{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,27]],"date-time":"2026-04-27T18:32:14Z","timestamp":1777314734520,"version":"3.51.4"},"reference-count":66,"publisher":"Springer Science and Business Media LLC","issue":"1","license":[{"start":{"date-parts":[[2025,1,5]],"date-time":"2025-01-05T00:00:00Z","timestamp":1736035200000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0"},{"start":{"date-parts":[[2025,1,5]],"date-time":"2025-01-05T00:00:00Z","timestamp":1736035200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by-nc-nd\/4.0"}],"funder":[{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"crossref","award":["NRF 2023R1A2C3006499"],"award-info":[{"award-number":["NRF 2023R1A2C3006499"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"crossref"}]},{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"crossref","award":["NRF-2022R1C1C1003966"],"award-info":[{"award-number":["NRF-2022R1C1C1003966"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"crossref"}]},{"DOI":"10.13039\/501100003725","name":"National Research Foundation of Korea","doi-asserted-by":"publisher","award":["No. 2019R1A5A8083201"],"award-info":[{"award-number":["No. 2019R1A5A8083201"]}],"id":[{"id":"10.13039\/501100003725","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["J Intell Manuf"],"published-print":{"date-parts":[[2026,1]]},"DOI":"10.1007\/s10845-024-02549-2","type":"journal-article","created":{"date-parts":[[2025,1,4]],"date-time":"2025-01-04T19:29:58Z","timestamp":1736018998000},"page":"299-311","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Deep learning-based rotational alignment technique using image generation and Fourier transform"],"prefix":"10.1007","volume":"37","author":[{"given":"Bo Wook","family":"Seo","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Woo Young","family":"Kim","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6049-6461","authenticated-orcid":false,"given":"Seok","family":"Kim","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7545-4646","authenticated-orcid":false,"given":"Young Tae","family":"Cho","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","published-online":{"date-parts":[[2025,1,5]]},"reference":[{"key":"2549_CR1","doi-asserted-by":"publisher","first-page":"335","DOI":"10.1016\/j.optlaseng.2018.04.010","volume":"107","author":"J Ai","year":"2018","unstructured":"Ai, J., Lv, M., Jiang, M., Liu, J., & Zeng, X. (2018). Focused laser lithographic system for efficient and cross-scale fabrication of large-area and 3D micro-patterns. Optics and Lasers in Engineering, 107, 335\u2013341. https:\/\/doi.org\/10.1016\/j.optlaseng.2018.04.010","journal-title":"Optics and Lasers in Engineering"},{"issue":"23","key":"2549_CR2","doi-asserted-by":"publisher","first-page":"21271","DOI":"10.1364\/OE.17.021271","volume":"17","author":"JJ Amsden","year":"2009","unstructured":"Amsden, J. J., Perry, H., Boriskina, S. V., Gopinath, A., Kaplan, D. L., Dal Negro, L., & Omenetto, F. G. (2009). Spectral analysis of induced color change on periodically nanopatterned silk films. Optics Express, 17(23), 21271\u201321279. https:\/\/doi.org\/10.1364\/OE.17.021271","journal-title":"Optics Express"},{"issue":"6","key":"2549_CR3","doi-asserted-by":"publisher","first-page":"2100427","DOI":"10.1002\/lpor.202100427","volume":"16","author":"AR Anwar","year":"2022","unstructured":"Anwar, A. R., Sajjad, M. T., Johar, M. A., Hern\u00e1ndez-Guti\u00e9rrez, C. A., Usman, M., & \u0141epkowski, S. P. (2022). Recent progress in micro-led-based display technologies. Laser & Photonics Reviews, 16(6), 2100427. https:\/\/doi.org\/10.1002\/lpor.202100427","journal-title":"Laser & Photonics Reviews"},{"key":"2549_CR4","doi-asserted-by":"publisher","first-page":"14","DOI":"10.1016\/j.neunet.2021.01.026","volume":"138","author":"A Apicella","year":"2021","unstructured":"Apicella, A., Tramontana, E., Vasile, M., & Mastronardi, G. (2021). A survey on modern trainable activation functions. Neural Networks, 138, 14\u201332. https:\/\/doi.org\/10.1016\/j.neunet.2021.01.026","journal-title":"Neural Networks"},{"key":"2549_CR5","doi-asserted-by":"publisher","first-page":"100089","DOI":"10.1016\/j.yjsbx.2023.100089","volume":"7","author":"PR Baldwin","year":"2023","unstructured":"Baldwin, P. R. (2023). Transformations