{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,11,6]],"date-time":"2025-11-06T15:58:09Z","timestamp":1762444689545,"version":"3.37.3"},"reference-count":60,"publisher":"Springer Science and Business Media LLC","issue":"2","license":[{"start":{"date-parts":[[2017,4,24]],"date-time":"2017-04-24T00:00:00Z","timestamp":1492992000000},"content-version":"tdm","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"},{"start":{"date-parts":[[2017,4,24]],"date-time":"2017-04-24T00:00:00Z","timestamp":1492992000000},"content-version":"vor","delay-in-days":0,"URL":"http:\/\/www.springer.com\/tdm"}],"funder":[{"DOI":"10.13039\/100000001","name":"National Science Foundation","doi-asserted-by":"publisher","award":["CMMI 0954422","IIS 1208233","CMMI 1435222"],"award-info":[{"award-number":["CMMI 0954422","IIS 1208233","CMMI 1435222"]}],"id":[{"id":"10.13039\/100000001","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":["link.springer.com"],"crossmark-restriction":false},"short-container-title":["Int J Intell Robot Appl"],"published-print":{"date-parts":[[2017,6]]},"DOI":"10.1007\/s41315-017-0017-7","type":"journal-article","created":{"date-parts":[[2017,4,24]],"date-time":"2017-04-24T08:02:28Z","timestamp":1493020948000},"page":"180-194","update-policy":"https:\/\/doi.org\/10.1007\/springer_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Thin-film piezoelectric and high-aspect ratio polymer leg mechanisms for millimeter-scale robotics"],"prefix":"10.1007","volume":"1","author":[{"given":"Jongsoo","family":"Choi","sequence":"first","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Minchul","family":"Shin","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ryan Q.","family":"Rudy","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Christopher","family":"Kao","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Jeffrey S.","family":"Pulskamp","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ronald G.","family":"Polcawich","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Kenn R.","family":"Oldham","sequence":"additional","affiliation":[],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"297","published-online":{"date-parts":[[2017,4,24]]},"reference":[{"key":"17_CR1","doi-asserted-by":"publisher","DOI":"10.1109\/ISISS.2014.6782538","volume-title":"A Vibratory Stage for on Chip Physical Stimulation and Calibration of MEMS Gyroscopes","author":"EE Aktakka","year":"2014","unstructured":"Aktakka, E.E., Woo, J.K., Egert, D., Gordenker, R., Najafi, K.: A Vibratory Stage for on Chip Physical Stimulation and Calibration of MEMS Gyroscopes. IEEE ISISS, Laguna Beach (2014)"},{"key":"17_CR2","volume-title":"Investigations into the Thermal and Mechanical Behavior of PMMA\/Alumina Nanocomposites","author":"BJ Ash","year":"2001","unstructured":"Ash, B.J., Stone, J., Roger, D.F., Schadler, L.S., Siegel, R.W., Benicewicz, B.C., Apple, T.: Investigations into the Thermal and Mechanical Behavior of PMMA\/Alumina Nanocomposites. Proc. MRS, Boston (2001)"},{"key":"17_CR3","doi-asserted-by":"publisher","first-page":"715","DOI":"10.1007\/978-3-642-19457-3_42","volume":"70","author":"A Baisch","year":"2011","unstructured":"Baisch, A., Wood, R.: Design and fabrication of the Harvard ambulatory micro-robot. Robot. Res. 70, 715\u2013730 (2011)","journal-title":"Robot. Res."},{"issue":"2","key":"17_CR4","doi-asserted-by":"publisher","first-page":"105","DOI":"10.1007\/s00542-001-0132-z","volume":"8","author":"G Baumeister","year":"2002","unstructured":"Baumeister, G., Mueller, K., Ruprecht, R., Hausselt, J.: Production of metallic high aspect ratio microstructures by microcasting. Microsyst. Technol. 