{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,11]],"date-time":"2026-06-11T16:11:35Z","timestamp":1781194295346,"version":"3.54.1"},"reference-count":31,"publisher":"Springer Science and Business Media LLC","issue":"3","license":[{"start":{"date-parts":[[2025,2,27]],"date-time":"2025-02-27T00:00:00Z","timestamp":1740614400000},"content-version":"tdm","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"},{"start":{"date-parts":[[2025,2,27]],"date-time":"2025-02-27T00:00:00Z","timestamp":1740614400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/www.springernature.com\/gp\/researchers\/text-and-data-mining"}],"funder":[{"name":"Hansol Iones","award":["Hansol Iones"],"award-info":[{"award-number":["Hansol Iones"]}]}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["J Intell Manuf"],"published-print":{"date-parts":[[2026,3]]},"DOI":"10.1007\/s10845-025-02584-7","type":"journal-article","created":{"date-parts":[[2025,2,27]],"date-time":"2025-02-27T14:17:17Z","timestamp":1740665837000},"page":"1075-1091","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":6,"title":["Optimizing chamber systems for deposition processes in the semiconductor industry with deep learning framework: tackling small simulation datasets"],"prefix":"10.1007","volume":"37","author":[{"given":"Donggeun","family":"Park","sequence":"first","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Hanbin","family":"Cho","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Changseob","family":"Kwon","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Youngyeon","family":"Ji","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9516-5809","authenticated-orcid":false,"given":"Seunghwa","family":"Ryu","sequence":"additional","affiliation":[],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"297","published-online":{"date-parts":[[2025,2,27]]},"reference":[{"key":"2584_CR11","doi-asserted-by":"publisher","first-page":"106504","DOI":"10.1016\/j.cmpb.2021.106504","volume":"213","author":"A Bailly","year":"2022","unstructured":"Bailly, A., Blanc, C., Francis, \u00c9., Guillotin, T., Jamal, F., Wakim, B., & Roy, P. (2022). Effects of dataset size and interactions on the prediction performance of logistic regression and deep learning models. Computer Methods and Programs in Biomedicine, 213, 106504. https:\/\/doi.org\/10.1016\/j.cmpb.2021.106504","journal-title":"Computer Methods and Programs in Biomedicine"},{"issue":"1","key":"2584_CR27","doi-asserted-by":"publisher","first-page":"182","DOI":"10.1109\/72.363438","volume":"6","author":"P Baldi","year":"1995","unstructured":"Baldi, P. (1995). Gradient descent learning Algorithm Overview: A General Dynamical systems Perspective. IEEE Transactions on Neural Networks, 6(1), 182\u2013195. https:\/\/doi.org\/10.1109\/72.363438","journal-title":"IEEE Transactions on Neural Networks"},{"issue":"8","key":"2584_CR1","doi-asserted-by":"publisher","first-page":"678","DOI":"10.1016\/j.scib.2020.01.016","volume":"65","author":"K Cao","year":"2020","unstructured":"Cao, K., Cai, J., Shan, B., & Chen, R. (2020). Surface functionalization on nanoparticles via atomic layer deposition. Science Bulletin, 65(8), 678\u2013688. https:\/\/doi.org\/10.1016\/j.scib.2020.01.016","journal-title":"Science Bulletin"},{"issue":"2","key":"2584_CR19","doi-asserted-by":"publisher","first-page":"357","DOI":"10.1016\/j.atmosenv.2005.09.044","volume":"40","author":"F Chen","year":"2006","unstructured":"Chen, F., Yu, S. C. M., & Lai, A. C. K. (2006). Modeling