between rotational and translational invariants formulated in reciprocal spaces. Journal of Structural Biology: X, 7, 100089. https:\/\/doi.org\/10.1016\/j.yjsbx.2023.100089","journal-title":"Journal of Structural Biology: X"},{"key":"2549_CR6","doi-asserted-by":"publisher","first-page":"80","DOI":"10.1117\/12.2228458","volume":"9888H","author":"B Bl\u00e4si","year":"2016","unstructured":"Bl\u00e4si, B., Tucher, N., H\u00f6hn, O., K\u00fcbler, V., Kroyer, T., Wellens, Ch., & Hauser, H. (2016). Large area patterning using interference and nanoimprint lithography. Proceedings SPIE 9888, Micro-Optics, 9888H, 80\u201388. https:\/\/doi.org\/10.1117\/12.2228458","journal-title":"Proceedings SPIE 9888, Micro-Optics"},{"issue":"6\u20137","key":"2549_CR7","doi-asserted-by":"publisher","first-page":"443","DOI":"10.1002\/ppap.200600015","volume":"3","author":"F Br\u00e9tagnol","year":"2006","unstructured":"Br\u00e9tagnol, F., Valsesia, A., Ceccone, G., Colpo, P., Gilliland, D., Ceriotti, L., Hasiwa, M., & Rossi, F. (2006). Surface functionalization and patterning techniques to design interfaces for biomedical and biosensor applications. Plasma Processes and Polymers, 3(6\u20137), 443\u2013455. https:\/\/doi.org\/10.1002\/ppap.200600015","journal-title":"Plasma Processes and Polymers"},{"issue":"2","key":"2549_CR8","doi-asserted-by":"publisher","first-page":"125","DOI":"10.3390\/info11020125","volume":"11","author":"A Buslaev","year":"2020","unstructured":"Buslaev, A., Parinov, A., Khvedchenya, E., Iglovikov, V. I., & Kalinin, A. A. (2020). Albumentations: Fast and flexible image augmentations. Information, 11(2), 125. https:\/\/doi.org\/10.3390\/info11020125","journal-title":"Information"},{"key":"2549_CR9","doi-asserted-by":"publisher","first-page":"57","DOI":"10.1016\/j.mee.2015.02.042","volume":"135","author":"Y Chen","year":"2015","unstructured":"Chen, Y. (2015). Nanofabrication by electron beam lithography and its applications: A review. Microelectronic Engineering, 135, 57\u201372. https:\/\/doi.org\/10.1016\/j.mee.2015.02.042","journal-title":"Microelectronic Engineering"},{"key":"2549_CR10","doi-asserted-by":"publisher","first-page":"106451","DOI":"10.1016\/j.orgel.2022.106451","volume":"103","author":"Y Chen","year":"2022","unstructured":"Chen, Y., Wen, S., Liao, P. H., Lee, W. K., Lee, C. C., Huang, C. W., Yang, Y. H., Lin, K. C., Chang, C. J., Su, G. D., Lin, H. Y., Chen, C. C., Lin, W. Y., Kwak, B. L., Visser, R. J., & Wu, C. C. (2022). Reflective 3D pixel configuration for enhancing efficiency of OLED displays. Organic Electronics, 103, 106451. https:\/\/doi.org\/10.1016\/j.orgel.2022.106451","journal-title":"Organic Electronics"},{"issue":"5","key":"2549_CR11","doi-asserted-by":"publisher","first-page":"545","DOI":"10.1111\/1754-9485.13261","volume":"65","author":"P Chlap","year":"2021","unstructured":"Chlap, P., Min, H., Vandenberg, N., Dowling, J., Holloway, L., & Haworth, A. (2021). A review of medical image data augmentation techniques for deep learning applications. Journal of Medical Imaging and Radiation Oncology, 65(5), 545\u2013563. https:\/\/doi.org\/10.1111\/1754-9485.13261","journal-title":"Journal of Medical Imaging and Radiation Oncology"},{"issue":"12","key":"2549_CR12","doi-asserted-by":"publisher","first-page":"2417","DOI":"10.1016\/j.mee.2009.05.004","volume":"86","author":"Y Cho","year":"2009","unstructured":"Cho, Y., Kwon, S., Seo, J. W., Kim, J. G., Cho, J. W., Park, J. W., Kim, H., & Lee, S. (2009). Development of large area nano imprint technology by step and repeat process and pattern stitching technique. Microelectronic Engineering, 86(12), 2417\u20132422. https:\/\/doi.org\/10.1016\/j.mee.2009.05.004","journal-title":"Microelectronic Engineering"},{"key":"2549_CR13","doi-asserted-by":"publisher","first-page":"36","DOI":"10.1117\/12.281232","volume":"3099","author":"FSM Clube","year":"1997","unstructured":"Clube, F. S. M., Gray, S., Struchen, D., Malfoy, S., Darbellay, Y., Magnon, N., Gratiet, B. L., & Tisserand, J. C. (1997). Large-field high-resolution photolithography. Proceedings of SPIE, the International Society for Optical Engineering\/proceedings of SPIE, 3099, 36\u201345. https:\/\/doi.org\/10.1117\/12.281232","journal-title":"Proceedings of SPIE, the International Society