8(2), 105\u2013108 (2002)","journal-title":"Microsyst. Technol."},{"key":"17_CR5","doi-asserted-by":"publisher","first-page":"130","DOI":"10.1016\/S0924-4247(00)00296-X","volume":"83","author":"H Becker","year":"2000","unstructured":"Becker, H., Heim, U.: Hot embossing as a method for fabrication of polymer high aspect ratio structures. Sens. Actuators 83, 130\u2013135 (2000)","journal-title":"Sens. Actuators"},{"key":"17_CR6","doi-asserted-by":"publisher","DOI":"10.1109\/ROBOT.2007.363827","volume-title":"Design of an Autonomous Jumping Microrobot","author":"S Bergbreiter","year":"2007","unstructured":"Bergbreiter, S., Pister, K.: Design of an Autonomous Jumping Microrobot. IEEE ICRA, Rome (2007)"},{"key":"17_CR7","volume-title":"DASH: A Dynamic 16\u00a0g Hexapedal Robot","author":"P Birkmeyer","year":"2009","unstructured":"Birkmeyer, P., Petersen, K., Fearing, R.S.: DASH: A Dynamic 16\u00a0g Hexapedal Robot. IEEE\/RSJ ICRS, St. Louis (2009)"},{"key":"17_CR8","unstructured":"Cymbet Corp.: Enerchip rechargeable solid state bare die batteries. \n                    http:\/\/www.cymbet.com\n                    \n                   (2016)"},{"key":"17_CR9","doi-asserted-by":"publisher","first-page":"781","DOI":"10.1088\/0960-1317\/17\/4\/015","volume":"17","author":"NJ Conway","year":"2007","unstructured":"Conway, N.J., Traina, Z.J., Kim, S.-G.: A strain amplifying piezoelectric MEMS actuator. J. Micromech. Microeng. 17, 781\u2013787 (2007)","journal-title":"J. Micromech. Microeng."},{"key":"17_CR10","doi-asserted-by":"publisher","DOI":"10.1109\/SENSOR.1997.613733","volume-title":"Fabrication Process Of High-Aspect Ratio Elastic Structures For Piezoelectric Motor Applications","author":"L Dellmann","year":"1997","unstructured":"Dellmann, L., Roth, S., Beuret, C., Racine, G., Lorenz, H., Despont, M., Renaud, P., Vettiger, P., de Rooij, N.: Fabrication Process Of High-Aspect Ratio Elastic Structures For Piezoelectric Motor Applications. Transducers, Chicago (1997)"},{"key":"17_CR11","unstructured":"Ebefors, T., Mattsson, Kalvesten, J.E., Stemme, G.: A walking silicon micro-robot. Proceedings of the 10th International Conference on Solid-State Sensors Actuators, pp. 1202\u20131205, Sendai (1999)"},{"issue":"1","key":"17_CR12","doi-asserted-by":"publisher","first-page":"158","DOI":"10.1109\/TMECH.2012.2226244","volume":"19","author":"B Edamana","year":"2014","unstructured":"Edamana, B., Oldham, K.R.: A near-optimal sensor scheduling strategy for an on-off controller with an expensive sensor. IEEE\/ASME T Mech. 19(1), 158\u2013170 (2014)","journal-title":"IEEE\/ASME T Mech."},{"issue":"5","key":"17_CR13","doi-asserted-by":"publisher","first-page":"884","DOI":"10.1109\/TMECH.2010.2053041","volume":"16","author":"B Edamana","year":"2011","unstructured":"Edamana, B., Hahn, B., Pulskamp, J.S., Polcawich, R.G., Oldham, K.: Modeling and optimal low-power on-off control of thin-film piezoelectric rotational actuators. IEEE\/ASME Trans. Mech. 16(5), 884\u2013896 (2011)","journal-title":"IEEE\/ASME Trans. Mech."},{"issue":"3","key":"17_CR14","doi-asserted-by":"publisher","first-page":"433","DOI":"10.1109\/JMEMS.2010.2041897","volume":"19","author":"EY Erdem","year":"2010","unstructured":"Erdem, E.Y., Chen, Y.