particle distribution and deposition in indoor environments with a new drift-flux model. Atmospheric Environment, 40(2), 357\u2013367. https:\/\/doi.org\/10.1016\/j.atmosenv.2005.09.044","journal-title":"Atmospheric Environment"},{"issue":"2","key":"2584_CR24","doi-asserted-by":"publisher","first-page":"101","DOI":"10.1016\/j.jai.2024.05.001","volume":"3","author":"Z Chen","year":"2024","unstructured":"Chen, Z., Zhao, W., Deng, L., Ding, Y., Wen, Q., Li, G., & Xie, Y. (2024). Large-scale self-normalizing neural networks. Journal of Automation and Intelligence, 3(2), 101\u2013110. https:\/\/doi.org\/10.1016\/j.jai.2024.05.001","journal-title":"Journal of Automation and Intelligence"},{"issue":"1","key":"2584_CR30","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1038\/s41598-022-27264-x","volume":"13","author":"MZI Chowdhury","year":"2023","unstructured":"Chowdhury, M. Z. I., Leung, A. A., Walker, R. L., Sikdar, K. C., O\u2019Beirne, M., Quan, H., & Turin, T. C. (2023). A comparison of machine learning algorithms and traditional regression-based statistical modeling for predicting hypertension incidence in a Canadian population. Scientific Reports, 13(1), 1\u201313. https:\/\/doi.org\/10.1038\/s41598-022-27264-x","journal-title":"Scientific Reports"},{"key":"2584_CR8","doi-asserted-by":"publisher","first-page":"275","DOI":"10.1016\/j.jmsy.2022.03.014","volume":"63","author":"SKS Fan","year":"2022","unstructured":"Fan, S. K. S., Lin, W. K., & Jen, C. H. (2022). Data-driven optimization of accessory combinations for final testing processes in semiconductor manufacturing. Journal of Manufacturing Systems, 63, 275\u2013287. https:\/\/doi.org\/10.1016\/j.jmsy.2022.03.014","journal-title":"Journal of Manufacturing Systems"},{"key":"2584_CR29","doi-asserted-by":"publisher","first-page":"100432","DOI":"10.1016\/j.measen.2022.100432","volume":"24","author":"S Gupta","year":"2022","unstructured":"Gupta, S., Saluja, K., Goyal, A., Vajpayee, A., & Tiwari, V. (2022). Comparing the performance of machine learning algorithms using estimated accuracy. Measurement: Sensors, 24, 100432. https:\/\/doi.org\/10.1016\/j.measen.2022.100432","journal-title":"Measurement: Sensors"},{"issue":"0","key":"2584_CR18","doi-asserted-by":"publisher","first-page":"68","DOI":"10.1016\/j.proeng.2016.06.191","volume":"147","author":"J Hart","year":"2016","unstructured":"Hart, J. (2016). Comparison of turbulence modeling approaches to the Simulation of a dimpled sphere. Procedia Engineering, 147(0), 68\u201373. https:\/\/doi.org\/10.1016\/j.proeng.2016.06.191","journal-title":"Procedia Engineering"},{"issue":"2","key":"2584_CR10","doi-asserted-by":"publisher","first-page":"925","DOI":"10.1007\/s10845-023-02082-8","volume":"35","author":"Z Jin","year":"2024","unstructured":"Jin, Z., Lim, D. D., Zhao, X., Mamunuru, M., Roham, S., & Gu, G. X. (2024). Machine learning enabled optimization of showerhead design for semiconductor deposition process. Journal of Intelligent Manufacturing, 35(2), 925\u2013935. https:\/\/doi.org\/10.1007\/s10845-023-02082-8","journal-title":"Journal of Intelligent Manufacturing"},{"issue":"1\u20133","key":"2584_CR6","doi-asserted-by":"publisher","first-page":"88","DOI":"10.1016\/j.surfcoat.2004.07.033","volume":"193","author":"YJ Kim","year":"2005","unstructured":"Kim, Y. J., Boo, J. H., Hong, B., & Kim, Y. J. (2005). Effects of showerhead shapes on the flowfields in a RF-PECVD reactor. Surface and