{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,4,25]],"date-time":"2025-04-25T13:05:31Z","timestamp":1745586331875,"version":"3.37.3"},"reference-count":23,"publisher":"Springer Science and Business Media LLC","issue":"3","license":[{"start":{"date-parts":[[2017,3,22]],"date-time":"2017-03-22T00:00:00Z","timestamp":1490140800000},"content-version":"unspecified","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Prod. Eng. Res. Devel."],"published-print":{"date-parts":[[2017,6]]},"DOI":"10.1007\/s11740-017-0722-y","type":"journal-article","created":{"date-parts":[[2017,3,23]],"date-time":"2017-03-23T01:45:21Z","timestamp":1490233521000},"page":"365-371","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Distortion-free laser beam shaping for material processing using a digital micromirror device"],"prefix":"10.1007","volume":"11","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8631-0039","authenticated-orcid":false,"given":"Hamza","family":"Messaoudi","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Fabian","family":"Thiemicke","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Claas","family":"Falldorf","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ralf B.","family":"Bergmann","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Frank","family":"Vollertsen","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","published-online":{"date-parts":[[2017,3,22]]},"reference":[{"key":"722_CR1","doi-asserted-by":"crossref","first-page":"566","DOI":"10.1016\/j.cirp.2009.09.002","volume":"58","author":"F Vollertsen","year":"2009","unstructured":"Vollertsen F, Biermann D, Hansen HN, Jawahir IS, Kuzma K (2009) Size effects in manufacturing of metallic components. CIRP Ann Manuf Technol 58:566\u2013587","journal-title":"CIRP Ann Manuf Technol"},{"key":"722_CR2","doi-asserted-by":"crossref","first-page":"3","DOI":"10.1177\/0954406211422972","volume":"226","author":"S Dimov","year":"2012","unstructured":"Dimov S, Brousseau E, Minev R, Bigot S (2012) Micro- and nanomanufacturing: challenges and opportunities, Proc IMechE Part C. J Mech Eng Sci 226:3\u201315","journal-title":"J Mech Eng Sci"},{"key":"722_CR3","doi-asserted-by":"crossref","first-page":"243","DOI":"10.1016\/B978-0-08-096532-1.00911-0","volume":"9","author":"L Santo","year":"2014","unstructured":"Santo L, Trovalusci F, Davim JP (2014) Laser applications in the field of plastics. Compr Mater Process 9:243\u2013260","journal-title":"Compr Mater Process"},{"key":"722_CR4","doi-asserted-by":"crossref","DOI":"10.1002\/9780470723876","volume-title":"Fundamental principles of optical lithography: the science of microfabrication","author":"C Mack","year":"2007","unstructured":"Mack C (2007) Fundamental principles of optical lithography: the science of microfabrication. Wiley, Chichester"},{"issue":"2","key":"722_CR5","doi-asserted-by":"crossref","first-page":"024110","DOI":"10.1117\/1.OE.54.2.024110","volume":"54","author":"C Falldorf","year":"2015","unstructured":"Falldorf C, Agour M, Bergmann RB (2015) Digital holography and quantitative phase contrast imaging using Computational Shear Interferometry. Optical Eng 54(2):024110","journal-title":"Optical Eng"},{"key":"722_CR6","doi-asserted-by":"crossref","unstructured":"Falldorf C, von Kopylow C, Bergmann RB (2010) Liquid crystal spatial light modulators in optical metrology. In: Proceedings of the 9th Euro-American Workshop on Information Optics (WIO), Helsinki","DOI":"10.1109\/WIO.2010.5582527"},{"key":"722_CR7","doi-asserted-by":"crossref","first-page":"7106","DOI":"10.1364\/OE.19.007106","volume":"19","author":"S Tauro","year":"2011","unstructured":"Tauro S, Baas A, Palima D, Glckstad J (2011) Experimental demonstration of generalized phase contrast based Gaussian beam-shaper. Opt Express 19:7106\u20137111","journal-title":"Opt Express"},{"key":"722_CR8","doi-asserted-by":"crossref","first-page":"16684","DOI":"10.1364\/OE.20.016684","volume":"20","author":"H Wu","year":"2012","unstructured":"Wu H, Hu W, Hu HC, Lin XW, Zhu G, Choi JW, Chigrinov V, Lu YQ (2012) Arbitrary photo-patterning in liquid crystal alignments using DMD based lithography system. Opt Express 20:16684\u201316689","journal-title":"Opt Express"},{"key":"722_CR9","first-page":"72147220","volume":"51","author":"X Chen","year":"2012","unstructured":"Chen X, Yan B, Song F, Wang Y, Xiao F, Alameh K (2012) Diffraction of digital micromirror device gratings and its effect on properties of tunable fiber lasers. Appl Opt 51:72147220","journal-title":"Appl Opt"},{"key":"722_CR10","doi-asserted-by":"crossref","unstructured":"Dudley D, Duncan WM, Slaughter J (2003) Emerging digital micromirror device (DMD) applications. In: Proc. SPIE 4985, MOEMS Display and Imaging Systems 14","DOI":"10.1117\/12.480761"},{"key":"722_CR11","first-page":"113120","volume":"121","author":"C Sun","year":"2005","unstructured":"Sun C, Fang N, Wu DM, Zhang X (2005) Projection micro-stereolithography using digital micro-mirror dynamic mask. Sensors Actuators A 121:113120","journal-title":"Sensors