016): Quanergy announces $250 solid-state LIDAR for cars, robots, and more. IEEE Spectrum."},{"key":"635_CR32","unstructured":"Innoviz Technologies (2018): Data sheet of InnovizPro \u2013 high performance solid-state LiDAR."},{"key":"635_CR33","volume-title":"Sensors, systems, and next-generation satellites XII","author":"T. Mizuno","year":"2008","unstructured":"Mizuno, T., Mita, M., Kajikawa, Y., Takeyama, N., Ikeda, H., Kawahara, K. (2008): Study of two-dimensional scanning LIDAR for planetary explorer. In Sensors, systems, and next-generation satellites XII."},{"key":"635_CR34","volume-title":"Proceedings of the 31st ICRC","author":"I. H. Park","year":"2009","unstructured":"Park, I. H., Jeon, J. A., Nam, J., Nam, S., Lee, J., Park, J. H., Yang, J., Ebisuzaki, T., Kawasaki, Y., Takizawa, Y., Wada, S. (2009): A new LIDAR method using MEMS micromirror array for the JEM-EUSO mission. In Proceedings of the 31st ICRC."},{"key":"635_CR35","series-title":"Proc. SPIE","doi-asserted-by":"publisher","DOI":"10.1117\/12.919804","volume-title":"Laser radar technology and applications XVII","author":"R. Moss","year":"2012","unstructured":"Moss, R., Yuan, P., Bai, X., Quesada, E., Sudharsanan, R., Stann, B. L., Dammann, J. F., Giza, M. M., Lawler, W. B. (2012): Low-cost compact MEMS scanning ladar system for robotic applications. In Laser radar technology and applications XVII. Proc. SPIE (Vol.\u00a08379)."},{"key":"635_CR36","unstructured":"Sudharsanan, R. (2013): Low cost scanning lidar imager. LIDAR Mag., 3(2)."},{"issue":"3","key":"635_CR37","doi-asserted-by":"publisher","first-page":"1934","DOI":"10.1364\/OE.24.001934","volume":"24","author":"Q. Hu","year":"2016","unstructured":"Hu, Q., Pedersen, C., Rodrigo, P. J. (2016): Eye-safe diode laser Doppler lidar with a MEMS beam-scanner. Opt. Express, 24(3), 1934\u20131942.","journal-title":"Opt. Express"},{"key":"635_CR38","unstructured":"Hofmann, U., Senger, F., Soerensen, F., Stenchly, V., Jensen, B., Janes, J. Biaxial resonant 7 mm-MEMS mirror for automotive LIDAR application."},{"key":"635_CR39","unstructured":"E. T. P. o. S. S. I. (EPoSS) (2015): European roadmap smart systems for automated driving."},{"key":"635_CR40","series-title":"Proc. SPIE","volume-title":"Laser radar technology and applications XXI","author":"B. L. Stann","year":"2016","unstructured":"Stann, B. L., Dammann, J. F., Giza, M. M. (2016): Progress on MEMS-scanned ladar. In Laser radar technology and applications XXI. Proc. SPIE (Vol.\u00a09832)."},{"issue":"2","key":"635_CR41","doi-asserted-by":"publisher","DOI":"10.1109\/JPHOT.2013.2247586","volume":"5","author":"K. Ito","year":"2013","unstructured":"Ito, K., Niclass, C., Aoyagi, I., Matsubara, H., Soga, M., Kato, S., Maeda, M., Kagami, M. (2013): System design and performance characterization of a MEMS-based laser scanning time-of-flight sensorbased on a 256x64-pixel single-photon imager. IEEE Photonics J., 5(2), 6800114.","journal-title":"IEEE Photonics J."},{"key":"635_CR42","series-title":"Proc. SPIE","volume-title":"Three-dimensional imaging, visualization, and display","author":"T. Giese","year":"2015","unstructured":"Giese, T., Janes, J. (2015): 2D MEMS scanning for LIDAR with sub-Nyquist sampling, electronics, and measurement procedure. In Three-dimensional imaging, visualization, and display. Proc. SPIE (Vol.\u00a09495)."