Coatings Technology, 193(1\u20133), 88\u201393. https:\/\/doi.org\/10.1016\/j.surfcoat.2004.07.033","journal-title":"Surface and Coatings Technology"},{"key":"2584_CR16","doi-asserted-by":"publisher","unstructured":"Kim, Y., Kim, Y., Yang, C., Park, K., Gu, G. X., & Ryu, S. (2021). Deep learning framework for material design space exploration using active transfer learning and data augmentation. npj Computational Materials, 7(1). https:\/\/doi.org\/10.1038\/s41524-021-00609-2","DOI":"10.1038\/s41524-021-00609-2"},{"key":"2584_CR23","doi-asserted-by":"publisher","first-page":"972","DOI":"10.5555\/3294771.3294864","volume":"2017-December","author":"G Klambauer","year":"2017","unstructured":"Klambauer, G., Unterthiner, T., Mayr, A., & Hochreiter, S. (2017). Self-normalizing neural networks. NIPS\u201917: Proceedings of the 31st International Conference on Neural Information Processing Systems, 2017-December, 972\u2013981. https:\/\/doi.org\/10.5555\/3294771.3294864","journal-title":"NIPS\u201917: Proceedings of the 31st International Conference on Neural Information Processing Systems"},{"issue":"12","key":"2584_CR25","doi-asserted-by":"publisher","first-page":"5436","DOI":"10.1039\/d3mh00039g","volume":"10","author":"J Lee","year":"2023","unstructured":"Lee, J., Park, D., Lee, M., Lee, H., Park, K., Lee, I., & Ryu, S. (2023). Machine learning-based inverse design methods considering data characteristics and design space size in materials design and manufacturing: A review. Materials Horizons, 10(12), 5436\u20135456. https:\/\/doi.org\/10.1039\/d3mh00039g","journal-title":"Materials Horizons"},{"key":"2584_CR5","doi-asserted-by":"publisher","unstructured":"Mousa, M. B. M., Ovental, J. S., Brozena, A. H., Oldham, C. J., & Parsons, G. N. (2018). Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure. Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films, 36(3). https:\/\/doi.org\/10.1116\/1.5022077","DOI":"10.1116\/1.5022077"},{"issue":"1","key":"2584_CR21","doi-asserted-by":"publisher","first-page":"47","DOI":"10.1016\/S0167-4730(02)00039-5","volume":"25","author":"A Olsson","year":"2003","unstructured":"Olsson, A., Sandberg, G., & Dahlblom, O. (2003). On latin hypercube sampling for structural reliability analysis. Structural Safety, 25(1), 47\u201368. https:\/\/doi.org\/10.1016\/S0167-4730(02)00039-5","journal-title":"Structural Safety"},{"issue":"1","key":"2584_CR3","doi-asserted-by":"publisher","first-page":"465","DOI":"10.1080\/14686996.2019.1599694","volume":"20","author":"PO Oviroh","year":"2019","unstructured":"Oviroh, P. O., Akbarzadeh, R., Pan, D., Coetzee, R. A. M., & Jen, T. C. (2019). New development of atomic layer deposition: Processes, methods and applications. Science and Technology of Advanced Materials, 20(1), 465\u2013496. https:\/\/doi.org\/10.1080\/14686996.2019.1599694","journal-title":"Science and Technology of Advanced Materials"},{"issue":"1","key":"2584_CR9","doi-asserted-by":"publisher","first-page":"180","DOI":"10.1080\/19942060.2019.1691054","volume":"14","author":"D Park","year":"2020","unstructured":"Park, D., Cha, J., Kim, M., & Go, J. S. (2020). Multi-objective optimization and comparison of surrogate models for separation performances of cyclone separator based on CFD, RSM, GMDH-neural network, back propagation-ANN and genetic algorithm. Engineering Applications of Computational Fluid Mechanics, 14(1), 180\u2013201. https:\/\/doi.org\/10.1080\/19942060.2019.1691054","journal-title":"Engineering