for Optical Engineering\/proceedings of SPIE"},{"issue":"3","key":"2549_CR14","doi-asserted-by":"publisher","first-page":"1046","DOI":"10.1002\/jemt.23974","volume":"85","author":"HD da Fonseca Filho","year":"2022","unstructured":"da Fonseca Filho, H. D., Pires, M. P., de Souza, P. L., Matos, R. S., & Prioli, R. (2022). Investigation of the morphological and fractal behavior at nanoscale of patterning lines by scratching in an atomic force microscope. Microscopy Research and Technique, 85(3), 1046\u20131055. https:\/\/doi.org\/10.1002\/jemt.23974","journal-title":"Microscopy Research and Technique"},{"key":"2549_CR15","doi-asserted-by":"publisher","first-page":"106594","DOI":"10.1016\/j.compbiomed.2023.106594","volume":"154","author":"O Eminaga","year":"2023","unstructured":"Eminaga, O., Abbas, M., Shen, J., & Laurie, M. (2023). PlexusNet: A neural network architectural concept for medical image classification. Computers in Biology and Medicine, 154, 106594. https:\/\/doi.org\/10.1016\/j.compbiomed.2023.106594","journal-title":"Computers in Biology and Medicine"},{"key":"2549_CR16","doi-asserted-by":"publisher","first-page":"79","DOI":"10.1117\/12.524447","volume":"5347","author":"LH Erdmann","year":"2004","unstructured":"Erdmann, L. H., Deparnay, A., Wirth, F., & Brunner, R. (2004). MEMS-based lithography for the fabrication of micro-optical components. Proceedings of SPIE, the International Society for Optical Engineering\/proceedings of SPIE, 5347, 79\u201384. https:\/\/doi.org\/10.1117\/12.524447","journal-title":"Proceedings of SPIE, the International Society for Optical Engineering\/proceedings of SPIE"},{"issue":"40","key":"2549_CR17","doi-asserted-by":"publisher","first-page":"19353","DOI":"10.1039\/C8TA06944A","volume":"6","author":"S Gam-Derouich","year":"2018","unstructured":"Gam-Derouich, S., Pinson, J., Lamouri, A., Decorse, P., Bellynck, S., Herbaut, R., Royon, L., & Mangeney, C. (2018). Micro-patterned anti-icing coatings with dual hydrophobic\/hydrophilic properties. Journal of Materials Chemistry. a, Materials for Energy and Sustainability, 6(40), 19353\u201319357. https:\/\/doi.org\/10.1039\/C8TA06944A","journal-title":"Journal of Materials Chemistry. a, Materials for Energy and Sustainability"},{"key":"2549_CR18","unstructured":"Gholamalinezhad, H., & Khosravi, H. (2020). Pooling methods in deep neural networks, a review. arXiv preprint arXiv:2009.07485. https:\/\/arxiv.org\/abs\/2009.07485"},{"key":"2549_CR19","doi-asserted-by":"publisher","DOI":"10.1109\/ICCV.2015.123","author":"K He","year":"2015","unstructured":"He, K., Zhang, X., Ren, S., & Sun, J. (2015). Delving deep into rectifiers: Surpassing human-level performance on imagenet classification. Proceedings of the IEEE International Conference on Computer Vision. https:\/\/doi.org\/10.1109\/ICCV.2015.123","journal-title":"Proceedings of the IEEE International Conference on Computer Vision"},{"key":"2549_CR20","doi-asserted-by":"publisher","DOI":"10.1109\/CVPR.2016.90","author":"K He","year":"2016","unstructured":"He, K., Zhang, X., Ren, S., & Sun, J. (2016). Deep residual learning for image recognition. Proceedings of the IEEE Conference on Computer Vision and Pattern Recognition. https:\/\/doi.org\/10.1109\/CVPR.2016.90","journal-title":"Proceedings of the IEEE Conference on Computer Vision and Pattern Recognition"},{"issue":"1","key":"2549_CR21","doi-asserted-by":"publisher","first-page":"28","DOI":"10.3390\/bios4010028","volume":"4","author":"WF Hynes","year":"2014","unstructured":"Hynes, W. F., Doty, N. J., Zarembinski, T. I., Schwartz, M., Toepke, M., Murphy, W., Atzet, S., Clark, R., Melendez, J., & Cady, N. (2014). Micropatterning of 3D microenvironments for living biosensor applications. Biosensors (Basel), 4(1), 28\u201344. https:\/\/doi.org\/10.3390\/bios4010028","journal-title":"Biosensors (Basel)"},{"issue":"6","key":"2549_CR22","doi-asserted-by":"publisher","first-page":"1115","DOI":"10.1088\/0964-1726\/10\/6\/301","volume":"10","author":"JW Judy","year":"2001","unstructured":"Judy, J. W. (2001). Microelectromechanical systems (MEMS): Fabrication, design and applications. Smart Materials and Structures, 10(6), 1115\u20131134. https:\/\/doi.org\/10.1088\/0964-1726\/10\/6\/301","journal-title":"Smart Materials and Structures"},{"issue":"8B","key":"2549_CR23","doi-asserted-by":"publisher","first-page":"5706","DOI":"10.1143\/JJAP.43.5706","volume":"43","author":"S Kang","year":"2004","unstructured":"Kang, S. (2004). Replication technology for micro\/nano optical components. Japanese Journal of Applied Physics, 43(8B), 5706\u20135716. https:\/\/doi.org\/10.1143\/JJAP.43.5706","journal-title":"Japanese Journal of Applied Physics"},{"key":"2549_CR24","doi-asserted-by":"publisher","DOI":"10.5281\/zenodo.1214456","author":"JN Kather","year":"2018","unstructured":"Kather, J. N., Halama, N., & Marx, A. (2018). 