{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,6,19]],"date-time":"2025-06-19T09:25:06Z","timestamp":1750325106025,"version":"3.32.0"},"reference-count":24,"publisher":"Springer Science and Business Media LLC","issue":"2","license":[{"start":{"date-parts":[[2006,4,1]],"date-time":"2006-04-01T00:00:00Z","timestamp":1143849600000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["J Electron Test"],"published-print":{"date-parts":[[2006,4]]},"DOI":"10.1007\/s10836-005-6132-7","type":"journal-article","created":{"date-parts":[[2006,5,15]],"date-time":"2006-05-15T06:49:00Z","timestamp":1147675740000},"page":"189-198","source":"Crossref","is-referenced-by-count":10,"title":["Electro-thermal Stimuli for MEMS Testing in FSBM Technology"],"prefix":"10.1007","volume":"22","author":[{"given":"N.","family":"Dumas","sequence":"first","affiliation":[]},{"given":"F.","family":"Aza\u00efs","sequence":"additional","affiliation":[]},{"given":"L.","family":"Latorre","sequence":"additional","affiliation":[]},{"given":"P.","family":"Nouet","sequence":"additional","affiliation":[]}],"member":"297","reference":[{"key":"6132_CR1","doi-asserted-by":"crossref","first-page":"153","DOI":"10.1016\/0250-6874(89)87113-6","volume":"20","author":"S.C. Terry","year":"1989","unstructured":"S.C. Terry, H.V. Allen, and D.W. De Bruin, \u201cAccelerometer Systems with Self-Testable Features,\u201d Sensors and Actuators, vol. 20, pp. 153\u2013161, 1989.","journal-title":"Sensors and Actuators"},{"key":"6132_CR2","doi-asserted-by":"crossref","first-page":"190","DOI":"10.1016\/0924-4247(94)00888-O","volume":"46\u201347","author":"L. Zimmermann","year":"1995","unstructured":"L. Zimmermann, J.Ph. Ebersohl, F. Le Hung, J.P. Berry, F. Baillieu, P. Rey, B. Diem, S. Renard, and P. Caillat, \u201cAirbag Application: A Microsystem Including a Silicon Capacitive Accelerometer, CMOS Switched Capacitor Electronics and True Self-Test Capability,\u201d Sensors and Actuators A, vol. 46\u201347, pp. 190\u2013195, 1995.","journal-title":"Sensors and Actuators A"},{"key":"6132_CR3","doi-asserted-by":"crossref","unstructured":"N. Deb and R.D. Blanton, \u201cBuilt-in Self Test of CMOS-MEMS Accelerometers\u201d, Proc. International Test Conference (ITC\u201902), pp. 1075\u20131084, 2002.","DOI":"10.1109\/TEST.2002.1041864"},{"key":"6132_CR4","unstructured":"B. Charlot, S. Mir, F. Parrain, and B. Courtois, \u201cGeneration of Electrically Induced Stimuli for MEMS Self-test,\u201d Journal of Electronic Testing - Theory and Applications (JETTA), vol. 17, no. 6, Dec. 2001."},{"issue":"1\u20133","key":"6132_CR5","doi-asserted-by":"crossref","first-page":"70","DOI":"10.1016\/S0924-4247(97)01718-4","volume":"66","author":"D. De Bruyker","year":"1998","unstructured":"D. De Bruyker, A. Cozma, and R. Puers, \u201cA Combined Piezoresistive\/Capacitive Pressure Sensor with Self-test Function Based on Thermal Actuation,\u201d Sensors and Actuators A: Physical, vol. 66, nos. 1\u20133, pp. 70\u201375, 1998.","journal-title":"Sensors and Actuators A: Physical"},{"key":"6132_CR6","unstructured":"A. Cozma Lapadatu, H. Jakobsen, and R. Puers, \u201cA New Concept for a Self-Testable Pressure Sensor Based on the Bimetal Effect,\u201d Tech Digest 10th International Conference on Solid-State Sensors and Actuators (Transducers\u201999), Sendai, Japan, June 7\u201310, 1999."