Applications of Computational Fluid Mechanics"},{"issue":"13","key":"2584_CR17","doi-asserted-by":"publisher","first-page":"3048","DOI":"10.1039\/d4mh00337c","volume":"11","author":"D Park","year":"2024","unstructured":"Park, D., Lee, J., Lee, H., Gu, G. X., & Ryu, S. (2024). Deep generative spatiotemporal learning for integrating fracture mechanics in composite materials: Inverse design, discovery, and optimization. Materials Horizons, 11(13), 3048\u20133065. https:\/\/doi.org\/10.1039\/d4mh00337c","journal-title":"Materials Horizons"},{"key":"2584_CR26","unstructured":"Ruder, S. (2016). An overview of gradient descent optimization algorithms. arXiv Preprint arXiv:1609.04747. http:\/\/arxiv.org\/abs\/1609.04747"},{"key":"2584_CR28","doi-asserted-by":"publisher","first-page":"10031","DOI":"10.1109\/ACCESS.2022.3142859","volume":"10","author":"TM Shami","year":"2022","unstructured":"Shami, T. M., El-Saleh, A. A., Alswaitti, M., Al-Tashi, Q., Summakieh, M. A., & Mirjalili, S. (2022). Particle swarm optimization: A Comprehensive Survey. Ieee Access: Practical Innovations, Open Solutions, 10, 10031\u201310061. https:\/\/doi.org\/10.1109\/ACCESS.2022.3142859","journal-title":"Ieee Access: Practical Innovations, Open Solutions"},{"key":"2584_CR20","doi-asserted-by":"publisher","first-page":"96","DOI":"10.1016\/j.ress.2015.12.002","volume":"148","author":"MD Shields","year":"2016","unstructured":"Shields, M. D., & Zhang, J. (2016). The generalization of latin hypercube sampling. Reliability Engineering and System Safety, 148, 96\u2013108. https:\/\/doi.org\/10.1016\/j.ress.2015.12.002","journal-title":"Reliability Engineering and System Safety"},{"issue":"4","key":"2584_CR22","doi-asserted-by":"publisher","first-page":"2066","DOI":"10.1109\/TPWRS.2011.2113380","volume":"26","author":"Z Shu","year":"2011","unstructured":"Shu, Z., & Jirutitijaroen, P. (2011). Latin hypercube sampling techniques for power systems reliability analysis with renewable energy sources. IEEE Transactions on Power Systems, 26(4), 2066\u20132073. https:\/\/doi.org\/10.1109\/TPWRS.2011.2113380","journal-title":"IEEE Transactions on Power Systems"},{"key":"2584_CR14","first-page":"1929","volume":"15","author":"N Srivastava","year":"2014","unstructured":"Srivastava, N., Hinton, G., Krizhevsky, A., Sutskever, I., & Salakhutdinov, R. (2014). Dropout: A simple way to prevent neural networks from overfitting. Journal of Machine Learning Research, 15, 1929\u20131958.","journal-title":"Journal of Machine Learning Research"},{"key":"2584_CR15","doi-asserted-by":"publisher","first-page":"146","DOI":"10.1016\/j.inffus.2021.11.005","volume":"80","author":"Y Tian","year":"2022","unstructured":"Tian, Y., & Zhang, Y. (2022). A comprehensive survey on regularization strategies in machine learning. Information Fusion, 80, 146\u2013166. https:\/\/doi.org\/10.1016\/j.inffus.2021.11.005","journal-title":"Information Fusion"},{"issue":"9","key":"2584_CR31","doi-asserted-by":"publisher","first-page":"2839","DOI":"10.1016\/j.patcog.2015.03.009","volume":"48","author":"TT Wong","year":"2015","unstructured":"Wong, T. T. (2015). Performance evaluation of classification algorithms by k-fold and leave-one-out cross validation. Pattern Recognition, 48(9), 2839\u20132846. https:\/\/doi.org\/10.1016\/j.patcog.2015.03.009","journal-title":"Pattern Recognition"},{"key":"2584_CR7","doi-asserted-by":"publisher","first-page":"1","DOI":"10.1016\/j.tsf.2017.07.043","volume":"638","author":"H