100,000 histological images of human colorectal cancer and healthy tissue. Zenodo. https:\/\/doi.org\/10.5281\/zenodo.1214456"},{"issue":"1","key":"2549_CR25","doi-asserted-by":"publisher","first-page":"e1002730","DOI":"10.1371\/journal.pmed.1002730","volume":"16","author":"JN Kather","year":"2019","unstructured":"Kather, J. N., Krisam, J., Charoentong, P., Luedde, T., Herpel, E., Weis, C.-A., Gaiser, T., Marx, A., Valous, N. A., Ferber, D., Jansen, L., Reyes-Aldasoro, C. C., Z\u00f6rnig, I., J\u00e4ger, D., Brenner, H., Chang-Claude, J., Hoffmeister, M., & Halama, N. (2019). Predicting survival from colorectal cancer histology slides using deep learning: A retrospective multicenter study. PLoS Medicine, 16(1), e1002730. https:\/\/doi.org\/10.1371\/journal.pmed.1002730","journal-title":"PLoS Medicine"},{"issue":"11","key":"2549_CR26","doi-asserted-by":"publisher","first-page":"569","DOI":"10.3390\/mi9110569","volume":"9","author":"J Kim","year":"2018","unstructured":"Kim, J., & Yoon, H. (2018). Transfer tiling of nanostructures for large-area fabrication. Micromachines (Basel), 9(11), 569. https:\/\/doi.org\/10.3390\/mi9110569","journal-title":"Micromachines (Basel)"},{"issue":"1","key":"2549_CR27","doi-asserted-by":"publisher","first-page":"6247","DOI":"10.1038\/ncomms7247","volume":"6","author":"M Kim","year":"2015","unstructured":"Kim, M., Ha, D., & Kim, T. (2015). Cracking-assisted photolithography for mixed-scale patterning and nanofluidic applications. Nature Communications, 6(1), 6247. https:\/\/doi.org\/10.1038\/ncomms7247","journal-title":"Nature Communications"},{"issue":"9","key":"2549_CR28","doi-asserted-by":"publisher","first-page":"14049","DOI":"10.1021\/acsnano.1c01636","volume":"15","author":"S Kim","year":"2021","unstructured":"Kim, S., Kim, W. Y., Nam, S. H., Shin, S., Choi, S. H., Kim, D. H., Lee, H., Choi, H. J., Lee, E., Park, J. H., Jo, I., Fang, N. X., & Cho, Y. T. (2021). Microstructured surfaces for reducing chances of fomite transmission via virus-containing respiratory droplets. ACS Nano, 15(9), 14049\u201314060. https:\/\/doi.org\/10.1021\/acsnano.1c01636","journal-title":"ACS Nano"},{"issue":"1","key":"2549_CR29","doi-asserted-by":"publisher","first-page":"2202","DOI":"10.1038\/s41467-023-37828-8","volume":"14","author":"WY Kim","year":"2023","unstructured":"Kim, W. Y., Seo, B. W., Lee, S. H., Lee, T. G., Kwon, S., Chang, W. S., Nam, S. H., Fang, N. X., Kim, S., & Cho, Y. T. (2023). Quasi-seamless stitching for large-area micropatterned surfaces enabled by Fourier spectral analysis of moir\u00e9 patterns. Nature Communications, 14(1), 2202. https:\/\/doi.org\/10.1038\/s41467-023-37828-8","journal-title":"Nature Communications"},{"issue":"35","key":"2549_CR30","doi-asserted-by":"publisher","first-page":"1801834","DOI":"10.1002\/adfm.201801834","volume":"28","author":"JH Koo","year":"2018","unstructured":"Koo, J. H., Kim, D. C., Shim, H. J., Kim, T., & Kim, D. (2018). Flexible and stretchable smart display: Materials, fabrication, device design, and system integration. Advanced Functional Materials, 28(35), 1801834. https:\/\/doi.org\/10.1002\/adfm.201801834","journal-title":"Advanced Functional Materials"},{"key":"2549_CR31","doi-asserted-by":"publisher","DOI":"10.1007\/s10845-024-02476-2","author":"AS Kumar","year":"2024","unstructured":"Kumar, A. S., Agarwal, A., Jansari, V. G., Desai, K. A., Chattopadhyay, C., & Mears, L. (2024). HG-XAI: Human-guided tool wear identification approach through augmentation of explainable artificial intelligence with machine vision. Journal of Intelligent Manufacturing. https:\/\/doi.org\/10.1007\/s10845-024-02476-2","journal-title":"Journal of Intelligent