{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,27]],"date-time":"2025-10-27T20:42:56Z","timestamp":1761597776293},"reference-count":22,"publisher":"Springer Science and Business Media LLC","issue":"4","license":[{"start":{"date-parts":[[2017,1,10]],"date-time":"2017-01-10T00:00:00Z","timestamp":1484006400000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Sci. China Inf. Sci."],"published-print":{"date-parts":[[2017,4]]},"DOI":"10.1007\/s11432-015-0931-8","type":"journal-article","created":{"date-parts":[[2017,1,11]],"date-time":"2017-01-11T09:00:49Z","timestamp":1484125249000},"update-policy":"http:\/\/dx.doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":10,"title":["An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control"],"prefix":"10.1007","volume":"60","author":[{"given":"Chunhua","family":"He","sequence":"first","affiliation":[]},{"given":"Jimeng","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Qiancheng","family":"Zhao","sequence":"additional","affiliation":[]},{"given":"Qinwen","family":"Huang","sequence":"additional","affiliation":[]},{"given":"Zhenchuan","family":"Yang","sequence":"additional","affiliation":[]},{"given":"Dacheng","family":"Zhang","sequence":"additional","affiliation":[]},{"given":"Guizhen","family":"Yan","sequence":"additional","affiliation":[]}],"member":"297","published-online":{"date-parts":[[2017,1,10]]},"reference":[{"key":"931_CR1","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/j.mejo.2007.10.025","volume":"39","author":"A Lee","year":"2008","unstructured":"Lee A, Ko H, Cho D I D, et al. Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope. Microelectronics J, 2008, 39: 1\u20136","journal-title":"Microelectronics J"},{"key":"931_CR2","doi-asserted-by":"crossref","first-page":"520","DOI":"10.1109\/JMEMS.2005.844801","volume":"14","author":"C Acar","year":"2005","unstructured":"Acar C, Shkel A M. An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes. J Microelectromech Syst, 2005, 14: 520\u2013528","journal-title":"J Microelectromech Syst"},{"key":"931_CR3","doi-asserted-by":"crossref","first-page":"347","DOI":"10.1016\/S0924-4247(01)00860-3","volume":"97\u201398","author":"S E Alper","year":"2002","unstructured":"Alper S E, Akin T. A symmetric surface micro-machined gyroscope with decoupled oscillation modes. Sensors Actuat A Phys, 2002, 97\u201398: 347\u2013358","journal-title":"Sensors Actuat A Phys"},{"key":"931_CR4","doi-asserted-by":"crossref","first-page":"479","DOI":"10.1109\/JMEMS.2006.876779","volume":"15","author":"M S Weinberg","year":"2006","unstructured":"Weinberg M S, Kourepenis A. Error sources in in-plane silicon tuning-fork MEMS gyroscopes. J Microelectromech Syst, 2006, 15: 479\u2013491","journal-title":"J Microelectromech Syst"},{"key":"931_CR5","doi-asserted-by":"crossref","first-page":"1639","DOI":"10.1109\/JSEN.2007.908921","volume":"7","author":"M Saukoski","year":"2007","unstructured":"Saukoski M, Aaltonen L, Halonen K A I, et al. Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sensors J, 2007, 7: 1639\u20131652","journal-title":"IEEE Sensors J"},{"key":"931_CR6","first-page":"264","volume-title":"Proceedings of IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong","author":"Z Y Guo","year":"2010","unstructured":"Guo Z Y, Liu X S, Yang Z C, et al. Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope. In: Proceedings of IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, 2010. 264\u2013267"},{"key":"931_CR7","first-page":"348","volume-title":"Proceedings of Solid-State Sensor and Actuator Workshop, Hilton Head Island","author":"B Cagdaser","year":"2004","unstructured":"Cagdaser B, Jog A, Last M, et al. Capacitive sense feedback control for MEMS beam steering mirrors. In: Proceedings of Solid-State Sensor and Actuator Workshop, Hilton Head Island, 2004. 348\u2013351"},{"key":"931_CR8","doi-asserted-by":"crossref","first-page":"1092","DOI":"10.1088\/0960-1317\/15\/5\/028","volume":"15","author":"C Acar","year":"2005","unstructured":"Acar C, Shkel A M. Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement. J Micromech Microeng, 2005, 15: 1092\u20131101","journal-title":"J Micromech Microeng"},{"key":"931_CR9","first-page":"2002","volume-title":"Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), Beijing","author":"J Cui","year":"2011","unstructured":"Cui J, Guo Z Y, Yang Z C, et al. Electrical coupling suppressing for a microgyroscope using ascending frequency drive with 2-DOF PID controller. In: Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), Beijing, 2011. 2002\u20132005"},{"key":"931_CR10","doi-asserted-by":"crossref","first-page":"095020","DOI":"10.1088\/0960-1317\/21\/9\/095020","volume":"21","author":"J Cui","year":"2011","unstructured":"Cui J, Guo Z Y, Yang Z C, et al. Electrical coupling suppression and transient response improvement for a microgyroscope using ascending frequency drive with a 2-DOF PID controller. J Micromech Microeng, 2011, 21: 095020","journal-title":"J Micromech Microeng"},{"key":"931_CR11","doi-asserted-by":"crossref","first-page":"2531","DOI":"10.1109\/Transducers.2013.6627321","volume-title":"Proceedings of Transducers & Eurosensors XXVII: the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona","author":"A A Trusov","year":"2013","unstructured":"Trusov A A, Prikhodko I P, Rozelle D M, et al. 1 PPM precision self calibration of scale factor in MEMS Coriolis vibratory gyroscopes. In: Proceedings of Transducers & Eurosensors XXVII: the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, 2013. 