-M., Mohebbi, M., Suh, J.W., Kovacs, G.T.A., Darling, R.B., Bohringer, K.F.: Thermally-actuated omnidirectional walking microrobot. J MEMS 19(3), 433\u2013442 (2010)","journal-title":"J MEMS"},{"key":"17_CR15","doi-asserted-by":"publisher","first-page":"4125","DOI":"10.1023\/A:1026321404286","volume":"38","author":"HD Espinosa","year":"2003","unstructured":"Espinosa, H.D., Prorok, B.C.: Size effects on the mechanical behavior of gold thin films. J. Mat. Sci. 38, 4125\u20134128 (2003)","journal-title":"J. Mat. Sci."},{"key":"17_CR16","unstructured":"Evans, J.: PZT-silicon cantilever benders. \n                    http:\/\/www.ferrodevices.com\n                    \n                   (2001)"},{"issue":"1","key":"17_CR17","doi-asserted-by":"publisher","first-page":"S141","DOI":"10.1088\/0964-1726\/15\/1\/023","volume":"15","author":"Y Fu","year":"2005","unstructured":"Fu, Y., Harvey, E., Ghantasala, M., Spinks, G.: Design, fabrication, and testing of piezoelectric polymer PVDF microactuators. Smart Mat. Struct. 15(1), S141 (2005)","journal-title":"Smart Mat. Struct."},{"key":"17_CR18","unstructured":"General Electronics Battery Co., Ltd.: Produce specification (for high discharge ratio battery). \n                    http:\/\/www.powerstream.com\n                    \n                   (2011)"},{"issue":"3","key":"17_CR19","doi-asserted-by":"publisher","first-page":"548","DOI":"10.1109\/JMEMS.2010.2047005","volume":"19","author":"R Guerre","year":"2010","unstructured":"Guerre, R., Drechsler, U., Bhattacharyya, D., Rantakati, P., Stutz, R., Heikkila, T., Kirby, P.B., Despont, D.: Wafer-level transfer technologies for PZT-Based RF MEMS Switches. J. MEMS 19(3), 548\u2013560 (2010)","journal-title":"J. MEMS"},{"key":"17_CR20","doi-asserted-by":"publisher","DOI":"10.1109\/ICRA.2016.7487676","volume-title":"A tether-less legged piezoelectric miniature robot using bounding gait locomotion for bidirectional motion","author":"H Hariri","year":"2016","unstructured":"Hariri, H., Prasetya, L.A., Foong, S., Soh, G.S., Otto, K.N., Wood, K.L.: A tether-less legged piezoelectric miniature robot using bounding gait locomotion for bidirectional motion. IEEE ICRA, Stockholm (2016a)"},{"key":"17_CR21","doi-asserted-by":"publisher","DOI":"10.1109\/ICRA.2016.7487676","volume-title":"Tether-less legged piezoelectric miniature robot using bounding gait locomotion for bidirectional motion","author":"H Hariri","year":"2016","unstructured":"Hariri, H., Prasetya, L.A., Soh, G.S., Wood, K.L.: Tether-less legged piezoelectric miniature robot using bounding gait locomotion for bidirectional motion. IEEE ICRA, Stockholm (2016b)"},{"key":"17_CR22","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2003.1189847","volume-title":"Solar Powered 10\u00a0mg Silicon Robot","author":"S Hollar","year":"2003","unstructured":"Hollar, S., Flynn, A., Bellew, C., Pister, K.: Solar Powered 10\u00a0mg Silicon Robot. IEEE C, MEMS (2003)"},{"issue":"4","key":"17_CR23","doi-asserted-by":"publisher","first-page":"725","DOI":"10.1109\/JMEMS.2005.850720","volume":"14","author":"S Hollar","year":"2005","unstructured":"Hollar, S., Flynn, A., Bergbreiter, S., Pister, K.S.J.: Robot leg motioon in a planarized-SOI, two-layer poly-Si process. J MEMS 14(4), 725\u2013740 (2005)","journal-title":"J MEMS"},{"key":"17_CR24","volume-title":"A ciliary Based 8-Legged Walking Micro Robot Using Cast IPMC Actuators","author":"B Kim","year":"2003","unstructured":"Kim, B., Ryu, J., Jeong, Y., Tak, Y., Kim, B., Park, J.