Manufacturing"},{"issue":"1","key":"2549_CR32","doi-asserted-by":"publisher","first-page":"86","DOI":"10.1039\/C4MH00159A","volume":"2","author":"MK Kwak","year":"2015","unstructured":"Kwak, M. K., Ok, J. G., Lee, S. H., & Guo, L. J. (2015). Visually tolerable tiling (VTT) for making a large-area flexible patterned surface. Materials Horizons, 2(1), 86\u201390. https:\/\/doi.org\/10.1039\/C4MH00159A","journal-title":"Materials Horizons"},{"issue":"3","key":"2549_CR33","doi-asserted-by":"publisher","first-page":"387","DOI":"10.1016\/j.elecom.2007.12.020","volume":"10","author":"Y Lai","year":"2008","unstructured":"Lai, Y., Lin, C., Wang, H., Huang, J., Zhuang, H., & Sun, L. (2008). Superhydrophilic\u2013superhydrophobic micropattern on TiO2 nanotube films by photocatalytic lithography. Electrochemistry Communications, 10(3), 387\u2013391. https:\/\/doi.org\/10.1016\/j.elecom.2007.12.020","journal-title":"Electrochemistry Communications"},{"key":"2549_CR34","doi-asserted-by":"crossref","unstructured":"Li, C., Xu, Z., Li, Z., & Song, Q. (2016). A center-line extraction algorithm of laser stripes based on multi-Gaussian signals fitting. In 2016 IEEE International Conference on Information and Automation (ICIA) (pp. 1343\u20131348). IEEE","DOI":"10.1109\/ICInfA.2016.7831820"},{"issue":"22","key":"2549_CR35","doi-asserted-by":"publisher","first-page":"3783","DOI":"10.1002\/adma.200701709","volume":"19","author":"C Liu","year":"2007","unstructured":"Liu, C. (2007). Recent developments in polymer MEMS. Advanced Materials (Weinheim), 19(22), 3783\u20133790. https:\/\/doi.org\/10.1002\/adma.200701709","journal-title":"Advanced Materials (Weinheim)"},{"key":"2549_CR36","doi-asserted-by":"publisher","first-page":"1091","DOI":"10.1016\/j.proeng.2015.08.778","volume":"120","author":"X Ma","year":"2015","unstructured":"Ma, X., Kato, Y., Kempen, F., Hirai, Y., Tsuchiya, T., Keulen, F., & Tabata, O. (2015). Multiple patterning with process optimization method for maskless DMD-based grayscale lithography. Procedia Engineering, 120, 1091\u20131094. https:\/\/doi.org\/10.1016\/j.proeng.2015.08.778","journal-title":"Procedia Engineering"},{"issue":"1167","key":"2549_CR37","doi-asserted-by":"publisher","first-page":"187","DOI":"10.1098\/rspb.1980.0020","volume":"207","author":"D Marr","year":"1980","unstructured":"Marr, D., & Hildreth, E. (1980). Theory of edge detection. Proceedings of the Royal Society of London. Series B. Biological Sciences, 207(1167), 187\u2013217. https:\/\/doi.org\/10.1098\/rspb.1980.0020","journal-title":"Proceedings of the Royal Society of London. Series B. Biological Sciences"},{"issue":"9","key":"2549_CR38","doi-asserted-by":"publisher","first-page":"3766","DOI":"10.1021\/la049803g","volume":"20","author":"PM Mendes","year":"2004","unstructured":"Mendes, P. M., Jacke, S., Critchley, K., Plaza, J., Chen, Y., Nikitin, K., Palmer, R. E., Preece, J. A., Evans, S. D., & Fitzmaurice, D. (2004). Gold nanoparticle patterning of silicon wafers using chemical e-beam lithography. Langmuir, 20(9), 3766\u20133768. https:\/\/doi.org\/10.1021\/la049803g","journal-title":"Langmuir"},{"issue":"31","key":"2549_CR39","doi-asserted-by":"publisher","first-page":"6253","DOI":"10.1364\/AO.35.006253","volume":"35","author":"MS Mill\u00e1n","year":"1996","unstructured":"Mill\u00e1n, M. S., & Escofet, J. (1996). Fourier-domain-based angular correlation for quasiperiodic pattern recognition. Applications to Web Inspection. Applied Optics, 35(31), 6253\u20136260. https:\/\/doi.org\/10.1364\/AO.35.006253","journal-title":"Applied Optics"},{"key":"2549_CR40","doi-asserted-by":"publisher","first-page":"100258","DOI":"10.1016\/j.array.2022.100258","volume":"16","author":"A Mumuni","year":"2022","unstructured":"Mumuni, A., & Mumuni, F. (2022). Data augmentation: A comprehensive survey of modern approaches. Array, 16, 100258. https:\/\/doi.org\/10.1016\/j.array.2022.100258","journal-title":"Array"},{"key":"2549_CR41","doi-asserted-by":"publisher","unstructured":"Nacereddine, N., Ziou, D., & Goumeidane, A. B. (2024). Linear anchored gaussian mixture model for location and width computation of objects in thick line shape. arXiv preprint arXiv:2404.03043. https:\/\/doi.org\/10.48550\/arXiv.2404.03043.","DOI":"10.48550\/arXiv.2404.03043"},{"key":"2549_CR42","doi-asserted-by":"publisher","unstructured":"Nair, V., & Hinton, G. E. (2010). Rectified