2531\u20132534"},{"key":"931_CR12","first-page":"20","volume-title":"Proceedings of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco","author":"J K Woo","year":"2014","unstructured":"Woo J K, Cho J Y, Boyd C, et al. Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WABRG). In: Proceedings of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, 2014. 20\u201323"},{"key":"931_CR13","first-page":"29","volume-title":"Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril","author":"D Senkal","year":"2015","unstructured":"Senkal D, Ng E J, Hong V, et al. Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating <20 ppm scale factor stability. In: Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015. 29\u201332"},{"key":"931_CR14","doi-asserted-by":"crossref","first-page":"818","DOI":"10.1049\/el.2009.0874","volume":"45","author":"Q J Xiao","year":"2009","unstructured":"Xiao Q J, Li S Y, Chen W Y, et al. Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope. Electron Lett, 2009, 45: 818\u2013819","journal-title":"Electron Lett"},{"key":"931_CR15","doi-asserted-by":"crossref","first-page":"97","DOI":"10.1007\/s11071-012-0433-z","volume":"70","author":"J T Fei","year":"2012","unstructured":"Fei J T, Xin M Y. An adaptive fuzzy sliding mode controller for MEMS triaxial gyroscope with angular velocity estimation. Nonlinear Dyn, 2012, 70: 97\u2013109","journal-title":"Nonlinear Dyn"},{"key":"931_CR16","doi-asserted-by":"crossref","first-page":"2069","DOI":"10.1109\/JSEN.2014.2371456","volume":"15","author":"C H He","year":"2015","unstructured":"He C H, Zhao Q C, Huang Q W, et al. A MEMS vibratory gyroscope with real-time mode-matching and robust control for the sense mode. IEEE Sensors J, 2015, 15: 2069\u20132077","journal-title":"IEEE Sensors J"},{"key":"931_CR17","first-page":"1088","volume":"29","author":"H T Ding","year":"2008","unstructured":"Ding H T, Yang Z C, Zhang M L, et al. Experimental study on the footing effect for SOG structures using DRIE. J Semicond, 2008, 29: 1088\u20131093","journal-title":"J Semicond"},{"key":"931_CR18","doi-asserted-by":"crossref","first-page":"1066","DOI":"10.1109\/JSEN.2010.2043669","volume":"10","author":"H T Ding","year":"2010","unstructured":"Ding H T, Liu X S, Lin L T, et al. A High-resolution silicon-on-glass axis gyroscope operating at atmospheric pressure. IEEE Sensors J, 2010, 10: 1066\u20131074","journal-title":"IEEE Sensors J"},{"key":"931_CR19","first-page":"1145","volume-title":"Proceedings of the 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS), Suzhou","author":"Y X Liu","year":"2013","unstructured":"Liu Y X, He C H, Liu D C, et al. Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm. In: Proceedings of the 8th IEEE International Conference on Nano\/Micro Engineered and Molecular Systems (NEMS), Suzhou, 2013. 1145\u20131148"},{"key":"931_CR20","doi-asserted-by":"crossref","first-page":"198","DOI":"10.1016\/j.measurement.2013.12.025","volume":"50","author":"D C Liu","year":"2014","unstructured":"Liu D C, He C H, Zhao Q C, et al. Digital signal processing for a micromachined vibratory gyroscope based on a three dimensional adaptive filter demodulator. Measurement, 2014, 50: 198\u2013202","journal-title":"Measurement"},{"key":"931_CR21","first-page":"530","volume-title":"Proceedings of the 11th IEEE International Conference on Control & Automation (ICCA), Taichung","author":"Z P Li","year":"2014","unstructured":"Li Z P, Fan Q J, Chang L M, et al. Improved wavelet threshold denoising method for MEMS gyroscope. In: Proceedings of the 11th IEEE International Conference on Control & Automation (ICCA), Taichung, 2014. 530\u2013534"},{"key":"931_CR22","doi-asserted-by":"crossref","first-page":"2269","DOI":"10.1109\/TAES.2014.120751","volume":"50","author":"Y Stebler","year":"2014","unstructured":"Stebler Y, Guerrier S, Skaloud J, et al. Generalized method of wavelet moments for inertial navigation filter design. IEEE Trans Aerospace Electron Syst, 2014, 50: 2269\u20132283","journal-title":"IEEE Trans Aerospace Electron Syst"}],"container-title":["Science China Information Sciences"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s11432-015-0931-8.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/article\/10.1007\/s11432-015-0931-8\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s11432-015-0931-8.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,7,21]],"date-time":"2022-07-21T07:29:58Z","timestamp":1658388598000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/s11432-015-0931-8"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,1,10]]},"references-count":22,"journal-issue":{"issue":"4","published-print":{"date-parts":[[2017,4]]}},"alternative-id":["931"],"URL":"https:\/\/doi.org\/10.1007\/s11432-015-0931-8","relation":{},"ISSN":["1674-733X","1869-1919"],"issn-type":[{"value":"1674-733X","type":"print"},{"value":"1869-1919","type":"electronic"}],"subject":[],"published":{"date-parts":[[2017,1,10]]},"article-number":"042402"}}