{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,5,6]],"date-time":"2026-05-06T06:37:33Z","timestamp":1778049453590,"version":"3.51.4"},"reference-count":24,"publisher":"Springer Science and Business Media LLC","issue":"2","license":[{"start":{"date-parts":[[2023,2,15]],"date-time":"2023-02-15T00:00:00Z","timestamp":1676419200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"},{"start":{"date-parts":[[2023,2,15]],"date-time":"2023-02-15T00:00:00Z","timestamp":1676419200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"}],"funder":[{"DOI":"10.13039\/100000001","name":"National Science Foundation","doi-asserted-by":"publisher","award":["ACI-1548562"],"award-info":[{"award-number":["ACI-1548562"]}],"id":[{"id":"10.13039\/100000001","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100000001","name":"National Science Foundation","doi-asserted-by":"publisher","award":["DMREF-2119276"],"award-info":[{"award-number":["DMREF-2119276"]}],"id":[{"id":"10.13039\/100000001","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/100007023","name":"Lam Research","doi-asserted-by":"publisher","award":["Lam Research"],"award-info":[{"award-number":["Lam Research"]}],"id":[{"id":"10.13039\/100007023","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["J Intell Manuf"],"published-print":{"date-parts":[[2024,2]]},"DOI":"10.1007\/s10845-023-02082-8","type":"journal-article","created":{"date-parts":[[2023,2,21]],"date-time":"2023-02-21T21:14:26Z","timestamp":1677014066000},"page":"925-935","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":15,"title":["Machine learning enabled optimization of showerhead design for semiconductor deposition process"],"prefix":"10.1007","volume":"35","author":[{"given":"Zeqing","family":"Jin","sequence":"first","affiliation":[]},{"given":"Dahyun Daniel","family":"Lim","sequence":"additional","affiliation":[]},{"given":"Xueying","family":"Zhao","sequence":"additional","affiliation":[]},{"given":"Meenakshi","family":"Mamunuru","sequence":"additional","affiliation":[]},{"given":"Sassan","family":"Roham","sequence":"additional","affiliation":[]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7118-3228","authenticated-orcid":false,"given":"Grace X.","family":"Gu","sequence":"additional","affiliation":[]}],"member":"297","published-online":{"date-parts":[[2023,2,15]]},"reference":[{"key":"2082_CR1","unstructured":"Chandrasekharan, R., Sangplung, S., Swaminathan, S., Pasquale, F., Kang, H., Lavoie, A., Augustyniak, E., Sakiyama, Y., Baldasseroni, C., & Varadarajan, S. (2019). Low volume showerhead with faceplate holes for improved flow uniformity."},{"issue":"4","key":"2082_CR2","doi-asserted-by":"publisher","first-page":"1148","DOI":"10.1016\/j.eswa.2006.02.013","volume":"32","author":"WC Chen","year":"2007","unstructured":"Chen, W. C., Lee, A. H. I., Deng, W. J., & Liu, K. Y. (2007). 2007\/05\/01\/). The implementation of neural network for semiconductor PECVD process. Expert Systems with Applications, 32(4), 1148\u20131153. https:\/\/doi.org\/10.1016\/j.eswa.2006.02.013.","journal-title":"Expert Systems with Applications"},{"key":"2082_CR3","doi-asserted-by":"crossref","unstructured":"Chen, C. T., & Gu, G. X. (2021). Learning hidden elasticity with deep neural networks. Proceedings of the National Academy of Sciences, 118(31).","DOI":"10.1073\/pnas.2102721118"},{"key":"2082_CR4","unstructured":"DePinto, G., & Wilson, J. (1990). Optimization of LPCVD silicon nitride deposition process by use of designed experiments. IEEE\/SEMI Conference on Advanced Semiconductor Manufacturing Workshop"},{"key":"2082_CR5","doi-asserted-by":"publisher","first-page":"131","DOI":"10.1016\/j.cherd.2019.09.005","volume":"151","author":"Y Ding","year":"2019","unstructured":"Ding, Y., Zhang, Y., Ren, Y. M., Orkoulas, G., & Christofides, P. D. (2019). 2019\/11\/01\/). Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation. Chemical Engineering Research and Design, 151, 131\u2013145. https:\/\/doi.org\/10.1016\/j.cherd.2019.09.005.","journal-title":"Chemical Engineering Research and Design"},{"key":"2082_CR6","doi-asserted-by":"publisher","first-page":"246","DOI":"10.2307\/2841583","volume":"15","author":"F Galton","year":"1886","unstructured":"Galton, F. (1886). Regression towards mediocrity in hereditary stature. The Journal of the Anthropological Institute of Great Britain and Ireland, 15, 246\u2013263.","journal-title":"The Journal of the Anthropological Institute of Great Britain and Ireland"},{"issue":"15","key":"2082_CR7","doi-asserted-by":"publisher","first-page":"eaaz1708","DOI":"10.1126\/sciadv.aaz1708","volume":"6","author":"AE Gongora","year":"2020","unstructured":"Gongora, A. E., Xu, B., Perry, W., Okoye, C., Riley, P., Reyes, K. G., Morgan, E. F., & Brown, K. A. (2020). A bayesian experimental autonomous researcher for mechanical design. Science advances, 6(15), eaaz1708.","journal-title":"Science advances"},{"issue":"4","key":"2082_CR8","doi-asserted-by":"publisher","first-page":"102262","DOI":"10.1016\/j.isci.2021.102262","volume":"24","author":"AE Gongora","year":"2021","unstructured":"Gongora, A. E., Snapp, K. L., Whiting, E., Riley, P., Reyes, K. G., Morgan, E. F., & Brown, K. A. (2021). Using simulation to accelerate autonomous experimentation: a case study using mechanics. Iscience, 24(4), 102262.","journal-title":"Iscience"},{"issue":"1\u20133","key":"2082_CR9","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1561\/0600000079","volume":"12","author":"J Janai","year":"2020","unstructured":"Janai, J., G\u00fcney, F., Behl, A., & Geiger, A. (2020). Computer vision for autonomous vehicles: problems, datasets and state of the art. Foundations and Trends\u00ae in Computer Graphics and Vision, 12(1\u20133), 1\u2013308.","journal-title":"Foundations and Trends\u00ae in Computer Graphics and Vision"},{"issue":"5","key":"2082_CR10","doi-asserted-by":"publisher","first-page":"1541","DOI":"10.1016\/j.matt.2020.08.023","volume":"3","author":"Z Jin","year":"2020","unstructured":"Jin, Z., Zhang, Z., Demir, K., & Gu, G. X. (2020). Machine learning for advanced additive manufacturing. Matter, 3(5), 1541\u20131556.","journal-title":"Matter"},{"key":"2082_CR11","doi-asserted-by":"publisher","first-page":"101696","DOI":"10.1016\/j.addma.2020.101696","volume":"37","author":"Z Jin","year":"2021","unstructured":"Jin, Z., Zhang, Z., Ott, J., & Gu, G. X. (2021). Precise localization and semantic segmentation detection of printing conditions in fused filament fabrication technologies using machine learning. Additive Manufacturing, 37, 101696.","journal-title":"Additive Manufacturing"},{"issue":"7873","key":"2082_CR12","doi-asserted-by":"publisher","first-page":"583","DOI":"10.1038\/s41586-021-03819-2","volume":"596","author":"J Jumper","year":"2021","unstructured":"Jumper, J., Evans, R., Pritzel, A., Green, T., Figurnov, M., Ronneberger, O., Tunyasuvunakool, K., Bates, R., \u017d\u00eddek, A., & Potapenko, A. (2021). Highly accurate protein structure prediction with AlphaFold. nature, 596(7873), 583\u2013589.","journal-title":"nature"},{"issue":"3","key":"2082_CR13","doi-asserted-by":"publisher","first-page":"952","DOI":"10.1039\/D1MH01792F","volume":"9","author":"S Lee","year":"2022","unstructured":"Lee, S., Zhang, Z., & Gu, G. X. (2022). Generative machine learning algorithm for lattice structures with superior mechanical properties. Materials Horizons, 9(3), 952\u2013960.","journal-title":"Materials Horizons"},{"issue":"2","key":"2082_CR14","doi-asserted-by":"publisher","first-page":"171757","DOI":"10.1098\/rsos.171757","volume":"5","author":"J Li","year":"2018","unstructured":"Li, J., Fei, Z., Xu, Y., Wang, J., Fan, B., Ma, X., & Wang, G. (2018). Study on the optimization of the deposition rate of planetary GaN-MOCVD films based on CFD simulation and the corresponding surface model. Royal Society Open Science, 5(2), 171757. https:\/\/doi.org\/10.1098\/rsos.171757.","journal-title":"Royal Society Open Science"},{"issue":"1","key":"2082_CR15","doi-asserted-by":"publisher","first-page":"115","DOI":"10.1007\/s00231-017-2110-8","volume":"54","author":"CC Liao","year":"2018","unstructured":"Liao, C. C., Hsiau, S. S., & Chuang, T. C. (2018). 