linear units improve restricted boltzmann machines. Proceedings of the 27th international conference on machine learning (ICML-10). https:\/\/doi.org\/10.48550\/arXiv.1512.03385.","DOI":"10.48550\/arXiv.1512.03385"},{"issue":"7397","key":"2549_CR43","doi-asserted-by":"publisher","first-page":"221","DOI":"10.1038\/nature11002","volume":"485","author":"KH Nam","year":"2012","unstructured":"Nam, K. H., Park, I. H., & Ko, S. H. (2012). Patterning by controlled cracking. Nature (London), 485(7397), 221\u2013224. https:\/\/doi.org\/10.1038\/nature11002","journal-title":"Nature (London)"},{"issue":"11","key":"2549_CR44","doi-asserted-by":"publisher","first-page":"6946","DOI":"10.1021\/acs.nanolett.6b03007","volume":"16","author":"J Park","year":"2016","unstructured":"Park, J., Kyhm, J., Kim, H. H., Jeong, S., Kang, J., Lee, S. E., Lee, K. T., Park, K., Barange, N., Han, J., Song, J. D., Choi, W. K., & Han, I. K. (2016). Alternative patterning process for realization of large-area, full-color, active quantum dot display. Nano Letters, 16(11), 6946\u20136953. https:\/\/doi.org\/10.1021\/acs.nanolett.6b03007","journal-title":"Nano Letters"},{"key":"2549_CR45","volume-title":"Three-Dimensional Integrated Circuit Design","author":"VF Pavlidis","year":"2017","unstructured":"Pavlidis, V. F., Savidis, I., & Friedman, E. G. (2017). Three-Dimensional Integrated Circuit Design (2nd ed.). Morgan Kaufmann Publishers.","edition":"2"},{"key":"2549_CR46","doi-asserted-by":"publisher","unstructured":"Plumworasawat, S., & Sae-Bae, N. (2023). Colorectal Tissue Image Classification Across Datasets. 2023 20th International Conference on Electrical Engineering\/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON). IEEE. https:\/\/doi.org\/10.1109\/ECTI-CON58255.2023.10153365","DOI":"10.1109\/ECTI-CON58255.2023.10153365"},{"key":"2549_CR47","volume-title":"Digital integrated circuits","author":"JM Rabaey","year":"2002","unstructured":"Rabaey, J. M., Chandrakasan, A. P., & Nikolic, B. (2002). Digital integrated circuits. Prentice hall Englewood Cliffs."},{"issue":"4","key":"2549_CR48","doi-asserted-by":"publisher","first-page":"885","DOI":"10.1109\/JMEMS.2011.2148161","volume":"20","author":"HL Sang","year":"2011","unstructured":"Sang, H. L., Chen, K. N., & Lu, J. J. Q. (2011). Wafer-to-wafer alignment for three-dimensional integration: A review. JMEMS, 20(4), 885\u2013898. https:\/\/doi.org\/10.1109\/JMEMS.2011.2148161","journal-title":"JMEMS"},{"issue":"4","key":"2549_CR49","doi-asserted-by":"publisher","first-page":"1995","DOI":"10.1007\/s10845-021-01878-w","volume":"34","author":"SA Singh","year":"2023","unstructured":"Singh, S. A., & Desai, K. A. (2023). Automated surface defect detection framework using machine vision and convolutional neural networks. Journal of Intelligent Manufacturing, 34(4), 1995\u20132011. https:\/\/doi.org\/10.1007\/s10845-021-01878-w","journal-title":"Journal of Intelligent Manufacturing"},{"key":"2549_CR50","doi-asserted-by":"publisher","DOI":"10.48550\/arXiv.1905.11946","author":"M Tan","year":"2019","unstructured":"Tan, M., & Le, Q. (2019). Efficientnet: Rethinking model scaling for convolutional neural networks. International Conference on Machine Learning, PMLR. https:\/\/doi.org\/10.48550\/arXiv.1905.11946","journal-title":"International Conference on Machine Learning, PMLR"},{"issue":"7","key":"2549_CR51","doi-asserted-by":"publisher","first-page":"2925","DOI":"10.1007\/s10845-022-01976-3","volume":"34","author":"J Tang","year":"2023","unstructured":"Tang, J., Zhou, H., Wang, T., Jin, Z., Wang, Y., & Wang, X. (2023). Cascaded foreign object detection in manufacturing processes using convolutional neural networks and synthetic data generation methodology. Journal of Intelligent Manufacturing, 34(7), 2925\u20132941. https:\/\/doi.org\/10.1007\/s10845-022-01976-3","journal-title":"Journal of Intelligent Manufacturing"},{"issue":"4.5","key":"2549_CR52","doi-asserted-by":"publisher","first-page":"491","DOI":"10.1147\/rd.504.0491","volume":"50","author":"AW Topol","year":"2006","unstructured":"Topol, A. W., La Tulipe, D. C., Shi, L., Frank, D. J., Bernstein, K., Steen, S. E., Kumar, A., Singco, G. U., Young, A. M., Guarini, K. W., & Ieong, M. (2006). Three-dimensional