-O.: A ciliary Based 8-Legged Walking Micro Robot Using Cast IPMC Actuators. IEEE ICRA, Taipei (2003)"},{"key":"17_CR25","doi-asserted-by":"publisher","first-page":"132","DOI":"10.1016\/S0924-4247(99)00258-7","volume":"80","author":"PE Kladitis","year":"2000","unstructured":"Kladitis, P.E., Bright, V.M.: Prototype microrobots for micro-positioning and micro-unmanned vehicles. Sensors Actuators 80, 132\u2013137 (2000)","journal-title":"Sensors Actuators"},{"issue":"1","key":"17_CR26","doi-asserted-by":"publisher","first-page":"31","DOI":"10.1080\/10584580500413418","volume":"76","author":"T Lam","year":"2005","unstructured":"Lam, T., Lam, K., Chan, H.: Micromachined piezoelectric polymer membrane acoustic sensor. Integr. Ferroelec. 76(1), 31\u201337 (2005)","journal-title":"Integr. Ferroelec."},{"key":"17_CR27","doi-asserted-by":"publisher","first-page":"343","DOI":"10.1007\/s00542-004-0452-x","volume":"11","author":"G Liu","year":"2005","unstructured":"Liu, G., Tian, Y., Kan, Y.: Fabrication of high-aspect-ratio microstructures using SU8 photoresist. Microsyst. Technol. 11, 343\u2013346 (2005)","journal-title":"Microsyst. Technol."},{"key":"17_CR28","volume-title":"Parylene as a new membrane material for biomems applications","author":"B Lu","year":"2012","unstructured":"Lu, B.: Parylene as a new membrane material for biomems applications. California Institute of Technology, Pasadena (2012)"},{"key":"17_CR29","doi-asserted-by":"publisher","first-page":"403","DOI":"10.1007\/s00542-010-1199-1","volume":"17","author":"Y Luo","year":"2011","unstructured":"Luo, Y., Lu, M., Cui, T.: A polymer-based bidirectional micropump driven by a PZT bimorph. Microsyst. Tech. 17, 403\u2013409 (2011)","journal-title":"Microsyst. Tech."},{"issue":"6132","key":"17_CR30","doi-asserted-by":"publisher","first-page":"603","DOI":"10.1126\/science.1231806","volume":"340","author":"K Ma","year":"2013","unstructured":"Ma, K., Chirarattananon, P., Fuller, S.W.R.: Controlled flight of a biologically inspired, insect-scale robot. Science 340(6132), 603\u2013607 (2013)","journal-title":"Science"},{"key":"17_CR31","volume-title":"Omindirectional Walking Microrobot Realized By Thermal Microactuator Arrays","author":"MH Mohebbi","year":"2001","unstructured":"Mohebbi, M.H., Terry, M.L., Bohringer, K.F., Kovacs, G.T.A., Suh, J.W.: Omindirectional Walking Microrobot Realized By Thermal Microactuator Arrays. ASME IMECE, New York (2001)"},{"issue":"2","key":"17_CR32","doi-asserted-by":"publisher","first-page":"276","DOI":"10.1109\/TASE.2012.2217740","volume":"10","author":"R Murthy","year":"2012","unstructured":"Murthy, R., Stephanou, H.E., Popa, D.: AFAM: an articulated four axes micro-robot for nanoscale applications. IEEE Trans. Automat. Sci. Eng. 10(2), 276\u2013284 (2012)","journal-title":"IEEE Trans. Automat. Sci. Eng."},{"key":"17_CR33","doi-asserted-by":"publisher","first-page":"321","DOI":"10.1007\/s10832-007-9170-y","volume":"19","author":"A Navarre","year":"2007","unstructured":"Navarre, A., Rocks, S., Dewey, R.: Micromoulding of lead zirconate titanate (PZT) structures for MEMS. J. Electroceram. 19, 321\u2013326 (2007)","journal-title":"J. Electroceram."},{"key":"17_CR34","doi-asserted-by":"publisher","first-page":"239","DOI":"10.1016\/S0924-4247(96)01324-6","volume":"50","author":"Y Nemirovsky","year":"1996","unstructured":"Nemirovsky, Y., Nemirovsky, A., Muralt, P., Setter, N.: Design of a novel thin-film piezoelectric accelerometer. Sensors Actuators A 50, 239\u2013249 (1996)","journal-title":"Sensors Actuators A"},{"issue":"4","key":"17_CR35","doi-asserted-by":"publisher","first-page":"890","DOI":"10.1109\/JMEMS.2008.927177","volume":"17","author":"K Oldham","year":"2008","unstructured":"Oldham, K., Pulskamp, J.S., Polcawich, R.G., Dubey, M.: Thin-film piezoelectric lateral actuators with