2018\/01\/01). Modeling and designing a new gas injection diffusion system for metalorganic chemical vapor deposition. Heat and Mass Transfer, 54(1), 115\u2013123. https:\/\/doi.org\/10.1007\/s00231-017-2110-8.","journal-title":"Heat and Mass Transfer"},{"key":"2082_CR16","first-page":"2825","volume":"12","author":"F Pedregosa","year":"2011","unstructured":"Pedregosa, F., Varoquaux, G., Gramfort, A., Michel, V., Thirion, B., Grisel, O., Blondel, M., Prettenhofer, P., Weiss, R., & Dubourg, V. (2011). Scikit-learn: machine learning in Python. The Journal of Machine Learning Research, 12, 2825\u20132830.","journal-title":"The Journal of Machine Learning Research"},{"key":"2082_CR17","first-page":"1939","volume":"6","author":"J Quinonero-Candela","year":"2005","unstructured":"Quinonero-Candela, J., & Rasmussen, C. E. (2005). A unifying view of sparse approximate gaussian process regression. The Journal of Machine Learning Research, 6, 1939\u20131959.","journal-title":"The Journal of Machine Learning Research"},{"key":"2082_CR18","unstructured":"Selep, M. J., Borth, A. J., Wiltse, J. M., Slevin, D. M., & Madsen, E. (2019). Chemical vapor deposition shower head for uniform gas distribution."},{"issue":"7587","key":"2082_CR19","doi-asserted-by":"publisher","first-page":"484","DOI":"10.1038\/nature16961","volume":"529","author":"D Silver","year":"2016","unstructured":"Silver, D., Huang, A., Maddison, C. J., Guez, A., Sifre, L., Van Den Driessche, G., Schrittwieser, J., Antonoglou, I., Panneershelvam, V., & Lanctot, M. (2016). Mastering the game of go with deep neural networks and tree search. nature, 529(7587), 484\u2013489.","journal-title":"nature"},{"key":"2082_CR20","unstructured":"Snoek, J., Larochelle, H., & Adams, R. P. (2012). Practical bayesian optimization of machine learning algorithms.Advances in neural information processing systems, 25."},{"issue":"4","key":"2082_CR21","doi-asserted-by":"publisher","first-page":"431","DOI":"10.1016\/0315-0860(74)90033-0","volume":"1","author":"SM Stigler","year":"1974","unstructured":"Stigler, S. M. (1974). Gergonne\u2019s 1815 paper on the design and analysis of polynomial regression experiments. Historia Mathematica, 1(4), 431\u2013439.","journal-title":"Historia Mathematica"},{"key":"2082_CR22","doi-asserted-by":"publisher","first-page":"525102","DOI":"10.1155\/2014\/525102","volume":"6","author":"H Xia","year":"2014","unstructured":"Xia, H., Xiang, D., & Mou, P. (2014). Simulation-Based optimization of a Vector Showerhead System for the control of Flow Field Profile in a Vertical Reactor Chamber. Advances in Mechanical Engineering, 6, 525102. https:\/\/doi.org\/10.1155\/2014\/525102.","journal-title":"Advances in Mechanical Engineering"},{"key":"2082_CR23","doi-asserted-by":"publisher","first-page":"111270","DOI":"10.1016\/j.commatsci.2022.111270","volume":"206","author":"CH Yu","year":"2022","unstructured":"Yu, C. H., Wu, C. Y., & Buehler, M. J. (2022). Deep learning based design of porous graphene for enhanced mechanical resilience. Computational Materials Science, 206, 111270.","journal-title":"Computational Materials Science"},{"issue":"4","key":"2082_CR24","doi-asserted-by":"publisher","first-page":"100842","DOI":"10.1016\/j.xcrp.2022.100842","volume":"3","author":"Z Zhang","year":"2022","unstructured":"Zhang, Z., Jin, Z., & Gu, G. X. (2022). Efficient pneumatic actuation modeling using hybrid physics-based and data-driven framework. Cell Reports Physical Science, 3(4), 100842.","journal-title":"Cell Reports Physical Science"}],"container-title":["Journal of Intelligent Manufacturing"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s10845-023-02082-8.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/article\/10.1007\/s10845-023-02082-8\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s10845-023-02082-8.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2024,1,31]],"date-time":"2024-01-31T09:16:02Z","timestamp":1706692562000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1007\/s10845-023-02082-8"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2023,2,15]]},"references-count":24,"journal-issue":{"issue":"2","published-print":{"date-parts":[[2024,2]]}},"alternative-id":["2082"],"URL":"https:\/\/doi.org\/10.1007\/s10845-023-02082-8","relation":{},"ISSN":["0956-5515","1572-8145"],"issn-type":[{"value":"0956-5515","type":"print"},{"value":"1572-8145","type":"electronic"}],"subject":[],"published":{"date-parts":[[2023,2,15]]},"assertion":[{"value":"28 September 2022","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"18 January 2023","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"15 February 2023","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}}]}}