integrated circuits. IBM Journal of Research and Development, 50(4.5), 491\u2013506. https:\/\/doi.org\/10.1147\/rd.504.0491","journal-title":"IBM Journal of Research and Development"},{"issue":"2","key":"2549_CR53","doi-asserted-by":"publisher","first-page":"141","DOI":"10.1109\/TEPM.2003.817714","volume":"26","author":"A Tseng","year":"2003","unstructured":"Tseng, A., Chen, N. K., Chen, C., & Ma, K. (2003). Electron beam lithography in nanoscale fabrication: Recent development. IEEE Transactions on Electronics Packaging Manufacturing, 26(2), 141\u2013149. https:\/\/doi.org\/10.1109\/TEPM.2003.817714","journal-title":"IEEE Transactions on Electronics Packaging Manufacturing"},{"issue":"5","key":"2549_CR54","doi-asserted-by":"publisher","first-page":"5437","DOI":"10.1021\/acsami.9b18187","volume":"12","author":"G Tullii","year":"2020","unstructured":"Tullii, G., Donini, S., Bossio, C., Lodola, F., Pasini, M., Parisini, E., Galeotti, F., & Antognazza, M. R. (2020). Micro- and nanopatterned silk substrates for antifouling applications. ACS Applied Materials & Interfaces, 12(5), 5437\u20135446. https:\/\/doi.org\/10.1021\/acsami.9b18187","journal-title":"ACS Applied Materials & Interfaces"},{"issue":"9","key":"2549_CR55","doi-asserted-by":"publisher","first-page":"1234","DOI":"10.1002\/adma.201204120","volume":"25","author":"E Ueda","year":"2013","unstructured":"Ueda, E., & Levkin, P. A. (2013). Emerging applications of superhydrophilic-superhydrophobic micropatterns. Advanced Materials (Weinheim), 25(9), 1234\u20131247. https:\/\/doi.org\/10.1002\/adma.201204120","journal-title":"Advanced Materials (Weinheim)"},{"issue":"3","key":"2549_CR56","doi-asserted-by":"publisher","first-page":"243","DOI":"10.1515\/aot-2017-0022","volume":"6","author":"MA Verschuuren","year":"2017","unstructured":"Verschuuren, M. A., Megens, M., Ni, Y., Van Sprang, H., & Polman, A. (2017). Large area nanoimprint by substrate conformal imprint lithography (SCIL). Advanced Optical Technologies, 6(3), 243\u2013264. https:\/\/doi.org\/10.1515\/aot-2017-0022","journal-title":"Advanced Optical Technologies"},{"issue":"12","key":"2549_CR57","doi-asserted-by":"publisher","first-page":"3503","DOI":"10.1016\/j.patcog.2007.04.020","volume":"40","author":"X Wang","year":"2007","unstructured":"Wang, X., Zhang, Y., & Smith, J. (2007). Scaling and rotation invariant analysis approach to object recognition based on Radon and Fourier-Mellin transforms. Pattern Recognition, 40(12), 3503\u20133508. https:\/\/doi.org\/10.1016\/j.patcog.2007.04.020","journal-title":"Pattern Recognition"},{"issue":"4","key":"2549_CR58","doi-asserted-by":"publisher","first-page":"045028","DOI":"10.1088\/2053-1583\/aba99f","volume":"7","author":"Z Wei","year":"2020","unstructured":"Wei, Z., Liao, M., Guo, Y., Tang, J., Cai, Y., Chen, H., Wang, Q., Jia, Q., Lu, Y., Zhao, Y., Liu, J., Chu, Y., Yu, H., Li, N., Yuan, J., Huang, B., Shen, C., Yang, R., Shi, D., & Zhang, G. (2020). Scratching lithography for wafer-scale MoS2 monolayers. 2D Materials, 7(4), 045028. https:\/\/doi.org\/10.1088\/2053-1583\/aba99f","journal-title":"2D Materials"},{"issue":"7","key":"2549_CR59","doi-asserted-by":"publisher","first-page":"75011","DOI":"10.1088\/1361-6439\/aabb1f","volume":"28","author":"S Wen","year":"2018","unstructured":"Wen, S., Bhaskar, A., & Zhang, H. (2018). Scanning digital lithography providing high-speed large-area patterning with diffraction-limited sub-micron resolution. Journal of Micromechanics and Microengineering, 28(7), 75011. https:\/\/doi.org\/10.1088\/1361-6439\/aabb1f","journal-title":"Journal of Micromechanics and Microengineering"},{"issue":"15","key":"2549_CR60","doi-asserted-by":"publisher","first-page":"16684","DOI":"10.1364\/OE.20.016684","volume":"20","author":"H Wu","year":"2012","unstructured":"Wu, H., Hu, W., Hu, H. C., Lin, X. W., Zhu, G., Choi, J. W., Chigrinov, V., & Lu, Y. Q. (2012). Arbitrary photo-patterning in liquid crystal alignments using DMD-based lithography system. Optics Express, 20(15), 16684. https:\/\/doi.org\/10.1364\/OE.20.016684","journal-title":"Optics Express"},{"key":"2549_CR61","doi-asserted-by":"publisher","unstructured":"Yu, D., Wang, H., Liang, Y., & Li, S. (2014). Mixed pooling for convolutional neural networks. In