extended stroke. J. MEMS 17(4), 890\u2013899 (2008)","journal-title":"J. MEMS"},{"key":"17_CR36","doi-asserted-by":"publisher","DOI":"10.1115\/DSCC2011-6150","volume-title":"Coordinated voltage conversion and low-power micro-actuator switching","author":"K Oldham","year":"2011","unstructured":"Oldham, K., Edamana, B., Hahn, B.: Coordinated voltage conversion and low-power micro-actuator switching. ASME DSCC, Arlington (2011)"},{"key":"17_CR37","doi-asserted-by":"publisher","DOI":"10.1109\/MEMSYS.2012.6170138","volume-title":"High Aspect Ratio Deep Silicon Etching","author":"KJ Owen","year":"2012","unstructured":"Owen, K.J., VanDerElzen, B., Peterson, R.L., Najafi, K.: High Aspect Ratio Deep Silicon Etching. IEEE C. MEMS, Paris (2012)"},{"key":"17_CR38","doi-asserted-by":"publisher","first-page":"206","DOI":"10.1016\/S0924-4247(03)00362-5","volume":"108","author":"J Park","year":"2003","unstructured":"Park, J., Lee, S., Cho, J., Jung, S., Han, J., Kang, S.: Acoustic and electromechanical properties of 1-3 PZT composites for ultrasonic transducer arrays fabricated by sacrificial micro PMMA mold. Sensors Actuators A 108, 206\u2013211 (2003)","journal-title":"Sensors Actuators A"},{"issue":"2","key":"17_CR39","doi-asserted-by":"publisher","first-page":"026001","DOI":"10.1088\/1748-3182\/3\/2\/026001","volume":"3","author":"EH Pelc","year":"2008","unstructured":"Pelc, E.H., Daley, M.A., Ferris, D.P.: Resonant hopping of a robot controlled by an artificial neural oscillator. Bioinspiration Biomim. 3(2), 026001 (2008)","journal-title":"Bioinspiration Biomim."},{"key":"17_CR40","volume-title":"Millimeter-scale MEMS Enabled Autonomous Systems: System Feasibility and Mobility","author":"J Pulskamp","year":"2012","unstructured":"Pulskamp, J.: Millimeter-scale MEMS Enabled Autonomous Systems: System Feasibility and Mobility. SPIE, Baltimore (2012)"},{"key":"17_CR41","doi-asserted-by":"publisher","DOI":"10.1115\/DETC2016-59621","volume-title":"Multiple Mode Dynamic Model for Piezoelectric Micro-Robot Walking","author":"J Qu","year":"2016","unstructured":"Qu, J., Oldham, K.: Multiple Mode Dynamic Model for Piezoelectric Micro-Robot Walking. ASME IDETC, Charlotte (2016)"},{"key":"17_CR42","unstructured":"Rasmussen, J., Bonivert, W., Krafcik, J. High Aspect Ratio Metal MEMS (LIGA) Technologies For Rugged, Low-Cost Firetrain And Control Components, NDIA 47th Fuze Conference (2003)"},{"issue":"6","key":"17_CR43","doi-asserted-by":"publisher","first-page":"1492","DOI":"10.1109\/JMEMS.2012.2211573","volume":"21","author":"CH Rhee","year":"2012","unstructured":"Rhee, C.H., Pulskamp, J.S., Polcawich, R.G., Oldham, K.R.: Multi-degree-of-freedom thin-film PZT-actuated microrobotic leg. J. MEMS 21(6), 1492\u20131503 (2012)","journal-title":"J. MEMS"},{"key":"17_CR44","doi-asserted-by":"publisher","DOI":"10.1109\/AIM.2016.7576897","volume-title":"Design and Characterization of a Miniature Monolithic Piezoelectric Hexapod Robot","author":"SA Rios","year":"2016","unstructured":"Rios, S.A., Fleming, A.J., Yong, Y.K.: Design and Characterization of a Miniature Monolithic Piezoelectric Hexapod Robot. IEEE AIM, Banff (2016)"},{"key":"17_CR45","doi-asserted-by":"publisher","first-page":"337","DOI":"10.1109\/LRA.2016.2614837","volume":"2","author":"SA Rios","year":"2017","unstructured":"Rios, S.A., Fleming, A.J., Yong, Y.K.: Miniature resonant ambulatory robot. IEEE Robot. Autom. Lett. 2, 337\u2013343 (2017)","journal-title":"IEEE Robot. Autom. Lett."