},{"issue":"1\u20133","key":"6132_CR7","doi-asserted-by":"crossref","first-page":"161","DOI":"10.1016\/S0924-4247(01)00558-1","volume":"92","author":"M. Aikele","year":"2001","unstructured":"M. Aikele, K. Bauer, W. Ficker, F. Neubauer, U. Prechtel, J. Schalk, and H. Seidel, \u201cResonant Accelerometer with Self-test,\u201d Sensors and Actuators A: Physical, vol. 92, nos. 1\u20133, pp. 161\u2013167, 2001.","journal-title":"Sensors and Actuators A: Physical"},{"key":"6132_CR8","unstructured":"http:\/\/cmp.imag.fr\/MemService\/bulk.html"},{"issue":"9\u201311","key":"6132_CR9","doi-asserted-by":"crossref","first-page":"1777","DOI":"10.1016\/S0026-2714(02)00230-5","volume":"42","author":"M. Dardalhon","year":"2002","unstructured":"M. Dardalhon, V. Beroulle, L. Latorre, P. Nouet, G. Perez, J.M. Nicot and C. Oudea, \u201cReliability Analysis of CMOS MEMS Structures Obtained by Front Side Bulk Micromachining,\u201d Microelectronics Reliability, vol. 42, no. 9\u201311, pp. 1777\u20131782, 2002.","journal-title":"Microelectronics Reliability"},{"key":"6132_CR10","unstructured":"N. Dumas, L. Latorre, and P. Nouet, \u201cLow Noise CMOS Amplifier for a Piezoresistive Magnetic Field Sensor,\u201d Proc. Conference on Design of Circuits and Integrated Systems (DCIS\u201903), Nov. 2003. pp. 639\u2013644"},{"key":"6132_CR11","doi-asserted-by":"crossref","unstructured":"A. Castillejo, D. Veychard, S. Mir, J.M. Karam, and B. Courtois, \u201cFailure Mechanisms and Fault Classes for CMOS-compatible Micro-electro-mechanical Systems,\u201d Proc. International Test Conference (ITC\u201998), 1998. pp. 541\u2013550.","DOI":"10.1109\/TEST.1998.743197"},{"key":"6132_CR12","doi-asserted-by":"crossref","unstructured":"A. Kolpekwar, R.D. Blanton and D. Woodilla, \u201cFailure Modes for Stiction in Surface-micromachined MEMS,\u201d Proc. International Test Conference (ITC\u201998), 1998. pp. 551\u2013556.","DOI":"10.1109\/TEST.1998.743198"},{"key":"6132_CR13","doi-asserted-by":"crossref","unstructured":"T. Jiang and R. Blanton, \u201cParticulate Failures for Surface-micromachined MEMS,\u201d Proc International Test Conference (ITC\u201999), 1999. pp. 329\u2013337.","DOI":"10.1109\/TEST.1999.805647"},{"key":"6132_CR14","doi-asserted-by":"crossref","unstructured":"N. Deb and R.D. Blanton, \u201cAnalysis of Failure Sources in Surface-micromachined MEMS,\u201d Proc International Test Conference (ITC\u201900), 2000. pp. 739\u2013749.","DOI":"10.1109\/TEST.2000.894270"},{"key":"6132_CR15","doi-asserted-by":"crossref","unstructured":"J.A. Walraven, \u201cFailure Mechanisms in MEMS,\u201d Proc. International Test Conference (ITC\u201903), 2003. pp. 828\u2013833.","DOI":"10.1109\/TEST.2003.1270915"},{"issue":"5","key":"6132_CR16","doi-asserted-by":"crossref","first-page":"439","DOI":"10.1023\/A:1012759320563","volume":"17","author":"V. Beroulle","year":"2001","unstructured":"V. Beroulle, Y. Bertrand, L. Latorre, and P. Nouet, \u201cTest and Testability of a Monolithic MEMS for Magnetic Field Sensing,\u201d Journal of Electronic Testing (JETTA), vol. 17, no. 5, pp. 439\u2013450, 2001.","journal-title":"Journal of Electronic Testing (JETTA)"},{"issue":"2","key":"6132_CR17","doi-asserted-by":"crossref","first-page":"18","DOI":"10.1109\/54.500197","volume":"13","author":"A. Balivada","year":"1996","unstructured":"A. Balivada, J. Chen and J. Abraham, \u201cAnalog Testing with Time Response Parameters,\u201d IEEE Design & Test of Computer, vol. 13, no. 2, pp. 18\u201325, 1996.","journal-title":"IEEE Design & Test of Computer"},{"key":"6132_CR18","unstructured":"J.V. Calvano, V. Castro-Alves, and M. Lubaszewski, \u201cFault Detection Methodolody for 2nd Order Filters using Compact Test Vectors Transient Analysis,\u201d Proc. 3rd International Workshop on Design of Mixed-Mode Integrated Circuits & Applications, Puerto Vallarta, Mexico, July 1999."},{"key":"6132_CR19","unstructured":"J.V. Calvano, V. Castro-Alves, and M. Lubaszewski, \u201cDesigning for Test MEMs-based Systems,\u201d Proc. 9th International Mixed-Signal Testing Workshop (IMSTW\u201903), Sevilla, Spain, June 25\u201327, 2003. pp. 104\u2013109."},{"key":"6132_CR20","doi-asserted-by":"crossref","unstructured":"W. Vermeiren, B. Straube and A. Holubek, \u201cDefect-oriented Experiments in Fault Modelling and Fault Simulation of Microsystem Components,\u201d Proc European Design and Test Conference (ET&TC\u201996), pp. 522\u2013527, 1996.","DOI":"10.1109\/EDTC.1996.494350"},{"key":"6132_CR21","doi-asserted-by":"crossref","unstructured":"M. Lubaszewski, E. Cota, and B. Courtois, \u201cMicrosystems Testing: An Approach and Open Problems,\u201d Proc Design, Automation and Test in Europe (DATE\u201998), 1998. pp. 524\u2013528.","DOI":"10.1109\/DATE.1998.655908"},{"key":"6132_CR22","doi-asserted-by":"crossref","unstructured":"S. Mir, B. Charlot and B. Courtois, \u201cExtending Fault-based Testing to Micro-electro-mechanical Systems,\u201d Proc. European Test Workshop (ETW\u201999), pp. 64\u201368, 1999.","DOI":"10.1109\/ETW.1999.804234"},{"key":"6132_CR23","doi-asserted-by":"crossref","unstructured":"R. Rosing, A.M. Richardson, and A.P. Dorey, \u201cA Fault Simulation Methodology for MEMS,\u201d Proc Design, Automation and Test in Europe (DATE\u201900), pp. 476\u2013483, 2000.","DOI":"10.1145\/343647.343826"},{"key":"6132_CR24","doi-asserted-by":"crossref","unstructured":"B. Charlot, S. Mir, E. Cota, M. Lubaszewski, and B. Courtois, \u201cFault Modeling of Suspended Thermal MEMS,\u201d Proc. International Test Conference (ITC\u201999), 1999. pp. 319\u2013328","DOI":"10.1109\/TEST.1999.805646"}],"container-title":["Journal of Electronic Testing"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s10836-005-6132-7.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/article\/10.1007\/s10836-005-6132-7\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s10836-005-6132-7","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,1,8]],"date-time":"2025-01-08T23:54:53Z","timestamp":1736380493000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/s10836-005-6132-7"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2006,4]]},"references-count":24,"journal-issue":{"issue":"2","published-print":{"date-parts":[[2006,4]]}},"alternative-id":["6132"],"URL":"https:\/\/doi.org\/10.1007\/s10836-005-6132-7","relation":{},"ISSN":["0923-8174","1573-0727"],"issn-type":[{"type":"print","value":"0923-8174"},{"type":"electronic","value":"1573-0727"}],"subject":[],"published":{"date-parts":[[2006,4]]}}}