},{"issue":"21","key":"635_CR43","doi-asserted-by":"publisher","first-page":"23810","DOI":"10.1364\/OE.24.023810","volume":"24","author":"G. Kim","year":"2016","unstructured":"Kim, G., Park, Y. (2016): LIDAR pulse coding for high resolution range imaging at improved refresh rate. Opt. Express, 24(21), 23810\u201323828.","journal-title":"Opt. Express"},{"issue":"2","key":"635_CR44","doi-asserted-by":"publisher","first-page":"259","DOI":"10.1109\/JMEMS.2013.2295470","volume":"23","author":"S. T. S. Holmstr\u00f6m","year":"2014","unstructured":"Holmstr\u00f6m, S. T. S., Baran, U., Urey, H. (2014): MEMS laser scanners: a review. J. Microelectromech. Syst., 23(2), 259\u2013275.","journal-title":"J. Microelectromech. Syst."},{"key":"635_CR45","volume-title":"IEEE international frequency control symposium and exposition","author":"M. Agarwal","year":"2006","unstructured":"Agarwal, M., Park, K. K., Candler, R. N., Kim, B., Hopcroft, M. A., Chandorkar, S. A., Jha, C. M., Melamud, R., Kenny, T. W., Murmann, B. (2006): Nonlinear characterization of electrostatic MEMS resonators. In IEEE international frequency control symposium and exposition, Miami, FL, US."},{"key":"635_CR46","series-title":"Proc. SPIE","volume-title":"Laser radar technology and applications","author":"V. Milanovi\u0107","year":"2017","unstructured":"Milanovi\u0107, V., Kasturi, A., Yang, J., Hu, F. (2017): Closed-loop control of gimbal-less MEMS mirrors for increased bandwidth in LiDAR applications. In Laser radar technology and applications, Anaheim,CA, US. Proc. SPIE (Vol.\u00a010191)."},{"key":"635_CR47","series-title":"Proc. SPIE","volume-title":"MOEMS and miniaturized systems XVII","author":"V. Milanovi\u0107","year":"2018","unstructured":"Milanovi\u0107, V., Kasturi, A., Yang, J., Su, Y. R., Hu, F. (2018): Iterative learning control (ILC) algorithm for greatly increased bandwidth and linearity of MEMS mirrors in LiDAR and related imaging applications. In MOEMS and miniaturized systems XVII, San Francisco, CA, US. Proc. SPIE (Vol.\u00a010545)."},{"issue":"9","key":"635_CR48","doi-asserted-by":"publisher","first-page":"2219","DOI":"10.1364\/AO.54.002219","volume":"54","author":"X. Lee","year":"2015","unstructured":"Lee, X., Wang, C. (2015): Optical design for uniform scanning in {MEMS}-based 3D imaging lidar. Appl. Opt., 54(9), 2219\u20132223.","journal-title":"Appl. Opt."},{"key":"635_CR49","volume-title":"2017 international conference on optical MEMS and nanophotonics","author":"B. Yang","year":"2017","unstructured":"Yang, B., Zhou, L., Zhang, X., Koppal, S., Xie, H. (2017): A compact MEMS-based wide-angle optical scanner. In 2017 international conference on optical MEMS and nanophotonics."},{"issue":"4","key":"635_CR50","volume":"24","author":"X. Zhang","year":"2016","unstructured":"Zhang, X., Koppal, S. J., Zhang, R., Zhou, L., Butler, E., Xie, H. (2016): Wide-angle structured light with a scanning MEMS mirror in liquid. Opt. Express, 24(4), 256226.","journal-title":"Opt. Express"},{"issue":"2","key":"635_CR51","doi-asserted-by":"publisher","DOI":"10.1088\/0960-1317\/23\/2\/025002","volume":"23","author":"\u00c7. Ataman","year":"2013","unstructured":"Ataman, \u00c7., Lani, S., Noell, W., Rooij, N. D. (2013): A dual-axis pointing mirror with moving-magnet actuation. J. Micromech. Microeng., 23(2), 025002.","journal-title":"J. Micromech. Microeng."