},{"issue":"4","key":"17_CR46","doi-asserted-by":"publisher","first-page":"792","DOI":"10.1109\/58.852060","volume":"47","author":"T Ritter","year":"2002","unstructured":"Ritter, T., Geng, X., Shung, K.K., Lopath, P.D., Park, S.-E., Shrout, T.R.: Single crystal PZN\/PT-polymer composites for ultrasound transducer applications. IEEE Trans. Ultrasonics 47(4), 792\u2013800 (2002)","journal-title":"IEEE Trans. Ultrasonics"},{"issue":"1","key":"17_CR47","doi-asserted-by":"publisher","first-page":"168","DOI":"10.1109\/JMEMS.2013.2264341","volume":"23","author":"C Robin","year":"2013","unstructured":"Robin, C., Vishnoi, A.: Mechanical behavior and anisotropy of spin-coated SU-8 thin-film for MEMS. J. MEMS 23(1), 168\u2013180 (2013)","journal-title":"J. MEMS"},{"key":"17_CR48","volume-title":"Energy Efficient HW\/SW Integration in an Autonomous Microrobot: 12th World Multi-C","author":"A Sanuy","year":"2008","unstructured":"Sanuy, A., Casanova, R., Dieguez, A., Samitier, J., Szymanski, M., Worn, H.: Energy Efficient HW\/SW Integration in an Autonomous Microrobot: 12th World Multi-C. Systemics Cybernetics Informatics, Orlando (2008)"},{"key":"17_CR49","volume-title":"A high aspect ratio, flexible, transparent and low-post parylene-C shadow mask technology for micropattering applications","author":"S Selvarasah","year":"2007","unstructured":"Selvarasah, S., Chao, S.H., Chen, C.-L., Mao, D., Hopwood, J., Ryley, S., Sridar, S., Khademhosseini, A., Busnaina, A., Dokmeci, M.R.: A high aspect ratio, flexible, transparent and low-post parylene-C shadow mask technology for micropattering applications. Solid State Sensors Actuators Microsyst. C, Lyon (2007)"},{"issue":"4","key":"17_CR50","doi-asserted-by":"publisher","first-page":"1888","DOI":"10.1116\/1.587830","volume":"13","author":"IA Shareef","year":"1995","unstructured":"Shareef, I.A., Rubloff, G.W., Anderle, M., Gill, W.N., Cotte, J., Kim, D.H.: Subatmospheric chemical vapor deposition ozone\/TEOS process for SiO2 trench filling. J. Vac. Sci. Technol. 13(4), 1888\u20131895 (1995)","journal-title":"J. Vac. Sci. Technol."},{"issue":"649\u2013658","key":"17_CR51","first-page":"47","volume":"5","author":"WN Sharpe Jr","year":"2006","unstructured":"Sharpe Jr., W.N., Gianola, P.J.D.S., Eberl, C., Polcawich, R.G., Thompson, R.J.: Strain measurements of silicon dioxide microspecimens by digital image processing. Exp. Mech. 5(649\u2013658), 47\u201350 (2006)","journal-title":"Exp. Mech."},{"key":"17_CR52","volume-title":"Yield Strength of Thin-Film Parylene-C, Symp","author":"VC-Y Shih","year":"2003","unstructured":"Shih, V.C.-Y., Harder, T.A., Tai, Y.C.: Yield Strength of Thin-Film Parylene-C, Symp. MEMS\/MOEMS (DTIP), Cote D\u2019Azur (2003)"},{"key":"17_CR53","volume-title":"Micro-robotic Actuation Units Based On Thin-Film Piezeoelectric and High-Aspect Ratio Polymer Structures","author":"M Shin","year":"2014","unstructured":"Shin, M., Choi, J., Rudy, R.Q., Kao, C., Pulskamp, J.S., Polcawich, R.G., Oldham, K.R.: Micro-robotic Actuation Units Based On Thin-Film Piezeoelectric and High-Aspect Ratio Polymer Structures. ASME IDETC, Buffalo (2014)"},{"key":"17_CR54","volume-title":"SMA Actuator and Pulse-Type Hardware Neural Networks IC for Fat Walking Motion Of Insect-Type MEMS Microrobot","author":"K Sugita","year":"2016","unstructured":"Sugita, K., Daisuke, T., Ono, S., Chiba, S., Iwata, K., Han, Y., Takato, M., Uchikoba, F., Saito, K.: SMA Actuator and Pulse-Type Hardware Neural Networks IC for Fat Walking Motion Of Insect-Type MEMS Microrobot. IEEE AIM, Banff (2016)"},{"issue":"5","key":"17_CR55","doi-asserted-by":"publisher","first-page":"1364","DOI":"10.1109\/JMEMS.2006.879706","volume":"15","author":"Y