Rough Sets and Knowledge Technology: 9th International Conference, RSKT 2014, Shanghai, China, October 24\u201326, 2014, Proceedings (Vol. 9, pp. 364\u2013375). Springer International Publishing. https:\/\/doi.org\/10.1007\/978-3-319-11740-9_34","DOI":"10.1007\/978-3-319-11740-9_34"},{"issue":"2","key":"2549_CR62","doi-asserted-by":"publisher","first-page":"310","DOI":"10.1109\/TIP.2006.887731","volume":"16","author":"Q Zhang","year":"2007","unstructured":"Zhang, Q., & Couloigner, I. (2007). Accurate centerline detection and line width estimation of thick lines using the radon transform. IEEE Transactions on Image Processing, 16(2), 310\u2013316. https:\/\/doi.org\/10.1109\/TIP.2006.887731","journal-title":"IEEE Transactions on Image Processing"},{"issue":"1","key":"2549_CR63","doi-asserted-by":"publisher","first-page":"012039","DOI":"10.1088\/1742-6596\/1939\/1\/012039","volume":"1939","author":"S Zhang","year":"2021","unstructured":"Zhang, S., Zhao, L., & He, Y. (2021). Lithography alignment method based on image rotation matching. Journal of Physics: Conference Series, 1939(1), 012039. https:\/\/doi.org\/10.1088\/1742-6596\/1939\/1\/012039","journal-title":"Journal of Physics: Conference Series"},{"issue":"8","key":"2549_CR64","doi-asserted-by":"publisher","first-page":"1632","DOI":"10.1063\/1.1600505","volume":"83","author":"W Zhang","year":"2003","unstructured":"Zhang, W., & Chou, S. Y. (2003). Fabrication of 60-nm transistors on 4-in wafer using nanoimprint at all lithography levels. Applied Physics Letters, 83(8), 1632\u20131634. https:\/\/doi.org\/10.1063\/1.1600505","journal-title":"Applied Physics Letters"},{"key":"2549_CR65","doi-asserted-by":"publisher","first-page":"258","DOI":"10.1117\/12.2219336","volume":"9781","author":"J Zhou","year":"2016","unstructured":"Zhou, J., & Chen, Y. (2016). A comparative study on the yield performance of via landing and direct stitching processes for 2D pattern connection. In Design-Process-Technology Co-Optimization for Manufacturability X, 9781, 258\u2013268. https:\/\/doi.org\/10.1117\/12.2219336","journal-title":"In Design-Process-Technology Co-Optimization for Manufacturability X"},{"issue":"5","key":"2549_CR66","doi-asserted-by":"publisher","first-page":"3710","DOI":"10.1021\/acs.nanolett.0c00701","volume":"20","author":"C Zou","year":"2020","unstructured":"Zou, C., Chang, C., Sun, D., B\u00f6hringer, K. F., & Lin, L. Y. (2020). Photolithographic patterning of perovskite thin films for multicolor display applications. Nano Letters, 20(5), 3710\u20133717. https:\/\/doi.org\/10.1021\/acs.nanolett.0c00701","journal-title":"Nano Letters"}],"container-title":["Journal of Intelligent Manufacturing"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s10845-024-02549-2.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/article\/10.1007\/s10845-024-02549-2","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s10845-024-02549-2.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,1,31]],"date-time":"2026-01-31T09:35:23Z","timestamp":1769852123000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1007\/s10845-024-02549-2"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,1,5]]},"references-count":66,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2026,1]]}},"alternative-id":["2549"],"URL":"https:\/\/doi.org\/10.1007\/s10845-024-02549-2","relation":{"references":[{"id-type":"doi","id":"10.5281\/zenodo.1214456","asserted-by":"subject"}]},"ISSN":["0956-5515","1572-8145"],"issn-type":[{"value":"0956-5515","type":"print"},{"value":"1572-8145","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,1,5]]},"assertion":[{"value":"5 May 2024","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"27 November 2024","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"5 January 2025","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}},{"order":1,"name":"Ethics","group":{"name":"EthicsHeading","label":"Declarations"}},{"value":"The authors declare that they have no conflict of interest.","order":2,"name":"Ethics","group":{"name":"EthicsHeading","label":"Conflict of interest"}},{"value":"This article does not contain any studies with human participants or animals performed by any.","order":3,"name":"Ethics","group":{"name":"EthicsHeading","label":"Ethical approval"}}]}}