Actuators A"},{"key":"722_CR12","doi-asserted-by":"crossref","unstructured":"Heath DJ, Feinaeugle M, Grant-Jacob JA, Mills B, Eason RW (2015) Dynamic spatial pulse shaping via a digital micromirror device for patterned laser-induced forward transfer of solid polymer films. Opt Mater Express 5(5):1129\u20131136","DOI":"10.1364\/OME.5.001129"},{"key":"722_CR13","doi-asserted-by":"crossref","unstructured":"Sontheimer AB (2002) Digital micromirror device (DMD) Hinge memory lifetime reliability modeling. In: 40th Annual International Reliability Physics Symposium, Dallas, Texas, pp 118-121","DOI":"10.1109\/RELPHY.2002.996622"},{"key":"722_CR14","unstructured":"N. N., DMD 0.7 XGA 12 DDR DMD (2005) Discovery: product preview data sheet. TI DN 2503686, pp 1\u201320"},{"key":"722_CR15","doi-asserted-by":"crossref","unstructured":"Messaoudi H, Vollertsen F (2017) Compact module for maskless and simultaneous 2D laser chemical machining. In: Wulfsberg JP, Sanders A (eds) Lecture Notes in Production Engineering. Small machine tools for small workpieces, pp 49\u201364","DOI":"10.1007\/978-3-319-49269-8_4"},{"issue":"1","key":"722_CR16","doi-asserted-by":"crossref","first-page":"011104","DOI":"10.1117\/1.JMM.13.1.011104","volume":"13","author":"PA Blanche","year":"2014","unstructured":"Blanche PA, Carothers D, Wissinger J, Peyghambarian N (2014) Digital micromirror device as a diffractive reconfigurable optical switch for telecommunication. J Micro\/Nanolithogr MEMS MOEMS 13(1):011104","journal-title":"J Micro\/Nanolithogr MEMS MOEMS"},{"issue":"2","key":"722_CR17","doi-asserted-by":"crossref","first-page":"160","DOI":"10.1147\/rd.132.0160","volume":"13","author":"BR Brown","year":"1969","unstructured":"Brown BR, Lohmann AW (1969) Computer-generated binary holograms. IBM J Res Develop 13(2):160\u2013168","journal-title":"IBM J Res Develop"},{"key":"722_CR18","doi-asserted-by":"crossref","first-page":"035005","DOI":"10.1088\/0960-1317\/23\/3\/035005","volume":"23","author":"B Mills","year":"2013","unstructured":"Mills B, Feinaeugle M, Sones CL, Rizvi N, Eason RW (2013) Sub-micron-scale femtosecond laser ablation using a digital micromirror device. J Micromech Microeng 23:035005","journal-title":"J Micromech Microeng"},{"key":"722_CR19","doi-asserted-by":"crossref","first-page":"85503l","DOI":"10.1117\/12.999424","volume":"8550","author":"S Zhang","year":"2012","unstructured":"Zhang S, Zhong H, Asoubar D, Wyrowski F, Kuhn M (2012) Tilt operator for electromagnetic fields and its application to propagation through plane interfaces, Optical Systems design 2012. Proc SPIE 8550:85503l","journal-title":"Proc SPIE"},{"issue":"9","key":"722_CR20","doi-asserted-by":"crossref","first-page":"1755","DOI":"10.1364\/JOSAA.20.001755","volume":"20","author":"K Matsushima","year":"2003","unstructured":"Matsushima K, Schimmel H, Wyrowski F (2003) Fast calculation method of optical diffraction on tilted planes by use of the angular spectrum of plane waves. J Opt Soc Am A 20(9):1755\u20131762","journal-title":"J Opt Soc Am A"},{"issue":"2","key":"722_CR21","doi-asserted-by":"crossref","first-page":"125","DOI":"10.1016\/0734-189X(85)90093-3","volume":"30","author":"J Kittler","year":"1985","unstructured":"Kittler J, Illingworth J, Fglein J (1985) Threshold selection based on a simple image statistic. Comp Vis Graph Image Process 30(2):125\u2013147","journal-title":"Comp Vis Graph Image Process"},{"issue":"7\u20138","key":"722_CR22","doi-asserted-by":"crossref","first-page":"447","DOI":"10.1002\/andp.201500111","volume":"527","author":"YX Ren","year":"2015","unstructured":"Ren YX, Lu RD, Gong L (2015) Tailoring light with a digital micromirror device. Annalen der Physik 527(7\u20138):447\u2013470","journal-title":"Annalen der Physik"},{"key":"722_CR23","doi-asserted-by":"crossref","first-page":"57825785","DOI":"10.1364\/AO.48.005782","volume":"48","author":"C Falldorf","year":"2009","unstructured":"Falldorf C, Dankwart C, Glbe R, Lnemann B, Kopylow CV, Bergmann RB (2009) Holographic projection based on diamond-turned diffractive optical elements. Appl Opt 48:57825785","journal-title":"Appl Opt"}],"container-title":["Production Engineering"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s11740-017-0722-y.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/article\/10.1007\/s11740-017-0722-y\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s11740-017-0722-y.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2017,5,15]],"date-time":"2017-05-15T05:38:44Z","timestamp":1494826724000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/s11740-017-0722-y"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,3,22]]},"references-count":23,"journal-issue":{"issue":"3","published-print":{"date-parts":[[2017,6]]}},"alternative-id":["722"],"URL":"https:\/\/doi.org\/10.1007\/s11740-017-0722-y","relation":{},"ISSN":["0944-6524","1863-7353"],"issn-type":[{"type":"print","value":"0944-6524"},{"type":"electronic","value":"1863-7353"}],"subject":[],"published":{"date-parts":[[2017,3,22]]}}}