},{"issue":"3","key":"635_CR52","doi-asserted-by":"publisher","first-page":"521","DOI":"10.3390\/s17030521","volume":"17","author":"L. Ye","year":"2017","unstructured":"Ye, L., Zhang, G., You, Z. (2017): 5 V compatible two-axis PZT driven MEMS scanning mirror with mechanical leverage structure for miniature LiDAR application. Sensors, 17(3), 521.","journal-title":"Sensors"},{"issue":"13","key":"635_CR53","doi-asserted-by":"publisher","first-page":"14732","DOI":"10.1364\/OE.25.014732","volume":"25","author":"B. Smith","year":"2017","unstructured":"Smith, B., Hellman, B., Gin, A., Espinoza, A., Takashima, Y. (2017): Single chip lidar with discrete beam steering by digital micromirror device. Opt. Express, 25(13), 14732\u201314745.","journal-title":"Opt. Express"},{"key":"635_CR54","volume-title":"The 21st microoptics conference (MOC)","author":"Y. Wang","year":"2016","unstructured":"Wang, Y., Kyoungsik, Y., Wu, M. C. (2016): MEMS optical phased array for LIDAR. In The 21st microoptics conference (MOC), Berkeley, CA, US."},{"key":"635_CR55","series-title":"Proc. SPIE","volume-title":"MOEMS and miniaturized systems IX","author":"T. Sandner","year":"2010","unstructured":"Sandner, T., Wildenhain, M., Gerwig, C., Schenk, H., Schwarzer, S., W\u00f6lfelschneider, H. (2010): Large aperture MEMS scanner module for 3D distance measurement. In MOEMS and miniaturized systems IX. Proc. SPIE (Vol.\u00a07594)."},{"key":"635_CR56","series-title":"Proc. SPIE","doi-asserted-by":"publisher","DOI":"10.1117\/12.600076","volume-title":"MOEMS and miniaturized systems V","author":"A. Wolter","year":"2005","unstructured":"Wolter, A., Hsu, S.-T., Schenk, H., Lakner, H. K. (2005): Applications and requirements for MEMS scanner mirrors. In MOEMS and miniaturized systems V, San Jose, CA, US. Proc. SPIE (Vol.\u00a05719)."},{"key":"635_CR57","volume-title":"SPIE defense and commercial sensing conference","author":"V. Milanovic","year":"2016","unstructured":"Milanovic, V., Kasturi, A., Yang, J. (2016): Novel fluidic packaging of gimbal-less MEMS mirrors for increased optical resolution and overall performance. In SPIE defense and commercial sensing conference, Baltimore, MD, US."}],"container-title":["e & i Elektrotechnik und Informationstechnik"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/article\/10.1007\/s00502-018-0635-2\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s00502-018-0635-2.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s00502-018-0635-2.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2019,7,30]],"date-time":"2019-07-30T23:22:10Z","timestamp":1564528930000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/s00502-018-0635-2"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2018,7,31]]},"references-count":57,"journal-issue":{"issue":"6","published-print":{"date-parts":[[2018,10]]}},"alternative-id":["635"],"URL":"https:\/\/doi.org\/10.1007\/s00502-018-0635-2","relation":{},"ISSN":["0932-383X","1613-7620"],"issn-type":[{"value":"0932-383X","type":"print"},{"value":"1613-7620","type":"electronic"}],"subject":[],"published":{"date-parts":[[2018,7,31]]},"assertion":[{"value":"15 May 2018","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"19 June 2018","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"31 July 2018","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}}]}}