Suzuki","year":"2006","unstructured":"Suzuki, Y., Tai, Y.: Micromachined high-aspect ratio parylene spring and its application to low-frequency accelerometers. J. MEMS 15(5), 1364\u20131370 (2006)","journal-title":"J. MEMS"},{"key":"17_CR56","volume-title":"Mechanical Characterization of Gold Thin Films for RF MEMS","author":"K Timpano","year":"2005","unstructured":"Timpano, K.: Mechanical Characterization of Gold Thin Films for RF MEMS. Proc. Virginia Space Grant Consortium Student Conf., Richmond (2005)"},{"issue":"4","key":"17_CR57","doi-asserted-by":"publisher","first-page":"487","DOI":"10.1088\/0022-3727\/34\/4\/308","volume":"34","author":"E Venkatragavaraj","year":"2000","unstructured":"Venkatragavaraj, E., Satish, B., Vinod, P., Vijaya, M.: Piezoelectric properties of ferroelectric PZT-polymer composites. J. Phys. D Appl. Phys. 34(4), 487\u2013494 (2000)","journal-title":"J. Phys. D Appl. Phys."},{"key":"17_CR58","doi-asserted-by":"publisher","DOI":"10.1109\/ICRA.2011.5980543","volume-title":"Multi-Material Compliant Mechanisms for Mobile Millirobots","author":"DE Vogtmann","year":"2011","unstructured":"Vogtmann, D.E., Gupta, S.K., Bergbreiter, S.: Multi-Material Compliant Mechanisms for Mobile Millirobots. IEEE ICRA, Shanghai (2011)"},{"issue":"6","key":"17_CR59","doi-asserted-by":"publisher","first-page":"1343","DOI":"10.1109\/58.808857","volume":"46","author":"Q-W Wang","year":"1999","unstructured":"Wang, Q.-W., Cross, L.E.: Constitutive equations of symmetrical tri-layer piezoelectric benders. IEEE Trans Ultrasonics, Ferroelec. Freq. Control 46(6), 1343\u20131352 (1999)","journal-title":"IEEE Trans Ultrasonics, Ferroelec. Freq. Control"},{"key":"17_CR60","first-page":"142","volume":"5","author":"CJ Wilson","year":"1996","unstructured":"Wilson, C.J., Ormeggi, A., Narbutovskih, M.: Fracture testing of silicon micro-cantilever beams. J. Appl. Phys. 5, 142\u2013150 (1996)","journal-title":"J. Appl. Phys."}],"container-title":["International Journal of Intelligent Robotics and Applications"],"original-title":[],"language":"en","link":[{"URL":"http:\/\/link.springer.com\/article\/10.1007\/s41315-017-0017-7\/fulltext.html","content-type":"text\/html","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s41315-017-0017-7.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"text-mining"},{"URL":"http:\/\/link.springer.com\/content\/pdf\/10.1007\/s41315-017-0017-7.pdf","content-type":"application\/pdf","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2020,5,14]],"date-time":"2020-05-14T10:04:22Z","timestamp":1589450662000},"score":1,"resource":{"primary":{"URL":"http:\/\/link.springer.com\/10.1007\/s41315-017-0017-7"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2017,4,24]]},"references-count":60,"journal-issue":{"issue":"2","published-print":{"date-parts":[[2017,6]]}},"alternative-id":["17"],"URL":"https:\/\/doi.org\/10.1007\/s41315-017-0017-7","relation":{},"ISSN":["2366-5971","2366-598X"],"issn-type":[{"type":"print","value":"2366-5971"},{"type":"electronic","value":"2366-598X"}],"subject":[],"published":{"date-parts":[[2017,4,24]]},"assertion":[{"value":"11 October 2016","order":1,"name":"received","label":"Received","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"22 March 2017","order":2,"name":"accepted","label":"Accepted","group":{"name":"ArticleHistory","label":"Article History"}},{"value":"24 April 2017","order":3,"name":"first_online","label":"First Online","group":{"name":"ArticleHistory","label":"Article History"}}]}}