Xia","year":"2017","unstructured":"Xia, H., Xiang, D., Mou, P., & Yang, W. (2017). Experimental study of the effects of showerhead configuration on large-area silicon-nitride thin film by plasma-enhanced chemical vapor deposition. Thin Solid Films, 638, 1\u20138. https:\/\/doi.org\/10.1016\/j.tsf.2017.07.043","journal-title":"Thin Solid Films"},{"key":"2584_CR13","doi-asserted-by":"publisher","unstructured":"Xiao, M., Wu, Y., Zuo, G., Fan, S., Yu, H., Shaikh, Z. A., & Wen, Z. (2021). Addressing Overfitting Problem in Deep Learning-based solutions for Next Generation Data-Driven Networks. Wireless Communications and Mobile Computing, 2021(1). https:\/\/doi.org\/10.1155\/2021\/8493795","DOI":"10.1155\/2021\/8493795"},{"key":"2584_CR12","doi-asserted-by":"publisher","unstructured":"Ying, X. (2019). An overview of Overfitting and its solutions. Journal of Physics: Conference Series, 1168(2). https:\/\/doi.org\/10.1088\/1742-6596\/1168\/2\/022022","DOI":"10.1088\/1742-6596\/1168\/2\/022022"},{"key":"2584_CR4","doi-asserted-by":"publisher","first-page":"529","DOI":"10.1016\/j.cherd.2019.05.049","volume":"147","author":"Y Zhang","year":"2019","unstructured":"Zhang, Y., Ding, Y., & Christofides, P. D. (2019). Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design. Chemical Engineering Research and Design, 147, 529\u2013544. https:\/\/doi.org\/10.1016\/j.cherd.2019.05.049","journal-title":"Chemical Engineering Research and Design"},{"issue":"3","key":"2584_CR2","doi-asserted-by":"publisher","first-page":"191","DOI":"10.1007\/s41871-022-00136-8","volume":"5","author":"J Zhang","year":"2022","unstructured":"Zhang, J., Li, Y., Cao, K., & Chen, R. (2022). Advances in atomic layer deposition. Nanomanufacturing and Metrology, 5(3), 191\u2013208. https:\/\/doi.org\/10.1007\/s41871-022-00136-8","journal-title":"Nanomanufacturing and Metrology"}],"container-title":["Journal of Intelligent Manufacturing"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s10845-025-02584-7.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/article\/10.1007\/s10845-025-02584-7","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"https:\/\/link.springer.com\/content\/pdf\/10.1007\/s10845-025-02584-7.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2026,2,24]],"date-time":"2026-02-24T08:49:07Z","timestamp":1771922947000},"score":1,"resource":{"primary":{"URL":"https:\/\/link.springer.com\/10.1007\/s10845-025-02584-7"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,2,27]]},"references-count":31,"journal-issue":{"issue":"3","published-print":{"date-parts":[[2026,3]]}},"alternative-id":["2584"],"URL":"https:\/\/doi.org\/10.1007\/s10845-025-02584-7","relation":{},"ISSN":["0956-5515","1572-8145"],"issn-type":[{"value":"0956-5515","type":"print"},{"value":"1572-8145","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,2,27]]},"assertion":[{"value":"14 August 2024","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"12 February 2025","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"27 February 2025","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}},{"order":1,"name":"Ethics","group":{"name":"EthicsHeading","label":"Declarations"}},{"value":"Not applicable.","order":2,"name":"Ethics","group":{"name":"EthicsHeading","label":"Ethics approval"}},{"value":"The authors have no relevant financial or non-financial interests to disclose.","order":3,"name":"Ethics","group":{"name":"EthicsHeading","label":"Conflict of interest"}}]}}